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1. 发明授权

EP0995085B1 ULTRASCHALLMIKROSKOP 失效
公开(公告)号：EP0995085B1
公开(公告)日：2002-09-18
申请号：EP98941260.6
申请日：1998-06-26
申请人： FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
发明人： ARNOLD, Walter , KULIK, Andrzej
IPC分类号： G01H3/12
CPC分类号： G01N29/0681 , G01N29/2406 , G01N29/2418 , G01N29/2456 , G01N2291/015 , G01N2291/048 , G01N2291/102 , G01Q60/32
摘要： The invention relates to an ultrasonic microscope having an ultrasonic emitter (1) with which ultrasonic waves can be selectively injected into a sample body (7) in proportion to the dimensions of said sample body. Ultrasonically induced excursions of a receiving point (14) can be detected, preferably with atomic resolution, by using an ultrasonic detector (13) that measures with high-sensitivity resolution. The ultrasonic emitter (1) and the ultrasonic detector (13) can be positioned in relation to each other. The ultrasonic detector (13) can adopt several receiving positions for each emitting position of the ultrasonic emitter (1). Measuring data, assigned to the induced excursions and to the positions of the ultrasonic emitter (1) and of the ultrasonic detector (13), can be stored in a central unit (9) and reused by means of a reconstruction unit with a tomographic algorithm. In this way, an image of at least one area inside the sample body (7) is generated.
摘要翻译：提供一种用于从样本体的内部区域获取数据的超声波显微镜。超声波显微镜包括超声波发射器，用于在与样本体的尺寸成比例的点处提供用于输入耦合到样本体中的超声波的点源。通过使用以高灵敏度分辨率测量的超声波探测器，可以用原子分辨率来检测接收尖端的超声引起的偏移。超声波发射器和超声波检测器可以相对于彼此定位，使得超声波检测器可以针对超声波发射器的每个发射位置采用多个接收位置。来自超声波检测器的测量数据信号在中央处理器中被存储和处理。中央处理器内的图像发生器使用断层摄影算法从测量数据重建样品体内至少一个区域的图像。

2. 发明授权

EP1994395B1 VERFAHREN ZUR ERMITTLUNG EINER DOTIERUNGSDICHTE IN EINER HALBLEITERPROBE 有权
标题翻译：掺杂浓度在半导体样品计算
公开(公告)号：EP1994395B1
公开(公告)日：2009-07-01
申请号：EP07711715.8
申请日：2007-02-28
申请人： Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
发明人： ARNOLD, Walter , SCHWARZ, Kerstin , RABE, Ute
IPC分类号： G01N13/16 , G12B21/08
CPC分类号： G01Q60/30 , G01Q60/32 , G01Q60/40
摘要： The invention relates to a method for determining a dopant concentration on a surface and/or in a layer region lying close to the surface of a semiconductor sample, using an atomic force microscope, whose leaf-spring tip is brought into contact with the semiconductor sample, forming a Schottky barrier. According to the invention, an electric alternating potential is applied between the spring-leaf tip and the semiconductor sample in the region of the Schottky barrier in such a way that a space charge region inside the semiconductor sample defining the three-dimensional extension of the Schottky barrier is excited and begins to oscillate within the confines of its three-dimensional extension. Said oscillations are transmitted to the leaf-spring, are detected and form the basis for determining the dopant concentration.

3. 发明公开

EP0711406A1 AKUSTISCHES MIKROSKOP 失效
标题翻译：声学显微镜
公开(公告)号：EP0711406A1
公开(公告)日：1996-05-15
申请号：EP94920374.0
申请日：1994-06-30
申请人： FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
发明人： ARNOLD, Walter , RABE, Ute
IPC分类号： G01N29 , B81B3 , G01H3 , G01H9
CPC分类号： G01H3/125 , G01H9/00 , G01N29/06 , G01N29/2418 , G01N29/46 , G01N2291/011 , G01N2291/02827 , G01N2291/0421 , G01Q60/32 , Y10S977/86 , Y10S977/87
摘要： An acoustic microscope allows both the topography and the elasticity properties of a sample (11) to be measured at the same time. For that purpose, the deviation of a measurement point (1) is measured by the deflection of a laser beam (22). In order to measure the topography, the mean deviation of the measurement point (1) is held constant by a regulation circuit. The regulation circuit consists of a segmented photodiode (24) which supplies a neutral signal to the output of a standardising amplifier (29) when the deviation of the measurement point (1) is an average deviation. Deviations from the neutral signal may be compensated by a z-electrode (8) of a piezoelectric crystal. The elasticity properties of the sample (11) may be measured by coupling ultra-sound into the sample (11) by means of a transmission head (9) and the high-frequency deviation of the measurement point (1) may be detected by a second detection device that consists of a shadowing device (36) and of a rapid photodiode (37). The second detection device may also consist of a heterodyne propagation time interferometer or of a purely electronic capacitive detection device.

4. 发明公开

EP1994395A1 VERFAHREN ZUR ERMITTLUNG EINER DOTIERUNGSDICHTE IN EINER HALBLEITERPROBE 有权
标题翻译：掺杂浓度在半导体样品计算
公开(公告)号：EP1994395A1
公开(公告)日：2008-11-26
申请号：EP07711715.8
申请日：2007-02-28
申请人： Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
发明人： ARNOLD, Walter , SCHWARZ, Kerstin , RABE, Ute
IPC分类号： G01N13/16 , G12B21/08
CPC分类号： G01Q60/30 , G01Q60/32 , G01Q60/40
摘要： The invention relates to a method for determining a dopant concentration on a surface and/or in a layer region lying close to the surface of a semiconductor sample, using an atomic force microscope, whose leaf-spring tip is brought into contact with the semiconductor sample, forming a Schottky barrier. According to the invention, an electric alternating potential is applied between the spring-leaf tip and the semiconductor sample in the region of the Schottky barrier in such a way that a space charge region inside the semiconductor sample defining the three-dimensional extension of the Schottky barrier is excited and begins to oscillate within the confines of its three-dimensional extension. Said oscillations are transmitted to the leaf-spring, are detected and form the basis for determining the dopant concentration.

5. 发明授权

EP0711406B1 AKUSTISCHES MIKROSKOP 失效
标题翻译：声学显微镜
公开(公告)号：EP0711406B1
公开(公告)日：1998-02-25
申请号：EP94920374.9
申请日：1994-06-30
申请人： FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
发明人： ARNOLD, Walter , RABE, Ute
IPC分类号： G01H3/12
CPC分类号： G01H3/125 , G01H9/00 , G01N29/06 , G01N29/2418 , G01N29/46 , G01N2291/011 , G01N2291/02827 , G01N2291/0421 , G01Q60/32 , Y10S977/86 , Y10S977/87
摘要： An acoustic microscope allows both the topography and the elasticity properties of a sample (11) to be measured at the same time. For that purpose, the deviation of a measurement point (1) is measured by the deflection of a laser beam (22). In order to measure the topography, the mean deviation of the measurement point (1) is held constant by a regulation circuit. The regulation circuit consists of a segmented photodiode (24) which supplies a neutral signal to the output of a standardising amplifier (29) when the deviation of the measurement point (1) is an average deviation. Deviations from the neutral signal may be compensated by a z-electrode (8) of a piezoelectric crystal. The elasticity properties of the sample (11) may be measured by coupling ultra-sound into the sample (11) by means of a transmission head (9) and the high-frequency deviation of the measurement point (1) may be detected by a second detection device that consists of a shadowing device (36) and of a rapid photodiode (37). The second detection device may also consist of a heterodyne propagation time interferometer or of a purely electronic capacitive detection device.

6. 发明公开

EP1623433A1 VERFAHREN UND VORRICHTUNG ZUR BERÜHRUNGSLOSEN ANREGUNG VON TORSIONSSCHWINGUNGEN IN EINEM EINSEITIG EINGESPANNTEN FEDERBALKEN EINES RASTERKRAFTMIKROSKOPS 审中-公开
标题翻译：方法和装置用于在扫描力显微镜的悬臂弹簧梁的扭转振动的非接触式的激励
公开(公告)号：EP1623433A1
公开(公告)日：2006-02-08
申请号：EP04731578.3
申请日：2004-05-07
申请人： Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
发明人： REINSTÄDTLER, Michael , SCHERER, Volker , ARNOLD, Walter
IPC分类号： G12B21/08 , G01H9/00
CPC分类号： G01Q60/32
摘要： The invention relates to a method for exciting free torsional oscillations in a sprung cantilever, which is fixed on one side and has a longitudinal extension, of an atomic force microscope (AFM). The invention is characterised in that the sprung cantilever, fixed on one side, is placed above a surface at a distance from the latter, an acoustic coupling medium being located between said surface and the sprung cantilever, that the surface is subjected to lateral oscillations that are polarised in a linear manner along an oscillation direction and that the polarisation axis defined by the oscillation direction runs perpendicular to the longitudinal extension of the sprung cantilever.

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