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    • 1. 发明申请
    • MICROWAVE PLASMA SOURCE AND METHOD FOR FORMING A LINEARLY EXTENDED PLASMA UNDER ATMOSPHERIC PRESSURE CONDITIONS
    • 微波等离子体源及在大气压力条件下形成线性长运行等离子体的方法
    • WO2010066247A3
    • 2010-11-11
    • PCT/DE2009001765
    • 2009-12-08
    • FRAUNHOFER GES FORSCHUNGROCH JULIUSDANI INESKASKEL STEFAN
    • ROCH JULIUSDANI INESKASKEL STEFAN
    • H05H1/24
    • H05H1/46H05H2001/463
    • The invention relates to a microwave plasma source and to a method for forming a linearly extended plasma under atmospheric pressure conditions. The aim of the invention is to provide a possibility for a large-scale modification of substrate surfaces using a plasma formed under atmospheric pressure conditions, wherein constant conditions can be maintained over the entire surface to be modified. For a microwave plasma source according to the invention, at least one plasma outlet nozzle and at least one inlet for a plasma gas are present at a plasma chamber. At least two units, each having at least one magnetron and a slit antenna, are disposed outside of the plasma chamber at two diametrically opposite sides on a plasma chamber having non-rotationally symmetrical cross sections. The magnetrons can be operated in alternating pulsed mode.
    • 微波等离子体源和用于在大气压条件下形成线性伸长的等离子体的方法 本发明的目的是提供用大气压条件下形成的等离子体对衬底表面进行大规模改性的可能性,其中可在整个待改性表面上保持恒定条件。 在根据本发明的微波等离子体源中,等离子体室上存在至少一个等离子体出口喷嘴和至少一个等离子体气体供应源。 被连接到等离子体腔室具有非旋转对称的横截面的至少两个单元,它们与至少一种磁控管,和一个缝隙天线形成的,设置在所述等离子体腔室外侧的两个在直径上相对的两侧。 Magentrons将交替脉冲运行。