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1. 发明申请

WO2004056158A3 DEVICE AND METHOD FOR THE CREATION OF DROPLET TARGETS 审中-公开
标题翻译：装置及其制造方法中液滴TARGETS
公开(公告)号：WO2004056158A3
公开(公告)日：2004-09-16
申请号：PCT/DE0304129
申请日：2003-12-11
申请人： FORSCHUNGSVERBUND BERLIN EV , TER-AVETISYAN SARGIS , SCHNUERER MATTHIAS , NICKLES PETER-VIKTOR
发明人： TER-AVETISYAN SARGIS , SCHNUERER MATTHIAS , NICKLES PETER-VIKTOR
IPC分类号： H05G2/00
CPC分类号： H05G2/003 , H05G2/006 , H05G2/008
摘要： The invention relates to a device consisting of a receptacle which receives the target liquid and inside which a high pressure is generated by means of a non-reactive gas. An electromagnetic valve (1) that is connected to a supersonic nozzle (4) via an expansion channel (2) and switches in the millisecond range is connected to the receptacle. Heating means (3) that are disposed around the expansion channel are configured such that the temperature is adjustable to a level at which an oversaturated vapor is formed inside the expansion channel, an insulator (5) being arranged between the electromagnetic valve and the heating means. The inventive device thus allows highly dense sub-micrometer targets for laser plasma sources to be created for the generation of EUV light or x-rays. The dimension of said targets ranges within the wavelengths of laser beams and they have an atomic density of > 10 atoms/cm and improved collimation characteristics.
摘要翻译：该装置由一个容器的用于通过高压接收所述非反应性气体中的被处理液产生。与所述容器中的MS的电磁阀切换范围（1），在与一超音速喷嘴（4）通过（2）连接的扩展信道。到形成在扩展通道装置，用于加热（3）与该温度可以被设置为在其中形成在所述扩展通道的过饱和蒸气的大小。加热和电磁阀之间，绝缘体（5）被布置。为了用于产生代的激光等离子体源的高密度亚微米目标EUV或X-射线是可能的。目标是在激光波长的量级和原子密度的程度有> 10 <18>原子/ cm <3>和改进准直，

2. 发明专利

DE50307397D1 未知
公开(公告)号：DE50307397D1
公开(公告)日：2007-07-12
申请号：DE50307397
申请日：2003-12-11
申请人： FORSCHUNGSVERBUND BERLIN EV
发明人： TER-AVETISYAN SARGIS , SCHNUERER MATTHIAS , NICKLES PETER-VIKTOR
IPC分类号： H05G2/00
摘要： An apparatus for making a droplet target provided with a chamber for receiving a target liquid and maintained under pressure, an electromagnetic valve switched at a ms rate for feeding target liquid from the receptacle to a heated expansion channel for converting the target liquid to supersaturated vapor and connected to a supersonic nozzle wherein the supersaturated vapor is cooled and condensed to droplets before they are discharged.

3. 发明专利

AT363819T 未知
公开(公告)号：AT363819T
公开(公告)日：2007-06-15
申请号：AT03813077
申请日：2003-12-11
申请人： FORSCHUNGSVERBUND BERLIN EV
发明人： TER-AVETISYAN SARGIS , SCHNUERER MATTHIAS , NICKLES PETER-VIKTOR
IPC分类号： H05G2/00
摘要： An apparatus for making a droplet target provided with a chamber for receiving a target liquid and maintained under pressure, an electromagnetic valve switched at a ms rate for feeding target liquid from the receptacle to a heated expansion channel for converting the target liquid to supersaturated vapor and connected to a supersonic nozzle wherein the supersaturated vapor is cooled and condensed to droplets before they are discharged.

4. 发明专利

AU2003300494A1 DEVICE AND METHOD FOR THE CREATION OF DROPLET TARGETS 未知
公开(公告)号：AU2003300494A1
公开(公告)日：2004-07-09
申请号：AU2003300494
申请日：2003-12-11
申请人： FORSCHUNGSVERBUND BERLIN EV
发明人： TER-AVETISYAN SARGIS , SCHNURER MATTHIAS , NICKLES PETER-VIKTOR
IPC分类号： H05G2/00
摘要： An apparatus for making a droplet target provided with a chamber for receiving a target liquid and maintained under pressure, an electromagnetic valve switched at a ms rate for feeding target liquid from the receptacle to a heated expansion channel for converting the target liquid to supersaturated vapor and connected to a supersonic nozzle wherein the supersaturated vapor is cooled and condensed to droplets before they are discharged.

5. 发明专利

DE10260376A1 未知
公开(公告)号：DE10260376A1
公开(公告)日：2004-07-15
申请号：DE10260376
申请日：2002-12-13
申请人： FORSCHUNGSVERBUND BERLIN EV
发明人： TER-AVETISYAN SARGIS , SCHNUERER MATTHIAS , NICKLES PETER-VIKTOR
IPC分类号： H05G2/00 , H05H1/24
摘要： An apparatus for making a droplet target provided with a chamber for receiving a target liquid and maintained under pressure, an electromagnetic valve switched at a ms rate for feeding target liquid from the receptacle to a heated expansion channel for converting the target liquid to supersaturated vapor and connected to a supersonic nozzle wherein the supersaturated vapor is cooled and condensed to droplets before they are discharged.

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