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1. 发明专利

JP2003133406A WAFER CUSHION USED FOR TRANSPORTING WAFER 审中-公开
公开(公告)号：JP2003133406A
公开(公告)日：2003-05-09
申请号：JP2002261093
申请日：2002-09-06
申请人： FLUOROWARE INC
发明人： NYSETH DAVID L
IPC分类号： B65D85/86 , H01L21/673 , H01L21/68
摘要： PROBLEM TO BE SOLVED: To provide a device for safely storing and transporting semiconductor wafers. SOLUTION: A device for storing and transporting a semiconductor wafer W is equipped with a carrier 16 whose top and bottom are open, and a top cover 17 and a bottom cover 18 which are flexible and used for covering the open top and bottom of the carrier 16, respectively. A wafer engaging member is provided to the top cover 17 and the bottom cover 18, respectively, and the wafer W is supported as suspended between the wafer engaging members.

2. 发明专利

JPH1070184A WAFER CONTAINER AND DOOR THEREFOR 失效
公开(公告)号：JPH1070184A
公开(公告)日：1998-03-10
申请号：JP18865197
申请日：1997-07-14
申请人： FLUOROWARE INC
发明人： NYSETH DAVID L
IPC分类号： B65D51/26 , B65D6/40 , B65D85/86 , H01L21/673 , H01L21/68
摘要： PROBLEM TO BE SOLVED: To provide a wafer container structure capable of holding wafers effectively even in the case of a large-sized container. SOLUTION: This wafer container has both an opened front 40 formed out of a door accepting frame 60 and a door 24 having dimensions coinciding with the ones of the door accepting frame 60. The door accepting frame 60 has slots 72, 74 on both its sides, and the door 24 has a latching arm 118. This latching arm 118 is protruded from the end portions of the door 24 into the slots 72, 74 or is retreated from the slots 72, 74 into the inside of the door 24 to attach the door 24 to the frame 60 or take off the door 24 from the frame 60. Also, the door 24 has a wafer engaging arm. The wafer engaging arm is extended to the inside of the wafer container and toward wafers to fasten the wafers to the wafer container when the door 24 is fastened to the frame 60. The latching arm 118 and the wafer engaging arm are coupled to a rotatable cam member 80 in the inside of the door 24. The cam member 80 utilizes its so formed cam surface as to first latch the door 24 and then extend the wafer engaging arm.

3. 发明专利

JP2000156401A PLASTIC CONTAINER AND PACKAGE THEREFOR 失效
公开(公告)号：JP2000156401A
公开(公告)日：2000-06-06
申请号：JP2000004926
申请日：2000-01-13
申请人： FLUOROWARE INC
发明人： NYSETH DAVID L
IPC分类号： B65D85/86 , H01L21/673 , H01L21/68
摘要： PROBLEM TO BE SOLVED: To provide a package, which can minimize contamination on wafers due to dusts, moisture or other contaminant and can store and transport the wafers. SOLUTION: A multitude of containers 15 to 15 for transportation housing semiconductor wafers are piled up on cover trays 85. The cover trays 85 are formed into a structure, wherein the individual containers 15 are housed in compartments 88 for storage of the trays 85. The trays 85 are arranged on the lower sides and upper sides of the containers 15. In each container 15, protruding pieces protruded to the outside in such a way that the pieces are adjacent to an upper cover 17 are provided. The trays 85 are engaged with these protruding pieces and support the containers 15 by supporting these protruding pieces.

4. 发明专利

JPH11204629A WAFER CARRIER 失效
公开(公告)号：JPH11204629A
公开(公告)日：1999-07-30
申请号：JP29885998
申请日：1998-10-20
申请人： FLUOROWARE INC
发明人： NYSETH DAVID L , EGGUM SHAWN , ADAMS MICHAEL S , BHATT SANJIV M , WISEMAN BRIAN S
IPC分类号： H01L21/673 , H01L21/68
摘要： PROBLEM TO BE SOLVED: To provide a wafer carrier which is capable of stably carrying wafers and minimizing adhesion of particles onto the wafers. SOLUTION: This wafer carrier transports or holds wafers in a horizontal condition with their axes being aligned. The carrier supports the wafers at their edge parts at least four points. In an embodiment, the carrier is of an H-bar type which has a plurality of slots defined by elongated wafer guides 120 provided on sidewalls of the carrier. The carrier holds wafers in such a condition that upward-protruded projections minimize the contact between the carrier and wafers. The number and shape of such projections are set so that the projections not to come into contact with the upper side faces of the guides.

5. 发明专利

JPH1070185A WAFER CONTAINER 失效
公开(公告)号：JPH1070185A
公开(公告)日：1998-03-10
申请号：JP18865297
申请日：1997-07-14
申请人： FLUOROWARE INC
发明人： NYSETH DAVID L
IPC分类号： B65D85/86 , E21B7/00 , E21B11/00 , H01L21/673 , H01L21/68
摘要： PROBLEM TO BE SOLVED: To enable wafers to be transported or held keeping them arranged in a horizontal direction and axially aligned, by a method wherein a wafer case is composed of a first molded part formed of material high in static electricity dissipating properties and a second molded part possessed of a transparent shell. SOLUTION: A container 26 is composed of a first molded part 50 and a second molded part 52. An additional function is added to the first molded part 50 so as to make the first molded part 50 easily linked to the second molded part 52 and a handle 128 easily and additionally provided to the part 50. A hooked projection 134 is made to extend from a horizontal upper part 74, and a groove 136 is cut in the upper part 74. A tab 138 provided with a groove 140 is provided to a lower base 76. A side handle 128 is snapped at a prescribed position and fixed onto the sides 32 and 36 and upside 38 of a carrier engaging with both the first molded part 50 and the second molded part 52 to hold an assembly firmly in one piece.

6. 发明专利

DE69529426D1 未知
公开(公告)号：DE69529426D1
公开(公告)日：2003-02-20
申请号：DE69529426
申请日：1995-05-23
申请人： FLUOROWARE INC
发明人： NYSETH DAVID L
IPC分类号： B65D85/86 , H01L21/673 , H01L21/00 , B65D21/02 , B65D85/30
摘要： A plastic container for storing and shipping semiconductor wafers comprising a wafer carrier of substantially rigid and transparent material supporting the wafers and maintaining the wafers in spaced relation to each other, top and bottom covers for the wafer carrier formed of stiff but resiliently flexibly yieldable material, the wafer carrier having upper and lower enlarged rim portions extending around the peripheries of the top and bottom of the wafer carrier and being embraced by enlarged peripherally extending rim portions of the top and bottom covers, the top and bottom covers having partially cylindrical panels with elongate beads or ridges formed thereon to engage and maintain the edges of the wafers spaced from the partially cylindrical surfaces, offset tabs on the wafer carrier and top and bottom covers facilitating of flexibly lifting small portions of the covers off the wafer carriers and then progressively disengaging the covers from the wafer carriers; a package comprising a multiplicity of cover trays with compartments receiving the shipping containers therein, the cover trays supporting the containers at the tab portions on the wafer carriers and the cover trays also bearing downwardly on the side edge portions of the cover to maintain the covers in closed condition on the wafer carrier.

7. 发明专利

GB2330944B Wafer carrier with minimal contact 未知
公开(公告)号：GB2330944B
公开(公告)日：2003-01-22
申请号：GB9822954
申请日：1998-10-20
申请人： FLUOROWARE INC
发明人： BHATT SANJIV M , EGGUM SHAWN D , NYSETH DAVID L , ADAMS MICHAEL S , WISEMAN BRIAN S
IPC分类号： H01L21/673 , H01L27/06 , H01L27/088 , H01L27/092 , H01L29/06 , H01L29/10 , H01L29/739 , H01L29/78 , H01L21/00

8. 发明专利

GB2315261B Wafer container door 未知
公开(公告)号：GB2315261B
公开(公告)日：2000-04-12
申请号：GB9714702
申请日：1997-07-11
申请人： FLUOROWARE INC
发明人： NYSETH DAVID L
IPC分类号： B65D51/26 , B65D6/40 , B65D85/86 , H01L21/673 , H01L21/00 , B65D55/12
摘要： A wafer container has an open front defined by a door frame and a door sized for the door frame. The door receiving frame has slots on opposite sides and the door utilizes latching portions that extend and retract from the edge portion of the door into and out of the slots for latching and unlatching the door on the door receiving frame. The door also has wafer engaging arms which extend inwardly toward the wafers to secure said wafers when the door is in place. The retractable latching portions and wafer retaining arms are linked to a rotatable cammed member in the interior of the door. The cammed member utilizes cammed surfaces configured to first latch the door and to then extend the wafer retaining arms.

9. 发明专利

GB2330944A Wafer carrier with minimal contact 未知
公开(公告)号：GB2330944A
公开(公告)日：1999-05-05
申请号：GB9822954
申请日：1998-10-20
申请人： FLUOROWARE INC
发明人： BHATT SANJIV M , EGGUM SHAWN D , NYSETH DAVID L , ADAMS MICHAEL S , WISEMAN BRIAN S
IPC分类号： H01L21/673 , H01L27/06 , H01L27/088 , H01L27/092 , H01L29/06 , H01L29/10 , H01L29/739 , H01L29/78 , H01L21/00
摘要： A wafer carrier for transporting or holding wafers in a horizontal axially aligned arrangement has regions, preferably minimal four point regions, of wafer support at the edge portion of the wafers. In a preferred embodiment, the wafers are supported on support shelves 220 having upward facing wafer engagement projections 230,231. A preferred embodiment is an H-bar carrier with a plurality of slots defined by elongate wafer guides on the carrier sidewalls. Upwardly extending protrusions support the wafers with minimal contact with the carrier. The protrusions are sufficient in number and configuration to prevent contact with the top surface of the guides.

10. 发明专利

DE19830639A1 未知
公开(公告)号：DE19830639A1
公开(公告)日：1999-01-14
申请号：DE19830639
申请日：1998-07-09
申请人： FLUOROWARE INC
发明人： NYSETH DAVID L , KRAMPOTICH DENNIS J
IPC分类号： B65D51/26 , B65D6/40 , B65D85/86 , B65G49/07 , H01L21/673 , H01L21/68
摘要： A wafer container has an open front defined by a door receiving frame and a door sized for the door receiving frame. The door receiving frame has slots on opposite sides and the door utilizes latching linkages and lifting linkages cooperate to extend, lift, lower and retract the latching portions from the door into and out of latch receptacles on the door receiving frame. The door may also have passive wafer cushions or active wafer engaging arms which extend inwardly toward the wafers to secure said wafers when the door is in place. The latching linkages, lifting linkages, and where desired the retaining arms are linked to rotatable cammed members in the interiors if the door. The cammed member utilizes cammed surfaces configured to first extend the latching portions in a first direction into the latching receptacles and to then move the latching portions in a second direction normal to the first direction to pull the door inwardly and to seal the door to the container portion.

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