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1. 发明申请

WO2008051880B1 METHOD AND APPARATUS FOR SAMPLE EXTRACTION AND HANDLING 审中-公开
公开(公告)号：WO2008051880B1
公开(公告)日：2008-09-04
申请号：PCT/US2007082030
申请日：2007-10-20
申请人： FEI CO , AGORIO ENRIQUE , HUDSON JAMES EDGAR , GERHARD DANIEL , TANGUAY MICHAEL , ARJAVAC JASON
发明人： AGORIO ENRIQUE , HUDSON JAMES EDGAR , GERHARD DANIEL , TANGUAY MICHAEL , ARJAVAC JASON
IPC分类号： G01R1/073 , H01L21/66
CPC分类号： H01J37/20 , G01N1/286 , G01N1/32 , G01N2001/2873 , G01N2001/2886 , G01R31/2893 , H01J37/26 , H01J37/28 , H01J37/285 , H01J37/31 , H01J2237/202 , H01J2237/2802 , H01J2237/2812 , H01J2237/3109 , H01J2237/3114 , H01J2237/31745
摘要： An improved method and apparatus for extracting and handling samples for S/TEM analysis. Preferred embodiments of the present invention make use of a micromanipulator and a hollow microprobe probe using vacuum pressure to adhere the microprobe tip to the sample. By applying a small vacuum pressure to the lamella through the microprobe tip, the lamella can be held more securely and its placement controlled more accurately than by using electrostatic force alone. By using a probe having a beveled tip and which can also be rotated around its long axis, the extracted sample can be placed down flat on a sample holder. This allows sample placement and orientation to be precisely controlled, thus greatly increasing predictability of analysis and throughput.

2. 发明申请

WO2008051880A2 METHOD AND APPARATUS FOR SAMPLE EXTRACTION AND HANDLING 审中-公开
标题翻译：用于样品提取和处理的方法和设备
公开(公告)号：WO2008051880A2
公开(公告)日：2008-05-02
申请号：PCT/US2007082030
申请日：2007-10-20
申请人： FEI CO , AGORIO ENRIQUE , HUDSON JAMES EDGAR , GERHARD DANIEL , TANGUAY MICHAEL , ARJAVAC JASON
发明人： AGORIO ENRIQUE , HUDSON JAMES EDGAR , GERHARD DANIEL , TANGUAY MICHAEL , ARJAVAC JASON
IPC分类号： G01R1/073 , H01L21/66
CPC分类号： H01J37/20 , G01N1/286 , G01N1/32 , G01N2001/2873 , G01N2001/2886 , G01R31/2893 , H01J37/26 , H01J37/28 , H01J37/285 , H01J37/31 , H01J2237/202 , H01J2237/2802 , H01J2237/2812 , H01J2237/3109 , H01J2237/3114 , H01J2237/31745
摘要： An improved method and apparatus for extracting and handling samples for S/TEM analysis. Preferred embodiments of the present invention make use of a micromanipulator and a hollow microprobe probe using vacuum pressure to adhere the microprobe tip to the sample. By applying a small vacuum pressure to the lamella through the microprobe tip, the lamella can be held more securely and its placement controlled more accurately than by using electrostatic force alone. By using a probe having a beveled tip and which can also be rotated around its long axis, the extracted sample can be placed down flat on a sample holder. This allows sample placement and orientation to be precisely controlled, thus greatly increasing predictability of analysis and throughput.
摘要翻译：用于S / TEM分析的提取和处理样品的改进方法和设备。本发明的优选实施例利用微操作器和使用真空压力的空心微探针探针将微探针尖端粘附到样本。通过微探针尖对薄片施加小的真空压力，薄片可以更牢固地保持，并且其放置比单独使用静电力更精确地控制。通过使用具有斜面尖端并且也可以围绕其长轴旋转的探针，可以将提取的样本平放在样本架上。这样可以精确控制样品放置和定位，从而大大提高分析和通量的可预测性。

3. 发明专利

ES2735205T3 Cama para ahorrar espacio 未知
公开(公告)号：ES2735205T3
公开(公告)日：2019-12-17
申请号：ES17171509
申请日：2017-05-17
申请人： GERHARD DANIEL
发明人： GERHARD DANIEL
IPC分类号： A47C17/32
摘要： Armazón de cama que presenta una primera parte de armazón (1) y una segunda parte de armazón (2), donde la primera parte de armazón (1) presenta un primer dispositivo receptor de colchón (5) y/o una primera recepción para un primer dispositivo receptor de colchón y donde la segunda parte de armazón (2) presenta un segundo dispositivo receptor de colchón (6) y/o una segunda recepción para un segundo dispositivo receptor de colchón, donde la primera y la segunda parte de armazón están conectadas entre sí de forma abatible una frente a otra alrededor de un primer eje (7), donde el armazón de cama está establecido de modo que, en una primera posición de las partes de armazón (1, 2), los dispositivos receptores de colchón (5, 6) están dispuestos uno sobre otro y en paralelo entre sí y, en una segunda posición de las partes de armazón (1, 2), los dispositivos receptores de colchón (5, 6) están dispuestos uno junto a otro y en paralelo entre sí, y donde un segundo eje (8) corta de forma centrada la anchura de la segunda recepción y/o del segundo dispositivo receptor de colchón (6) y/o de la segunda parte de armazón (2) y donde el primer y segundo eje están dispuestos en paralelo entre sí, caracterizado porque la segunda recepción y/o el segundo dispositivo receptor de colchón (6) están conectados con la segunda parte de armazón (2) de forma giratoria y/o pivotable alrededor del segundo eje (8).

4. 发明专利

JP2013101123A Method and apparatus for sample extraction and handling 有权
标题翻译：样品提取和处理方法和装置
公开(公告)号：JP2013101123A
公开(公告)日：2013-05-23
申请号：JP2012267309
申请日：2012-12-06
申请人： Fei Co , エフ・イ−・アイ・カンパニー
发明人： AGORIO ENRIQUE , JAMES EDGAR HUDSON , GERHARD DANIEL , TANGUAY MICHAEL , JASON ARJAVAC
IPC分类号： G01N1/28 , G01N23/225
CPC分类号： H01J37/20 , G01N1/286 , G01N1/32 , G01N2001/2873 , G01N2001/2886 , G01R31/2893 , H01J37/26 , H01J37/28 , H01J37/285 , H01J37/31 , H01J2237/202 , H01J2237/2802 , H01J2237/2812 , H01J2237/3109 , H01J2237/3114 , H01J2237/31745
摘要： PROBLEM TO BE SOLVED: To provide an improved method and apparatus for extracting and handling samples for S/TEM analysis.SOLUTION: A preferred embodiment of the present invention is an apparatus for extracting a lamella from a substrate having a substrate face, the apparatus comprising: a moveable stage for a substrate, the stage connected to one or more stage controllers; a microprobe; a substrate holder for holding the substrate, the substrate holder mounted on a moveable stage; oblique illumination for illuminating the substrate surface with light at an oblique angle with respect to the substrate surface when the substrate holder is holding the substrate; and an optical microscope which images the substrate.
摘要翻译：要解决的问题：提供用于提取和处理用于S / TEM分析的样品的改进的方法和装置。解决方案：本发明的优选实施例是一种用于从具有基板面的基板提取薄片的装置，该装置包括：用于基板的可移动台，该台连接到一个或多个平台控制器; 微探针用于保持基板的基板保持器，安装在可移动台上的基板保持件; 倾斜照明，用于当基板保持器保持基板时相对于基板表面以倾斜角度的光照射基板表面; 以及对该基板进行成像的光学显微镜。版权所有（C）2013，JPO＆INPIT

5. 发明专利

JP2013033066A Method for creating s/tem sample and sample structure 有权
标题翻译：创建S / TEM样品和样品结构的方法
公开(公告)号：JP2013033066A
公开(公告)日：2013-02-14
申请号：JP2012248393
申请日：2012-11-12
申请人： Fei Co , エフ・イ−・アイ・カンパニー
发明人： JASON ARJAVAC , PEI ZOU , DAVID JAMES TASKER , MAXIMUS THEODORUS OTTEN , GERHARD DANIEL
IPC分类号： G01N1/28 , G01N1/00
CPC分类号： G01N1/28 , G01N1/06 , G01N1/08 , G01N1/32 , G01N23/04 , H01J37/06 , H01J37/18 , H01J37/20 , H01J37/26 , H01J37/28 , H01J37/3056 , H01J2237/063 , H01J2237/182 , H01J2237/204 , H01J2237/208 , H01J2237/2802 , H01J2237/31745 , H01J2237/31749
摘要： PROBLEM TO BE SOLVED: To provide an improved method and apparatus for S/TEM sample preparation and analysis.SOLUTION: Preferred embodiments of the present invention provide improved methods for TEM sample creation, especially for small geometry (under 100 nm in thick) TEM lamellae. Preferred embodiments of the present invention also provide methods to partially or fully automate TEM sample creation, to make the process of creating and analyzing TEM samples less labor intensive, and to increase throughput and reproducibility of TEM analysis, thereby providing in-line process for S/TEM based metrology on objects such as integrated circuits or other structures manufactured on semiconductor wafer.
摘要翻译：要解决的问题：提供用于S / TEM样品制备和分析的改进的方法和装置。解决方案：本发明的优选实施方案提供用于TEM样品制备的改进方法，特别是对于小几何（厚度在100nm以下）TEM薄片。本发明的优选实施方案还提供了部分或全部自动化TEM样品制备的方法，使TEM样品的创建和分析过程更少劳动密集度，并提高TEM分析的生产量和再现性，从而为S / TEM测量对象，如集成电路或半导体晶圆上制造的其他结构。版权所有（C）2013，JPO＆INPIT

6. 发明专利

PL3403537T3 ŁÓŻKO OSZCZĘDZAJĄCE PRZESTRZEŃ 未知
公开(公告)号：PL3403537T3
公开(公告)日：2019-09-30
申请号：PL17171509
申请日：2017-05-17
申请人： GERHARD DANIEL
发明人： GERHARD DANIEL
IPC分类号： A47C17/32

7. 发明公开

EP2095134A4 METHOD AND APPARATUS FOR SAMPLE EXTRACTION AND HANDLING 有权
标题翻译：方法和装置的样品提取和处理
公开(公告)号：EP2095134A4
公开(公告)日：2011-09-14
申请号：EP07863442
申请日：2007-10-20
申请人： FEI CO
发明人： AGORIO ENRIQUE , HUDSON JAMES EDGAR , GERHARD DANIEL , TANGUAY MICHAEL , ARJAVAC JASON
IPC分类号： G01R1/073 , H01L21/66
CPC分类号： H01J37/20 , G01N1/286 , G01N1/32 , G01N2001/2873 , G01N2001/2886 , G01R31/2893 , H01J37/26 , H01J37/28 , H01J37/285 , H01J37/31 , H01J2237/202 , H01J2237/2802 , H01J2237/2812 , H01J2237/3109 , H01J2237/3114 , H01J2237/31745

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