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1. 发明专利

DE60225369T2 未知
公开(公告)号：DE60225369T2
公开(公告)日：2009-03-26
申请号：DE60225369
申请日：2002-03-20
申请人： FANUC LTD
发明人： SAWADA KIYOSHI , KAWAI TOMOHIKO , EBIHARA KENZO
IPC分类号： B23Q5/28 , H02K33/00 , B23Q1/00 , B23Q1/26 , B23Q1/38 , B23Q1/58 , H02K41/02 , H02K41/03

2. 发明专利

DE602007004279D1 未知
公开(公告)号：DE602007004279D1
公开(公告)日：2010-03-04
申请号：DE602007004279
申请日：2007-10-23
申请人： FANUC LTD
发明人： HON YONPYO , EBIHARA KENZO , KAWAI TOMOHIKO
IPC分类号： G05B19/401 , G05B19/404
摘要： An ultra-precision machine tool capable of accurately detecting a machining start position, in which movable axes are supported by fluid bearings. A workpiece is mounted on a rotary table of a B axis, and the rotary table is mounted on an X axis that is a linear motion axis. A tool is mounted on a Y axis. The Y axis is mounted on a Z axis. The X axis is moved reciprocally each time the Z axis is moved a predetermined amount, a machining surface of the workpiece is scanned, and it is determined whether or not position deviation of the X, Y and B axes reaches or exceeds a reference value. The Y axis is driven and the tool is moved toward the workpiece a predetermined amount, and the above-described scan is performed. When the position deviation of the X, Y and B axes reaches or exceeds the reference value it is determined that contact between the tool and the workpiece has occurred, and this contact point is stored as the machining start position, the Y axis is skipped, and the tool is moved a predetermined amount in a direction away from the workpiece, thus enabling a point of maximum protrusion from the machining surface of the workpiece to be simply detected as the machining start point.

3. 发明专利

DE60225369D1 未知
公开(公告)号：DE60225369D1
公开(公告)日：2008-04-17
申请号：DE60225369
申请日：2002-03-20
申请人： FANUC LTD
发明人： SAWADA KIYOSHI , KAWAI TOMOHIKO , EBIHARA KENZO
IPC分类号： B23Q5/28 , H02K33/00 , B23Q1/00 , B23Q1/26 , B23Q1/38 , B23Q1/58 , H02K41/02 , H02K41/03

4. 发明专利

DE602007001903D1 未知
公开(公告)号：DE602007001903D1
公开(公告)日：2009-09-24
申请号：DE602007001903
申请日：2007-02-07
申请人： FANUC LTD
发明人： KAWAI TOMOHIKO , EBIHARA KENZO , MATSUURA OSAMU
IPC分类号： B23Q1/38 , G01B7/00 , G01D5/12 , G01D5/245 , H02K41/02
摘要： A linear drive apparatus comprising: a guide having an internal body; a slider moved along the guide, a driving mechanism for generating a driving force by magnetic interaction of the slider with the guide so as to linearly drive the slider; and a magnetic measurement unit having a magnetic scale and a detector which are opposed to each other and change a relative position relative to each other in order to obtain the relative position of the slider relative to the guide, wherein an opposing direction of the magnetic scale and the detector is the direction of the outer circumference of the guide, and the detector detects a signal from the magnetic scale in accordance with the relative position of the slider, whereby the relative position of the slider is obtained.

5. 发明专利

DE602004008534T2 未知
公开(公告)号：DE602004008534T2
公开(公告)日：2008-05-21
申请号：DE602004008534
申请日：2004-05-26
申请人： FANUC LTD
发明人： SAWADA KIYOSHI , EBIHARA KENZO , SAKAIDA YASUHIRO
IPC分类号： B23Q5/22 , H01L41/09 , B23Q1/34 , B23Q5/28 , G05D3/00
摘要： A microscopic positioning device having machine rigidity and being capable of achieving nano-order positioning accuracy, and a method of compensating tool position and orientation. A driving unit comprises two piezoelectric elements P1 and P2 arranged into alignment along an expanding/shrinking direction. The ends of the piezoelectric element P1, facing in the expanding/shrinking direction, are fixed to a base member 1 and a movable member 2, respectively. The other piezoelectric element P2 is fixed to the base member 1 only, at one end of the piezoelectric element P2. A gap L is formed between the other end of the piezoelectric element P2 and the movable member 2. Where expanding displacement amounts of the piezoelectric elements P1 and P2 are a1 and a2, respectively, voltage applied to the piezoelectric elements P1 and P2 is so controlled to satisfy an equation, a1 + a2 = a ≥ L. It is possible to position the movable member 2 at a position within a maximum stroke a in the nano-order. Driving units may be arranged in orthogonal directions, thereby providing the positioning device with two degrees of freedom, and further providing six degrees of freedom including rotation axes.

6. 发明专利

DE60312579T2 未知
公开(公告)号：DE60312579T2
公开(公告)日：2007-07-05
申请号：DE60312579
申请日：2003-02-12
申请人： FANUC LTD
发明人： SAWADA KIYOSHI , EBIHARA KENZO
IPC分类号： F16C29/02 , F16C32/06
摘要： A guide member (1) and a slide (2) are disposed such as to be opposed to each other with a bearing clearance (3) therebetween. Air is supplied to the bearing clearance (3) through a main pipe (10), a branch pipe (11) and an orifice (12) provided in the slide (2). Shape and size of each portion of the main pipe (10), the branch pipe (11) and the orifice (12) are determined such that the Reynolds number becomes 2000 or less in any of the portions of the main pipe (10), the branch pipe (11) and the orifice (12), so that a turbulent flow is not generated in air flow approaching the bearing clearance (3).

7. 发明专利

DE602007000187D1 未知
公开(公告)号：DE602007000187D1
公开(公告)日：2008-12-04
申请号：DE602007000187
申请日：2007-04-11
申请人： FANUC LTD
发明人： KAWAI TOMOHIKO , EBIHARA KENZO , ODA TAKAYUKI
IPC分类号： B23Q1/62 , B23Q15/007 , B23Q15/24 , B29C33/42 , G02B6/00
摘要： A machining apparatus capable of irregularly forming a plurality of dimples on a surface of a workpiece in a short period of time. The machining apparatus includes a tool for machining a plurality of dimples on a surface of a workpiece, each dimple having a depth in a first direction; a drive unit for displacing the tool relative to the workpiece in the first direction and a second direction generally perpendicular to the first direction; a controller for controlling the drive unit so as to displace the tool relative to the workpiece in the first direction such that the tool cuts into or leaves the workpiece, while the tool is being moved relative to the workpiece in the second direction, wherein a trigger of the displacement of the tool in the first direction is timing calculated by using a second waveform, the second waveform being determined by comparing the magnitude of a first waveform with a predetermined threshold, at least one of frequency and amplitude of the first waveform being irregular.

8. 发明专利

DE602004008534D1 未知
公开(公告)号：DE602004008534D1
公开(公告)日：2007-10-11
申请号：DE602004008534
申请日：2004-05-26
申请人： FANUC LTD
发明人： SAWADA KIYOSHI , EBIHARA KENZO , SAKAIDA YASUHIRO
IPC分类号： B23Q5/22 , H01L41/09 , B23Q1/34 , B23Q5/28 , G05D3/00
摘要： A microscopic positioning device having machine rigidity and being capable of achieving nano-order positioning accuracy, and a method of compensating tool position and orientation. A driving unit comprises two piezoelectric elements P1 and P2 arranged into alignment along an expanding/shrinking direction. The ends of the piezoelectric element P1, facing in the expanding/shrinking direction, are fixed to a base member 1 and a movable member 2, respectively. The other piezoelectric element P2 is fixed to the base member 1 only, at one end of the piezoelectric element P2. A gap L is formed between the other end of the piezoelectric element P2 and the movable member 2. Where expanding displacement amounts of the piezoelectric elements P1 and P2 are a1 and a2, respectively, voltage applied to the piezoelectric elements P1 and P2 is so controlled to satisfy an equation, a1 + a2 = a ≥ L. It is possible to position the movable member 2 at a position within a maximum stroke a in the nano-order. Driving units may be arranged in orthogonal directions, thereby providing the positioning device with two degrees of freedom, and further providing six degrees of freedom including rotation axes.

9. 发明专利

DE602008002554D1 Spindelvorrichtung mit Rotorstrahlantriebsflüssigkeit 未知
公开(公告)号：DE602008002554D1
公开(公告)日：2010-10-28
申请号：DE602008002554
申请日：2008-12-17
申请人： FANUC LTD
发明人： KAWAI TOMOHIKO , EBIHARA KENZO , OOKI TAKESHI
IPC分类号： B23Q1/70 , A61C1/05 , B23Q1/38 , B23Q5/06 , F16C32/06

10. 发明专利

DE60312579D1 未知
公开(公告)号：DE60312579D1
公开(公告)日：2007-05-03
申请号：DE60312579
申请日：2003-02-12
申请人： FANUC LTD
发明人： SAWADA KIYOSHI , EBIHARA KENZO
IPC分类号： F16C29/02 , F16C32/06
摘要： A guide member (1) and a slide (2) are disposed such as to be opposed to each other with a bearing clearance (3) therebetween. Air is supplied to the bearing clearance (3) through a main pipe (10), a branch pipe (11) and an orifice (12) provided in the slide (2). Shape and size of each portion of the main pipe (10), the branch pipe (11) and the orifice (12) are determined such that the Reynolds number becomes 2000 or less in any of the portions of the main pipe (10), the branch pipe (11) and the orifice (12), so that a turbulent flow is not generated in air flow approaching the bearing clearance (3).

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