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1. 发明授权

EP2743963B8 Supply of a liquid-metal target in x-ray generation 有权转让
标题翻译：在x射线产生中提供液态金属靶
公开(公告)号：EP2743963B8
公开(公告)日：2015-10-28
申请号：EP14158592.7
申请日：2009-04-03
申请人： Excillum AB
发明人： Hemberg, Oscar , Tuohimaa, Tomi , Otendal, Mikael
IPC分类号： H01J35/08
CPC分类号： H01J35/08 , G03F7/70033 , H01J35/12 , H01J2235/082 , H01J2235/1204 , H01J2235/1279 , H05G2/003 , H05G2/008

2. 发明公开

EP2743963A2 Supply of a liquid-metal target in x-ray generation 有权转让
标题翻译： Bereitstellung einesFlüssigmetall-Targets bei derRöntgenstrahlerzeugung
公开(公告)号：EP2743963A2
公开(公告)日：2014-06-18
申请号：EP14158592.7
申请日：2009-04-03
申请人： Excillum AB
发明人： Hemberg, Oscar , Tuohimaa, Tomi , Otendal, Mikael
IPC分类号： H01J35/08
CPC分类号： H01J35/08 , G03F7/70033 , H01J35/12 , H01J2235/082 , H01J2235/1204 , H01J2235/1279 , H05G2/003 , H05G2/008
摘要： Closed-loop circulation for providing liquid metal to an interaction region at which an electron beam is to impact upon the liquid metal to produce X-rays is presented. In a method according to the invention, the pressure of the liquid metal is raised to at least 10 bar using a high-pressure pump (312). The pressurized liquid metal is then conducted to a nozzle (332) and ejected into a vacuum chamber (330) in the form of a spatially continuous jet. After passage through the vacuum chamber, the liquid metal is collected in a collection reservoir (334), and the pressure of the liquid metal is raised to an inlet pressure, e.g. using a primer pump (322), suitable for the inlet of the high-pressure pump. The invention also relates to a corresponding circulation system and an X-ray source provided with such circulation system.
摘要翻译：提出了将液体金属提供到电子束将冲击液态金属以产生X射线的相互作用区域的闭环循环。在根据本发明的方法中，使用高压泵（312）将液态金属的压力升高至至少10巴。加压液体金属然后被传导到喷嘴（332）并以空间连续射流的形式喷射到真空室（330）中。在通过真空室之后，将液态金属收集在收集容器（334）中，并且液态金属的压力升高到入口压力，例如压力。使用底漆泵（322），适用于高压泵的入口。本发明还涉及具有这种循环系统的相应循环系统和X射线源。

3. 发明公开

EP3525556A1 A METHOD FOR PROTECTING AN X-RAY SOURCE, AND AN X-RAY SOURCE 审中-公开
公开(公告)号：EP3525556A1
公开(公告)日：2019-08-14
申请号：EP18156151.5
申请日：2018-02-09
申请人： Excillum AB
发明人： Tuohimaa, Tomi , Takman, Per , Larsson, Daniel
IPC分类号： H05G2/00
摘要： The present inventive concept relates to a method for protecting an X-ray source (100) comprising: a liquid jet generator (108) configured to form a liquid jet (110) moving along a flow axis; an electron source (114) configured to provide an electron beam (116) interacting with the liquid jet to generate X-ray radiation; wherein the method comprises: generating the liquid jet; monitoring a quality measure indicating a performance of the liquid jet; identifying, based on the quality measure, a malperformance of the liquid jet; and if said malperformance is identified, causing the X-ray source to enter a safe mode for protecting the X ray source. The inventive concept further relates to corresponding devices.

4. 发明公开

EP3385976A1 VAPOUR MONITORING 审中-公开
公开(公告)号：EP3385976A1
公开(公告)日：2018-10-10
申请号：EP17165059.1
申请日：2017-04-05
申请人： Excillum AB
发明人： Takman, Per , Tuohimaa, Tomi
IPC分类号： H01J35/20 , H01J35/30 , H01J35/04
CPC分类号： H01J35/20 , H01J35/30 , H01J2235/082 , H01J2235/1204 , H01J2235/1225 , H05G1/30
摘要： A method for generating X-ray radiation is disclosed. The method comprises providing (10) a liquid target (J), directing (20) an electrom beam (132) towards the liquid target such that the electron beam interacts with the liquid target to generated X-ray radiation (134), estimating (30) a number of particlas produced from the interaction between the electron beam and the liquid target, and controlling (40) the electron beam, and/or a temperature in a region of the liquid target in which the electron beam interacts with the target, such that the estimated number of particles is below a predetermined limit. A corresponding X-ray source is also disclosed.

5. 发明授权

EP2743963B1 Supply of a liquid-metal target in x-ray generation 有权转让
标题翻译：提供液体金属靶在X射线产生
公开(公告)号：EP2743963B1
公开(公告)日：2015-09-23
申请号：EP14158592.7
申请日：2009-04-03
申请人： Excillum AB
发明人： Hemberg, Oscar , Tuohimaa, Tomi , Otendal, Mikael
IPC分类号： H01J35/08
CPC分类号： H01J35/08 , G03F7/70033 , H01J35/12 , H01J2235/082 , H01J2235/1204 , H01J2235/1279 , H05G2/003 , H05G2/008

6. 发明公开

EP3261110A1 X-RAY SOURCE WITH IONISATION TOOL 审中-公开
标题翻译： X射线源与离子工具
公开(公告)号：EP3261110A1
公开(公告)日：2017-12-27
申请号：EP16175573.1
申请日：2016-06-21
申请人： Excillum AB
发明人： Tuohimaa, Tomi
IPC分类号： H01J35/20
CPC分类号： H01J35/20 , H01J2235/082 , H01J2235/168 , H01J2235/205
摘要： An X-ray source (1) and a corresponding method for generating X-ray radiation are disclosed. The X-ray source comprises a chamber (110) comprising an interaction region (I), and a first electron source (130) operable to emit a first electron beam, comprising electrons of a first energy, towards the interaction region such that the first electron beam interacts with a target (120) to generate X-ray radiation (150). The X-ray source further comprises an ionisation tool (160) for ionising particles in the chamber, and an ion collection tool (170) that is adapted to remove the ionised particles from the chamber by means of an electromagnetic (e.g. electrostatic) field (E). By ionising particles and preventing them from moving freely in the chamber, problems related to contamination of the chamber may be mitigated.
摘要翻译：公开了一种用于产生X射线辐射的X射线源（1）和相应的方法。该X射线源包括包含相互作用区域（I）的腔室（110）以及可操作以朝向相互作用区域发射包括第一能量的电子的第一电子束的第一电子源（130），使得第一电子电子束与目标（120）相互作用以产生X射线辐射（150）。 X射线源还包括用于离子化腔室中的粒子的离子化工具（160）以及离子收集工具（170），离子收集工具适于通过电磁（例如静电）场将离子化粒子从腔室移除（ E）。通过电离粒子并防止它们在腔室内自由移动，可以减轻与腔室污染有关的问题。

7. 发明公开

EP2743963A3 Supply of a liquid-metal target in x-ray generation 有权转让
标题翻译：在x射线产生中提供液态金属靶
公开(公告)号：EP2743963A3
公开(公告)日：2014-07-30
申请号：EP14158592.7
申请日：2009-04-03
申请人： Excillum AB
发明人： Hemberg, Oscar , Tuohimaa, Tomi , Otendal, Mikael
IPC分类号： H01J35/08
CPC分类号： H01J35/08 , G03F7/70033 , H01J35/12 , H01J2235/082 , H01J2235/1204 , H01J2235/1279 , H05G2/003 , H05G2/008
摘要： Closed-loop circulation for providing liquid metal to an interaction region at which an electron beam is to impact upon the liquid metal to produce X-rays is presented. In a method according to the invention, the pressure of the liquid metal is raised to at least 10 bar using a high-pressure pump (312). The pressurized liquid metal is then conducted to a nozzle (332) and ejected into a vacuum chamber (330) in the form of a spatially continuous jet. After passage through the vacuum chamber, the liquid metal is collected in a collection reservoir (334), and the pressure of the liquid metal is raised to an inlet pressure, e.g. using a primer pump (322), suitable for the inlet of the high-pressure pump. The invention also relates to a corresponding circulation system and an X-ray source provided with such circulation system.
摘要翻译：提出了用于将液态金属提供给电子束将撞击液态金属以产生X射线的相互作用区域的闭环循环。在根据本发明的方法中，使用高压泵（312）将液态金属的压力升高到至少10巴。然后将加压液态金属导入喷嘴（332）并以空间连续射流的形式喷射到真空室（330）中。在通过真空室之后，液态金属被收集在收集容器（334）中，并且液态金属的压力升高到入口压力，例如，使用适用于高压泵入口的引爆泵（322）。本发明还涉及配备有这种循环系统的相应的循环系统和X射线源。

8. 发明公开

EP3906856A1 X-RAY IMAGING SYSTEM 审中-公开
公开(公告)号：EP3906856A1
公开(公告)日：2021-11-10
申请号：EP20173258.3
申请日：2020-05-06
申请人： Excillum AB
发明人： Hansson, Björn , Hållstedt, Julius , Tuohimaa, Tomi , Lundström, Ulf
IPC分类号： A61B6/00 , H01J35/08
摘要： There is disclosed an X-ray imaging system, comprising a target; an electron beam source configured to provide an electron beam for interaction with the target to generate X-ray radiation; electron optics configured to alternately direct the electron beam to at least a first and a second location on the target; an X-ray detector array configured to receive X-ray radiation generated at the first and second locations on the target; a sample position region for receiving a sample to be exposed to generated X-ray radiation, the sample position region being located in a region where X-ray radiation generated at the first location overlaps with X-ray radiation generated at the second location; and a processing unit coupled to the X-ray detector array, the processing unit being configured to create an image of a sample, positioned in the sample position region, based on the X-ray radiation originating from the first location and from the second location. In embodiments, the electron beam is moved between the locations at a sufficiently short time period such that thermal cycling, and thereby thermally induced mechanical stress, is reduced. A corresponding method is also disclosed.

9. 发明公开

EP3826047A1 CHARACTERIZATION OF AN ELECTRON BEAM 审中-公开
公开(公告)号：EP3826047A1
公开(公告)日：2021-05-26
申请号：EP19209895.2
申请日：2019-11-19
申请人： Excillum AB
发明人： Takman, Per , Tuohimaa, Tomi , Lundström, Ulf
IPC分类号： H01J35/14 , H05G1/52
摘要： A method for characterizing an electron beam in a liquid metal jet X-ray source is disclosed. The method comprises providing said electron beam and directing said electron beam to an interaction region; providing an electron beam dump connected to ground potential for receiving said electron beam after it has traversed said interaction region; scanning said electron beam over at least part of said interaction region; measuring X-ray radiation generated during said scanning to obtain an X-ray profile; and calculating an electron beam characteristic based on said X-ray profile. A corresponding liquid metal jet X-ray source is also disclosed.

10. 发明公开

EP3736445A1 X-RAY SOURCE WITH AN ELECTROMAGNETIC PUMP 审中-公开
公开(公告)号：EP3736445A1
公开(公告)日：2020-11-11
申请号：EP19218021.4
申请日：2019-12-19
申请人： Excillum AB
发明人： Hansson, Björn , Takman, Per , Lundström, Ulf , Tuohimaa, Tomi
IPC分类号： F04B17/04
摘要： A liquid metal jet X-ray source comprising an electromagnetic pump for pumping the liquid metal is disclosed. The electromagnetic pump comprises a core having a core diameter and an outer yoke with a thickness of at least 20% of the core diameter. Preferably, the thickness of the outer yoke is at least 20% of the core diameter plus 6% of a radial distance between an outside of the core and an inside of the yoke.

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