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1. 发明授权

US07643146B2 Methods and apparatus for reducing noise in scatterometry measurements 有权
标题翻译：用于降低散射测量中噪声的方法和装置
公开(公告)号：US07643146B2
公开(公告)日：2010-01-05
申请号：US11336388
申请日：2006-01-20
申请人： Evan F. Cromwell , Steven C. Miller , Robert T. Trujillo , Paul B. Comita
发明人： Evan F. Cromwell , Steven C. Miller , Robert T. Trujillo , Paul B. Comita
IPC分类号： G01N21/47
CPC分类号： B01L3/50853 , B01L2200/0684 , B01L2300/0654 , B01L2300/0829 , G01N21/0303 , G01N21/49
摘要： Methods and apparatus for performing scatterometry measurements of biological samples as described herein. A substrate having formed therein one or more sample wells is provided. Each sample well is configured to hold a sample solution containing objects that are to be characterized based on their light scattering properties. One or more sample solutions are dispensed into the sample wells. A specular reflection reducing element is applied to at least some of the sample solutions in the sample wells to decrease reflections of light into one or more detectors. A light beam is directed from a light source onto the objects in the sample wells. Light scattered by the objects in the sample wells is collected and transmitted to one or more detectors. The signal from the detectors is analyzed to detect the one or more characteristics of the one or more samples.
摘要翻译：如本文所述进行生物样品的散射测量的方法和装置。提供了其中形成有一个或多个样品阱的衬底。每个样品孔构造成容纳含有根据其光散射性质进行表征的物体的样品溶液。将一种或多种样品溶液分配到样品孔中。将镜面反射减少元件应用于样品阱中的至少一些样品溶液以减少光反射到一个或多个检测器中。将光束从光源引导到样品孔中的物体上。被样品孔中的物体散射的光被收集并传输到一个或多个检测器。分析来自检测器的信号以检测一个或多个样品的一个或多个特性。

2. 发明申请

US20080206888A1 Screening using polarization anisotropy in FRET emissions 失效
标题翻译：在FRET排放中使用偏振各向异性进行筛选
公开(公告)号：US20080206888A1
公开(公告)日：2008-08-28
申请号：US12069724
申请日：2008-02-11
申请人： Steven C. Miller , Paul B. Comita , Christopher B. Shumate , Evan F. Cromwell
发明人： Steven C. Miller , Paul B. Comita , Christopher B. Shumate , Evan F. Cromwell
IPC分类号： G01N33/566 , G01N21/76
CPC分类号： G01N33/542 , G01N2500/00
摘要： Methods and apparatus are described for detecting specific binding between first and second chemical entities. The first chemical entity in association with a first fluorophore is immobilized. The second chemical entity is allowed to bind with the immobilized first chemical entity. The second chemical entity is or becomes coupled to a second fluorophore, which forms a FRET pair with the first fluorophore. The bound chemical entities are exposed to radiation at an excitation frequency for either the first or the second fluorophore, and polarization anisotropy of a FRET fluorescent signal from the bound chemical entities is measured to detect specific binding between the first and second chemical entities. Techniques are also disclosed for detecting whether a FRET interaction is occurring between a first chemical entity including a donor fluorophore and a second chemical entity including an acceptor fluorophore, using simultaneous anisotropy measurements at the wavelengths of the donor and acceptor fluorophores.
摘要翻译：描述了用于检测第一和第二化学实体之间的特异性结合的方法和装置。与第一荧光团相关联的第一化学实体被固定化。允许第二化学实体与固定化的第一化学实体结合。第二化学实体是或连接到与第一荧光团形成FRET对的第二荧光团。结合的化学实体以第一或第二荧光团的激发频率暴露于辐射，并且测量来自结合的化学实体的FRET荧光信号的偏振各向异性以检测第一和第二化学实体之间的特异性结合。还公开了用于检测在包括供体荧光团的第一化学实体和包括受体荧光团的第二化学实体之间是否发生FRET相互作用的技术，其使用在供体和受体荧光团的波长处的同时各向异性测量。

3. 发明授权

US07141378B2 Exploring fluorophore microenvironments 有权
标题翻译：探索荧光团微环境
公开(公告)号：US07141378B2
公开(公告)日：2006-11-28
申请号：US11173814
申请日：2005-07-01
申请人： Steven C. Miller , Paul B. Comita , Evan F. Cromwell , Christopher B. Shumate
发明人： Steven C. Miller , Paul B. Comita , Evan F. Cromwell , Christopher B. Shumate
IPC分类号： C12Q1/68 , G01N33/53
CPC分类号： G01N33/582 , B82Y5/00 , B82Y10/00 , C12Q1/6816 , G01N21/6408 , G01N21/6428 , G01N21/6445 , G01N2021/6419 , G01N2021/6421 , G01N2021/6432 , G01N2021/6441 , G01N2021/6478 , G01N2021/6484 , G01N2201/067 , G01N2201/0697 , G01N2201/0833 , C12Q2563/107 , C12Q2561/119
摘要： Methods, apparatus, and system, implementing and using techniques for detecting a presence of one or more target analytes in particular regions of interest of one or more samples. One or more samples including objects and one or more target analytes are provided. Some of the target analytes are labeled with a fluorophore and are bound to some of the objects in the samples. The samples are illuminated with fluorescence inducing light and fluorescent light is collected from one or more regions of the one or more samples. At least one anisotropy measurement of the samples is performed to identify regions of interest where one or more target analytes are bound to the objects. The collected fluorescent light from the regions of interest is analyzed to determine a presence of target analytes that are bound to the objects in the one or more samples.
摘要翻译：方法，装置和系统，实施和使用用于检测一个或多个样品的特定感兴趣区域中一种或多种目标分析物的存在的技术。提供了一个或多个样品，包括物体和一种或多种目标分析物。一些目标分析物用荧光团标记，并且与样品中的某些对象结合。用荧光诱导光照射样品，并从一个或多个样品的一个或多个区域采集荧光。进行样品的至少一个各向异性测量以识别一个或多个目标分析物与物体结合的感兴趣区域。分析来自感兴趣区域的收集的荧光以确定与一个或多个样品中的物体结合的目标分析物的存在。

4. 发明授权

US07674588B2 Screening using polarization anisotropy in FRET emissions 失效
标题翻译：在FRET排放中使用偏振各向异性进行筛选
公开(公告)号：US07674588B2
公开(公告)日：2010-03-09
申请号：US12069724
申请日：2008-02-11
申请人： Steven C. Miller , Paul B. Comita , Christopher B. Shumate , Evan F. Cromwell
发明人： Steven C. Miller , Paul B. Comita , Christopher B. Shumate , Evan F. Cromwell
IPC分类号： C12Q1/68 , G01N33/53 , C07H21/02 , C07H21/04
CPC分类号： G01N33/542 , G01N2500/00
摘要： Methods and apparatus are described for detecting specific binding between first and second chemical entities. The first chemical entity in association with a first fluorophore is immobilized. The second chemical entity is allowed to bind with the immobilized first chemical entity. The second chemical entity is or becomes coupled to a second fluorophore, which forms a FRET pair with the first fluorophore. The bound chemical entities are exposed to radiation at an excitation frequency for either the first or the second fluorophore, and polarization anisotropy of a FRET fluorescent signal from the bound chemical entities is measured to detect specific binding between the first and second chemical entities. Techniques are also disclosed for detecting whether a FRET interaction is occurring between a first chemical entity including a donor fluorophore and a second chemical entity including an acceptor fluorophore, using simultaneous anisotropy measurements at the wavelengths of the donor and acceptor fluorophores.
摘要翻译：描述了用于检测第一和第二化学实体之间的特异性结合的方法和装置。与第一荧光团相关联的第一化学实体被固定化。允许第二化学实体与固定化的第一化学实体结合。第二化学实体是或连接到与第一荧光团形成FRET对的第二荧光团。结合的化学实体以第一或第二荧光团的激发频率暴露于辐射，并且测量来自结合的化学实体的FRET荧光信号的偏振各向异性以检测第一和第二化学实体之间的特异性结合。还公开了用于检测在包括供体荧光团的第一化学实体和包括受体荧光团的第二化学实体之间是否发生FRET相互作用的技术，其使用在供体和受体荧光团的波长处的同时各向异性测量。

5. 发明申请

US20080174842A1 Time dependent fluorescence measurements 有权
标题翻译：时间依赖荧光测量
公开(公告)号：US20080174842A1
公开(公告)日：2008-07-24
申请号：US12072047
申请日：2008-02-22
申请人： Evan F. Cromwell , Johann F. Adam , Andrei Brunfeld , Paul B. Comita , Christopher J. Seipert
发明人： Evan F. Cromwell , Johann F. Adam , Andrei Brunfeld , Paul B. Comita , Christopher J. Seipert
IPC分类号： G02B26/08
CPC分类号： G01N21/6452 , G01N21/6408 , G01N21/6445 , G01N21/6458 , G01N2021/6484 , G02B21/0048 , G02B21/0068 , G02B21/0076 , G02B21/16
摘要： Methods and apparatus, including computer program products, implementing and using techniques for collecting optical data pertaining to one or more characteristics of a sample. The apparatus has a light source, one or more illumination optical elements, a scanner, one or more collection optical elements, and a device forming an aperture that limits detection of light from the sample. The illumination optical elements direct a light beam from the light source onto the sample. The scanner scans the light beam across the sample. The collection optical elements collect light from the sample and transmit the collected light to a detector. None of the collection optical elements are included among the illumination optical elements. The device forming an aperture limits detection of light from the sample to light associated with a limited vertical depth within the sample, and is one of the collection optical elements.
摘要翻译：方法和装置，包括计算机程序产品，用于收集与样品的一个或多个特征有关的光学数据的实施和使用技术。该装置具有光源，一个或多个照明光学元件，扫描器，一个或多个收集光学元件，以及形成限制来自样品的光的检测的孔径的装置。照明光学元件将来自光源的光束引导到样品上。扫描仪扫描样品上的光束。收集光学元件收集来自样品的光并将收集的光传输到检测器。在照明光学元件中不包括收集光学元件。形成孔径的装置将从样品的光的检测限制到与样品内的有限垂直深度相关联的光，并且是收集光学元件之一。

6. 发明授权

US07576862B2 Measuring time dependent fluorescence 有权
标题翻译：测量时间依赖荧光
公开(公告)号：US07576862B2
公开(公告)日：2009-08-18
申请号：US10928484
申请日：2004-08-26
申请人： Evan F. Cromwell , Johann F. Adam , Andrei Brunfeld , Paul B. Comita , Christopher J. Seipert
发明人： Evan F. Cromwell , Johann F. Adam , Andrei Brunfeld , Paul B. Comita , Christopher J. Seipert
IPC分类号： G01N21/55
CPC分类号： G01N21/6452 , G01N21/6408 , G01N21/6445 , G01N21/6458 , G01N2021/6484 , G02B21/0048 , G02B21/0068 , G02B21/0076 , G02B21/16
摘要： Methods and apparatus, including computer program products, implementing and using techniques for collecting optical data pertaining to one or more characteristics of a sample. A light beam of a first frequency is scanned onto a sample surface using one or more illumination optical elements. Light of a second frequency is collected from a scan line on the sample surface using one or more collection optical elements. None of the one or more collection optical elements are included among the one or more illumination optical elements. The collected light is transmitted to a detector.
摘要翻译：方法和装置，包括计算机程序产品，用于收集与样品的一个或多个特征有关的光学数据的实施和使用技术。使用一个或多个照明光学元件将第一频率的光束扫描到样品表面上。使用一个或多个收集光学元件从样品表面上的扫描线收集第二频率的光。在一个或多个照明光学元件中不包括一个或多个收集光学元件。所收集的光被传送到检测器。

7. 发明授权

US07812956B2 Time dependent fluorescence measurements 有权
标题翻译：时间依赖荧光测量
公开(公告)号：US07812956B2
公开(公告)日：2010-10-12
申请号：US12072047
申请日：2008-02-22
申请人： Evan F. Cromwell , Johann F. Adam , Andrei Brunfeld , Paul B. Comita , Christopher J. Seipert
发明人： Evan F. Cromwell , Johann F. Adam , Andrei Brunfeld , Paul B. Comita , Christopher J. Seipert
IPC分类号： G01N21/55 , G01N21/25 , G01N21/00 , G01N21/64 , G01J3/30 , G01J1/58 , G01J1/10 , F21V9/16 , G21H3/02 , H01J65/06 , H01J65/08
CPC分类号： G01N21/6452 , G01N21/6408 , G01N21/6445 , G01N21/6458 , G01N2021/6484 , G02B21/0048 , G02B21/0068 , G02B21/0076 , G02B21/16
摘要： Methods and apparatus, including computer program products, implementing and using techniques for collecting optical data pertaining to one or more characteristics of a sample. The apparatus has a light source, one or more illumination optical elements, a scanner, one or more collection optical elements, and a device forming an aperture that limits detection of light from the sample. The illumination optical elements direct a light beam from the light source onto the sample. The scanner scans the light beam across the sample. The collection optical elements collect light from the sample and transmit the collected light to a detector. None of the collection optical elements are included among the illumination optical elements. The device forming an aperture limits detection of light from the sample to light associated with a limited vertical depth within the sample, and is one of the collection optical elements.
摘要翻译：方法和装置，包括计算机程序产品，用于收集与样品的一个或多个特征有关的光学数据的实施和使用技术。该装置具有光源，一个或多个照明光学元件，扫描器，一个或多个收集光学元件，以及形成限制来自样品的光的检测的孔径的装置。照明光学元件将来自光源的光束引导到样品上。扫描仪扫描样品上的光束。收集光学元件收集来自样品的光并将收集的光传输到检测器。在照明光学元件中不包括收集光学元件。形成孔径的装置将从样品的光的检测限制到与样品内的有限垂直深度相关联的光，并且是收集光学元件之一。

8. 发明授权

US07540920B2 Silicon-containing layer deposition with silicon compounds 有权
标题翻译：含硅层沉积与硅化合物
公开(公告)号：US07540920B2
公开(公告)日：2009-06-02
申请号：US10688797
申请日：2003-10-17
申请人： Kaushal K. Singh , Paul B. Comita , Lance A. Scudder , David K. Carlson
发明人： Kaushal K. Singh , Paul B. Comita , Lance A. Scudder , David K. Carlson
IPC分类号： C30B21/02
CPC分类号： C07F7/0896 , C01B33/04 , C01B33/107 , C07F7/12 , C23C16/24 , C23C16/30
摘要： Embodiments of the invention generally provide a composition of silicon compounds and methods for using the silicon compounds to deposit a silicon-containing film. The processes employ introducing the silicon compound to a substrate surface and depositing a portion of the silicon compound, the silicon motif, as the silicon-containing film. The ligands are another portion of the silicon compound and are liberated as an in-situ etchant. The in-situ etchants supports the growth of selective silicon epitaxy. Silicon compounds include SiRX6, Si2RX6, Si2RX8, wherein X is independently hydrogen or halogen and R is carbon, silicon or germanium. Silicon compound also include compounds comprising three silicon atoms, fourth atom of carbon, silicon or germanium and atoms of hydrogen or halogen with at least one halogen, as well as, comprising four silicon atoms, fifth atom of carbon, silicon or germanium and atoms of hydrogen or halogen with at least one halogen.
摘要翻译：本发明的实施方案通常提供硅化合物的组合物和使用硅化合物沉积含硅膜的方法。该方法采用将硅化合物引入衬底表面，并将一部分硅化合物硅基体作为含硅膜沉积。配体是硅化合物的另一部分，并且被释放为原位蚀刻剂。原位蚀刻剂支持选择性硅外延的生长。硅化合物包括SiRX6，Si2RX6，Si2RX8，其中X独立地是氢或卤素，R是碳，硅或锗。硅化合物还包括包含三个硅原子，第四碳原子，硅或锗的氢原子或卤原子与至少一个卤素的化合物，以及包含四个硅原子，第五个碳原子，硅或锗的化合物和氢或卤素与至少一个卤素。

9. 发明授权

US06685779B2 Method and a system for sealing an epitaxial silicon layer on a substrate 有权
标题翻译：用于密封衬底上的外延硅层的方法和系统
公开(公告)号：US06685779B2
公开(公告)日：2004-02-03
申请号：US10076250
申请日：2002-02-11
申请人： David K Carlson , Paul B. Comita , Norma B. Riley , Dale R. Du Bois
发明人： David K Carlson , Paul B. Comita , Norma B. Riley , Dale R. Du Bois
IPC分类号： C23C1600
CPC分类号： H01L21/67167 , C01B13/10 , C30B29/06 , C30B33/005 , H01L21/67017 , H01L21/67201 , H01L21/67745 , Y10S414/139
摘要： According to one aspect of the invention, a method of processing a wafer is provided. The wafer is located in a wafer processing chamber of a system for processing a wafer. A silicon layer is then formed on the wafer while the wafer is located in the wafer processing chamber. The wafer is then transferred from the wafer processing chamber to a loadlock chamber of the system. Communication between the processing chamber and the loadlock chamber is closed off. The wafer is then exposed to ozone gas while located in the loadlock chamber, whereafter the wafer is removed from the loadlock chamber out of the system.
摘要翻译：根据本发明的一个方面，提供了一种处理晶片的方法。晶片位于用于处理晶片的系统的晶片处理室中。然后在晶片上形成硅层，同时晶片位于晶片处理室中。然后将晶片从晶片处理室转移到系统的负载锁定室。处理室和负载锁定室之间的通信被关闭。然后将晶片暴露于臭氧气体，同时位于负载锁定室中，此后将晶片从负载锁定室移出系统外。

10. 发明授权

US06876442B2 Method of calibrating and using a semiconductor processing system 失效
标题翻译：校准和使用半导体处理系统的方法
公开(公告)号：US06876442B2
公开(公告)日：2005-04-05
申请号：US10078071
申请日：2002-02-13
申请人： Jean R. Vatus , David K. Carlson , Arkadii V. Samoilov , Lance A. Scudder , Paul B. Comita , Annie A. Karpati
发明人： Jean R. Vatus , David K. Carlson , Arkadii V. Samoilov , Lance A. Scudder , Paul B. Comita , Annie A. Karpati
IPC分类号： C23C16/52 , H01L21/205 , H01L21/66 , G01J5/48 , G01R31/26
CPC分类号： H01L22/20
摘要： A method is provided wherein a temperature reading error of a pyrometer is avoided. An upper pyrometer is used to detect infrared radiation from a test layer formed on a test substrate under standard processing conditions. The infrared radiation from the test layer has a period having a length which is indicative of growth rate of the layer. The period is generally inversely proportional to the growth rate. The growth rate is directly related to the temperature.
摘要翻译：提供了避免高温计的温度读数误差的方法。在标准处理条件下，使用上高温计来检测在测试基板上形成的测试层的红外辐射。来自测试层的红外辐射具有指示层的生长速率的长度的周期。这个时期通常与增长率成反比。生长速度与温度直接相关。

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