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    • 1. 发明授权
    • Multi-wavelength surface emitting laser and method for manufacturing the same
    • 多波长表面发射激光器及其制造方法
    • US06778578B2
    • 2004-08-17
    • US09835319
    • 2001-04-17
    • Eun-kyung LeeMin-hyung Chung
    • Eun-kyung LeeMin-hyung Chung
    • H01S310
    • H01S5/423H01S5/18308H01S5/18344H01S5/18361H01S5/2063H01S5/4087
    • A multi-wavelength surface emitting laser for emitting light having different wavelengths includes a lower reflector, an active layer and an upper reflector which are integrally formed above one substrate. The multi-wavelength surface emitting laser is manufactured by forming a first surface emitting laser, partially removing a first upper reflector, a first active layer, and a first lower reflection layer by etching. A protection film is formed on the outer surface of the first surface emitting laser. A second surface emitting laser is formed by removing a second lower reflector, a second active layer, and a second upper reflection layer formed on the protection film by etching. The protection film is removed and first and second upper electrodes are formed on upper surfaces of the first and second upper reflection layers, respectively, and a lower electrode is formed on a bottom surface of the substrate.
    • 用于发射具有不同波长的光的多波长表面发射激光器包括在一个基板上一体形成的下反射器,有源层和上反射器。 通过形成第一表面发射激光器,通过蚀刻部分地去除第一上反射器,第一有源层和第一下反射层来制造多波长表面发射激光器。 在第一表面发射激光器的外表面上形成保护膜。 通过蚀刻除去形成在保护膜上的第二下反射器,第二有源层和第二上反射层,形成第二表面发射激光器。 去除保护膜,分别在第一和第二上反射层的上表面上形成第一和第二上电极,并且在基板的底表面上形成下电极。
    • 2. 发明授权
    • Multi-wavelength surface emitting laser and method for manufacturing the same
    • 多波长表面发射激光器及其制造方法
    • US07387906B2
    • 2008-06-17
    • US10890289
    • 2004-07-14
    • Eun-kyung LeeMin-hyung Chung
    • Eun-kyung LeeMin-hyung Chung
    • H01L21/00
    • H01S5/423H01S5/18308H01S5/18344H01S5/18361H01S5/2063H01S5/4087
    • A multi-wavelength surface emitting laser for emitting light having different wavelengths includes a lower reflector, an active layer and an upper reflector which are integrally formed above one substrate. The multi-wavelength surface emitting laser is manufactured by forming a first surface emitting laser, partially removing a first upper reflector, a first active layer, and a first lower reflection layer by etching. A protection film is formed on the outer surface of the first surface emitting laser. A second surface emitting laser is formed by removing a second lower reflector, a second active layer, and a second upper reflection layer formed on the protection film by etching. The protection film is removed and first and second upper electrodes are formed on upper surfaces of the first and second upper reflection layers, respectively, and a lower electrode is formed on a bottom surface of the substrate.
    • 用于发射具有不同波长的光的多波长表面发射激光器包括在一个基板上一体形成的下反射器,有源层和上反射器。 通过形成第一表面发射激光器,通过蚀刻部分地去除第一上反射器,第一有源层和第一下反射层来制造多波长表面发射激光器。 在第一表面发射激光器的外表面上形成保护膜。 通过蚀刻除去形成在保护膜上的第二下反射器,第二有源层和第二上反射层,形成第二表面发射激光器。 去除保护膜,分别在第一和第二上反射层的上表面上形成第一和第二上电极,并且在基板的底表面上形成下电极。