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1. 发明授权

US08330485B2 Curved spring structure with downturned tip 有权
标题翻译：弯曲的弹簧结构与低头
公开(公告)号：US08330485B2
公开(公告)日：2012-12-11
申请号：US12845690
申请日：2010-07-28
申请人： Eugene M. Chow , Dirk DeBruyker
发明人： Eugene M. Chow , Dirk DeBruyker
IPC分类号： G01R31/02
CPC分类号： G01R3/00 , G01R1/06727 , G01R1/06744 , G01R1/06761
摘要： A curved spring structure includes a base (anchor) section extending parallel to a planar substrate surface, a cantilever section extending away from the substrate surface, and an optional elongated section extending from the base section along the substrate surface under the cantilevered section. The cantilever section includes a body portion integrally attached at a lower end to the anchor section and extending at an acute angle relative to the planar surface, and a curved portion integrally attached to an upper end of the body portion and including a downturned tip. A middle section of the curved portion is disposed a first distance away from the planar surface of the substrate, and the downturned tip is disposed a second distance away from the planar surface of the substrate, the first distance being greater than the second distance.
摘要翻译：弯曲的弹簧结构包括平行于平面衬底表面延伸的基部（锚）部分，远离衬底表面延伸的悬臂部分，以及从底部部分沿悬臂部分下方的衬底表面延伸的可选的细长部分。悬臂部分包括主体部分，其整体地附接到锚固部分的下端并相对于平坦表面以锐角延伸;以及弯曲部分，其整体地附接到主体部分的上端并且包括下降的尖端。弯曲部分的中间部分设置成离开基板的平面表面的第一距离，并且下端尖端设置成离开基板的平面表面第二距离，第一距离大于第二距离。

2. 发明申请

US20100285700A1 Curved Spring Structure With Downturned Tip 有权
标题翻译：弯曲的弹簧结构与低调的尖端
公开(公告)号：US20100285700A1
公开(公告)日：2010-11-11
申请号：US12845690
申请日：2010-07-28
申请人： Eugene M. Chow , Dirk DeBruyker
发明人： Eugene M. Chow , Dirk DeBruyker
IPC分类号： H01R4/48
CPC分类号： G01R3/00 , G01R1/06727 , G01R1/06744 , G01R1/06761
摘要： A curved spring structure includes a base (anchor) section extending parallel to a planar substrate surface, a cantilever section extending away from the substrate surface, and an optional elongated section extending from the base section along the substrate surface under the cantilevered section. The cantilever section includes a body portion integrally attached at a lower end to the anchor section and extending at an acute angle relative to the planar surface, and a curved portion integrally attached to an upper end of the body portion and including a downturned tip. A middle section of the curved portion is disposed a first distance away from the planar surface of the substrate, and the downturned tip is disposed a second distance away from the planar surface of the substrate, the first distance being greater than the second distance.
摘要翻译：弯曲的弹簧结构包括平行于平面衬底表面延伸的基部（锚）部分，远离衬底表面延伸的悬臂部分，以及从底部部分沿悬臂部分下方的衬底表面延伸的可选的细长部分。悬臂部分包括主体部分，其整体地附接到锚固部分的下端并相对于平坦表面以锐角延伸;以及弯曲部分，其整体地附接到主体部分的上端并且包括下降的尖端。弯曲部分的中间部分设置成离开基板的平面表面的第一距离，并且下端尖端设置成离开基板的平面表面第二距离，第一距离大于第二距离。

3. 发明授权

US07354787B2 Electrode design and positioning for controlled movement of a moveable electrode and associated support structure 有权
标题翻译：电极设计和定位，用于可移动电极和相关支撑结构的受控运动
公开(公告)号：US07354787B2
公开(公告)日：2008-04-08
申请号：US11096840
申请日：2005-03-30
申请人： John L. Dunec , Eric Peeters , Armin R. Volkel , Michel A. Rosa , Dirk DeBruyker , Thomas Hantschel
发明人： John L. Dunec , Eric Peeters , Armin R. Volkel , Michel A. Rosa , Dirk DeBruyker , Thomas Hantschel
IPC分类号： H01L21/00
CPC分类号： B81B3/0008 , B81B3/0021 , B81B2201/042 , B81B2201/045 , B81B2203/0118 , B81B2203/058 , G02B26/0841 , H02N1/002
摘要： A MEMS system including a fixed electrode and a suspended moveable electrode that is controllable over a wide range of motion. In traditional systems where an fixed electrode is positioned under the moveable electrode, the range of motion is limited because the support structure supporting the moveable electrode becomes unstable when the moveable electrode moves too close to the fixed electrode. By repositioning the fixed electrode from being directly underneath the moving electrode, a much wider range of controllable motion is achievable. Wide ranges of controllable motion are particularly important in optical switching applications.
摘要翻译：一种MEMS系统，包括可在宽范围的运动中控制的固定电极和悬挂的可移动电极。在固定电极位于可动电极下方的传统系统中，由于支撑可移动电极的支撑结构在可移动电极移动得太靠近固定电极时，运动范围受到限制。通过将固定电极重新定位在移动电极的正下方，可以实现更宽范围的可控运动。宽范围的可控运动在光交换应用中尤其重要。

4. 发明授权

US06891240B2 Electrode design and positioning for controlled movement of a moveable electrode and associated support structure 失效
标题翻译：电极设计和定位，用于可移动电极和相关支撑结构的受控运动
公开(公告)号：US06891240B2
公开(公告)日：2005-05-10
申请号：US10136683
申请日：2002-04-30
申请人： John L. Dunec , Eric Peeters , Armin R. Volkel , Michel A. Rosa , Dirk DeBruyker , Thomas Hantschel
发明人： John L. Dunec , Eric Peeters , Armin R. Volkel , Michel A. Rosa , Dirk DeBruyker , Thomas Hantschel
IPC分类号： B81B3/00 , G02B26/08 , H01L29/82
CPC分类号： B81B3/0008 , B81B3/0021 , B81B2201/042 , B81B2201/045 , B81B2203/0118 , B81B2203/058 , G02B26/0841 , H02N1/002
摘要： A MEMS system including a fixed electrode and a suspended moveable electrode that is controllable over a wide range of motion. In traditional systems where an fixed electrode is positioned under the moveable electrode, the range of motion is limited because the support structure supporting the moveable electrode becomes unstable when the moveable electrode moves too close to the fixed electrode. By repositioning the fixed electrode from being directly underneath the moving electrode, a much wider range of controllable motion is achievable. Wide ranges of controllable motion are particularly important in optical switching applications.
摘要翻译：一种MEMS系统，包括可在宽范围的运动中控制的固定电极和悬挂的可移动电极。在固定电极位于可动电极下方的传统系统中，由于支撑可移动电极的支撑结构在可移动电极移动得太靠近固定电极时，运动范围受到限制。通过将固定电极重新定位在移动电极的正下方，可以实现更宽范围的可控运动。宽范围的可控运动在光交换应用中尤其重要。

5. 发明申请

US20050167769A1 Electrode design and positioning for controlled movement of a moveable electrode and associated support structure 有权
公开(公告)号：US20050167769A1
公开(公告)日：2005-08-04
申请号：US11096840
申请日：2005-03-30
申请人： John Dunec , Eric Peeters , Armin Volkel , Michel Rosa , Dirk DeBruyker , Thomas Hantschel
发明人： John Dunec , Eric Peeters , Armin Volkel , Michel Rosa , Dirk DeBruyker , Thomas Hantschel
IPC分类号： B81B3/00 , G02B26/08 , G01P15/125
CPC分类号： B81B3/0008 , B81B3/0021 , B81B2201/042 , B81B2201/045 , B81B2203/0118 , B81B2203/058 , G02B26/0841 , H02N1/002
摘要： A MEMS system including a fixed electrode and a suspended moveable electrode that is controllable over a wide range of motion. In traditional systems where an fixed electrode is positioned under the moveable electrode, the range of motion is limited because the support structure supporting the moveable electrode becomes unstable when the moveable electrode moves too close to the fixed electrode. By repositioning the fixed electrode from being directly underneath the moving electrode, a much wider range of controllable motion is achievable. Wide ranges of controllable motion are particularly important in optical switching applications.

6. 发明授权

US07006720B2 Optical switching system 有权
公开(公告)号：US07006720B2
公开(公告)日：2006-02-28
申请号：US10136684
申请日：2002-04-30
申请人： John L. Dunec , Eric Peeters , Armin R. Volkel , Michel A. Rosa , Dirk DeBruyker , Thomas Hantschel
发明人： John L. Dunec , Eric Peeters , Armin R. Volkel , Michel A. Rosa , Dirk DeBruyker , Thomas Hantschel
IPC分类号： G02B6/26 , G02B6/42
CPC分类号： G02B6/352 , G02B6/3556 , G02B6/357 , G02B6/3584
摘要： A MEMS system including a fixed electrode and a suspended moveable electrode that is controllable over a wide range of motion. In traditional systems where an fixed electrode is positioned under the moveable electrode, the range of motion is limited because the support structure supporting the moveable electrode becomes unstable when the moveable electrode moves too close to the fixed electrode. By repositioning the fixed electrode from being directly underneath the moving electrode, a much wider range of controllable motion is achievable. Wide ranges of controllable motion are particularly important in optical switching applications.

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