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1. 发明授权

US06510688B2 Safety device for a moving system 失效
标题翻译：移动系统的安全装置
公开(公告)号：US06510688B2
公开(公告)日：2003-01-28
申请号：US09158560
申请日：1998-09-22
申请人： Erich Adler , Andreas Berger , Marlies Mages
发明人： Erich Adler , Andreas Berger , Marlies Mages
IPC分类号： F15B1522
CPC分类号： H01L21/67775 , F16P3/12 , F16P3/14 , Y10S414/139 , Y10S414/14
摘要： A safety device for a moving system with a drive in which a pneumatically operated piston, by linear movement in a cylinder, moves a transported object past a stationary part in at least one direction has the aim of generating a switching signal at every point of a through-opening when an obstacle is located between the moving object and the edge of the through-opening, regardless of the movement direction of the object and the geometrical construction of the through-opening. The cylinder has, at its ends, devices for measuring the pressure of the air flowing out of the cylinder in the movement direction of the piston, wherein a drop in the otherwise substantially constant pressure below a threshold value serves as a switching signal at least for switching off the system. The device is useful for safety purposes during the transport of objects, particularly when the objects form shearing edges with neighboring objects.
摘要翻译：一种用于具有驱动器的移动系统的安全装置，其中通过气缸中的线性运动的气动活塞使运送的物体沿至少一个方向移动经过固定部分，目的是在每个点处产生切换信号当障碍物位于移动物体和通孔的边缘之间时，不管物体的移动方向如何，以及通孔的几何结构都是贯通的。气缸在其端部具有用于测量在活塞的移动方向上流出气缸的空气的压力的装置，其中低于阈值的基本恒定压力的下降至少为关闭系统。该装置在运输物体时特别适用于在相邻物体形成剪切边缘时用于安全目的。

2. 发明授权

US5601484A Device for transporting wafer magazines 失效
标题翻译：晶片传送装置
公开(公告)号：US5601484A
公开(公告)日：1997-02-11
申请号：US406976
申请日：1995-04-03
申请人： Erich Adler , Marlies Mages
发明人： Erich Adler , Marlies Mages
IPC分类号： B65G49/07 , H01L21/677 , F24F3/16
CPC分类号： H01L21/67772 , Y10S414/14
摘要： In order to transfer a magazine from a depositing position to a processing station, a linear drive for a rigid gripper arm is attached to a supporting column, an air passage opening being formed by the space between the supporting column and an elevator drive, this linear drive being vertically adjustable in the movement direction of the elevator. The range of action of the gripper arm is located above the magazine in the depositing position and is directed vertically to the movement direction of the elevator. All drive parts are separated from the clean room by a dust-tight enclosure and suction devices are arranged adjacent to openings through which the transport elements project into the clean room.
摘要翻译： PCT No.pct / ep94 / 02447 Sec。 371日期：1995年4月3日 102（e）日期1995年4月3日PCT 1994年7月25日PCT公布。 WO95 / 05003 PCT出版物日期1995年2月16日为了将仓库从存放位置传送到处理站，用于刚性夹臂的线性驱动装置附接到支撑柱，空气通道开口由支撑柱和支撑柱之间的空间形成电梯驱动器，该线性驱动器可在电梯的移动方向上垂直调节。夹持臂的作用范围位于存放位置上的盒体上方并且垂直于电梯的移动方向。所有驱动部件通过防尘外壳与洁净室隔开，吸入装置邻近开口设置，运输元件通过该开口投射到洁净室中。

3. 发明授权

US06641348B1 Docking station for substrate transport containers 有权
标题翻译：底物运输容器对接站
公开(公告)号：US06641348B1
公开(公告)日：2003-11-04
申请号：US09184561
申请日：1998-11-02
申请人： Klaus Schultz , Alfred Schulz , Marlies Mages
发明人： Klaus Schultz , Alfred Schulz , Marlies Mages
IPC分类号： B65G4907
CPC分类号： H01L21/67775 , Y10S414/135
摘要： A device for coupling containers at a loading and unloading port with a horizontally displaceable platform for receiving the container has the object of increasing protection against faulty operation and faulty loading in a simple manner while guaranteeing technical cleanroom requirements and without limiting the clear space of the platform. An arrangement for detecting the presence of a container and for distinguishing between containers with different contents is provided for an expectancy area above the platform. The device is used for the loading and unloading at machining or processing stations of objects that are to be transported in a container, especially objects in the fabrication process for integrated circuits.
摘要翻译：一种用于在装载和卸载端口处连接容器的装置具有用于容纳容器的水平位移平台，其目的是以简单的方式增加对故障操作和故障加载的保护，同时保证技术洁净室的要求，而不限制平台的清晰空间。为平台上方的预期区域提供用于检测容器的存在和用于区分具有不同内容物的容器的装置。该设备用于在要在集装箱中运输的物体的加工或加工站的加载和卸载，特别是用于集成电路的制造过程中的物体。

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