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1. 发明授权

US07312422B2 Semiconductor batch heating assembly 失效
标题翻译：半导体批量加热组件
公开(公告)号：US07312422B2
公开(公告)日：2007-12-25
申请号：US11548598
申请日：2006-10-11
申请人： Eric Wintenberger , Douglas Alan Longworth , Wei Fan , John Thomas Mariner
发明人： Eric Wintenberger , Douglas Alan Longworth , Wei Fan , John Thomas Mariner
IPC分类号： F27B5/14 , C23C16/00
CPC分类号： H01L21/324 , H01L21/67115
摘要： A heat treatment apparatus for use in batch heating/wafer processing is provided, which comprises a process chamber for receiving a wafer boat, at least a heating element comprising a substrate body configured to form an electrical heating circuit for at least one heating zone and encapsulated in a continuous overcoat layer, a heat reflector comprising a heat reflective surface disposed on the heating element, and the heating element has a ramp rate of at least 1° C. per second for heating the wafers in the wafer boat.
摘要翻译：提供了一种用于批量加热/晶片处理的热处理设备，其包括用于接收晶片舟皿的处理室，至少一个加热元件，其包括基板主体，该基板主体被配置为形成用于至少一个加热区域的电加热回路，在连续外涂层中，包括设置在加热元件上的热反射表面的热反射器，并且加热元件具有至少1℃/秒的斜率以加热晶片舟中的晶片。

2. 发明申请

US20070215596A1 Semiconductor Batch Heating Assembly 失效
标题翻译：半导体批量加热组件
公开(公告)号：US20070215596A1
公开(公告)日：2007-09-20
申请号：US11548598
申请日：2006-10-11
申请人： Eric Wintenberger , Douglas Alan Longworth , Wei Fan , John Thomas Mariner
发明人： Eric Wintenberger , Douglas Alan Longworth , Wei Fan , John Thomas Mariner
IPC分类号： A21B1/00
CPC分类号： H01L21/324 , H01L21/67115
摘要： A heat treatment apparatus for use in batch heating/wafer processing is provided, which comprises a process chamber for receiving a wafer boat, at least a heating element comprising a substrate body configured to form an electrical heating circuit for at least one heating zone and encapsulated in a continuous overcoat layer, a heat reflector comprising a heat reflective surface disposed on the heating element, and the heating element has a ramp rate of at least 1° C. per second for heating the wafers in the wafer boat.
摘要翻译：提供了一种用于批量加热/晶片处理的热处理设备，其包括用于接收晶片舟皿的处理室，至少一个加热元件，其包括基板主体，该基板主体被配置为形成用于至少一个加热区域的电加热回路，在连续外涂层中，包括设置在加热元件上的热反射表面的热反射器，并且加热元件具有至少1℃/秒的斜率以加热晶片舟中的晶片。

3. 发明授权

US07364624B2 Wafer handling apparatus and method of manufacturing thereof 失效
标题翻译：晶片处理装置及其制造方法
公开(公告)号：US07364624B2
公开(公告)日：2008-04-29
申请号：US10759582
申请日：2004-01-16
申请人： John Thomas Mariner , Timothy J. Hejl , Douglas Alan Longworth , Jeffrey Lennartz , Ajit Sane , Andrew John Macey , Jon Leist , Thomas E. Devan
发明人： John Thomas Mariner , Timothy J. Hejl , Douglas Alan Longworth , Jeffrey Lennartz , Ajit Sane , Andrew John Macey , Jon Leist , Thomas E. Devan
IPC分类号： C23C16/00 , C23F1/00 , H01L21/306
CPC分类号： H01L21/67109 , C23C16/4581 , H01L21/67103 , H01L21/6833 , H01L21/68757 , H05B3/143
摘要： A wafer processing device or apparatus, i.e., a heater or an electrostatic chuck, comprises a planar support platen, a support shaft having centrally located bore, and a pair of electrical conductors located in the shaft. In one embodiment, the electrical conductors are concentrically located within the bore of the shaft, with the first electrical lead being in the form of a pyrolytic graphite rod and separated from the outer second graphite electrical lead by means of a pyrolytic boron nitride (pBN) coating. In a second embodiment, the support platen and the support shaft are formed from a single unitary body of graphite. In yet another embodiment of the device of the invention, the connection posts comprise a carbon fiber composite and the exposed ends of the electrical connectors are coated with a protective ceramic paste for extended life in operations.
摘要翻译：晶片处理装置或装置，即加热器或静电卡盘，包括平面支撑压板，具有居中定位的孔的支撑轴和位于轴中的一对电导体。在一个实施例中，电导体同心地位于轴的孔内，其中第一电引线为热解石墨棒的形式，并通过热解氮化硼（pBN）与外部第二石墨电引线分离，涂层。在第二实施例中，支撑台板和支撑轴由单一的石墨单体形成。在本发明的装置的另一个实施例中，连接柱包括碳纤维复合材料，并且电连接器的暴露端涂覆有保护性陶瓷膏，以在使用中延长寿命。

4. 发明授权

US06404982B1 High density flash evaporator 失效
标题翻译：高密度闪蒸器
公开(公告)号：US06404982B1
公开(公告)日：2002-06-11
申请号：US08771373
申请日：1996-12-16
申请人： John Thomas Mariner , Douglas Alan Longworth
发明人： John Thomas Mariner , Douglas Alan Longworth
IPC分类号： C23C1000
CPC分类号： C23C14/024 , C23C14/243 , C23C16/342
摘要： A flash evaporator vaporization vessel for flash evaporating metal under conditions of repeated thermal cycling having a graphite body and an outer layer of pyrolytic boron nitride having a density above 2.15 gm/cc and preferably between 2.19 gm/cc and 2.2 gm/cc.
摘要翻译：一种闪蒸蒸发器蒸发容器，用于在具有石墨体和热解氮化硼的外层的重复热循环的条件下闪蒸金属，其密度高于2.15gm / cc，优选在2.19gm / cc至2.2gm / cc之间。

5. 发明申请

US20080173638A1 ENCAPSULATED GRAPHITE HEATER AND PROCESS 有权
标题翻译：加密石墨加热器和工艺
公开(公告)号：US20080173638A1
公开(公告)日：2008-07-24
申请号：US11625329
申请日：2007-01-21
申请人： John Thomas Mariner
发明人： John Thomas Mariner
IPC分类号： H05B3/10
CPC分类号： H05B3/145 , H01L21/67103 , H05B3/24 , Y10T29/49083
摘要： A graphite heater and method of forming a graphite heater comprising a graphite body configured to form an electrical heating circuit for at least one heating zone through the graphite encapsulated in a continuous overcoat layer comprising at least one of a nitride, carbide, carbonitride or oxynitride of elements selected from a group consisting of B, Al, Si, Ga, refractory hard metals, transition metals, and rare earth metals, or complexes and/or combinations thereof, wherein prior to being configured to form the electrical heating circuit path, the graphite body is coated with a layer comprising at least one of a nitride, carbide, carbonitride or oxynitride of elements selected from a group consisting of B, Al, Si, Ga, refractory hard metals, transition metals, and rare earth metals, or complexes and/or combinations thereof.
摘要翻译：一种石墨加热器和形成石墨加热器的方法，所述石墨加热器包括石墨体，所述石墨加热器被构造成通过所述石墨形成用于至少一个加热区的电加热回路，所述石墨包封在包含氮化物，碳化物，碳氮化物或氮氧化物中的至少一种的连续外涂层中选自B，Al，Si，Ga，难熔硬金属，过渡金属和稀土金属的元素，或其复合物和/或其组合，其中在构造成形成电加热电路路径之前，石墨主体涂覆有包含选自B，Al，Si，Ga，难熔硬金属，过渡金属和稀土金属或复合物的元素的氮化物，碳化物，碳氮化物或氮氧化物中的至少一种的层，以及 /或其组合。

6. 发明授权

US07220485B2 Bulk high thermal conductivity feedstock and method of making thereof 有权
标题翻译：散装高导热性原料及其制备方法
公开(公告)号：US07220485B2
公开(公告)日：2007-05-22
申请号：US10761567
申请日：2004-01-21
申请人： Haluk Sayir , John Thomas Mariner
发明人： Haluk Sayir , John Thomas Mariner
IPC分类号： B32B9/00
CPC分类号： F28F21/02 , B32B18/00 , B32B2315/02 , C04B35/522 , C04B35/645 , C04B2235/6567 , C04B2235/9607 , C04B2237/363 , C04B2237/66 , C04B2237/704 , H01L23/373 , H01L2924/0002 , Y10T428/30 , Y10T428/31721 , H01L2924/00
摘要： The invention relates to a feedstock material for use in making heat spreaders, comprising a sheet of annealed pyrolytic graphite having a thermal conductivity of greater than 1000 watts/m-K, a size in any dimension of at least 5 cm and a thickness of at least 0.2 mm. In one embodiment, the feedstock is made by hot-pressing a stack of alternate layers of pyrolytic graphite sheets with flat graphite dies for a finished sheet of annealed pyrolytic graphite comprising a plurality of layers being parallel to each other of at least 0.075 degrees per mm of thickness. In another embodiment, the finished sheet of annealed pyrolytic graphite is made by graphitizing a stack of films comprising a high-carbon polymer.
摘要翻译：本发明涉及用于制造散热器的原料材料，其包括热导率大于1000瓦/ mK的退火热解石墨板，任何尺寸至少为5cm的尺寸和至少0.2的厚度 mm。在一个实施方案中，原料通过用平板状石墨模具热交换层叠的热解石墨片制成，所述平板状石墨模具用于退火的热解石墨的成品片材，其包括彼此平行的至少0.075度/ mm 的厚度。在另一个实施方案中，经退火的热解石墨的成品片通过将包含高碳聚合物的薄膜叠层石墨化而制成。

7. 发明授权

US5863467A High thermal conductivity composite and method 失效
标题翻译：高导热率复合材料和方法
公开(公告)号：US5863467A
公开(公告)日：1999-01-26
申请号：US642469
申请日：1996-05-03
申请人： John Thomas Mariner , Haluk Sayir
发明人： John Thomas Mariner , Haluk Sayir
IPC分类号： C04B35/80 , C01B31/04 , C08K3/04 , C08K7/00 , C08K7/18 , C08L101/00 , C09C1/48 , H01B1/24
CPC分类号： C08K7/00 , C08K7/18 , H01B1/24 , C08K2201/016
摘要： This invention is directed to a composite composition of particles of highly oriented graphite in the form of flakes having a hexagonal crystal orientation and an aspect ratio of at least 5 to 1 and a polymeric binder which when polymerized under compression forms a solid having a high thermal conductivity and low density and to a method of forming a machinable composite of high thermal conductivity comprising the steps of combining particles of highly oriented graphite flakes having an hexagonal crystal orientation and an aspect ratio of at least 5 to 1 with a polymeric binder to form a composition having at least a 40% graphite particle volume fraction, compressing the composition under a pressure sufficient to substantially align the particles parallel to one another and to the surface of the composition normal to the direction of the applied pressure until said binder polymerizes into a solid thereby forming an electrically conductive solid having a high thermal conductivity.
摘要翻译：本发明涉及具有六方晶结晶取向和长宽比至少为5:1的薄片形式的高定向石墨颗粒和聚合物粘合剂的复合组合物，当在压缩下聚合形成具有高热稳定性的固体时导电性和低密度，以及形成具有高导热性的可加工复合材料的方法，包括以下步骤：将具有六方晶结晶取向的高度取向的石墨片和至少5:1的纵横比的颗粒与聚合物粘合剂结合，形成组合物具有至少40％的石墨颗粒体积分数，在足以使颗粒彼此平行的基本上对齐的压力下和在施加压力方向上垂直于组合物的表面直至所述粘合剂聚合成固体的压力下压缩组合物从而形成具有高导热性的导电固体。

8. 发明授权

US07741584B2 Encapsulated graphite heater and process 有权
标题翻译：密封石墨加热器和工艺
公开(公告)号：US07741584B2
公开(公告)日：2010-06-22
申请号：US11625329
申请日：2007-01-21
申请人： John Thomas Mariner
发明人： John Thomas Mariner
IPC分类号： H05B3/68 , C23C14/00
CPC分类号： H05B3/145 , H01L21/67103 , H05B3/24 , Y10T29/49083
摘要： A graphite heater and method of forming a graphite heater comprising a graphite body configured to form an electrical heating circuit for at least one heating zone through the graphite encapsulated in a continuous overcoat layer comprising at least one of a nitride, carbide, carbonitride or oxynitride of elements selected from a group consisting of B, Al, Si, Ga, refractory hard metals, transition metals, and rare earth metals, or complexes and/or combinations thereof, wherein prior to being configured to form the electrical heating circuit path, the graphite body is coated with a layer comprising at least one of a nitride, carbide, carbonitride or oxynitride of elements selected from a group consisting of B, Al, Si, Ga, refractory hard metals, transition metals, and rare earth metals, or complexes and/or combinations thereof.
摘要翻译：一种石墨加热器和形成石墨加热器的方法，所述石墨加热器包括石墨体，所述石墨加热器被构造成通过所述石墨形成用于至少一个加热区的电加热回路，所述石墨包封在包含氮化物，碳化物，碳氮化物或氮氧化物中的至少一种的连续外涂层中选自B，Al，Si，Ga，难熔硬金属，过渡金属和稀土金属的元素，或其复合物和/或其组合，其中在构造成形成电加热电路路径之前，石墨主体涂覆有包含选自B，Al，Si，Ga，难熔硬金属，过渡金属和稀土金属或复合物的元素的氮化物，碳化物，碳氮化物或氮氧化物中的至少一种的层，以及 /或其组合。

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