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1. 发明授权

US08724095B2 Optical assembly for laser radar 有权
标题翻译：激光雷达光学组件
公开(公告)号：US08724095B2
公开(公告)日：2014-05-13
申请号：US13281397
申请日：2011-10-25
申请人： Eric Peter Goodwin , Daniel Gene Smith , Brian L. Stamper , Alexander Cooper , Alec Robertson
发明人： Eric Peter Goodwin , Daniel Gene Smith , Brian L. Stamper , Alexander Cooper , Alec Robertson
IPC分类号： G01C3/08
CPC分类号： G02B26/105 , G01S7/4812 , G01S17/95 , G02B26/0816
摘要： A compact optical assembly for a laser radar system is provided, that is configured to move as a unit with a laser radar system as the laser radar system is pointed at a target and eliminates the need for a large scanning (pointing) mirror that is moveable relative to other parts of the laser radar. The optical assembly comprises a light source, a lens, a scanning reflector and a fixed reflector that are oriented relative to each other such that: (i) a beam from the light source is reflected by the scanning reflector to the fixed reflector; (ii) reflected light from the fixed reflector is reflected again by the scanning reflector and directed along a line of sight through the lens; and (iii) the scanning reflector is moveable relative to the source, the lens and the fixed reflector, to adjust the focus of the beam along the line of sight.
摘要翻译：提供了一种用于激光雷达系统的紧凑型光学组件，其被配置为随着激光雷达系统指向目标而与激光雷达系统一起移动，并且消除了对可移动的大扫描（指向）镜的需要相对于激光雷达的其他部分。光学组件包括相对于彼此定向的光源，透镜，扫描反射器和固定反射器，使得：（i）来自光源的光束被扫描反射器反射到固定反射器; （ii）来自固定反射器的反射光再次被扫描反射器反射并沿着视线穿过透镜; 和（iii）扫描反射器相对于光源，透镜和固定反射器可移动，以便沿着视线调节光束的焦点。

2. 发明申请

US20120224172A1 Optical components for use in measuring projection lens distortion or focus of an optical imaging system that images a substrate 审中-公开
标题翻译：用于测量对成像基片的光学成像系统的投影透镜变形或焦点的光学部件
公开(公告)号：US20120224172A1
公开(公告)日：2012-09-06
申请号：US13315592
申请日：2011-12-09
申请人： Eric Peter Goodwin , Daniel Gene Smith , David Michael Williamson , Takamitsu Sugawara , Yasuhiro Kitamura
发明人： Eric Peter Goodwin , Daniel Gene Smith , David Michael Williamson , Takamitsu Sugawara , Yasuhiro Kitamura
IPC分类号： G01N21/17
CPC分类号： G01M11/0264 , G03F7/70591 , G03F7/706 , G03F7/7085
摘要： New and useful optical components are provided, for use in measuring projection lens characteristics of an optical imaging system that images a substrate. The optical components comprise an array of full NA imagers located at the substrate plane, and a relay system for imaging the imagers to a detector that is remote from the substrate.
摘要翻译：提供了新的和有用的光学部件，用于测量对基板成像的光学成像系统的投影透镜特性。光学部件包括位于基板平面处的全NA成像器的阵列，以及用于将成像器成像到远离基板的检测器的中继系统。

3. 发明申请

US20110071784A1 Goos-Hanchen compensation in autofocus systems 审中-公开
标题翻译： Goos-Hanchen补偿自动对焦系统
公开(公告)号：US20110071784A1
公开(公告)日：2011-03-24
申请号：US12884890
申请日：2010-09-17
申请人： Daniel Gene Smith , Eric Peter Goodwin
发明人： Daniel Gene Smith , Eric Peter Goodwin
IPC分类号： G06F19/00 , G01B11/14 , G01J4/00 , G06F17/18
CPC分类号： G01B11/14 , G01B11/02 , G01B11/0608 , G01J3/0237 , G01J3/0297 , G01N21/25 , G02B7/28 , G02B7/36
摘要： A new and useful method is provided for Goos-Hanchen compensation in an optical autofocus (AF) system that uses light reflected from a substrate to determine changes in the z position of a substrate. According to the method of the invention reflected light from the substrate is provided at a plurality of wavelengths and polarizations, detected and used to make corrections that compensate for the errors due to the Goos-Hanchen effect.
摘要翻译：在使用从基板反射的光来确定基板的z位置的变化的光学自动对焦（AF）系统中，为Goos-Hanchen补偿提供了一种新的有用的方法。根据本发明的方法，来自基板的反射光以多个波长和极化被提供，被检测并用于进行修正，以补偿由于Goos-Hanchen效应引起的误差。

4. 发明授权

US09625368B2 Apparatus, optical assembly, method for inspection or measurement of an object and method for manufacturing a structure 有权
公开(公告)号：US09625368B2
公开(公告)日：2017-04-18
申请号：US13281393
申请日：2011-10-25
申请人： Eric Peter Goodwin , David Michael Williamson , Daniel Gene Smith , Michel Pharand , Alexander Cooper , Alec Robertson , Brian L. Stamper
发明人： Eric Peter Goodwin , David Michael Williamson , Daniel Gene Smith , Michel Pharand , Alexander Cooper , Alec Robertson , Brian L. Stamper
IPC分类号： G01C3/08 , G01N21/01 , G01B11/02 , G01S7/481 , G01N21/17
CPC分类号： G01N21/01 , G01B11/026 , G01N2021/1793 , G01S7/4814 , G01S7/4817 , G01S7/4818
摘要： An optical assembly for a system for inspecting or measuring of an object is provided that is configured to move as a unit with a system, as the system is pointed at a target, and eliminates the need for a large scanning (pointing) mirror that is moveable relative to other parts of the system. The optical assembly comprises catadioptric optics configured to fold the optical path of the pointing beam and measurement beam that are being directed through the outlet of the system, to compress the size of the optical assembly.

5. 发明授权

US09074911B2 Measurement system and method utilizing high contrast encoder head for measuring relative movement between objects 有权
标题翻译：使用高对比度编码器头测量物体之间的相对运动的测量系统和方法
公开(公告)号：US09074911B2
公开(公告)日：2015-07-07
申请号：US13593839
申请日：2012-08-24
申请人： Eric Peter Goodwin , Daniel Gene Smith
发明人： Eric Peter Goodwin , Daniel Gene Smith
IPC分类号： G01D5/34 , G01D5/347 , G01D5/38
CPC分类号： G01D5/34723 , G01D5/38
摘要： A measurement system (22) for measuring the position of a work piece (28) includes a measurement grating (34) and an encoder head (36). The encoder head (36) directs a measurement beam (252) at the measurement grating (34), the measurement beam (252) having an oval shaped cross-section. The encoder head (36) includes a beam shape adjuster (256) positioned in the path of an input measurement beam (240) having a substantially circular cross-sectional shape that transforms the input measurement beam (240) to provide the measurement beam (252) having the oval shaped cross-section.
摘要翻译：用于测量工件（28）的位置的测量系统（22）包括测量光栅（34）和编码器头（36）。编码器头（36）在测量光栅（34）处引导测量光束（252），测量光束（252）具有椭圆形横截面。编码器头（36）包括位于输入测量光束（240）的路径中的光束形状调节器（256），其具有基本上圆形的横截面形状，其转换输入测量光束（240）以提供测量光束（252））具有椭圆形横截面。

6. 发明授权

US08736813B2 Exposure apparatus with an illumination system generating multiple illumination beams 有权
标题翻译：具有产生多个照明光束的照明系统的曝光装置
公开(公告)号：US08736813B2
公开(公告)日：2014-05-27
申请号：US12547311
申请日：2009-08-25
申请人： Daniel Gene Smith , Eric Peter Goodwin
发明人： Daniel Gene Smith , Eric Peter Goodwin
IPC分类号： G03B27/54 , G03B27/72 , G03F7/20
CPC分类号： G03F7/70208 , G03B27/54 , G03F7/70275
摘要： An exposure apparatus (10) for transferring a mask pattern (12A) from a mask (12) to first and second substrates (14A) (14B) includes an illumination system (18) that generates and simultaneously directs a first beam (32A) at the mask pattern (12A) and a second beam (32B) at the mask pattern (12A). Further, the first beam (32A) is spaced apart from the second beam (32B) at the mask pattern (12A). As provided herein, the first beam (32A) directed at the mask (12) creates a first pattern beam (34A) that is transferred to a first substrate location (33A), and the second beam (32B) directed at the mask (12) creates a second pattern beam (34B) that is transferred to a second substrate location (33B). Moreover, the first substrate location (33A) is spaced apart from the second substrate location (33B). With this design, the first pattern beam (34A) can be transferred to the first substrate (14A) and the second pattern beam (34B) can be simultaneously transferred to the second substrate (14B). As a result thereof, the same mask (12) can be used to simultaneously transfer features to two wafers (14A) (14B) to approximately double the throughput capabilities of the exposure apparatus (10).
摘要翻译：一种用于将掩模图案（12A）从掩模（12）传送到第一和第二基板（14A）（14B）的曝光装置（10）包括照明系统（18），其产生并同时将第一光束（32A）掩模图案（12A）和在掩模图案（12A）处的第二光束（32B）。此外，第一光束（32A）在掩模图案（12A）处与第二光束（32B）间隔开。如本文所提供的，指向掩模（12）的第一光束（32A）产生转移到第一衬底位置（33A）的第一图案光束（34A），并且指向掩模（12）的第二光束（32B））产生传送到第二基板位置（33B）的第二图案光束（34B）。此外，第一衬底位置（33A）与第二衬底位置（33B）间隔开。通过这种设计，可以将第一图案光束（34A）传送到第一基板（14A），并且第二图案光束（34B）可以被同时传送到第二基板（14B）。作为其结果，可以使用相同的掩模（12）来同时将特征传递到两个晶片（14A）（14B），使曝光装置（10）的吞吐能力大致翻倍。

7. 发明授权

US09213227B2 Custom color or polarization sensitive CCD for separating multiple signals in autofocus projection system 有权
标题翻译：自定义颜色或偏光敏CCD，用于分离自动对焦投影系统中的多个信号
公开(公告)号：US09213227B2
公开(公告)日：2015-12-15
申请号：US13588919
申请日：2012-08-17
申请人： Eric Peter Goodwin , Daniel Gene Smith
发明人： Eric Peter Goodwin , Daniel Gene Smith
IPC分类号： G03B21/53 , G02B7/36 , G01B11/25 , G03F9/00 , H05K13/08 , G01J3/36 , G01J3/02
CPC分类号： G03B21/53 , G01B11/2509 , G01J3/0224 , G01J3/36 , G02B7/36 , G03F9/7026 , G03F9/7049
摘要： An autofocus (AF) system and method is provided that maps the topography of a substrate such as a semiconductor wafer, in a manner that corrects for Goos Hanchen (GH) effect. In addition, a new and useful detector is provided that is particularly useful in an AF system and method. The detector preferably has both color and polarization filtering integrally associated with the detector, so that polarization and color filtering is provided at the detector, on a pixel by pixel basis.
摘要翻译：提供了一种自动对焦（AF）系统和方法，其以校正Goos Hanchen（GH）效应的方式映射诸如半导体晶片的衬底的形貌。另外，提供了一种在AF系统和方法中特别有用的新的和有用的检测器。检测器优选地具有与检测器一体地相关联的颜色和偏振滤波，使得在检测器处以像素为单位提供偏振和滤色。

8. 发明申请

US20130099957A1 Optical Assembly for Laser Radar 有权
标题翻译：激光雷达光学组件
公开(公告)号：US20130099957A1
公开(公告)日：2013-04-25
申请号：US13281397
申请日：2011-10-25
申请人： Eric Peter Goodwin , Daniel Gene Smith , Brian L. Stamper , Alexander Cooper , Alec Robertson
发明人： Eric Peter Goodwin , Daniel Gene Smith , Brian L. Stamper , Alexander Cooper , Alec Robertson
IPC分类号： G01S13/00 , G02B26/10
CPC分类号： G02B26/105 , G01S7/4812 , G01S17/95 , G02B26/0816
摘要： A compact optical assembly for a laser radar system is provided, that is configured to move as a unit with a laser radar system as the laser radar system is pointed at a target and eliminates the need for a large scanning (pointing) mirror that is moveable relative to other parts of the laser radar. The optical assembly comprises a light source, a lens, a scanning reflector and a fixed reflector that are oriented relative to each other such that: (i) a beam from the light source is reflected by the scanning reflector to the fixed reflector; (ii) reflected light from the fixed reflector is reflected again by the scanning reflector and directed along a line of sight through the lens; and (iii) the scanning reflector is moveable relative to the source, the lens and the fixed reflector, to adjust the focus of the beam along the line of sight.
摘要翻译：提供了一种用于激光雷达系统的紧凑型光学组件，其被配置为随着激光雷达系统指向目标而与激光雷达系统一起移动，并且消除了对可移动的大扫描（指向）镜的需要相对于激光雷达的其他部分。光学组件包括相对于彼此定向的光源，透镜，扫描反射器和固定反射器，使得：（i）来自光源的光束被扫描反射器反射到固定反射器; （ii）来自固定反射器的反射光再次被扫描反射器反射并沿着视线穿过透镜; 和（iii）扫描反射器相对于光源，透镜和固定反射器可移动，以便沿着视线调节光束的焦点。

9. 发明申请

US20130048842A1 High Contrast Encoder Head 有权
标题翻译：高对比度编码器头
公开(公告)号：US20130048842A1
公开(公告)日：2013-02-28
申请号：US13593839
申请日：2012-08-24
申请人： Eric Peter Goodwin , Daniel Gene Smith
发明人： Eric Peter Goodwin , Daniel Gene Smith
IPC分类号： G01D5/347
CPC分类号： G01D5/34723 , G01D5/38
摘要： A measurement system (22) for measuring the position of a work piece (28) includes a measurement grating (34) and an encoder head (36). The encoder head (36) directs a measurement beam (252) at the measurement grating (34), the measurement beam (252) having an oval shaped cross-section. The encoder head (36) includes a beam shape adjuster (256) positioned in the path of an input measurement beam (240) having a substantially circular cross-sectional shape that transforms the input measurement beam (240) to provide the measurement beam (252) having the oval shaped cross-section.
摘要翻译：用于测量工件（28）的位置的测量系统（22）包括测量光栅（34）和编码器头（36）。编码器头（36）在测量光栅（34）处引导测量光束（252），测量光束（252）具有椭圆形横截面。编码器头（36）包括位于输入测量光束（240）的路径中的光束形状调节器（256），其具有基本上圆形的横截面形状，其转换输入测量光束（240）以提供测量光束（252））具有椭圆形横截面。

10. 发明申请

US20120186059A1 TARGET FOR LARGE SCALE METROLOGY SYSTEM 审中-公开
标题翻译：大规模计量系统的目标
公开(公告)号：US20120186059A1
公开(公告)日：2012-07-26
申请号：US13359297
申请日：2012-01-26
申请人： Eric Peter Goodwin , Daniel Gene Smith
发明人： Eric Peter Goodwin , Daniel Gene Smith
IPC分类号： B23Q17/00 , G01B11/14
CPC分类号： G01S5/16 , G01C15/02 , Y10T29/49764
摘要： A target (16) for a metrology system (10) that monitors the position of an object (12) includes a target housing (18) and a detector assembly (20). The target housing (18) is substantially spherically shaped and includes a first detector region (218F). The target housing (18) includes a housing interior (228). A light beam (22A) impinging on the target housing (18) results in light energy within the housing interior (228). The detector assembly (20) includes a first detector (220A) secured to the first detector region (218F). The first detector (220β) generates a first signal when the light beam (22A) impinges on the target housing (18) that relates to the light energy within the housing interior (228).
摘要翻译：用于监测物体（12）的位置的用于测量系统（10）的目标（16）包括目标壳体（18）和检测器组件（20）。目标外壳（18）基本上是球形的并且包括第一检测器区域（218F）。目标壳体（18）包括壳体内部（228）。入射到目标壳体（18）上的光束（22A）导致壳体内部（228）内的光能。检测器组件（20）包括固定到第一检测器区域（218F）的第一检测器（220A）。当光束（22A）撞击与壳体内部（228）内的光能相关的目标壳体（18）时，第一检测器（220＆amp; bgr））产生第一信号。

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