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1. 发明申请

US20130039734A1 ROBOT SYSTEMS, APPARATUS, AND METHODS ADAPTED TO PROCESS SUBSTRATES IN MULTIPLE TIERS 有权
标题翻译：机器人系统，装置和适用于多层次处理基板的方法
公开(公告)号：US20130039734A1
公开(公告)日：2013-02-14
申请号：US13571080
申请日：2012-08-09
申请人： Eric A. Englhardt , Richard Giljum , Jeffrey C. Hudgens , Igor G. Kogan , Michael Robert Rice , Sushant S. Koshti
发明人： Eric A. Englhardt , Richard Giljum , Jeffrey C. Hudgens , Igor G. Kogan , Michael Robert Rice , Sushant S. Koshti
IPC分类号： H01L21/677 , H05B6/00 , H05B3/68 , F27D15/02
CPC分类号： H01L21/67184 , H01L21/67109 , H01L21/67115 , H01L21/67167 , H01L21/67178 , H01L21/6719 , H01L21/67196 , H01L21/67201 , H01L21/67742 , H01L21/67745 , H01L21/68742
摘要： Substrate transport systems, apparatus, and methods are described. In one aspect, the systems are disclosed having vertically stacked transfer chamber bodies. In one embodiment, a common robot apparatus services process chambers or load lock chambers coupled to upper and lower transfer chamber bodies. In another embodiment, separate robot apparatus service the process chambers and/or load lock chambers coupled to upper and lower transfer chamber bodies, and an elevator apparatus transfers the substrates between the various elevations. Degassing apparatus are described, as are numerous other aspects.
摘要翻译：描述了基底输送系统，装置和方法。在一个方面，公开了具有垂直堆叠的传送室主体的系统。在一个实施例中，常见的机器人装置服务处理室或联接到上部和下部传送室主体的加载锁定室。在另一个实施例中，分离的机器人装置服务于联接到上传送室主体和下传送室主体的处理室和/或加载锁定室，并且电梯装置在不同高度之间传送基板。除了脱气装置之外，还描述了许多其它方面。

2. 发明授权

US09177842B2 Degassing apparatus adapted to process substrates in multiple tiers with second actuator 有权
标题翻译：脱气装置适于用第二致动器处理多层的基板
公开(公告)号：US09177842B2
公开(公告)日：2015-11-03
申请号：US13571080
申请日：2012-08-09
申请人： Eric A. Englhardt , Richard Giljum , Jeffrey C. Hudgens , Igor G. Kogan , Michael Robert Rice , Sushant S. Koshti
发明人： Eric A. Englhardt , Richard Giljum , Jeffrey C. Hudgens , Igor G. Kogan , Michael Robert Rice , Sushant S. Koshti
IPC分类号： H01L21/67 , H01L21/677 , H01L21/687
CPC分类号： H01L21/67184 , H01L21/67109 , H01L21/67115 , H01L21/67167 , H01L21/67178 , H01L21/6719 , H01L21/67196 , H01L21/67201 , H01L21/67742 , H01L21/67745 , H01L21/68742
摘要： Substrate transport systems, apparatus, and methods are described. In one aspect, the systems are disclosed having vertically stacked transfer chamber bodies. In one embodiment, a common robot apparatus services process chambers or load lock chambers coupled to upper and lower transfer chamber bodies. In another embodiment, separate robot apparatus service the process chambers and/or load lock chambers coupled to upper and lower transfer chamber bodies, and an elevator apparatus transfers the substrates between the various elevations. Degassing apparatus are described, as are numerous other aspects.
摘要翻译：描述了基底输送系统，装置和方法。在一个方面，公开了具有垂直堆叠的传送室主体的系统。在一个实施例中，常见的机器人装置服务处理室或联接到上部和下部传送室主体的加载锁定室。在另一个实施例中，分离的机器人装置服务于联接到上传送室主体和下传送室主体的处理室和/或加载锁定室，并且电梯装置在不同高度之间传送基板。除了脱气装置之外，还描述了许多其它方面。

3. 发明授权

US08379082B2 System, methods and apparatus for substrate carrier content verification using a material handling system 有权
标题翻译：使用材料处理系统进行基板载体内容验证的系统，方法和装置
公开(公告)号：US08379082B2
公开(公告)日：2013-02-19
申请号：US12398178
申请日：2009-03-04
申请人： Vinay K. Shah , Sushant S. Koshti , Eric A. Englhardt
发明人： Vinay K. Shah , Sushant S. Koshti , Eric A. Englhardt
IPC分类号： H04N7/18 , G06K9/00
CPC分类号： H01L21/67259 , H01L21/67353 , H01L21/681
摘要： Methods and systems are provided for mapping substrates in a substrate carrier. The invention includes a substrate carrier including one or more windows; and an imaging system coupled to a substrate carrier handling robot and adapted to determine or image substrate positions in the substrate carrier via the one or more windows. Numerous other aspects are provided.
摘要翻译：提供了用于在衬底载体中映射衬底的方法和系统。本发明包括一个包括一个或多个窗的衬底载体; 以及耦合到衬底载体处理机器人并且适于经由所述一个或多个窗口来确定或图像所述衬底载体中的衬底位置的成像系统。提供了许多其他方面。

4. 发明授权

US07577487B2 Methods and apparatus for a band to band transfer module 有权
标题翻译：一种带对带传输模块的方法和装置
公开(公告)号：US07577487B2
公开(公告)日：2009-08-18
申请号：US11521070
申请日：2006-09-13
申请人： Robert B. Lowrance , Eric Andrew Englhardt , Michael R. Rice , Vinay Shah , Sushant S. Koshti , Jeffrey C. Hudgens
发明人： Robert B. Lowrance , Eric Andrew Englhardt , Michael R. Rice , Vinay Shah , Sushant S. Koshti , Jeffrey C. Hudgens
IPC分类号： G06F19/00 , G06F7/00
CPC分类号： B65G47/52 , B65G29/00 , B65G47/28 , B65G2203/025 , H01L21/67706 , H01L21/67715 , Y10S414/135 , Y10S414/14
摘要： A band to band transfer module according to the present invention may be used with a substrate carrier transport system, or other systems, to transfer substrate carriers (e.g., small lot substrate carriers) from one conveyor to another conveyor or between two points on the same conveyor. The transfers (e.g., pick and place) of the substrate carriers may be made between conveyors traveling at different speeds. Numerous other aspects and features are disclosed.
摘要翻译：根据本发明的带带传输模块可以与衬底载体传输系统或其他系统一起使用，以将衬底载体（例如，小批量衬底载体）从一个传送器转移到另一个传送器或在相同的两个点之间输送带。可以在以不同速度行进的输送机之间形成基板载体的传送（例如拾取和放置）。公开了许多其他方面和特征。

5. 发明授权

US07894923B2 Methods and apparatus for sensing substrates in carriers 有权
标题翻译：检测载体底物的方法和装置
公开(公告)号：US07894923B2
公开(公告)日：2011-02-22
申请号：US11960411
申请日：2007-12-19
申请人： Sushant S. Koshti , Eric A. Englhardt , Vinay K. Shah
发明人： Sushant S. Koshti , Eric A. Englhardt , Vinay K. Shah
IPC分类号： G06F19/00 , B65D85/48
CPC分类号： H01L21/67265 , H01L21/67259
摘要： In some aspects, a method is provided for mapping contents of a substrate carrier. The method includes (1) moving a carrier to a sensor; and (2) determining, with the sensor, a presence or an absence of a substrate in the carrier based upon a position of a substrate clamp in the carrier. Numerous other aspects are provided.
摘要翻译：在一些方面，提供了一种用于映射衬底载体的内容的方法。该方法包括（1）将载体移动到传感器; 以及（2）基于所述载体中的基板夹具的位置，使用所述传感器确定所述载体中基板的存在或不存在。提供了许多其他方面。

6. 发明申请

US20080156689A1 METHODS AND APPARATUS FOR SENSING SUBSTRATES IN CARRIERS 有权
标题翻译：传感基座在载体上的方法和装置
公开(公告)号：US20080156689A1
公开(公告)日：2008-07-03
申请号：US11960411
申请日：2007-12-19
申请人： Sushant S. Koshti , Eric A. Englhardt , Vinay K. Shah
发明人： Sushant S. Koshti , Eric A. Englhardt , Vinay K. Shah
IPC分类号： H01L21/677 , B65D79/00 , B65D25/56
CPC分类号： H01L21/67265 , H01L21/67259
摘要： In some aspects, a method is provided for mapping contents of a substrate carrier. The method includes (1) moving a carrier to a sensor; and (2) determining, with the sensor, a presence or an absence of a substrate in the carrier based upon a position of a substrate clamp in the carrier. Numerous other aspects are provided.
摘要翻译：在一些方面，提供了一种用于映射衬底载体的内容的方法。该方法包括（1）将载体移动到传感器; 以及（2）基于所述载体中的基板夹具的位置，使用所述传感器确定所述载体中基板的存在或不存在。提供了许多其他方面。

7. 发明申请

US20090225160A1 SYSTEM, METHODS AND APPARATUS FOR SUBSTRATE CARRIER CONTENT VERIFICATION USING A MATERIAL HANDLING SYSTEM 有权
标题翻译：使用材料处理系统的基板载体内容验证的系统，方法和装置
公开(公告)号：US20090225160A1
公开(公告)日：2009-09-10
申请号：US12398178
申请日：2009-03-04
申请人： Vinay K. Shah , Sushant S. Koshti , Eric A. Englhardt
发明人： Vinay K. Shah , Sushant S. Koshti , Eric A. Englhardt
IPC分类号： H04N7/18 , H04N5/225
CPC分类号： H01L21/67259 , H01L21/67353 , H01L21/681
摘要： Methods and systems are provided for mapping substrates in a substrate carrier. The invention includes a substrate carrier including one or more windows; and an imaging system coupled to a substrate carrier handling robot and adapted to determine or image substrate positions in the substrate carrier via the one or more windows. Numerous other aspects are provided.
摘要翻译：提供了用于在衬底载体中映射衬底的方法和系统。本发明包括一个包括一个或多个窗的衬底载体; 以及耦合到衬底载体处理机器人并且适于经由所述一个或多个窗口来确定或图像所述衬底载体中的衬底位置的成像系统。提供了许多其他方面。

8. 发明申请

US20080294282A1 USE OF LOGICAL LOTS IN SEMICONDUCTOR SUBSTRATE PROCESSING 审中-公开
标题翻译：在半导体基板处理中使用逻辑元件
公开(公告)号：US20080294282A1
公开(公告)日：2008-11-27
申请号：US12126880
申请日：2008-05-24
申请人： Sushant S. Koshti , Vinay K. Shah , Eric A. Englhardt
发明人： Sushant S. Koshti , Vinay K. Shah , Eric A. Englhardt
IPC分类号： H01L21/67 , G06F17/00 , H01L21/677
CPC分类号： H01L21/67276 , H01L21/67271
摘要： In some embodiments, a method of processing substrates is provided that includes (1) grouping substrates in a plurality of substrate carriers as a logical lot; (2) processing the logical lot as if the substrates were stored in a single substrate carrier; and (3) performing metrology on a representative subset of substrates in the logical lot. Numerous other embodiments are provided.
摘要翻译：在一些实施例中，提供了处理衬底的方法，其包括（1）将多个衬底载体中的衬底分组为逻辑批次; （2）处理逻辑批次，好像基板存储在单个基板载体中; 和（3）在逻辑批次中的代表性基底子集上进行计量。提供了许多其他实施例。

9. 发明申请

US20090202336A1 METHODS AND APPARATUS FOR AN EFFICIENT HANDSHAKE BETWEEN MATERIAL HANDLING AND MATERIAL PROCESSING DEVICES FOR SAFE MATERIAL TRANSFER 有权
标题翻译：材料处理和材料加工装置之间的有效手段的安全材料转移的方法和装置
公开(公告)号：US20090202336A1
公开(公告)日：2009-08-13
申请号：US12369722
申请日：2009-02-11
申请人： Vinay K. Shah , Sushant S. Koshti
发明人： Vinay K. Shah , Sushant S. Koshti
IPC分类号： H01L21/677 , B25J11/00
CPC分类号： G05B19/41815 , G05B2219/31216 , G05B2219/45031 , H01L21/67276 , Y02P90/08 , Y02P90/285
摘要： Methods and systems are provided. The invention includes performing a handshake directly between a load port associated with process equipment and material handling equipment; and transferring a carrier between the material handling equipment and the load port based on the handshake. Numerous other aspects are provided.
摘要翻译：提供方法和系统。本发明包括在与处理设备相关联的负载端口和材料处理设备之间直接进行握手; 并且基于握手在物料搬运设备和装载端口之间传送承运人。提供了许多其他方面。

10. 发明授权

US08886354B2 Methods, systems and apparatus for rapid exchange of work material 有权
标题翻译：用于快速交换工作材料的方法，系统和装置
公开(公告)号：US08886354B2
公开(公告)日：2014-11-11
申请号：US12684660
申请日：2010-01-08
申请人： Vinay K. Shah , Sushant S. Koshti
发明人： Vinay K. Shah , Sushant S. Koshti
IPC分类号： G06F7/00 , H01L21/677
CPC分类号： H01L21/67766
摘要： Systems, apparatus and methods for the rapid exchange of work material in a facility processing substrates (e.g., LCD panels, solar panels, semiconductor wafers, or the like) are disclosed. The system may include load ports associated with a process tool, local storage units, and a work material exchange apparatus adapted to rapidly exchange work material at the ports, units, or other exchange locations. The work material exchange apparatus may include two or more end effectors coupled to one or more actuator members and which may be adapted to rapidly exchange two or more carriers containing work material at an exchange location.
摘要翻译：公开了用于在处理基板（例如，LCD面板，太阳能电池板，半导体晶片等）的设备中快速更换工作材料的系统，装置和方法。系统可以包括与处理工具相关联的装载端口，本地存储单元和适于在端口，单元或其他交换位置快速交换工作材料的工作材料交换装置。工作材料交换装置可以包括耦合到一个或多个致动器构件的两个或更多个端部执行器，并且可以适于在交换位置快速地交换包含工作材料的两个或更多个载体。

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