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1. 发明申请

US20070144439A1 CARTESIAN CLUSTER TOOL CONFIGURATION FOR LITHOGRAPHY TYPE PROCESSES 有权
标题翻译：用于刻印类型工艺的卡特彼勒集群工具配置
公开(公告)号：US20070144439A1
公开(公告)日：2007-06-28
申请号：US11530297
申请日：2006-09-08
申请人： Eric A. Englhardt , Michael R. Rice , Jeffrey C. Hudgens , Steve Hongkham , Jay D. Pinson , Mohsen Salek , Charles Carlson , William T. Weaver , Helen R. Armer
发明人： Eric A. Englhardt , Michael R. Rice , Jeffrey C. Hudgens , Steve Hongkham , Jay D. Pinson , Mohsen Salek , Charles Carlson , William T. Weaver , Helen R. Armer
IPC分类号： B65H1/00 , C23F1/00 , H01L21/306 , C23C16/00
CPC分类号： G03F7/70991 , H01L21/67173 , H01L21/67178 , H01L21/67225 , H01L21/67742 , H01L21/67745
摘要： The present invention generally provides an apparatus and method for processing substrates using a multi-chamber processing system (e.g., a cluster tool) that is easily configurable, has an increased system throughput, increased system reliability, improved device yield performance, a more repeatable wafer processing history (or wafer history), and a reduced footprint. In one embodiment, the cluster tool is adapted to perform a track lithography process in which a substrate is coated with a photosensitive material, is then transferred to a stepper/scanner, which exposes the photosensitive material to some form of radiation to form a pattern in the photosensitive material, and then certain portions of the photosensitive material are removed in a developing process completed in the cluster tool.
摘要翻译：本发明总体上提供了一种用于使用容易配置的多室处理系统（例如，集群工具）处理衬底的装置和方法，具有增加的系统吞吐量，增加的系统可靠性，改进的器件产量性能，更可重复的晶片处理历史（或晶圆历史），减少占地面积。在一个实施例中，簇工具适于执行其中衬底被感光材料涂覆的轨道光刻工艺，然后转移到步进/扫描器，其将感光材料暴露于某种形式的辐射以形成图案感光材料，然后在簇组工具中完成的显影过程中去除感光材料的某些部分。

2. 发明授权

US07819079B2 Cartesian cluster tool configuration for lithography type processes 有权
标题翻译：用于光刻类型工艺的笛卡尔簇工具配置
公开(公告)号：US07819079B2
公开(公告)日：2010-10-26
申请号：US11530297
申请日：2006-09-08
申请人： Eric A. Englhardt , Michael R. Rice , Jeffrey C. Hudgens , Steve Hongkham , Jay D. Pinson , Mohsen Salek , Charles Carlson , William T Weaver , Helen R. Armer
发明人： Eric A. Englhardt , Michael R. Rice , Jeffrey C. Hudgens , Steve Hongkham , Jay D. Pinson , Mohsen Salek , Charles Carlson , William T Weaver , Helen R. Armer
IPC分类号： B05C13/02 , H01L21/677 , C23C14/00
CPC分类号： G03F7/70991 , H01L21/67173 , H01L21/67178 , H01L21/67225 , H01L21/67742 , H01L21/67745
摘要： The present invention generally provides an apparatus and method for processing substrates using a multi-chamber processing system (e.g., a cluster tool) that is easily configurable, has an increased system throughput, increased system reliability, improved device yield performance, a more repeatable wafer processing history (or wafer history), and a reduced footprint. In one embodiment, the cluster tool is adapted to perform a track lithography process in which a substrate is coated with a photosensitive material, is then transferred to a stepper/scanner, which exposes the photosensitive material to some form of radiation to form a pattern in the photosensitive material, and then certain portions of the photosensitive material are removed in a developing process completed in the cluster tool.
摘要翻译：本发明总体上提供了一种用于使用容易配置的多室处理系统（例如，集群工具）处理衬底的装置和方法，具有增加的系统吞吐量，增加的系统可靠性，改进的器件产量性能，更可重复的晶片处理历史（或晶圆历史），减少占地面积。在一个实施例中，簇工具适于执行其中衬底被感光材料涂覆的轨道光刻工艺，然后转移到步进/扫描器，其将感光材料暴露于某种形式的辐射以形成图案感光材料，然后在簇组工具中完成的显影过程中去除感光材料的某些部分。

3. 发明授权

US08019467B2 Scheduling method for processing equipment 有权
标题翻译：加工设备调度方法
公开(公告)号：US08019467B2
公开(公告)日：2011-09-13
申请号：US11775355
申请日：2007-07-10
申请人： Steve S. Hongkham , Eric A. Englhardt , Michael R. Rice , Helen R. Armer , Chongyang Chris Wang
发明人： Steve S. Hongkham , Eric A. Englhardt , Michael R. Rice , Helen R. Armer , Chongyang Chris Wang
IPC分类号： G06F7/00
CPC分类号： H01L21/67745 , H01L21/67173 , H01L21/67178 , H01L21/67276
摘要： Methods and apparatus for processing substrates using a multi-chamber processing system (e.g., a cluster tool) that has an increased system throughput and repeatable wafer processing history are provided. In one embodiment a first substrate is transferred from a first position to a second position and then the first substrate is transferred from the second position to a third position using a first robot. A second substrate is transferred from a first position to a second position and then the second substrate is transferred from the second position to a third position using a second robot. The movement of the first and second robots is synchronized so that the movement from the first position to the second position by the first and second robot is performed within a first time interval.
摘要翻译：提供了使用具有增加的系统吞吐量和可重复的晶片处理历史的多室处理系统（例如，集群工具）处理衬底的方法和装置。在一个实施例中，第一衬底从第一位置转移到第二位置，然后使用第一机器人将第一衬底从第二位置转移到第三位置。第二基底从第一位置转移到第二位置，然后使用第二机器人将第二基底从第二位置转移到第三位置。第一机器人和第二机器人的移动被同步，使得在第一时间间隔内执行由第一和第二机器人从第一位置到第二位置的移动。

4. 发明授权

US07522968B2 Scheduling method for processing equipment 有权
标题翻译：加工设备调度方法
公开(公告)号：US07522968B2
公开(公告)日：2009-04-21
申请号：US11775365
申请日：2007-07-10
申请人： Steve S. Hongkham , Eric A. Englhardt , Michael R. Rice , Helen R. Armer , Chongyang Chris Wang
发明人： Steve S. Hongkham , Eric A. Englhardt , Michael R. Rice , Helen R. Armer , Chongyang Chris Wang
IPC分类号： G06F19/00
CPC分类号： H01L21/67276
摘要： Methods and apparatus for increasing the processing throughput of multiple lots of semiconductor wafers through a cluster tool while maintaining a constant wafer history for each lot are provided. A first lot of wafers containing one through n-th wafers is introduced into a cluster tool containing one or more processing chambers. The first lot of wafers is processed for a first time period. A second lot of wafers containing one through n-th wafers is introduced into the cluster tool prior to completion of the first time period, wherein the second lot is introduced so as to minimize a time gap between the n-th wafer of the first lot of wafers and the first wafer of the second lot of wafers while maintaining a first constant wafer history for each wafer within the first lot and maintaining a second constant wafer history for each wafer in the second lot.
摘要翻译：提供了通过集群工具增加多批半导体晶片的处理能力的方法和装置，同时保持每批的恒定的晶片历史。包含一个至第n个晶片的第一批晶片被引入到包含一个或多个处理室的簇工具中。第一批晶圆首次处理。在第一时间段完成之前，将包含一个至第n个晶片的第二批晶片引入到该簇工具中，其中引入第二批以最小化第一批第n个晶片之间的时间间隔的晶片和第二批晶片的第一晶片，同时保持第一批内的每个晶片的第一恒定晶片历史，并为第二批中的每个晶片保持第二恒定的晶片历史。

5. 发明授权

US07857570B2 Method and apparatus for supplying substrates to a processing tool 有权
标题翻译：用于将基材供给到加工工具的方法和装置
公开(公告)号：US07857570B2
公开(公告)日：2010-12-28
申请号：US12100388
申请日：2008-04-09
申请人： Martin R. Elliott , Michael R. Rice , Robert B. Lowrance , Jeffrey C. Hudgens , Eric A. Englhardt
发明人： Martin R. Elliott , Michael R. Rice , Robert B. Lowrance , Jeffrey C. Hudgens , Eric A. Englhardt
IPC分类号： B65G49/07
CPC分类号： H01L21/67775 , Y10S414/14
摘要： In one aspect, a substrate loading station for a processing tool includes plural load ports. Each load port is operatively coupled to the processing tool and has a mechanism for opening a substrate carrier. A carrier handler transports substrate carriers from a factory exchange location to the load ports without placing the carriers on any carrier support location other than the load ports. Numerous other aspects are provided.
摘要翻译：一方面，用于处理工具的基板装载站包括多个装载端口。每个负载端口可操作地耦合到处理工具并且具有用于打开衬底载体的机构。载体处理器将基板载体从工厂交换位置传送到负载端口，而不将载体放置在除负载端口之外的任何载体支撑位置上。提供了许多其他方面。

6. 发明授权

US07594789B2 Overhead transfer flange and support for suspending a substrate carrier 失效
标题翻译：架空传输法兰和支撑件用于悬挂基板载体
公开(公告)号：US07594789B2
公开(公告)日：2009-09-29
申请号：US11838501
申请日：2007-08-14
申请人： Michael R. Rice , Martin R. Elliott , Robert B. Lowrance , Jeffrey C. Hudgens , Eric A. Englhardt
发明人： Michael R. Rice , Martin R. Elliott , Robert B. Lowrance , Jeffrey C. Hudgens , Eric A. Englhardt
IPC分类号： B65G17/02
CPC分类号： H01L21/6773 , H01L21/67733 , H01L21/67769 , H01L21/67778
摘要： In a first aspect, a first apparatus is provided for use in supporting a substrate carrier. The first apparatus includes an overhead transfer flange adapted to couple to a substrate carrier body and an overhead carrier support. The overhead transfer flange has a first side and a second side opposite the first side that is wider than the first side. Numerous other aspects are provided.
摘要翻译：在第一方面，提供了一种用于支撑衬底载体的第一装置。第一装置包括适于联接到衬底载体主体和架空托架支架的架空输送凸缘。架空输送法兰具有比第一侧宽的第一侧和与第一侧相对的第二侧。提供了许多其他方面。

7. 发明授权

US07552816B2 Break-away positioning conveyor mount for accommodating conveyor belt bends 有权
公开(公告)号：US07552816B2
公开(公告)日：2009-06-30
申请号：US11619183
申请日：2007-01-02
申请人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens
发明人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens
IPC分类号： B65G43/08
CPC分类号： H01L21/68707 , H01L21/6773 , H01L21/67733
摘要： A break-away mounting system for a continuous-motion, high-speed position conveyor system is disclosed. A support cradle may be suspended from a conveyor belt such that the support cradle maintains a fixed position and orientation relative to at least one point on the conveyor belt without inducing appreciable stress on the conveyor belt, the support cradle, or the coupling between the conveyor belt and the support cradle. The mount may include a leading rotatable bearing attached to the support cradle which may releasably engage a first key attached to the conveyor belt, the rotatable bearing adapted to accommodate rotational forces applied to the support cradle by the conveyor belt. The mount may also include a slide bearing attached to the support cradle which may releasably engage a second key attached to the conveyor belt, the slide bearing adapted to accommodate longitudinal forces applied to the support cradle by the conveyor belt.

8. 发明授权

US07540371B2 Break-away positioning conveyor mount for accommodating conveyor belt bends 有权
公开(公告)号：US07540371B2
公开(公告)日：2009-06-02
申请号：US11619181
申请日：2007-01-02
申请人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens
发明人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens
IPC分类号： B65G47/34
CPC分类号： H01L21/68707 , H01L21/6773 , H01L21/67733
摘要： A break-away mounting system for a continuous-motion, high-speed position conveyor system is disclosed. A support cradle may be suspended from a conveyor belt such that the support cradle maintains a fixed position and orientation relative to at least one point on the conveyor belt without inducing appreciable stress on the conveyor belt, the support cradle, or the coupling between the conveyor belt and the support cradle. The mount may include a leading rotatable bearing attached to the support cradle which may releasably engage a first key attached to the conveyor belt, the rotatable bearing adapted to accommodate rotational forces applied to the support cradle by the conveyor belt. The mount may also include a slide bearing attached to the support cradle which may releasably engage a second key attached to the conveyor belt, the slide bearing adapted to accommodate longitudinal forces applied to the support cradle by the conveyor belt.

9. 发明授权

US07537108B2 Methods and apparatus for transporting substrate carriers 有权
公开(公告)号：US07537108B2
公开(公告)日：2009-05-26
申请号：US11838354
申请日：2007-08-14
申请人： Michael R. Rice , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Eric A. Englhardt
发明人： Michael R. Rice , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Eric A. Englhardt
IPC分类号： B65G17/02
CPC分类号： H01L21/67706 , B65G17/20 , B65G37/02 , B65G2201/0297 , H01L21/67727 , H01L21/6773 , H01L21/67769 , H01L21/67778 , Y10S414/135
摘要： According to a first aspect, a first conveyor system is provided that is adapted to deliver substrate carriers within a semiconductor device manufacturing facility. The first conveyor system includes a ribbon that forms a closed loop along at least a portion of the semiconductor device manufacturing facility. The ribbon is adapted to (1) be flexible in a horizontal plane and rigid in a vertical plane; and (2) transport a plurality of substrate carriers within at least a portion of the semiconductor device manufacturing facility. Numerous other aspects are provided, as are systems, methods and computer program products in accordance with these and other aspects.

10. 发明授权

US07506747B2 Break-away positioning conveyor mount for accommodating conveyor belt bends 有权
公开(公告)号：US07506747B2
公开(公告)日：2009-03-24
申请号：US11495055
申请日：2006-07-28
申请人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens
发明人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens
IPC分类号： B65G29/00
CPC分类号： H01L21/68707 , H01L21/6773 , H01L21/67733
摘要： A break-away mounting system for a continuous-motion, high-speed position conveyor system is disclosed. A support cradle may be suspended from a conveyor belt such that the support cradle maintains a fixed position and orientation relative to at least one point on the conveyor belt without inducing appreciable stress on the conveyor belt, the support cradle, or the coupling between the conveyor belt and the support cradle. The mount may include a leading rotatable bearing attached to the support cradle which may releasably engage a first key attached to the conveyor belt, the rotatable bearing adapted to accommodate rotational forces applied to the support cradle by the conveyor belt. The mount may also include a slide bearing attached to the support cradle which may releasably engage a second key attached to the conveyor belt, the slide bearing adapted to accommodate longitudinal forces applied to the support cradle by the conveyor belt.

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