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1. 发明授权

US4841624A Method of producing a thin film magnetic head 失效
标题翻译：薄膜磁头的制造方法
公开(公告)号：US4841624A
公开(公告)日：1989-06-27
申请号：US142696
申请日：1988-01-11
申请人： Eisei Togawa , Saburo Suzuki , Kenji Sugimoto , Shunichiro Kuwatsuka
发明人： Eisei Togawa , Saburo Suzuki , Kenji Sugimoto , Shunichiro Kuwatsuka
IPC分类号： G11B5/31
CPC分类号： G11B5/3163 , Y10T29/49044 , Y10T29/49064
摘要： A method of producing a thin film magnetic head by successively depositing on a substrate a first magnetic material, a gap material, an electrically conductive material consisting of a coil, an insulating film, a second magnetic material and a protecting film, wherein the improvement comprises a step for forming a recessed portion in the insulating film at a portion corresponding to a gap portion on the air bearing surface side, the bottom surface of said recessed portion serving as an exposed portion on the upper surface of the gap material and the side surfaces of said recessed portion being tapered, a step for forming a recessed portion in the gap material by etching using the insulating film with the recessed portion as a mask and making the thickness thereof equal to the gap length, and a step for depositing a second magnetic material on the whole surface, so that the recessed portion formed in the gap material will have a rectangular shape with its one side being equal to a gap depth and its another side being equal to a track width. Unlike the conventional art, no thick photoresist film is used in a step for determining the gap depth and the track width, making it possible to obtain a thin film magnetic head having a small gap depth and a narrow track width maintaining high precision.
摘要翻译：一种通过在基板上依次沉积第一磁性材料，间隙材料，由线圈，绝缘膜，第二磁性材料和保护膜组成的导电材料制造薄膜磁头的方法，其中改进包括在与空气轴承面侧的间隙部对应的部分，在绝缘膜上形成凹部的工序，作为上述间隙材料的上表面的露出部的上述凹部的底面，所述凹陷部分是锥形的，通过使用具有凹陷部分作为掩模的绝缘膜进行蚀刻并使其厚度等于间隙长度来形成间隙材料中的凹陷部分的步骤，以及用于沉积第二磁体材料在整个表面上，使得形成在间隙材料中的凹陷部分将具有矩形形状，其一侧等于间隙d epth，另一边等于轨道宽度。与传统技术不同，在用于确定间隙深度和轨道宽度的步骤中不使用厚的光致抗蚀剂膜，使得可以获得具有小间隙深度和窄轨道宽度的薄膜磁头，从而保持高精度。

2. 发明授权

US5241440A Thin film magnetic head and manufacturing method therefor 失效
标题翻译：薄膜磁头及其制造方法
公开(公告)号：US5241440A
公开(公告)日：1993-08-31
申请号：US908607
申请日：1992-06-29
申请人： Eizi Ashida , Moriaki Fuyama , Hideki Yamazaki , Shinji Narishige , Makoto Morijiri , Takashi Kawabe , Shunichiro Kuwatsuka , Saburo Suzuki , Eisei Togawa
发明人： Eizi Ashida , Moriaki Fuyama , Hideki Yamazaki , Shinji Narishige , Makoto Morijiri , Takashi Kawabe , Shunichiro Kuwatsuka , Saburo Suzuki , Eisei Togawa
IPC分类号： G11B5/31
CPC分类号： G11B5/313 , G11B5/3163
摘要： A thin film magnetic head including conductor coils, a plurality of insulating layers to interpose and insulate the conductor coils and a magnetic gap layer between upper and lower magnetic cores, in which another insulating layer is provided on a stepped region formed by end faces of the plurality of insulating layers.
摘要翻译：一种薄膜磁头，包括导体线圈，多个绝缘层，用于将导体线圈插入并绝缘，以及在上下磁芯之间的磁隙层，其中另一绝缘层设置在由多个绝缘层。

3. 发明授权

US4841402A Thin film magnetic head and method of manufacture 失效
标题翻译：薄膜磁头及其制造方法
公开(公告)号：US4841402A
公开(公告)日：1989-06-20
申请号：US004623
申请日：1987-01-20
申请人： Tadashi Imanaka , Masayuki Takagi , Eisei Togawa , Harunobu Saito , Sadanori Nagaike , Masaki Ohura , Saburo Suzuki , Tetsuo Kobayashi , Shunichiro Kuwatsuka
发明人： Tadashi Imanaka , Masayuki Takagi , Eisei Togawa , Harunobu Saito , Sadanori Nagaike , Masaki Ohura , Saburo Suzuki , Tetsuo Kobayashi , Shunichiro Kuwatsuka
IPC分类号： G11B5/17 , G11B5/31
CPC分类号： G11B5/17 , G11B5/31 , Y10T29/49044 , Y10T29/49062 , Y10T29/49064
摘要： A thin film magnetic head having two conductor layers provided within a magnetic circuit constituted by a first and a second magnetic member. The magnetic circuit has, at the side to which a recording medium is opposed, a portion where the first and second magnetic members are opposed to each other over a length substantially equal to a gap depth, intervening a non-magnetic gap member therebetween, and a portion ahead thereof where they are connected with each other. The edge of the gap member constitutes an aperture of the magnetic circuit. The thin film magnetic head arranged as above permits a high density recording without reducing its production yield.
摘要翻译：一种薄膜磁头，其具有设置在由第一和第二磁性构件构成的磁路内的两个导体层。所述磁路在与记录介质相对的一侧具有第一和第二磁性构件在基本上等于间隙深度的长度上彼此相对的部分，其间插入非磁性间隙构件，以及在它们之前的部分，它们彼此连接。间隙构件的边缘构成磁路的孔。如上所述布置的薄膜磁头允许高密度记录而不降低其产量。

4. 发明授权

US5567333A Thin film magnetic head, process for production thereof 失效
标题翻译：薄膜磁头，其制造方法
公开(公告)号：US5567333A
公开(公告)日：1996-10-22
申请号：US263915
申请日：1994-06-22
申请人： Yasuo Hira , Tamaki Toba , Hirotaka Imayama , Atsuko Ohkawa , Masayasu Fujisawa , Kazuo Nate , Hideki Sonobe , Saburo Suzuki , Eisei Togawa , Hiroshi Ishizaki , Yoshiki Hagiwara
发明人： Yasuo Hira , Tamaki Toba , Hirotaka Imayama , Atsuko Ohkawa , Masayasu Fujisawa , Kazuo Nate , Hideki Sonobe , Saburo Suzuki , Eisei Togawa , Hiroshi Ishizaki , Yoshiki Hagiwara
IPC分类号： B23K15/00 , C23F4/00 , G11B5/31 , G11B5/60 , H01L21/302 , H01L21/3065 , B44C1/22
CPC分类号： G11B5/3106 , G11B5/60 , G11B5/6005 , G11B5/3163
摘要： A magnetic head element has one or more rails formed on the surface thereof. Each rail is formed so as to have a tapered angle of 55.degree.-85.degree.. To form such a rail, ion milling is conducted; the rail substrate used is allowed to have an inclination angle to 15.degree.-60.degree. and is rotated; and there is used, as the ion milling gas, a fluorinated hydrocarbon (e.g. CH.sub.2 FCF.sub.3) gas alone or a mixed gas of said fluorinated hydrocarbon gas and Ar, SF.sub.6 or the like. Accordingly, a magnetic head rail shape gives a small variation in flying height between magnetic head and magnetic disc.
摘要翻译：磁头元件具有形成在其表面上的一个或多个轨道。每个轨道形成为具有55°-85°的锥角。为了形成轨道，进行离子铣削; 所使用的轨道基板允许倾斜角度为15°-60°并旋转; 并且作为离子研磨气体使用单独的氟化烃（例如CH 2 CF 3）气体或者所述氟化烃气体与Ar，SF 6等的混合气体。因此，磁头轨道形状在磁头和磁盘之间的飞行高度变化很小。

5. 发明授权

US06198601B1 Thin film magnetic head having non-linear tapered rails 失效
标题翻译：具有非线性锥形导轨的薄膜磁头
公开(公告)号：US06198601B1
公开(公告)日：2001-03-06
申请号：US09268711
申请日：1999-03-16
申请人： Yasuo Hira , Tamaki Toba , Hirotaka Imayama , Atsuko Ohkawa , Masayasu Fujisawa , Kazuo Nate , Hideki Sonobe , Saburo Suzuki , Eisei Togawa , Hiroshi Ishizaki , Yoshiki Hagiwara
发明人： Yasuo Hira , Tamaki Toba , Hirotaka Imayama , Atsuko Ohkawa , Masayasu Fujisawa , Kazuo Nate , Hideki Sonobe , Saburo Suzuki , Eisei Togawa , Hiroshi Ishizaki , Yoshiki Hagiwara
IPC分类号： G11B560
CPC分类号： G11B5/3106 , G11B5/3163 , G11B5/60 , G11B5/6005
摘要： A magnetic head element has one or more rails formed on the surface thereof. Each rail is formed so as to have a tapered angle of 55-85°. To form such a rail, ion milling is conducted; the rail substrate used is allowed to have an inclination angle to 15-60° and is rotated; and there is used, as the ion milling gas, a fluorinated hydrocarbon (e.g., CH2FCF3) gas alone or a mixed gas of said fluorinated hydrocarbon gas and Ar, SF6 or the like. Accordingly, a magnetic head rail shape gives a small variation in flying height between magnetic bead and magnetic disc.
摘要翻译：磁头元件具有形成在其表面上的一个或多个轨道。每个轨道形成为具有55-85°的锥角。为了形成轨道，进行离子铣削; 所使用的轨道基板允许具有15-60°的倾斜角并旋转; 作为离子研磨气体使用单独的氟化烃（例如CH 2 CF 3）或所述氟化烃气体与Ar，SF 6等的混合气体。因此，磁头轨道形状在磁珠和磁盘之间的飞行高度变化很小。

6. 发明授权

US5910864A Thin film magnetic head having non-linear rails 失效
标题翻译：具有非线性导轨的薄膜磁头
公开(公告)号：US5910864A
公开(公告)日：1999-06-08
申请号：US773783
申请日：1996-10-22
申请人： Yasuo Hira , Tamaki Toba , Hirotaka Imayama , Atsuko Ohkawa , Masayasu Fujisawa , Kazuo Nate , Hideki Sonobe , Saburo Suzuki , Eisei Togawa , Hiroshi Ishizaki , Yoshiki Hagiwara
发明人： Yasuo Hira , Tamaki Toba , Hirotaka Imayama , Atsuko Ohkawa , Masayasu Fujisawa , Kazuo Nate , Hideki Sonobe , Saburo Suzuki , Eisei Togawa , Hiroshi Ishizaki , Yoshiki Hagiwara
IPC分类号： B23K15/00 , C23F4/00 , G11B5/31 , G11B5/60 , H01L21/302 , H01L21/3065
CPC分类号： G11B5/3106 , G11B5/60 , G11B5/6005 , G11B5/3163
摘要： A magnetic head element has one or more rails formed on the surface thereof. Each rail is formed so as to have a tapered angle of 55-85.degree.. To form such a rail, ion milling is conducted; the rail substrate used is allowed to have an inclination angle to 15-60.degree. and is rotated; and there is used, as the ion milling gas, a fluorinated hydrocarbon (e.g., CH.sub.2 FCF.sub.3) gas alone or a mixed gas of said fluorinated hydrocarbon gas and Ar, SF.sub.6 or the like. Accordingly, a magnetic head rail shape gives a small variation in flying height between magnetic head and magnetic disc.
摘要翻译：磁头元件具有形成在其表面上的一个或多个轨道。每个轨道形成为具有55-85°的锥角。为了形成轨道，进行离子铣削; 所使用的轨道基板允许倾斜角度为15-60°并旋转; 作为离子研磨气体使用单独的氟化烃（例如CH 2 CF 3）或所述氟化烃气体与Ar，SF 6等的混合气体。因此，磁头轨道形状在磁头和磁盘之间的飞行高度变化很小。

7. 发明授权

US5430591A Negative pressure flying head slider having siderails with narrow width portion 失效
标题翻译：负压飞头滑块具有窄宽度部分的斜盘
公开(公告)号：US5430591A
公开(公告)日：1995-07-04
申请号：US135442
申请日：1993-10-13
申请人： Yoshinori Takeuchi , Kenji Mori , Masaaki Matsumoto , Hiroshi Agari , Jyousei Shimizu , Eisei Togawa , Yasuo Kojima , Mikio Tokuyama , Hiromitsu Tokisue , Hidekazu Kohira , Yokuo Saitoh , Haruhide Takahashi , Yoshihiro Shiorishi
发明人： Yoshinori Takeuchi , Kenji Mori , Masaaki Matsumoto , Hiroshi Agari , Jyousei Shimizu , Eisei Togawa , Yasuo Kojima , Mikio Tokuyama , Hiromitsu Tokisue , Hidekazu Kohira , Yokuo Saitoh , Haruhide Takahashi , Yoshihiro Shiorishi
IPC分类号： G11B5/60
CPC分类号： G11B5/6005
摘要： A flying head slider utilizing a negative pressure according to the invention has a front end, a rear end, and an air bearing surface directed to face a rotating recording medium. The air bearing surface includes a pair of side rails extending on both sides of the air bearing surface from the front end in the longitudinal direction of the slider, a center rail provided at the center of the air bearing surface in the transverse direction and extending from the front end to the rear end in the longitudinal direction of the slider, a cross rail extending in the transverse direction of the slider to connect the pair of side rails and the center rail to each other near the front end, a pair of recesses defined by the pair of side rails, the center rail and the cross rail, communicating grooves for communicating the pair of recesses with the front end, and a head mounted on a rear end surface of the center rail. The pair of side rails, the center rail and the cross rail lie substantially in the same plane. The pair of side rails are spaced from the rear end and are terminated at oblique edges in agreement with oblique lines extending from side edges of the slider to the center of the center rail at its rear end. The pair of side rails each has a width shape which is gradually narrowed from the front end toward a narrow portion located in a vicinity of a center of the slider, and is gradually spread from the narrow portion toward the rear end. The center rail is extended from the front end with substantially a constant width, followed by a width shape gradually spreading toward the rear end.
摘要翻译：根据本发明的利用负压的飞头滑块具有前端，后端和面向旋转记录介质的空气轴承表面。空气轴承表面包括从滑动件的纵向方向上的前端在空气轴承表面的两侧延伸的一对侧轨，在横向方向上设置在空气轴承表面的中心的中心轨道，在滑块的纵向方向上的后端到后端的横向导轨，沿着滑块的横向方向延伸的横向导轨，用于将一对侧轨和中心导轨彼此靠近前端连接，一对凹口被限定通过一对侧轨，中心轨道和十字轨道，用于将一对凹部与前端连通的连通槽，以及安装在中心导轨的后端表面上的头部。一对侧轨，中心轨道和十字轨大致位于同一平面内。一对侧轨与后端隔开并且在倾斜边缘处终止，与从滑块的侧边缘延伸到其后端的中心轨道的中心的斜线一致。一对侧轨具有从前端向位于滑块的中心附近的狭窄部分逐渐变窄的宽度形状，并且从窄部朝向后端逐渐扩展。中心轨道从前端以基本上恒定的宽度延伸，随后是朝向后端逐渐扩展的宽度形状。

8. 发明授权

US06504680B2 Magnetic head and magnetic head manufacturing method 失效
公开(公告)号：US06504680B2
公开(公告)日：2003-01-07
申请号：US09927392
申请日：2001-08-13
申请人： Atsuko Okawa , Yasuo Hira , Hirotaka Imayama , Masayasu Fujisawa , Saburou Suzuki , Eisei Togawa , Noriyuki Saiki , Nobuo Suzuki , Hiroshi Agari , Kiyoshi Akamatsu , Hiromu Chiba
发明人： Atsuko Okawa , Yasuo Hira , Hirotaka Imayama , Masayasu Fujisawa , Saburou Suzuki , Eisei Togawa , Noriyuki Saiki , Nobuo Suzuki , Hiroshi Agari , Kiyoshi Akamatsu , Hiromu Chiba
IPC分类号： G11B560
CPC分类号： G11B5/6005 , Y10T29/49041
摘要： A method of manufacturing a magnetic head slider for a magnetic head and the magnetic slider wherein the slider has non-linear rails formed in a floating surface thereof by processing including one of reactive ion etching, sputter etching and an ion milling, and side walls of the non-linear rails are polished after formation of the non-linear rails by the processing.

9. 发明授权

US06278582B1 Magnetic head and magnetic head manufacturing method 有权
标题翻译：磁头和磁头制造方法
公开(公告)号：US06278582B1
公开(公告)日：2001-08-21
申请号：US09469180
申请日：1999-12-21
申请人： Atsuko Okawa , Yasuo Hira , Hirotaka Imayama , Masayasu Fujisawa , Saburou Suzuki , Eisei Togawa , Noriyuki Saiki , Nobuo Suzuki , Hiroshi Agari , Kiyoshi Akamatsu , Hiromu Chiba
发明人： Atsuko Okawa , Yasuo Hira , Hirotaka Imayama , Masayasu Fujisawa , Saburou Suzuki , Eisei Togawa , Noriyuki Saiki , Nobuo Suzuki , Hiroshi Agari , Kiyoshi Akamatsu , Hiromu Chiba
IPC分类号： G11B560
CPC分类号： G11B5/6005 , Y10T29/49041
摘要： For removing re-deposited particulates produced during an etching process of a magnetic head slider and forming a minute chamfered portion, a polishing process is carried out by using polishing cloth such as non-woven polyester fabric after having formed rails of non-linear shape on a floating surface by the etching process. Thus, the re-deposited particulates produced during the etching process are removed, whereby the reliability of the floating characteristic of magnetic head is improved.
摘要翻译：为了除去在磁头滑块的蚀刻过程中产生的重新沉积的微粒并形成微小的倒角部分，通过使用诸如无纺聚酯织物的抛光布，在形成非线性形状的轨道之后，进行抛光处理通过蚀刻工艺浮动表面。因此，去除了在蚀刻工艺期间产生的再沉积的微粒，从而提高了磁头的浮动特性的可靠性。

10. 发明授权

US5329689A Process for producing magnetic head slider 失效
标题翻译：制造磁头滑块的方法
公开(公告)号：US5329689A
公开(公告)日：1994-07-19
申请号：US941250
申请日：1992-09-04
申请人： Kasufumi Azuma , Hideki Sonobe , Kazuo Nate , Akiko Mizushima , Harunobu Saito , Eisei Togawa , Hiroshi Ishizaki
发明人： Kasufumi Azuma , Hideki Sonobe , Kazuo Nate , Akiko Mizushima , Harunobu Saito , Eisei Togawa , Hiroshi Ishizaki
IPC分类号： G11B21/21 , G11B5/60 , G11B5/42
CPC分类号： G11B5/6005 , Y10T29/49032 , Y10T29/49041
摘要： A process for producing a magnetic head slider with at least one rail having an air bearing surface. The process includes the steps of disposing a non-metallic film on a work surface to be shaped of a magnetic head slider material so as to be in intimate contact with the work surface, patterning the non-metallic film disposed on the work surface into at least one predetermined rail shape, shaping the work surface of the magnetic head slider material utilizing the patterned non-metallic film as a mask, and stripping off the patterned non-metallic film utilized as a mask which remains on the work surface of the slider material so as to provide at least one shaped slider rail of the magnetic head slider.
摘要翻译：一种用于制造具有至少一个具有空气轴承表面的轨道的磁头滑块的方法。该方法包括以下步骤：将非金属膜设置在要形成磁头滑块材料的工作表面上以与工作表面紧密接触，将设置在工作表面上的非金属膜图案化成为至少一个预定轨道形状，利用图案化的非金属膜作为掩模对磁头滑块材料的工作表面进行成形，并剥离用作保留在滑块材料的工作表面上的掩模的图案化非金属膜以便提供磁头滑块的至少一个成形的滑轨。

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