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    • 1. 发明授权
    • Compact video inspection apparatus with Y, Z, X compounded measurement axes
    • 具有Y,Z,X复合测量轴的紧凑型视频检测仪
    • US06518996B1
    • 2003-02-11
    • US09256343
    • 1999-02-22
    • Edward T. PolidorAlbert G. Choate
    • Edward T. PolidorAlbert G. Choate
    • H04N718
    • G01B11/002G12B5/00
    • A yoke is supported on a frame for vertical movement in a Z direction above a transparent work support that is mounted on the frame for horizontal adjustment in a Y direction, normal to the Z direction. A carriage which is mounted for horizontal adjustment on the yoke in an X direction, normal to the Y and Z directions, carries a video camera and lens system which overlies the work support to project an image of an inspected workpiece to the camera. A substage collimator which is mounted on the frame beneath the work support for adjustment in the X direction, has thereon a souce of collimated light that registers with the lens system. The collimator is connected to the carriage to be moved in unison therewith in the X direction, and always to maintain the light source in registry with the lens system.
    • 轭架支撑在框架上,用于在安装在框架上方的Z方向上垂直移动,用于垂直于Z方向的Y方向的水平调节。 安装在轭架上的X方向上水平调节的滑架,垂直于Y和Z方向,载有一个视频摄像机和镜头系统,该摄像机和镜头系统覆盖工作支架,以将被检测工件的图像投影到摄像机。 安装在工件支架下方的框架上以便在X方向上调节的子台准直器具有与透镜系统对准的准直光。 准直器被连接到滑架以与X方向一致地移动,并且始终保持光源与透镜系统对准。
    • 2. 发明授权
    • Surface illuminator with means for adjusting orientation and inclination
of incident illumination
    • 具有用于调整入射照明的方向和倾斜的装置的表面照明器
    • US5690417A
    • 1997-11-25
    • US645382
    • 1996-05-13
    • Edward T. PolidorAlbert G. ChoateTerry L. Herbeck
    • Edward T. PolidorAlbert G. ChoateTerry L. Herbeck
    • G01B11/00G02B21/08G02B21/10F21V5/00
    • G02B21/084F21V19/001F21Y2101/00Y10S362/80Y10S362/804
    • A plurality of light emitting diodes are secured coaxially around the lower end of a cylindrical objective lens housing in radially spaced, circular arrays or rings disposed coaxially of the housing. The diodes in each ring are equi-angularly spaced from each other about the axis of the housing; and their light emitting ends overlie a work table so as to direct beams of light obliquely downwardly onto an object supported thereon. The diodes are energizable in generally pie-shaped sectors disposed coaxially of the housing so that arcuate clusters of diodes in a given segment may be illuminated to enable the orientation of the resultant illumination to be varied. The diodes of each ring may have their beam axes inclined at different angles to the axis of the housing so that the inclination of the projected illumination may be varied by selected energization of the rings; and a collimating lens may be secured over the light emitting end of each diode.
    • 多个发光二极管同轴地围绕圆柱形物镜壳体的下端固定在与壳体同轴设置的径向隔开的圆形阵列或环中。 每个环中的二极管围绕壳体的轴线彼此等角度地间隔开; 并且其发光端覆盖在工作台上,以将光束向下倾斜地引导到支撑在其上的物体上。 二极管通常在与壳体同轴设置的饼形扇区中通电,使得给定段中的二极管的弓形群可以被照亮以使所得照明的取向变化。 每个环的二极管可以使其光束轴线以与壳体的轴线不同的角度倾斜,使得投射照明的倾斜度可以通过选择的环的通电来改变; 并且准直透镜可以固定在每个二极管的发光端上。
    • 3. 发明授权
    • Digital video optical inspection apparatus and method for vertically sectioning an object's surface
    • 数字视频光学检测装置及方法,用于垂直剖切物体的表面
    • US07526118B2
    • 2009-04-28
    • US10634944
    • 2003-08-06
    • David Scott DavisAlbert G. ChoateJason N. CouvutsakisKarl J. Lenz
    • David Scott DavisAlbert G. ChoateJason N. CouvutsakisKarl J. Lenz
    • G06K9/00
    • G06T7/571
    • A method for generating a vertical section of an object surface under inspection by a digital optical-video inspection system movable along a vertical Z axis, comprising obtaining a video image of the object surface; overlaying over the video image on the object surface a sectioning band along a section vector to make a vertical section of the object, the band comprising a number of regions of pixels, the center of each region being a sampling point along the section vector; generating a series of video images of the object surface at several Z axis positions; computing a focus quality measurement Q(n) for each region at each Z axis position Z(n); computing a best focus quality measurement the series of Q(n); and generating a vertical cross-section of the object surface from a set of points x,y,z obtained at each best focus location.
    • 一种用于通过可沿着垂直Z轴移动的数字光学视频检查系统检测的物体表面的垂直截面的方法,包括获得所述物体表面的视频图像; 在所述物体表面上的视频图像上沿着截面向量覆盖分割带,以形成所述对象的垂直部分,所述带包括多个像素区域,每个区域的中心是沿着所述截面向量的采样点; 在几个Z轴位置生成物体表面的一系列视频图像; 在每个Z轴位置Z(n)处计算每个区域的焦点质量测量Q(n); 计算最佳焦点质量测量系列的Q(n); 以及从在每个最佳聚焦位置处获得的一组点x,y,z生成物体表面的垂直横截面。
    • 4. 发明授权
    • Large area collimated substage illuminators for gaging applications
    • 用于测量应用的大面积准直分段照明器
    • US06161940A
    • 2000-12-19
    • US186392
    • 1998-11-05
    • Albert G. ChoateEdward Stokes
    • Albert G. ChoateEdward Stokes
    • F21V13/04G01N21/88F21V1/00
    • F21V13/04F21Y2101/00F21Y2115/10G01N21/8806
    • The illuminator includes a housing having thereon a transparent work supporting stage overlying an opening formed in the top of the housing. A plurality of light sources in the housing emit an array of spaced, parallel light beams through a like plurality of collimating lenses which collimate each of the beams emitted by the sources. The collimated light beams pass through a light transmissive diffuser which is interposed in the housing between its opening and the collimating lenses, which homogenizes the collimated light beams produced by said lenses. The homogenized light then passes through the housing opening, either directly or via one or more reflective surfaces, onto a workpiece located on the stage. In certain embodiments the collimated light beams pass through a beamsplitter before passage through the diffuser.
    • 照明器包括其上具有覆盖形成在壳体的顶部中的开口的透明作业支撑台的壳体。 壳体中的多个光源通过相似的多个准直透镜排列间隔开的平行光束的阵列,该准直透镜准直由源发射的每个光束。 准直光束通过透光扩散器,其被插入在其开口和准直透镜之间的壳体中,这使得由所述透镜产生的准直光束均匀化。 然后,均质化光直接或经由一个或多个反射表面穿过壳体开口到位于载物台上的工件上。 在某些实施例中,准直光束在通过扩散器之前通过分束器。
    • 5. 发明授权
    • Oblique led illuminator device
    • 倾斜的LED照明装置
    • US5897195A
    • 1999-04-27
    • US987049
    • 1997-12-09
    • Albert G. Choate
    • Albert G. Choate
    • F21V5/04G01N21/88G02B19/00G02B21/10G02F1/1335G02F1/13357H01L25/13F21V5/00
    • G01N21/8806F21V5/04G02B19/0009G02B19/0066F21Y2101/00H01L25/13H01L2924/0002Y10S362/80
    • The illuminator has a cylindrical or truncated-conical array of LEd's producing collimated light beams that are directed onto axially-spaced, inclined surfaces formed on the outer periphery of a hollow, similarly shaped (i.e., cylindrical or truncated-conically shaped) Fresnel-like diffuser which refracts and directs rings of light beams onto the surface of a workpiece at angles of incidence ranging anywhere from 15.degree. to 80.degree.. The array of LED's surrounds the associated Fresnel-like diffuser coaxially thereof, and in turn is surrounded by a circuit board which supplies power selectively to illuminate LED's in the array thereof. The Fresnel-like diffusers have in the outer peripheral surfaces thereof circumferential grooves forming on their outer surfaces annular, prism-shaped projections which differ in shape depending upon the desired angle of incidence of the light beams that are to be projected thereby onto a workpiece.
    • 照明器具有LEd的圆柱形或截头圆锥形阵列,其产生准直光束,其被引导到形成在中空的,类似形状(即,圆柱形或截锥形的)菲涅尔状的中空的外周上的轴向间隔开的倾斜表面 漫射器折射并将光束环引导到工件的表面上,入射角范围为15°至80°。 LED阵列围绕相关联的菲涅耳状扩散器同轴地围绕,并且由电路板包围,该电路板选择性地供电来照亮其阵列中的LED。 菲涅尔状扩散器在其外周面上具有在其外表面上形成环状的圆周槽,棱柱形突起的形状不同,所述棱镜形突起根据要投影到工件上的光束的所需入射角度而不同。
    • 6. 发明授权
    • Telecentric, parfocal, multiple magnification optical system for
videoinspection apparatus
    • 用于视频检测设备的远心,双焦,多重放大光学系统
    • US5668665A
    • 1997-09-16
    • US499870
    • 1995-07-10
    • Albert G. Choate
    • Albert G. Choate
    • G02B13/22G01J1/20
    • G02B13/22
    • An objective lens is secured in an afocal mode to a support for movement vertically toward and away from a workpiece. An illumination collimator fixed on the support above the objective lens projects the image of a reticle downwardly and successively through a second lens assembly, a beamsplitter plate, and coaxially of the objective lens to the workpiece. A combined image of the reticle and workpiece is then projected by the objective lens upwardly onto the beamsplitter, and laterally to a mirror which projects the combined image upwardly along an axis spaced from and parallel to the axis of the objective lens, and through one of several different magnifying lens assemblies to the image detector of a video camera. The magnifying lens assemblies can be selectively indexed one at a time into registry with the camera, and each has a telecentric opening or stop which always registers with the rear focal point of the objective lens each time such assembly is indexed into its operative position.
    • 物镜以无焦点模式固定到支撑件上,以垂直移动和远离工件。 固定在物镜上方的支撑件上的照明准直器将光罩的图像向下并依次通过第二透镜组件,分光板并与物镜同轴地投射到工件。 然后,将掩模版和工件的组合图像由物镜向上投射到分光器上,并且侧向地投射到沿着与物镜的轴线间隔开并平行于物镜的轴向上突出组合图像的反射镜,并且通过 几个不同的放大镜组件到摄像机的图像检测器。 放大镜组件可以一次一个地选择性地与照相机对准,并且每个具有远心打开或停止,每当这样的组件被索引到其操作位置时,其始终与物镜的后焦点对准。
    • 7. 发明授权
    • Optical system for stereoscopically measuring feature heights based on
lateral image offsets
    • 基于横向图像偏移的立体测量特征高度的光学系统
    • US5832107A
    • 1998-11-03
    • US699436
    • 1996-09-19
    • Albert G. Choate
    • Albert G. Choate
    • G01B11/245G01B11/25G01B11/30H04N13/00G01B11/22
    • H04N13/0239G01B11/245G01B11/2545G01B11/306G06T7/0075G06T2207/10012H04N2013/0081
    • Two stereoscopic images of the surface of an inspected object are projected by two different lens systems to two separate video cameras for recording thereby and for display via a CPU on a 3D monitor. The optical axes of the two lens systems are equiangularly spaced from a central Z axis extending normal to the object plane, so that the height of a feature on the surface of the workpice may be calculated by determining the difference in the amount of lateral offset in the X direction from the center of a displayed image of a given feature as shown in one of the displayed images from the amount of its corresponding lateral offset in the other image, and then calculating Z in accordance with the formula Z=the difference in the offset in the X direction divided by twice the tangent of the angle of inclination of a respective viewing axis relative to the Z axis. Alternatively, the two images may be superimposed to form a stereoscopic image, and the two lens systems are shifted on the Z axis until the slight offset images of the feature coincide.
    • 被检查对象的表面的两个立体图像由两个不同的透镜系统投影到两个分离的摄像机,用于由此记录并经由3D监视器上的CPU显示。 两个透镜系统的光轴与从垂直于物平面延伸的中心Z轴等角度地间隔开,从而可以通过确定镊子表面上的特征的差异来计算工件表面上的特征的高度 从所显示的图像中的一个所示的给定特征的显示图像的中心的X方向,从其他图像中的相应的横向偏移的量,然后根据公式Z计算Z = 在X方向上的偏移除以相应观察轴相对于Z轴的倾斜角的两倍。 或者,两个图像可以叠加以形成立体图像,并且两个透镜系统在Z轴上移动,直到特征的轻微偏移图像重合。
    • 8. 发明授权
    • Surface illuminator
    • 表面照明
    • US4223986A
    • 1980-09-23
    • US883478
    • 1978-03-06
    • Albert G. Choate
    • Albert G. Choate
    • F21S8/00G03B21/20
    • G03B21/2026G03B21/00F21W2131/402G03B21/10
    • The light source comprises an elongate arc lamp surrounded by a paraboloidal reflector which, in one embodiment, projects an annular beam of light onto an annular reflector, or mirror, which in turn projects the light onto a workpiece. Reflected light from the workpiece is projected backwardly through an opening in the center of the mirror and is projected in known manner onto a viewing screen. In a second embodiment the mirror comprises a transparent member having a reflective spot (e.g., silver) in its center. In each embodiment a glass light filter is positioned between the light source and the associated mirror to filter out all but yellow and green light, and is inclined to the axis of the associated arc lamp to prevent direct reflection of ultraviolet light back at the lamp. The paraboloidal reflectors concentrate and direct collimated light toward the associated mirror thus eliminating need to employ separate collimating lenses and high wattage lamps.
    • 光源包括由抛物面反射器包围的细长弧形灯,在一个实施例中,将环形光束投射到环形反射器或反射镜上,反射镜或反射镜又将光投影到工件上。 来自工件的反射光通过反射镜中心的开口向后突出,并以已知的方式投影到观察屏幕上。 在第二实施例中,反射镜包括在其中心具有反射点(例如银)的透明构件。 在每个实施例中,玻璃光过滤器位于光源和相关联的反射镜之间,以过滤除了黄色和绿色的所有光,并且相对于相关联的弧光灯的轴线倾斜,以防止紫外线在灯处的直接反射。 抛物面反射器集中并将准直的光线直接转向相关的反射镜,因此无需采用单独的准直透镜和高瓦数灯。
    • 9. 发明授权
    • Multi-directional mirror device and method for optical inspection and autofocus measurement of objects
    • 用于物体的光学检测和自动对焦测量的多向反射镜装置和方法
    • US06853448B2
    • 2005-02-08
    • US10175531
    • 2002-06-14
    • Karl J. LenzAlbert G. Choate
    • Karl J. LenzAlbert G. Choate
    • G01N21/88G01N21/00
    • G01N21/8806
    • The upper end of an elongate, rigid, mirror supporting arm is releasably secured at its upper end to an orientation ring, which is removably and rotatably mounted on the lower, cylindrically shaped end of the objective lens housing of an optical autofocus measurement system. The arm extends at its lower end beneath the housing and has secured thereon a mirror which is spaced beneath the housing, and lies in a plane that intersects and is inclined relative to the optical axis of the optical system contained in the housing. The mirror faces the surface of an object disposed in an object plane spaced laterally from the optical axis of the lens system, so that the system is focused along a supplemental optical axis which is inclined to, and intersects, the optical axis of the system in the housing. Images of the object in the offset object plane are therefore projected along the supplemental axis and then from the mirror to the optical system along its optical axis. This system enables a method of effecting autofocus measurements of an object placed in a first object plane that is intersected by the system optical axis when the mirror arm is removed from the lens housing, and, which also enables autofocusing of object surfaces in a second object plane when the mirror is attached by the arm to the lens housing.
    • 细长的,刚性的镜子支撑臂的上端在其上端可释放地固定到定向环上,该取向环可拆卸地且可旋转地安装在光学自动对焦测量系统的物镜壳体的下部圆柱形端上。 臂在其下端在壳体下方延伸并且在其上固定有在壳体下方间隔开的反射镜,并且位于与包含在壳体中的光学系统的光轴相交并相对于其倾斜的平面中。 镜面对着设置在与透镜系统的光轴横向隔开的物平面中的物体的表面,使得系统沿着与系统的光轴倾斜并相交的补充光轴聚焦, 住房。 因此,偏移对象平面中的物体的图像沿辅助轴线投影,然后沿着其光轴从反射镜投影到光学系统。 该系统能够实现当镜臂从透镜壳体移除时,放置在由系统光轴相交的第一物体平面中放置的物体的自动聚焦测量的方法,并且还能够使第二物体中的物体表面自动聚焦 当镜子通过手臂连接到镜头外壳时,平面。
    • 10. 发明授权
    • Variable magnification apparatus for reticle projection system
    • 光栅投影系统可变放大装置
    • US5619031A
    • 1997-04-08
    • US558793
    • 1995-11-15
    • Albert G. Choate
    • Albert G. Choate
    • B23Q17/24G02B27/34G02B7/04
    • G02B27/34B23Q17/24
    • A magnifying lens system is fixed to the lower end of a vertically adjustable support plate to overlie a workpiece, and to project an image thereof upwardly through a beamsplitter to the image sensor of a video camera that is mounted for vertical adjustment on the support plate above the lens system. A portion of the lens system registers with the reflective surface of a mirror which is inclined to the horizontal, and which registers also with the output of a reticle projecting mechanism that is operatively connected to the video camera for vertical adjustment therewith on the support plate. During auto-focusing, an image of a reticle contained in the reticle projecting mechanism is projected via the mirror, the lens system and the beamsplitter onto the surface of the workpiece. Since the reticle projecting mechanism is coupled to the camera, magnification of the images of the workpiece surface and the reticle will occur simultaneously.
    • 放大镜系统固定在垂直调节的支撑板的下端以覆盖工件,并将其图像向上突出通过分光镜投影到摄像机的图像传感器,摄像机被安装用于垂直调节在上面的支撑板上 镜头系统。 透镜系统的一部分与倾斜于水平镜的反射镜的反射表面配准,并且还与可操作地连接到摄像机的标线片突出机构的输出一起登记在支撑板上用于垂直调节。 在自动聚焦期间,包含在标线片突出机构中的掩模版的图像经由反射镜,透镜系统和分束器投射到工件的表面上。 由于标线片投影机构与照相机相连,工件表面和标线片的图像的放大率将同时发生。