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    • 2. 发明申请
    • Circulation housing for a mover
    • 移动器的循环住房
    • US20050168075A1
    • 2005-08-04
    • US10769307
    • 2004-01-30
    • Ed ReynoldsAndrew HazeltonMichael Binnard
    • Ed ReynoldsAndrew HazeltonMichael Binnard
    • H02K5/20H02K9/00H02K9/19H02K41/00H02K41/02H02K41/03
    • H02K41/03H02K5/20H02K9/00
    • A mover (36) for an exposure apparatus (10) includes a conductor array (358) and a circulation housing (362) that defines at least a portion of a fluid passageway (364) near the conductor array (358). The circulation housing (362) includes a wall (366A) having a wall thickness. In one embodiment, the wall thickness at a first position on the wall (366A) is different than the wall thickness at a second position on the wall (366A). The wall (366A) can be curved and the shape of the curve is different at the first position than at the second position. Further, a cross-sectional shape of the wall (366A) at the first position is different from a cross-sectional shape of the wall (366A) at the second position.
    • 用于曝光设备(10)的移动器(36)包括限定在导体阵列(358)附近的流体通道(364)的至少一部分的导体阵列(358)和循环壳体(362)。 循环壳体(362)包括具有壁厚的壁(366A)。 在一个实施例中,壁(366A)上的第一位置处的壁厚度不同于壁(366A)上的第二位置处的壁厚度。 壁(366A)可以是弯曲的,并且曲线的形状在第一位置处比在第二位置处不同。 此外,第一位置处的壁(366A)的横截面形状不同于第二位置处的壁(366A)的横截面形状。