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1. 发明专利

JP2013172019A Substrate processing apparatus and substrate processing method 有权
标题翻译：基板处理装置和基板处理方法
公开(公告)号：JP2013172019A
公开(公告)日：2013-09-02
申请号：JP2012035365
申请日：2012-02-21
申请人： Ebara Corp , 株式会社荏原製作所 , Toshiba Corp , 株式会社東芝
发明人： ISHII YU , KAWASAKI HIROYUKI , NAGAOKA KENICHI , ITO KENYA , KODERA MASAKO , TOMITA HIROSHI , NISHIOKA TAKESHI
IPC分类号： H01L21/304 , B08B1/04
CPC分类号： B08B1/001 , H01L21/67046 , H01L21/67051 , H01L21/68728
摘要： PROBLEM TO BE SOLVED: To provide a substrate processing apparatus which efficiently removes foreign objects adhering to a front surface and/or a rear surface of a substrate achieving a high removal ratio.SOLUTION: A substrate processing apparatus includes: a scrubber 50 causing a scrub member 61 to slidably contact with a first surface of a substrate W to perform surface treatment of the substrate W; a static pressure support mechanism 90 supporting a second surface of the substrate W, which is the opposite side of the first surface, using fluid pressure in a non-contact manner; a cleaning part 27 cleaning the substrate W on which the surface treatment is performed by the scrubber 50; and a dry part 100 drying the cleaned substrate W. The scrubber 50 rotates the scrub member 61 around its shaft center and causes the scrub member 61 to slidably contact with the first surface of the substrate W.
摘要翻译：要解决的问题：提供一种能够有效地去除附着在基板的前表面和/或后表面上的异物的基板处理装置，实现高的去除率。解决方案：基板处理装置包括：洗涤器50，其产生擦洗构件61与衬底W的第一表面滑动接触以对衬底W进行表面处理; 以非接触方式使用流体压力支撑作为第一表面的相对侧的基板W的第二表面的静压支撑机构90; 清洁部分27，清洁由洗涤器50执行表面处理的基板W; 和干燥部分100干燥清洁的基底W.洗涤器50围绕其轴心旋转擦洗部件61，并使擦洗部件61与基板W的第一表面滑动接触。

2. 发明专利

JP2017118146A スクラバー有权
公开(公告)号：JP2017118146A
公开(公告)日：2017-06-29
申请号：JP2017051113
申请日：2017-03-16
申请人：株式会社荏原製作所 , Ebara Corp , 株式会社東芝 , Toshiba Corp
发明人： ISHII YU , KAWASAKI HIROYUKI , NAGAOKA KENICHI , ITO KENYA , KODERA MASAKO , TOMITA HIROSHI , NISHIOKA TAKESHI
IPC分类号： H01L21/304 , B08B1/04 , B24B21/06
摘要：【課題】基板の表面および/または裏面に付着した異物を高い除去率で効率よく除去することができるスクラバーを提供する。【解決手段】スクラバー50は、その内部に基板Wの第1の面に摺接させて第1の面の表面処理を行うテープ状の複数のスクラブ部材61と、複数のスクラブ部材61をそれぞれ繰り出す複数のテープ繰り出しリール64と、複数のスクラブ部材61をそれぞれ巻き取る複数のテープ巻き取りリール65と、複数のテープ巻き取りリール65がそれぞれ連結された複数のテープ巻き取り軸67とを備え、スクラバー50は、スクラバー50の軸心周りに複数のスクラブ部材61を回転させながら複数のスクラブ部材61を基板Wの第1の面に摺接させる。【選択図】図8

3. 发明专利

JP2014177891A Vacuum pump 有权
标题翻译：真空泵
公开(公告)号：JP2014177891A
公开(公告)日：2014-09-25
申请号：JP2013051751
申请日：2013-03-14
申请人： Ebara Corp , 株式会社荏原製作所
发明人： KAWASAKI HIROYUKI
IPC分类号： F04C25/02 , F04C18/16 , F04C23/00 , F04C29/00 , F04C29/12
摘要： PROBLEM TO BE SOLVED: To provide a vacuum pump that improves the degree of freedom for access to an intake port and/or an exhaust port of the pump and also eliminates the need to separately dispose a supply port of inert gas for purging in a casing.SOLUTION: A vacuum pump includes: paired oppositely disposed rotors 2 and 2; a casing 1 having an intake/exhaust port and first bearings 3 for defining an inter-center axis distance of the paired rotors 2 and 2; and a motor part 10 that rotatingly drives the rotors 2 and 2. The intake port or exhaust port formed on the side of arrangement of the first bearings 3, of the casing 1, are provided at a plurality of locations.
摘要翻译：要解决的问题：提供一种真空泵，其提高进入泵的进气口和/或排气口的自由度，并且还消除了在壳体中单独设置用于吹扫的惰性气体供应口的需要解决方案：真空泵包括：成对相对设置的转子2和2; 具有进气/排气口的壳体1和用于限定成对转子2和2的中心轴距离的第一轴承3; 以及旋转地驱动转子2和2的马达部件10.形成在壳体1的第一轴承3的布置侧的进气口或排气口设置在多个位置。

4. 发明专利

JP2014169663A Vacuum pump 审中-公开
标题翻译：真空泵
公开(公告)号：JP2014169663A
公开(公告)日：2014-09-18
申请号：JP2013041852
申请日：2013-03-04
申请人： Ebara Corp , 株式会社荏原製作所
发明人： KAWASAKI HIROYUKI
IPC分类号： F04C18/16 , F04C25/02
摘要： PROBLEM TO BE SOLVED: To provide a vacuum pump comprising rotors that allow the simplification of a production process by integrally forming the whole rotors by one material and allow the elimination of the risk of causing a clearance between a screw part and a shaft part because of thermal deformation during operation at a high temperature.SOLUTION: A vacuum pump comprises: a pair of rotors 2 arranged oppositely; a casing 1 that includes an inlet port and an outlet port and includes first bearings 3 for defining a distance between axes of the pair of rotors 2; and a motor part 10 that rotates the rotors 2. The rotors 2 are integrally formed by one material.
摘要翻译：要解决的问题：提供一种包括转子的真空泵，该转子允许通过一种材料一体地形成整个转子来简化生产过程，并且可以消除由于螺纹部分和轴部分之间的间隙而导致的风险，因为在高温运行期间的热变形。解决方案：真空泵包括：一对相反布置的转子2; 壳体1，其包括入口端口和出口，并且包括用于限定一对转子2的轴线之间的距离的第一轴承3; 以及使转子2旋转的马达部件10.转子2由一种材料一体形成。

5. 发明专利

JP2014163340A Vacuum pump 有权
标题翻译：真空泵
公开(公告)号：JP2014163340A
公开(公告)日：2014-09-08
申请号：JP2013036784
申请日：2013-02-27
申请人： Ebara Corp , 株式会社荏原製作所
发明人： KAWASAKI HIROYUKI , KOJIMA YOSHINORI , HOZUMI TAKASHI
IPC分类号： F04C25/02 , F04C18/16 , F04C29/00
摘要： PROBLEM TO BE SOLVED: To provide a vacuum pump in which contact between screw parts of rotors and a casing can be prevented by keeping minute clearances between the screw parts of the rotors and the casing during operation and in which variations of the minute clearances between the screw parts of the rotors and the casing can be made very small even if respective parts of the pump are thermally expanded by a temperature rise during operation.SOLUTION: A vacuum pump comprises: a pair of rotors 2 arranged oppositely; a casing 1 that includes an inlet port and an outlet port and houses first bearings 3 for defining a distance between axes of the pair of rotors 2; and a motor part 10 that rotates the rotors 2. The casing 1, the screw parts of the rotors 2, and a bearing plate 4 that houses second bearings 5 for defining the distance between the axes of the pair of rotors are made of the same material.
摘要翻译：要解决的问题：提供一种真空泵，其中可以通过在操作期间通过在转子的螺杆部分和壳体之间保持微小的间隙来防止转子的螺杆部分和壳体之间的接触，并且其中，即使泵的各部分在运行期间的温度升高而热膨胀，转子和壳体的螺纹部分也可以非常小。解决方案：真空泵包括：一对相反地布置的转子; 壳体1，其包括入口和出口，并容纳用于限定一对转子2的轴线之间的距离的第一轴承3; 以及使转子2旋转的马达部件10.壳体1，转子2的螺钉部分和容纳用于限定一对转子的轴线之间的距离的第二轴承5的支承板4由相同的材料。

6. 发明专利

JP2013167207A Turbo-molecular pump 审中-公开
标题翻译：涡轮分子泵
公开(公告)号：JP2013167207A
公开(公告)日：2013-08-29
申请号：JP2012030970
申请日：2012-02-15
申请人： Ebara Corp , 株式会社荏原製作所
发明人： KAWASAKI HIROYUKI , SOFUGAWA TAKUJI
IPC分类号： F04D19/04
CPC分类号： F04D19/042
摘要： PROBLEM TO BE SOLVED: To provide a turbo-molecular pump capable of preventing trouble of inflow of dust or a foreign matter to a vacuum container, or the like due to air intrusion that occurs in a vacuum pumping system provided with the turbo-molecular pump and, meanwhile, capable of preventing air intrusion to the turbo-molecular pump.SOLUTION: An automatic opening and closing valve provided with a valve body 41 that opens and closes according to a pressure difference is disposed on a suction port and/or a pump exhaust port of a pump casing 1, or near the suction port and/or the pump exhaust port of the pump casing 1. The automatic opening and closing valve includes a valve seat 1s, a valve body 41 pushed in one direction by a restoring force of at least two springs 43 and at least two valve body support rods 42 which support the valve body 41 and, at the same time, guide the movement of the valve body 41, and is configured such that, when a pressure is applied in a direction reverse to the direction into which the valve body 41 is pushed, the spring 43 is contracted in the pressure actuating direction and, thereby, the valve body 41 is moved in the axial direction of the valve body support rods 42 such that the valve seat 1s is closed.
摘要翻译：要解决的问题：提供一种涡轮分子泵，其能够防止由于在具有涡轮分子泵的真空泵送系统中发生的空气侵入而导致灰尘或异物流入真空容器等的麻烦同时能够防止空气侵入涡轮分子泵。解决方案：具有阀体41的自动开关阀，其根据压力差打开和关闭，设置在吸入口和/或泵泵壳1的排气口或泵壳1的吸入口和/或泵排出口附近。自动开关阀包括阀座1s，通过恢复力沿一个方向推动的阀体41 至少两个弹簧43和至少两个支撑阀体41的阀体支撑杆42，并且同时引导阀体41的运动，并且构造成使得当在方向反转在阀体41被推动的方向上，弹簧43在压力致动方向上收缩，从而阀体41沿着阀体支撑杆42的轴向移动，使得阀座1s为关闭。

7. 发明专利

JP2010207086A Rotating device and turbo molecular pump 有权
标题翻译：旋转装置和涡轮分子泵
公开(公告)号：JP2010207086A
公开(公告)日：2010-09-16
申请号：JP2010130565
申请日：2010-06-07
申请人： Ebara Corp , 株式会社荏原製作所
发明人： KAWASAKI HIROYUKI , MIYAMOTO MATSUTARO
IPC分类号： H02K17/16 , F04D19/04 , H02K7/14
摘要： PROBLEM TO BE SOLVED: To provide a rotating device which rotates stably when a rotor rotates at a high speed and rotates at a relatively high speed by rotating force of an inductive motor with excellent reliability, and a turbo molecular pump.
SOLUTION: The rotating device includes a rotor shaft 11 which rotates at a high speed by rotating force of an inductive motor. A rotor spacer 20 comprises a fixed part in a small inner diameter fixed to the rotor shaft 11 and a cylindrical covering part in a large inner diameter for covering the periphery of a motor end ring 13b, the covering part being formed integrally with an end part on the side of a core 13a of a reverse motor rotor of the fixed part, and the outer diameter of the covering part being smaller than the outer diameter of a core of the motor rotor. By fixing the fixed part fitting to the rotor shaft 11, the covering part covers the periphery of the end part on the side of the core 13a of the reverse motor rotor of the motor end ring 13b.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种当转子高速旋转并且通过具有优异的可靠性的感应电机的旋转力以较高速度旋转时的旋转装置以及涡轮分子泵。解决方案：旋转装置包括通过感应电动机的旋转力高速旋转的转子轴11。转子间隔件20包括固定到转子轴11的小内径的固定部分和用于覆盖电动机端环13b的周边的大内径的圆柱形覆盖部分，该覆盖部分与端部部分在固定部的反转电动机转子的铁芯13a的一侧，并且覆盖部的外径小于电动机转子的铁芯的外径。通过将固定部件配合固定到转子轴11上，覆盖部分覆盖电动机端环13b的反向电动机转子的铁芯13a侧端部的周边。版权所有（C）2010，JPO＆INPIT

8. 发明专利

JP2009257213A Turbo vacuum pump 审中-公开
标题翻译：涡轮真空泵
公开(公告)号：JP2009257213A
公开(公告)日：2009-11-05
申请号：JP2008107878
申请日：2008-04-17
申请人： Ebara Corp , 株式会社荏原製作所
发明人： KAWASAKI HIROYUKI
IPC分类号： F04D19/04
CPC分类号： F04D29/0513 , F04D17/168 , F04D19/048
摘要： PROBLEM TO BE SOLVED: To provide an inexpensively manufacturable turbo vacuum pump capable of highly accurately and rotatably holding a rotary body at a high speed, in the turbo vacuum pump capable of compressing gas up to atmospheric pressure from a high vacuum.
SOLUTION: This turbo vacuum pump has a rotary shaft 1 extending over the substantially total length of the pump, a blade exhaust part 10 formed by alternately arranging a rotor blade and a stator blade in a casing 2, and a bearing motor part 50. A gas bearing 40 is used for a bearing for supporting the rotary shaft 1 in the thrust direction. A spiral groove 45 is formed on both surfaces of a fixed side part 41 of the gas bearing. The fixed side part 41 forming the spiral groove 45 is sandwiched by an upper side rotary side part 42 and a lower side rotary side part 41 fixed to the rotary shaft 1. Centrifugal blade elements 43a and 63a for compressively exhausting the gas in the radial direction are formed on at least one surface of a surface opposite to an opposed surface of the spiral groove 45 of the lower side rotary side part 43 and a surface of the stator blade 63 opposed in the axial direction to the lower side rotary side part 43.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：为了提供能够高精度和可旋转地保持高速旋转体的涡轮真空泵，能够从高真空将气体压缩至大气压的涡轮真空泵中提供廉价的涡轮真空泵。解决方案：该涡轮真空泵具有在泵的基本上全长上延伸的旋转轴1，通过在壳体2中交替地布置转子叶片和定子叶片而形成的叶片排出部分10以及轴承马达部分气体轴承40用于在推力方向上支撑旋转轴1的轴承。螺旋槽45形成在气体轴承的固定侧部分41的两个表面上。形成螺旋槽45的固定侧部41被固定在旋转轴1上的上侧旋转侧部42和下侧旋转侧部41夹持。用于沿径向压缩排出气体的离心叶片元件43a，63a 形成在与下侧旋转侧部43的螺旋槽45的相对面的相对面的表面和与轴向相对的定子叶片63的与下侧旋转侧部43相对的面的至少一个面上。版权所有（C）2010，JPO＆INPIT

9. 发明专利

JP2008286179A Turbo type vacuum pump, and semiconductor manufacturing device equipped therewith 审中-公开
标题翻译：涡轮式真空泵及其半导体制造装置
公开(公告)号：JP2008286179A
公开(公告)日：2008-11-27
申请号：JP2007134576
申请日：2007-05-21
申请人： Ebara Corp , 株式会社荏原製作所
发明人： KAWASAKI HIROYUKI
IPC分类号： F04D19/04 , F04D29/02 , F04D29/044
摘要： PROBLEM TO BE SOLVED: To provide a turbo type vacuum pump, smaller and lighter, easy to construct with a first rotating shaft on which a separately constructed moving blade is mounted and a second rotating shaft on which a motor rotor is mounted fastening each other, and adaptable for high speed rotation and for operating the rotor at relatively high temperatures.
SOLUTION: The turbo type vacuum pump, wherein a bearing for rotationally supporting the moving blade and a motor part M are arranged on the single axial side of a pump part P, comprises the first rotating shaft 25 on which the moving blade is mounted, the second rotating shaft 44 on which the motor rotor 41 is mounted, and a fastening member 29 for fastening the first rotating shaft 25 to the second rotating shaft 44. The first rotating shaft 25 is formed of a highly corrosion resistant material, and the second rotating shaft 44 is formed of a ferromagnetic material. The linear expansion coefficient of the first rotating shaft 25 is smaller than the linear expansion coefficient of the second rotating shaft. The first rotating shaft 25 is in a hollow structure, and the fastening member 29 passes through a hollow portion of the first rotating shaft 25 and fastens the first rotating shaft 25 to the second rotating shaft 44.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种更小更轻，更容易构造的涡轮式真空泵，其中安装有单独构造的动叶片的第一旋转轴和安装有马达转子的第二旋转轴固定彼此相适应，适用于高速旋转和用于在较高温度下操作转子。解决方案：涡轮式真空泵，其中用于旋转地支撑动叶片的轴承和马达部件M布置在泵部件P的单个轴向侧上，包括第一旋转轴25，动叶片安装有电动机转子41的第二旋转轴44以及用于将第一旋转轴25紧固到第二旋转轴44的紧固构件29.第一旋转轴25由耐腐蚀性高的材料形成，并且第二旋转轴44由铁磁材料形成。第一旋转轴25的线膨胀系数小于第二旋转轴的线膨胀系数。第一旋转轴25处于中空结构，并且紧固构件29穿过第一旋转轴25的中空部分并将第一旋转轴25紧固到第二旋转轴44.版权所有（C）2009 ，JPO＆INPIT

10. 发明专利

JP2007113455A Evacuation system 审中-公开
标题翻译：排气系统
公开(公告)号：JP2007113455A
公开(公告)日：2007-05-10
申请号：JP2005304317
申请日：2005-10-19
申请人： Ebara Corp , Tokki Corp , トッキ株式会社 , 株式会社荏原製作所
发明人： NAGAI JUNICHI , TAKAGI KENICHI , HAMANO AKIHIRO , KITAMURA TAKESHI , TAKEMI TAKASHI , UCHIUMI CHIKATAKE , KAWASAKI HIROYUKI
IPC分类号： F04D19/04
CPC分类号： F04D19/04
摘要： PROBLEM TO BE SOLVED: To provide an evacuation system capable of running stably for a long period of time in evacuation of organic material evaporated by heating.
SOLUTION: The evacuation system A evacuates vapor generated in heating organic material to evaporation temperature or higher in a vacuum chamber 30. A turbo-molecular pump 34 provided with heaters 15, 17 achieving evaporation temperature of the organic material or higher is connected to the vacuum chamber 30, and an evacuation pipe 32 of which temperature is maintained at evaporation temperature of the organic material or higher is connected to the turbo-molecular pump 34. A cold trap 36 is connected to the evacuation pipe 32, and a roughing vacuum pump is connected to the cold trap 36. Also, an adhesion prevention mechanism 40 introducing inert gas to an intake side of the turbo-molecular pump 34 is provided.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：解决的问题：提供能够长时间稳定地排出通过加热蒸发的有机材料的抽空系统。排气系统A将真空室30内的加热有机材料中产生的蒸气排出到蒸发温度以上。连接有提供有机材料的蒸发温度以上的加热器15,17的涡轮分子泵34连接并且将有机材料的蒸发温度维持在该温度以下的排气管32与涡轮分子泵34连接。冷阱36与排气管32连接，粗抽真空泵与冷阱36连接。此外，设置有将惰性气体引入涡轮分子泵34的吸入侧的防粘附机构40。版权所有（C）2007，JPO＆INPIT

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