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1. 发明专利

JP2008091951A Substrate treating device 有权
标题翻译：基板处理设备
公开(公告)号：JP2008091951A
公开(公告)日：2008-04-17
申请号：JP2007332170
申请日：2007-12-25
申请人： Ebara Corp , Toshiba Corp , 株式会社東芝 , 株式会社荏原製作所
发明人： NAKANISHI MASAYUKI , ISHII YU , NAKAMURA KENRO
IPC分类号： H01L21/304 , B24B9/00 , B24B21/00 , B24B49/12
摘要： PROBLEM TO BE SOLVED: To provide a substrate treating device capable of effectively removing surface roughness occurring on a periphery of the substrate and the like and films attached to the periphery of the substrate and the like that can be contamination sources, in a semiconductor device manufacturing process and the like. SOLUTION: The substrate treating device is provided with a polishing tape 21, a mechanism that rotates the substrate W, and a polishing head 41 that presses the tape 21 against a bevel section of the rotating substrate. The head 41 is provided with a support section 42 having two protrusions 42a, 42b, an elastic member 43 that supports the tape 21 extended between the ends of the protrusions 42a, 42b, and an air cylinder 45 that moves the head 41 in the radial direction of the substrate. The supporting section 42 of the head 41 is moved in the radial direction of the substrate by the cylinder 45 to extend the elastic member 43 to generate a tension in it, and this tension allows the tape 21 to be pressed against the bevel section of the substrate by a certain force to polish the bevel section. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够有效地去除在基板等的周边上发生的表面粗糙度的基板处理装置以及附着到可能是污染源的基板等的外围的膜，半导体器件制造工艺等。解决方案：基板处理装置设置有研磨带21，使基板W旋转的机构，以及将带21压靠旋转基板的斜切部的研磨头41。头部41设置有具有两个突起42a，42b的支撑部分42，弹性部件43，其支撑在突起42a，42b的端部之间延伸的带21和使头部41径向移动的气缸45 基板的方向。头部41的支撑部42通过圆筒45在基板的径向方向上移动，以使弹性构件43延伸以在其中产生张力，并且该张力允许带21压靠在基座的斜面部分基板通过一定的力量抛光斜面部分。版权所有（C）2008，JPO＆INPIT

2. 发明专利

JP2004241434A Substrate processing device 有权
标题翻译：基板处理装置
公开(公告)号：JP2004241434A
公开(公告)日：2004-08-26
申请号：JP2003026367
申请日：2003-02-03
申请人： Ebara Corp , Toshiba Corp , 株式会社東芝 , 株式会社荏原製作所
发明人： NAKANISHI MASAYUKI , ISHII YU , NAKAMURA KENRO
IPC分类号： H01L21/304 , B24B9/06 , B24B21/00
CPC分类号： B24B9/065 , B24B21/002
摘要： PROBLEM TO BE SOLVED: To provide a substrate processing device which is capable of effectively removing surface roughness in the periphery of a substrate or a film which adheres to the periphery or the like of the substrate to become a pollution source in a process of manufacturing a semiconductor device. SOLUTION: The substrate processing device performs a process of pressing a polishing tape 21 on the prescribed spot of the substrate W and polishing the substrate W by sliding the tape 21 on the substrate W. The substrate processing device is equipped with a polishing unit 10 which is provided with an edge polishing unit 20 that polishes the edge E of the substrate W pressing the polishing tape 21 against the edge E, and a beveled part polishing unit 40 that polishes the beveled part B of the substrate W pressing the polishing tape 21 against the beveled part B. COPYRIGHT: (C)2004,JPO&NCIPI
摘要翻译：要解决的问题：提供一种基板处理装置，该基板处理装置能够有效地去除基板周围的表面粗糙度或附着在基板的周围等的膜，从而成为过程中的污染源制造半导体器件。＆lt; P＆gt;解决方案：基板处理装置执行将基板W的规定点上的研磨带21按压的处理，并通过滑动基板W上的带21来研磨基板W.基板处理装置配备有抛光单元10设置有边缘抛光单元20，该边缘抛光单元20抛光将抛光带21压靠边缘E的基板W的边缘E;以及倾斜部分抛光单元40，其对基板W的倾斜部分B进行抛光，带21对着斜面部分B.版权所有（C）2004，JPO＆NCIPI

3. 发明专利

JP2004093330A Reaction detection chip, reaction detection chip manufacturing method, and reaction detection system 审中-公开
公开(公告)号：JP2004093330A
公开(公告)日：2004-03-25
申请号：JP2002254558
申请日：2002-08-30
申请人： Ebara Corp , 株式会社荏原製作所
发明人： NAKAMURA KENRO , ABE YUJI , IIMURA SEIJI , NAGASAWA HIROSHI
IPC分类号： G01N33/53 , C12M1/00 , C12M1/34 , C12N15/09 , G01N33/566
摘要： PROBLEM TO BE SOLVED: To provide a reaction detection chip capable of recognizing a large number of functional molecules used for gene diagnosis and physiological function diagnosis.
SOLUTION: In this reaction detection chip, activated molecules having an amino group terminals are led onto the surface of a carrier, and oligonucleotide formed from an amino group by dehydration reaction is used as probe molecules. The carrier is of a porous type, and desirably be formed of a phase-separated porous glass, and formed such that the activated molecules are formed of one or multiple types of various types of aminosilane, aminotitanate, and aminoaluminate having an amino group in the molecular structures and that the carrier having the probe immobilized thereto is arranged, connected, and fixed to one or more districts of one or a plurality of micro districts provided on a substrate on the substrate formed of a chemically and mechanically stable material.
COPYRIGHT: (C)2004,JPO

4. 发明专利

JP2006266789A Spotting method and spotting device 审中-公开
标题翻译：点播方法和点播设备
公开(公告)号：JP2006266789A
公开(公告)日：2006-10-05
申请号：JP2005083519
申请日：2005-03-23
申请人： Ebara Corp , 株式会社荏原製作所
发明人： ABE YUJI , NAKAMURA KENRO , KOGURE NAOAKI
IPC分类号： G01N35/10
摘要： PROBLEM TO BE SOLVED: To provide a spotting method and a spotting device capable of performing stably excellent spotting, even when particles are included in spotting liquid, or when the viscosity of the spotting liquid is high, or when only a small amount of spotting liquid is available. SOLUTION: In this spotting method, the spotting liquid 1 stored in a spotting liquid discharge mechanism 2 is discharged from a discharge port 5. In the spotting method, the spotting liquid 1 is arranged on the discharge port side in the spotting liquid discharge mechanism 2, and dummy liquid 6 is arranged behind the spotting liquid 1 to be in contact with the spotting liquid 1, and the spotting liquid 1 is pressed through the dummy liquid 6. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：为了提供即使在点样液体中包含颗粒的情况下或者当点样液体的粘度高时，或者当仅少量时，能够实现稳定优异的斑点的点样方法和点样装置的液体是可用的。解决方案：在这种点样方法中，存储在点样液体排放机构2中的点样液1从排出口5排出。在点样方法中，点样液1设置在点样液体的排出口侧排出机构2和虚拟液体6布置在点样液体1的后面与点样液1接触，并且点样液体1通过虚拟液体6被压制。版权所有（C）2007，JPO＆INPIT

5. 发明专利

JP2006247492A Solid-phase synthesis apparatus 审中-公开
标题翻译：固相合成装置
公开(公告)号：JP2006247492A
公开(公告)日：2006-09-21
申请号：JP2005065918
申请日：2005-03-09
申请人： Ebara Corp , 株式会社荏原製作所
发明人： NAKAMURA KENRO , ABE YUJI , KOGURE NAOAKI
IPC分类号： B01J19/00 , G01N33/53 , G01N33/543 , G01N33/552 , G01N33/553 , G01N37/00
摘要： PROBLEM TO BE SOLVED: To provide a solid-phase synthesis apparatus without generating troubles such as lowering a yield of a synthesis reaction even if a particle diameter of a carrier particle using for the solid-phase synthesis is small or an amount of carrier particles to be received in a column is plenty.
SOLUTION: The solid-phase synthesis apparatus is used for contacting a predetermined liquid to a plurality of carrier particles 2 to thereby synthesize predetermined substances on the surfaces of the carrier particles 2. The solid-phase synthesis apparatus stores the carrier particles 2, and has a column 1 where the liquid passes through and a dispersing mechanism (8, 10, 15, or the like) for making the carrier particles 2 disperse in the column 1.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：待解决的问题：为了提供一种固相合成装置，即使使用固相合成的载体粒子的粒径小，或者使用固体相合成装置的量，也不会产生诸如降低合成反应的产率的问题在柱中接收的载体颗粒很多。解决方案：固相合成装置用于使预定液体与多个载体颗粒2接触，从而在载体颗粒2的表面上合成预定物质。固相合成装置将载体颗粒2 并且具有液体通过的柱1和用于使载体颗粒2分散在柱1中的分散机构（8,10,15等）。版权所有（C）2006，JPO＆NCIPI

6. 发明专利

JP2005249429A Reaction detection chip 审中-公开
标题翻译：反应检测芯片
公开(公告)号：JP2005249429A
公开(公告)日：2005-09-15
申请号：JP2004056758
申请日：2004-03-01
申请人： Ebara Corp , 株式会社荏原製作所
发明人： NAKAMURA KENRO , ABE YUJI , KOGURE NAOAKI
IPC分类号： G01N33/53 , C12M1/00 , C12N15/09 , C12Q1/68 , G01N21/78 , G01N37/00
摘要： PROBLEM TO BE SOLVED: To improve the S/N ratio by increasing stably a signal component, and to improve detection capacity of a DNA chip, by stabilizing the magnitude of the signal component by manufacturing a three-dimensionally arranged probe capable of controlling stably the number of probes and uniformizing specimen supply to the probes in order to improve the detection capacity in a reaction detection chip.
SOLUTION: In this reaction detection chip where a spot is formed by gathering and immobilizing on a substrate a plurality of such porous particles that probe molecules are bonded to the surface including pores of each porous particle, the porous particles are transparent to incident light, and the porous particles are immobilized in the monolayer state on the substrate.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：为了通过稳定地增加信号分量来提高S / N比，并且通过制造三维布置的探针来稳定信号分量的大小来提高DNA芯片的检测能力，为了提高反应检测芯片的检测能力，能够稳定地控制探针的数量和使检体的试样供给均匀化。解决方案：在该反应检测芯片中，通过聚集并固定在基板上形成点，多个这样的探针分子的多孔颗粒结合到包括每个多孔颗粒的孔的表面，多孔颗粒对于入射是透明的光，并且多孔颗粒以单层状态固定在基底上。版权所有（C）2005，JPO＆NCIPI

7. 发明专利

JP2004212108A Reaction detecting cell and analyzing system using the same 审中-公开
公开(公告)号：JP2004212108A
公开(公告)日：2004-07-29
申请号：JP2002379634
申请日：2002-12-27
申请人： Ebara Corp , 株式会社荏原製作所
发明人： NAKAMURA KENRO
IPC分类号： G01N33/483 , C12M1/00 , C12N15/09 , C12Q1/68 , G01N21/03 , G01N21/21 , G01N33/53 , G01N33/566
摘要： PROBLEM TO BE SOLVED: To provide a technique for directly recognizing a bond as it is without newly adding a molecule or the like for recognizing the bond when the bond between molecules of a probe and a specimen such as a hybridization bond or the like is detected, and to establish a detection method not requiring excessive labor and cost and causes no lowering of detection precision due to the deterioration of the specimen or probe.
SOLUTION: The detection method causing no lowering of detection precision due to the deterioration of the specimen or probe can be obtained by directly recognizing the bond of the molecules of the probe and the specimen based on the change in rotatary power originating from the optical activity of sugar or an amino acid constituting molecules. Since the new addition of a molecule or the like for recognizing the bond is not unnecessary when the bond of the molecules of the probe and the specimen such as the hybridization bond or the like is detected, excessive labor and time can be avoided. That is, the detection operation due to a reaction detecting chip such as a DNA chip or the like can be performed for a shorter time at a lower cost than before. Further, since the new addtion of the molecule or the like for recognizing the bond is not required, the specimen or the probe is not deteriorated and the deterioration of detection precision caused by that of the probe is eliminated.
COPYRIGHT: (C)2004,JPO&NCIPI

8. 发明专利

JP2008042220A Method and apparatus for processing substrate 审中-公开
标题翻译：用于处理基板的方法和装置
公开(公告)号：JP2008042220A
公开(公告)日：2008-02-21
申请号：JP2007246720
申请日：2007-09-25
申请人： Ebara Corp , Toshiba Corp , 株式会社東芝 , 株式会社荏原製作所
发明人： ISHII YU , NAKANISHI MASAYUKI , NAKAMURA KENRO
IPC分类号： H01L21/304 , B24B21/02 , B24B49/12
摘要： PROBLEM TO BE SOLVED: To provide a method and an apparatus for processing a substrate to effectively remove surface coarseness generated around a circumferential part or the like of the substrate and a film adhering to the circumferential part or the like of the substrate and becoming a source of contaminant, in a manufacturing step of a semiconductor apparatus or the like. SOLUTION: A bevel part and an edge part of the substrate are polished with a polishing film 22 after a CMP step. Projections and depressions of the bevel part are measured by applying set shape and set intensity of light from a normal direction to a device forming surface of the substrate onto a part of the substrate bevel part where a polishing head is not positioned and by measuring dispersed light, thus a finishing point of the polishing is detected based on the measurement. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种用于处理基板的方法和装置，以有效地去除基板周围部分等周围产生的表面粗糙度和附着到基板的圆周部分等的膜，以及在半导体装置等的制造工序中成为污染源。解决方案：在CMP步骤之后，用抛光膜22抛光衬底的斜面部分和边缘部分。通过将设定的形状和从正常方向的光强度设置到基板的装置形成表面的设备的形状和抛光头未被定位的基板斜面部分的一部分上，并且通过测量分散的光来测量斜面部分的突出和凹陷因此基于测量来检测抛光的最终点。版权所有（C）2008，JPO＆INPIT

9. 发明专利

JP2007089446A Method for isolating single strand nucleic acid of sense chain or anti-sense chain from pcr amplification products containing sense chain and anti-sense chain 审中-公开
标题翻译：用于从包含感应链和抗感染链的PCR扩增产物中分离单链或单链的单链核酸的方法
公开(公告)号：JP2007089446A
公开(公告)日：2007-04-12
申请号：JP2005281677
申请日：2005-09-28
申请人： Ebara Corp , 株式会社荏原製作所
发明人： NAKAMURA KENRO , KOGURE NAOAKI , ABE YUJI
IPC分类号： C12N15/09
摘要： PROBLEM TO BE SOLVED: To provide a method for easily separating an amplified objective chain from PCR amplification products containing both a sense chain and an anti-sense chain. SOLUTION: This method for separating a synthesized sense chain from a synthesized anti-sense chain in the PCR amplification product of a double strand nucleic acid comprising an anti-sense chain 1 and a sense chain 4 comprises a process for adding a functional portion 10 to at least one of a sense primer 2 and an anti-sense primer 3 and then subjecting the product to a PCR amplification to obtain the PCR amplification product in which at least one of the synthesized sense chain and the synthesized anti-sense chain has the functional portion 10, and a process for separating one chain from the other chain by the utilization of the functional portion 10 under a temperature condition in which the sense chain and the anti-sense chain in the PCR amplification product have single strand forms. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：待解决的问题：提供一种容易地将扩增的目标链与含有感应链和反义链的PCR扩增产物分离的方法。解决方案：用于在包含反义链1和感测链4的双链核酸的PCR扩增产物中从合成的反义链分离合成的有义链的方法包括添加官能团部分10至有义引物2和反义引物3中的至少一个，然后对产物进行PCR扩增，得到其中至少一个合成的感应链和合成反义链的PCR扩增产物具有功能部分10，以及通过利用功能部分10在PCR扩增产物中的有义链和反义链具有单链形式的温度条件下将一条链与另一条链分离的方法。版权所有（C）2007，JPO＆INPIT

10. 发明专利

JP2007093403A Method for evaluating dna chip for detection of snps 审中-公开
标题翻译：用于检测SNPS的DNA芯片的方法
公开(公告)号：JP2007093403A
公开(公告)日：2007-04-12
申请号：JP2005283673
申请日：2005-09-29
申请人： Ebara Corp , 株式会社荏原製作所
发明人： NAKAMURA KENRO , ABE YUJI , KOGURE NAOAKI
IPC分类号： G01N33/53 , C12M1/00 , C12N15/09 , C12Q1/68 , G01N33/566
摘要： PROBLEM TO BE SOLVED: To provide a method capable of easily and accurately evaluating the performance of DNA chips for the detection of SNPs by prescribed preliminary experiments and the quantitative capability and reliability of detection in particular. SOLUTION: The method for evaluating the performance of DNA chips for the detection of SNPs includes the preparation of a plurality of combinations of nucleic acid probes and nucleic acid specimens; the execution of hybridization reaction for each combination and the measurement of the concentration of hybrid nucleic acids formed in the hybridization reaction; and the examination of the positive correlation between the intensity of measurement signals for each combination and the total number of hydrogen-bonded pairs which can be theoretically formed between the nucleic acid probes and the nucleic acid specimens for each combination. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够通过规定的初步实验容易且准确地评价用于检测SNP的DNA芯片的性能，特别是检测的定量能力和可靠性的方法。解决方案：用于评估用于检测SNP的DNA芯片的性能的方法包括制备核酸探针和核酸样品的多种组合; 每个组合的杂交反应的执行和杂交反应中形成的杂交核酸的浓度的测量; 以及每个组合的测量信号的强度与可以在每个组合的核酸探针和核酸样品之间理论上形成的氢键对的总数之间的正相关性的检查。版权所有（C）2007，JPO＆INPIT

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