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1. 发明申请

WO2011146432A2 CONTROLLED VAPORIZATION SYSTEM AND METHOD FOR SURFACE PRIMING IN SEMICONDUCTOR MANUFACTURING 审中-公开
标题翻译：控制蒸发系统及其在半导体制造中的表面加工方法
公开(公告)号：WO2011146432A2
公开(公告)日：2011-11-24
申请号：PCT/US2011036746
申请日：2011-05-17
申请人： ENTEGRIS INC , XIA YANAN ANNIE , FUNAHASHI ISAMU , HARAGUCHI SEIJI , RAMIREZ RAUL
发明人： XIA YANAN ANNIE , FUNAHASHI ISAMU , HARAGUCHI SEIJI , RAMIREZ RAUL
CPC分类号： B01D61/246 , B01D61/362 , B01D63/02 , B01D2313/90 , G03F7/162 , G03F7/70933
摘要： A method and corresponding system for a contactor used to introduce a chemical solvent to a gas stream are described. The chemical solvent is directed onto a first side of the contactor and the gas stream is directed onto a second side of the contactor. The first side of the contactor is chemical solvent permeable. The chemical solvent diffuses through the first side of the contactor onto the second side and creates a mixture with the gas stream. The mixture may be used to prime substrate surfaces in photolithography applications to enhance transfer of patterns to substrate surfaces. The flow, concentration, and temperature of the gas stream and adhesion parameter may be controlled.
摘要翻译：描述了用于向气流引入化学溶剂的接触器的方法和相应系统。化学溶剂被引导到接触器的第一侧，并且气流被引导到接触器的第二侧。接触器的第一面是化学溶剂可渗透的。化学溶剂通过接触器的第一侧扩散到第二侧，并与气流产生混合物。该混合物可用于在光刻应用中填充衬底表面以增强图案向衬底表面的转移。可以控制气流的流动，浓度和温度以及粘附参数。

2. 发明专利

JP2009038047A Liquid vaporization apparatus 审中-公开
标题翻译：液体蒸发装置
公开(公告)号：JP2009038047A
公开(公告)日：2009-02-19
申请号：JP2006122148
申请日：2006-04-26
申请人： Entegris Inc , インテグリス・インコーポレーテッド
发明人： OYASHIKI YASUSHI , HARAGUCHI SEIJI
IPC分类号： H01L21/027 , G03F7/20
CPC分类号： C23C16/4481
摘要： PROBLEM TO BE SOLVED: To solve the problem of mixing of mist in a liquid vapor fed to a semiconductor process by the use of a single vaporization apparatus.
SOLUTION: The liquid vaporization apparatus, which achieves contact of a liquid with a carrier gas to thereby attain vaporization, comprises: a vaporization section (13) fitted with porous membranes in an air tight housing (3); a mist separation section (14) partitioned by a bulkhead (11) from the vaporization section (13) and fitted with filter materials (27, 31, 43); a liquid inlet (26) for feeding of the liquid to a liquid flow channel on the upstream of the porous membranes; a gas inlet (23) for feeding of the carrier gas to a gas flow channel on the downstream of the porous membranes; a connection passageway passing through the bulkhead (11) on the outlet side of the gas flow channel and making communication to the upstream side of the filter materials (27, 33, 43) to draw out the vapor resulting from vaporization by contact of the liquid having permeated the porous membranes with the carrier gas from the gas flow channel to the upstream side (15) of the separation section (13); and vapor outlets (29, 35) for drawing out the vapor having mist removed therefrom from the downstream side of the filter materials (27, 33, 43).
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：解决的问题：为了解决通过使用单一蒸发装置将进入半导体工艺的液体蒸气中的雾混合的问题。解决方案：实现液体与载体气体接触从而实现蒸发的液体蒸发装置包括：在气密壳体（3）中装有多孔膜的蒸发部分（13）; 由隔板（11）与蒸发部分（13）分隔并配有过滤材料（27,31,43）的雾分离部分（14）; 液体入口（26），用于将液体供给到多孔膜上游的液体流动通道; 用于将载气供给到多孔膜下游的气体流路的气体入口（23）连接通道，其穿过所述气体流动通道的出口侧上的所述隔板（11）并与所述过滤材料（27,33,43）的上游侧连通，以通过所述液体接触而抽出蒸发产生的蒸汽已经将载气从气流通道渗透到分离段（13）的上游侧（15）的多孔膜; 以及蒸气出口（29,35），用于从所述过滤材料（27,33,43）的下游侧抽出从其中除去的雾的蒸气。版权所有（C）2009，JPO＆INPIT

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