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1. 发明申请

WO2009143056A1 GASIFICATION SYSTEMS AND METHODS FOR MAKING BUBBLE FREE SOLUTIONS OF GAS IN LIQUID 审中-公开
标题翻译：用于制造气体中无气泡溶液的气化系统和方法
公开(公告)号：WO2009143056A1
公开(公告)日：2009-11-26
申请号：PCT/US2009/044343
申请日：2009-05-18
申请人： ENTEGRIS, INC. , XIA, Yanan, Annie , NIERMEYER, J., Karl , MOLLICA, Rosario , CONNER, Gregg, T.
发明人： XIA, Yanan, Annie , NIERMEYER, J., Karl , MOLLICA, Rosario , CONNER, Gregg, T.
IPC分类号： B01F3/04
CPC分类号： B01F3/04439 , B01F3/04106 , B01F3/04985 , B01F15/00207 , B01F2003/04404 , Y10T137/0318
摘要： Embodiments disclosed herein can introduce low amounts of gas in a liquid with fast response time and low variation in concentration. In one embodiment, a gas is directed into an inlet on a gas contacting side of a porous element of a contactor and a liquid is directed into an inlet on a liquid contacting side of the porous element of the contactor. The liquid contacting side and the gas contacting side are separated by the porous element and a housing. The gas is removed from an outlet on the gas contacting side of the porous element at a reduced pressure compared to the pressure of the gas flowing into the inlet of the contactor. A liquid containing a portion of the gas transferred into the liquid is removed from an outlet on the liquid contacting side of the porous element, producing a dilute bubble free solution.
摘要翻译：本文公开的实施例可以在液体中引入少量气体，其响应时间快，浓度变化小。在一个实施例中，气体被引导到接触器的多孔元件的气体接触侧的入口中，并且液体被引导到接触器的多孔元件的液体接触侧上的入口中。液体接触侧和气体接触侧被多孔元件和壳体分离。与流入接触器的入口的气体的压力相比，气体在减压下从多孔元件的气体接触侧的出口排出。从多孔元件的液体接触侧的出口排出含有一部分转移到液体中的气体的液体，产生无气泡的溶液。

2. 发明申请

WO2008097838A1 SYSTEM AND METHOD OF CHEMICAL DILUTION AND DISPENSE 审中-公开
标题翻译：化学沉淀和溶解的系统与方法
公开(公告)号：WO2008097838A1
公开(公告)日：2008-08-14
申请号：PCT/US2008/052787
申请日：2008-02-01
申请人： ENTEGRIS, INC. , CLARKE, Michael , LAVERDIERE, Marc , MCLOUGHLIN, Robert, F. , NIERMEYER, Karl, J. , SMITH, Joseph, E. , MOLLICA, Rosario
发明人： CLARKE, Michael , LAVERDIERE, Marc , MCLOUGHLIN, Robert, F. , NIERMEYER, Karl, J. , SMITH, Joseph, E. , MOLLICA, Rosario
IPC分类号： F04B25/00
CPC分类号： B01F5/0685 , B01F3/088 , G05D11/132 , Y10T137/0329
摘要： Embodiments disclosed herein provide a pump or a multiple-pump system that can mix chemicals without dilution tanks and can dispense the mixture of chemicals in a precise and highly controllable manner, particularly useful in semiconductor manufacturing processes. In some embodiments, one or more piston pumps of similar displacement are used to mix and dispense the chemical directly. A first valve is opened to a first chemical source. A piston is moved in a first direction to a selected position in a chamber to draw the first chemical into the chamber. The first valve is closed and a second valve is opened to a second chemical source. The piston is moved in the first direction to a second position in the chamber to draw in the second chemical and mix the chemicals. The second valve is closed and the piston is moved to dispense the fluids through a dispense port.
摘要翻译：本文公开的实施例提供了一种泵或多泵系统，其可以混合没有稀释罐的化学品，并且可以精确和高度可控的方式分配化学品的混合物，特别适用于半导体制造过程。在一些实施例中，使用类似位移的一个或多个活塞泵来直接混合和分配化学品。第一阀打开到第一化学源。活塞在第一方向上移动到室中的选定位置以将第一化学品吸入室中。第一阀关闭，第二阀打开到第二化学源。活塞沿第一方向移动到腔室中的第二位置以吸入第二化学品并混合化学品。关闭第二个阀门并移动活塞以通过分配口分配流体。

3. 发明申请

WO2009064878A1 SYSTEM AND METHOD FOR BLENDING, MONITORING AND DISPENSING CHEMICAL MIXTURES 审中-公开
标题翻译：用于混合，监测和分配化学混合物的系统和方法
公开(公告)号：WO2009064878A1
公开(公告)日：2009-05-22
申请号：PCT/US2008/083394
申请日：2008-11-13
申请人： ENTEGRIS, INC. , MOLLICA, Rosario , CLARKE, Michael
发明人： MOLLICA, Rosario , CLARKE, Michael
IPC分类号： B01F15/02
CPC分类号： B01F15/0408 , B01F15/0216 , B01F2015/0221 , B01F2215/0096 , G05D11/132
摘要： Embodiments disclosed herein provide a new solution to blend, monitor, and dispense multi-component chemical mixtures in a controlled and efficient manner. This new solution can prevent a volatile chemical such as hydrogen peroxide (H2O2) from decomposing prematurely by introducing that chemical at the very last stage before dispensing. In embodiments disclosed herein, prior to dispensing, H2O2 is introduced into a mixture of two or more chemicals that are relatively more stable. In embodiments disclosed herein, chemicals that are not as volatile as H2O2 are introduced into a recirculation loop where these chemical may be heated. In some embodiments, the heated mixture of chemicals is directed from the recirculation loop to a mixing manifold where H2O2 may be introduced. The final multi-component chemical mixture may then be dispensed through a plurality of dispense points.
摘要翻译：本文公开的实施例提供了以受控和有效的方式混合，监测和分配多组分化学混合物的新解决方案。这种新的解决方案可以防止挥发性化学物质，如过氧化氢（H2O2））通过在分配前的最后阶段引入该化学物质而过早分解。在本文公开的实施方案中，在分配之前，将H 2 O 2引入相对更稳定的两种或更多种化学品的混合物中。在本文公开的实施方案中，不像H 2 O 2那样挥发的化学品被引入可以加热这些化学物质的循环回路中。在一些实施方案中，加热的化学物质的混合物从循环回路引导到可以引入H 2 O 2的混合歧管。然后可以通过多个分配点分配最终的多组分化学混合物。

4. 发明申请

WO2007087209A1 METHODS AND APPARATUS FOR ION BEAM ANGLE MEASUREMENT IN TWO DIMENSIONS 审中-公开
标题翻译：用于两个尺寸的离子束角度测量的方法和装置
公开(公告)号：WO2007087209A1
公开(公告)日：2007-08-02
申请号：PCT/US2007/001204
申请日：2007-01-17
申请人： VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. , CUMMINGS, James J. , OLSON, Joseph , CLOUGH, Arthur H. , HERMANSON, Eric , MOLLICA, Rosario , MURPHY, Paul J. , DONAHUE, Mark
发明人： CUMMINGS, James J. , OLSON, Joseph , CLOUGH, Arthur H. , HERMANSON, Eric , MOLLICA, Rosario , MURPHY, Paul J. , DONAHUE, Mark
IPC分类号： H01J37/244 , H01J37/304
CPC分类号： H01J37/244 , G01B15/00 , H01J37/304 , H01J37/3171 , H01J2237/2446 , H01J2237/24507 , H01J2237/24528 , H01J2237/24578 , H01J2237/31701 , H01J2237/31703
摘要： An angle measurement system (100) for an ion beam includes a flag (120) defining first (140) and second features (142), wherein the second feature has a variable spacing from the first feature, a mechanism (122) to translate the flag along a translation path so that the flag intercepts at least a portion of the ion beam (62), and a sensing device (123, 124) to detect the ion beam for different flag positions along the translation path and produce a sensor signal in response to the detected ion beam. The sensor signal and corresponding positions of the flag are representative of a vertical beam angle of the ion beam in a vertical plane . The sensing device may include a mask and a mechanism to translate the mask in order to define a beam current sensor on a portion of an associated Faraday sensor.
摘要翻译：用于离子束的角度测量系统（100）包括限定第一（140）和第二特征（142）的标志（120），其中所述第二特征具有与所述第一特征可变的间隔;机构（122）标记沿着平移路径，使得该标记拦截离子束（62）的至少一部分，以及感测装置（123,124），用于检测沿着平移路径的不同标志位置的离子束，并产生传感器信号响应于检测到的离子束。传感器信号和标志的对应位置代表离子束在垂直平面中的垂直波束角。感测装置可以包括掩模和用于平移掩模以便在相关法拉第传感器的一部分上限定束流传感器的机构。

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