专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

WO2007145997A2 SYSTEMS AND METHODS FOR MANAGING HEAT TRANSFER IN A FLUID HANDLING DEVICE 审中-公开
标题翻译：用于管理流体处理装置中的热传递的系统和方法
公开(公告)号：WO2007145997A2
公开(公告)日：2007-12-21
申请号：PCT/US2007/013322
申请日：2007-06-06
申请人： ENTEGRIS, INC. , LAVERDIERE, Marc , GASHGAEE, Iraj , BRODEUR, Craig, L. , MCLOUGHLIN, Robert, F.
发明人： LAVERDIERE, Marc , GASHGAEE, Iraj , BRODEUR, Craig, L. , MCLOUGHLIN, Robert, F.
IPC分类号： F28F1/00
CPC分类号： F28F27/00 , F28F2270/00 , G05D7/0635
摘要： Systems and methods for reducing temperature variations induced by fluid handling equipment in process fluids by separating heat-producing portions of the control equipment from portions' of the equipment which handle or are in close proximity to a fluid flow path. In one embodiment, the fluid handling components are contained in a first enclosure, while the heat-generating components are contained in a second enclosure. An air gap is maintained between the two enclosures to provide thermal isolation of the fluid handling components from the heat-generating components. In one embodiment, the air gap is maintained by connecting the two enclosures using insulating spacers. Interconnects between components in the two enclosures may be routed through an insulating tube that is sealed at each end to prevent heat transfer through the tube.
摘要翻译：通过将控制设备的发热部分与处理或非常靠近流体流动路径的设备的部分分离来减少流体处理设备在过程流体中引起的温度变化的系统和方法。在一个实施例中，流体处理部件容纳在第一外壳中，而发热部件容纳在第二外壳中。在两个外壳之间保持气隙，以提供流体处理部件与发热部件的热隔离。在一个实施例中，通过使用绝缘间隔件连接两个外壳来保持气隙。两个外壳中的组件之间的互连可以通过绝缘管路，绝缘管在每一端密封，以防止通过管的热传递。

2. 发明申请

WO2004010474A2 LIQUID FLOW CONTROLLER AND PRECISION DISPENSE APPARATUS AND SYSTEM 审中-公开
标题翻译：液体流量控制器和精密配置设备和系统
公开(公告)号：WO2004010474A2
公开(公告)日：2004-01-29
申请号：PCT/US2003/022579
申请日：2003-07-18
申请人： MYKROLIS CORPORATION , LAVERDIERE, Marc , MCLOUGHLIN, Robert, F. , GONNELLA, George , GASHGAEE, Iraj , MARRS, Jennifer
发明人： LAVERDIERE, Marc , MCLOUGHLIN, Robert, F. , GONNELLA, George , GASHGAEE, Iraj , MARRS, Jennifer
IPC分类号： H01L
CPC分类号： G05D7/0617 , G05D16/2013 , Y10T137/0396 , Y10T137/7758 , Y10T137/776 , Y10T137/7761
摘要： Apparatus and a control system for monitoring (preferably digitally) and/or controlling pressure to a pneumatic load such as a proportional fluid control valve and using a measurement input from a fluid measuremenc device that responds to a flow rate, the liquid measurement input being used to control the' pressure to the pneumatic load so that pneumatic load may be increased or decreased (to proportionally open or close the pneumatic valve) to change the flow rate of the fluid to a desired rate. The pneumatic load can also be adjusted (to proportionally open or close the pneumatic valve) to accommodate changes in temperature and viscosity of a fluid.
摘要翻译：装置和控制系统，用于监测（优选数字地）和/或控制诸如比例流体控制阀的气动负载的压力，并且使用来自响应于流量的流体测量装置的测量输入，所使用的液体测量输入以控制气压负荷的压力，使得气动负载可以增加或减小（按比例打开或关闭气动阀），以将流体的流速改变到所需的速率。也可以调节气动负载（按比例打开或关闭气动阀），以适应流体温度和粘度的变化。

3. 发明申请

WO2005081169A1 SYSTEM AND METHOD FOR FLOW MONITORING AND CONTROL 审中-公开
标题翻译：流量监测与控制系统与方法
公开(公告)号：WO2005081169A1
公开(公告)日：2005-09-01
申请号：PCT/US2005/004276
申请日：2005-02-09
申请人： MYKROLIS CORPORATION , BRODEUR, Craig, L. , LAVERDIERE, Marc , MCLOUGHLIN, Robert, F. , NIERMEYER, Karl, J. , SHYU, Jieh-Hwa
发明人： BRODEUR, Craig, L. , LAVERDIERE, Marc , MCLOUGHLIN, Robert, F. , NIERMEYER, Karl, J. , SHYU, Jieh-Hwa
IPC分类号： G06F19/00
CPC分类号： G01F1/363 , G05D7/0635 , Y10T137/7761
摘要： A control device (30) include an inlet (32) for receiving a flow, an outlet (34) for directing a flow to other components of a flow system, pressure loss element (36) a pressure sensor (38) upstream pressure loss element (36) configured to measure an upstream of pressure, pressure sensor (40) downstream of pressure loss element (36) configured to measure a downstream pressure, a controller (42), which can include processor, memory and software instructions for determining a fluid flow rate for generating a valve coontrol signal, and a valve (44) butterfly valve, a pneumatically driven valve responsive to the valve control signal to regulate fluid flow.
摘要翻译：控制装置（30）包括用于接收流的入口（32），用于将流引导到流动系统的其它部件的出口（34），压力损失元件（36）压力传感器（38）上游压力损失元件（36），被配置为测量压力的上游;压力损失元件（36）下游的压力传感器（40）被配置成测量下游压力;控制器（42），其可以包括用于确定流体的处理器，存储器和软件指令用于产生阀门控制信号的流量，以及阀（44）蝶形阀，响应于阀控制信号以调节流体流动的气动驱动阀。

4. 发明申请

WO2008097838A1 SYSTEM AND METHOD OF CHEMICAL DILUTION AND DISPENSE 审中-公开
标题翻译：化学沉淀和溶解的系统与方法
公开(公告)号：WO2008097838A1
公开(公告)日：2008-08-14
申请号：PCT/US2008/052787
申请日：2008-02-01
申请人： ENTEGRIS, INC. , CLARKE, Michael , LAVERDIERE, Marc , MCLOUGHLIN, Robert, F. , NIERMEYER, Karl, J. , SMITH, Joseph, E. , MOLLICA, Rosario
发明人： CLARKE, Michael , LAVERDIERE, Marc , MCLOUGHLIN, Robert, F. , NIERMEYER, Karl, J. , SMITH, Joseph, E. , MOLLICA, Rosario
IPC分类号： F04B25/00
CPC分类号： B01F5/0685 , B01F3/088 , G05D11/132 , Y10T137/0329
摘要： Embodiments disclosed herein provide a pump or a multiple-pump system that can mix chemicals without dilution tanks and can dispense the mixture of chemicals in a precise and highly controllable manner, particularly useful in semiconductor manufacturing processes. In some embodiments, one or more piston pumps of similar displacement are used to mix and dispense the chemical directly. A first valve is opened to a first chemical source. A piston is moved in a first direction to a selected position in a chamber to draw the first chemical into the chamber. The first valve is closed and a second valve is opened to a second chemical source. The piston is moved in the first direction to a second position in the chamber to draw in the second chemical and mix the chemicals. The second valve is closed and the piston is moved to dispense the fluids through a dispense port.
摘要翻译：本文公开的实施例提供了一种泵或多泵系统，其可以混合没有稀释罐的化学品，并且可以精确和高度可控的方式分配化学品的混合物，特别适用于半导体制造过程。在一些实施例中，使用类似位移的一个或多个活塞泵来直接混合和分配化学品。第一阀打开到第一化学源。活塞在第一方向上移动到室中的选定位置以将第一化学品吸入室中。第一阀关闭，第二阀打开到第二化学源。活塞沿第一方向移动到腔室中的第二位置以吸入第二化学品并混合化学品。关闭第二个阀门并移动活塞以通过分配口分配流体。

5. 发明申请

WO2008113015A1 SYSTEM AND METHOD FOR NON-INTRUSIVE THERMAL MONITOR 审中-公开
标题翻译：非侵入式热监测系统和方法
公开(公告)号：WO2008113015A1
公开(公告)日：2008-09-18
申请号：PCT/US2008/057079
申请日：2008-03-14
申请人： ENTEGRIS, INC. , LAVERDIERE, Marc , MCLOUGHLIN, Robert, F. , CLARKE, Michael , MAENKE, Dale , WILKENSON, Wiley, James
发明人： LAVERDIERE, Marc , MCLOUGHLIN, Robert, F. , CLARKE, Michael , MAENKE, Dale , WILKENSON, Wiley, James
IPC分类号： G01K17/06
CPC分类号： G01J5/02 , G01J5/0037 , G01J5/0255 , G01J5/08 , G01J5/0893 , G01J5/12
摘要： Embodiments disclosed herein provide a non-intrusive thermal (NlT) monitor for sensing temperatures useful for semiconductor manufacturing applications. In some embodiments, a NIT monitor comprises a thermopile, a fluid housing with a fluid window, and an elongated member positioned between the thermopile and the fluid window for transmitting or reflecting infrared signals corresponding to a temperature of a fluid in the fluid housing. The fluid housing may have a cross-sectional profile to enable the manipulation of the fluid flow under the fluid window, enhancing the speed and accuracy of the temperature sampling. The elongated member, which may be hollow and coated with gold, may an extended piece of the fluid housing or a part of an optics housing. In some embodiments, the NIT monitor is connected to a main conditioning circuit board via a cable for processing the temperature measurements at a remote location.
摘要翻译：本文公开的实施例提供用于感测对于半导体制造应用有用的温度的非侵入式热（NlT）监视器。在一些实施例中，NIT监视器包括热电堆，具有流体窗口的流体壳体和位于热电堆和流体窗口之间的细长构件，用于传输或反射对应于流体壳体中的流体温度的红外信号。流体壳体可以具有横截面轮廓，以使得能够操纵流体窗下方的流体流动，从而提高温度采样的速度和精度。可以是中空的并且涂有金的细长构件可以是流体壳体的延伸件或光学外壳的一部分。在一些实施例中，NIT监视器经由电缆连接到主调节电路板，用于在远程位置处理温度测量。

6. 发明申请

WO2008020966A2 SYSTEMS AND METHODS FOR FLUID FLOW CONTROL IN AN IMMERSION LITHOGRATHY SYSTEM 审中-公开
标题翻译：流体力学控制系统与方法
公开(公告)号：WO2008020966A2
公开(公告)日：2008-02-21
申请号：PCT/US2007/016673
申请日：2007-07-25
申请人： ENTEGRIS, INC. , CLARKE, Michael , MCLOUGHLIN, Robert, F. , LAVERDIERE, Marc
发明人： CLARKE, Michael , MCLOUGHLIN, Robert, F. , LAVERDIERE, Marc
IPC分类号： G03B27/42
CPC分类号： G03B27/42 , G03F7/70341
摘要： Systems and methods for controlling fluid flow in an immersion lithography system. The system includes a fluid flow path that allows fluid to flow from a source through a fluid retention hood and then a fluid control valve. The system includes a pressure sensing system for determining a pressure drop across the fluid retention hood. The pressure drop across the fluid retention hood changes with the fluid flow rate. A control system receives signals indicating the pressure drop across the fluid retention hood and produces control signals for the fluid control valve. The control signals adjust the fluid flow rate through the fluid control valve to drive the flow rate to a desired rate, thereby driving the sensed pressure drop across the fluid retention hood to a desired pressure drop.
摘要翻译：用于控制浸没光刻系统中的流体流动的系统和方法。该系统包括允许流体从源流过流体保持罩然后流体控制阀的流体流动路径。该系统包括用于确定穿过流体保持罩的压降的压力感测系统。流体保持罩上的压降随流体流速而变化。控制系统接收指示流体保持罩上的压降的信号，并产生流体控制阀的控制信号。控制信号调节通过流体控制阀的流体流速，以将流速驱动到期望的速率，从而将感测到的压力降跨越流体保持罩驱动到期望的压降。

7. 发明申请

WO2005079235A2 SYSTEM AND METHOD OF CONTROLLING FLUID FLOW 审中-公开
标题翻译：控制流体流动的系统和方法
公开(公告)号：WO2005079235A2
公开(公告)日：2005-09-01
申请号：PCT/US2005/003709
申请日：2005-02-07
申请人： MYKROLIS CORPORATION , LAVERDIERE, Marc , MCLOUGHLIN, Robert, F.
发明人： LAVERDIERE, Marc , MCLOUGHLIN, Robert, F.
IPC分类号： G05D7/00 , G05D7/06 , G05D11/00
CPC分类号： G05D7/0635 , H01L21/6715 , Y10T137/0989
摘要： Embodiments of the present invention provide systems and methods of controlling fluid dispense to ensure clean break off of fluid at the end of a dispense process and to reduce crystallization of fluid in the dispense nozzle. One embodiment of the present invention can include a controller that can, generate a flow control signal to cause a control valve to close according to a first close rate parameter for a first segment of the close range and to generate the flow control signal to cause the control valve to close according to a second close rate parameter for a second segment of the close range.
摘要翻译：本发明的实施例提供了控制流体分配的系统和方法，以确保在分配过程结束时清洁液体的分离并减少分配喷嘴中的流体结晶。本发明的一个实施例可以包括一个控制器，该控制器可以产生一个流量控制信号，以使控制阀根据第一关闭范围的第一段的第一关闭速率参数关闭，并产生流量控制信号，控制阀根据第二关闭速率参数关闭近距离的第二段。

8. 发明申请

WO2007067354A2 I/O SYSTEMS, METHODS AND DEVICES FOR INTERFACING A PUMP CONTROLLER 审中-公开
标题翻译： I / O系统，用于接口泵控制器的方法和装置
公开(公告)号：WO2007067354A2
公开(公告)日：2007-06-14
申请号：PCT/US2006/045127
申请日：2006-11-20
申请人： ENTEGRIS, INC. , CEDRONE, James , GONNELLA, George , MCLOUGHLIN, Robert, F.
发明人： CEDRONE, James , GONNELLA, George , MCLOUGHLIN, Robert, F.
IPC分类号： H04L12/28
CPC分类号： G06F13/4027 , F04B49/065 , G05B19/042 , G05B2219/25204 , G06F13/4282 , H04L67/12 , Y02D10/14 , Y02D10/151
摘要： Embodiments of the present invention provide I/O systems, methods, and devices for interfacing pump controller(s) with control device(s) which may have different interfaces and/or signaling formats. In one embodiment, an I/O interface module comprises a processor, a memory, and at least two data communications interfaces for communicating with a pumping controller and a control device. The I/O interface module can receive discrete signals from the control device, interpret them accordingly and send the packets to the pump controller. The pump controller reads the packets and takes appropriate actions at the pump. The I/O interface module can interpret packets of data received from the pump controller and assert corresponding discrete signals to the control device. The I/O interface module is customizable and allows a variety of interfaces and control schemes to be implemented with a particular multiple stage pump without changing the hardware of the pump.
摘要翻译：本发明的实施例提供用于将泵控制器与可具有不同接口和/或信令格式的控制设备接口连接的I / O系统，方法和设备。在一个实施例中，I / O接口模块包括处理器，存储器以及用于与泵送控制器和控制装置通信的至少两个数据通信接口。 I / O接口模块可以接收来自控制设备的离散信号，相应解释它们并将数据包发送给泵控制器。泵控制器读取数据包并在泵上采取适当的措施。 I / O接口模块可以解释从泵控制器接收到的数据包，并向控制设备发出相应的离散信号。 I / O接口模块是可定制的，并允许使用特定的多级泵实现各种接口和控制方案，而无需更改泵的硬件。

9. 发明申请

WO2007103184A2 SYSTEM AND METHOD FOR CONTROLLED MIXING OF FLUIDS AND MULTIPLEXING SETPOINTS 审中-公开
标题翻译：用于控制流体和多重设置的混合的系统和方法
公开(公告)号：WO2007103184A2
公开(公告)日：2007-09-13
申请号：PCT/US2007/005377
申请日：2007-02-28
申请人： ENTEGRIS, INC. , NIERMEYER, J., Karl , MCLOUGHLIN, Robert, F. , SMITH, Joseph, E.
发明人： NIERMEYER, J., Karl , MCLOUGHLIN, Robert, F. , SMITH, Joseph, E.
IPC分类号： G05B11/01 , H04B7/212
CPC分类号： B01F15/0416 , B01F2215/0096 , G05D11/135 , G05D11/16 , G05D23/1393 , H01L21/67075 , Y10T137/0329
摘要： Embodiments of the present invention provide a system and method for continuous flow production of mixed fluids. The mixed fluids can comprise a mixture of different fluids or a mixture of the same fluid having different input properties such as temperature. Additionally, embodiments of the present invention provide a system and method for multiplexing analog setpoints.
摘要翻译：本发明的实施例提供了用于混合流体的连续流动生产的系统和方法。混合流体可以包括不同流体的混合物或具有不同输入特性如温度的相同流体的混合物。另外，本发明的实施例提供了一种用于复用模拟设定点的系统和方法。

10. 发明申请

WO2008021241A2 AUTO RANGING SYSTEM AND METHOD FOR AN ANALOG SIGNAL 审中-公开
标题翻译：自动测距系统和模拟信号的方法
公开(公告)号：WO2008021241A2
公开(公告)日：2008-02-21
申请号：PCT/US2007/017805
申请日：2007-08-10
申请人： ENTEGRIS, INC. , MCLOUGHLIN, Robert, F.
发明人： MCLOUGHLIN, Robert, F.
IPC分类号： H04N1/41
CPC分类号： H03M1/183
摘要： Disclosed herein are embodiments of an auto ranging system and method for an analog signal. A microprocessor is configured to digitally control the programmable gains of an operational amplifier based on the digital output of an A/D converter which may reside on or packaged along with the microprocessor. The amplifier receives a raw analog signal from a sensor and provides an amplified analog signal to the A/D converter. The gain of the amplifier generally corresponds to some range of the sensor signal. The A/D converter outputs a number of bits representative of the input signal. A microprocessor which is configured to digitally control the programmable gains of the amplifier receives and examines the output from the A/D converter and automatically adjusts the gain of the amplifier accordingly and as needed to keep or maintain the output from the A/D converter in a predetermined range.
摘要翻译：这里公开了用于模拟信号的自动测距系统和方法的实施例。微处理器被配置为基于可以驻留在微处理器上或与微处理器一起包装的A / D转换器的数字输出来数字地控制运算放大器的可编程增益。放大器从传感器接收原始模拟信号，并向A / D转换器提供放大的模拟信号。放大器的增益通常对应于传感器信号的一些范围。 A / D转换器输出表示输入信号的位数。被配置为数字控制放大器的可编程增益的微处理器接收并检查来自A / D转换器的输出并相应地自动调整放大器的增益，并且根据需要保持或维持来自A / D转换器的输出预定范围。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式