会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 2. 发明申请
    • METHOD FOR MAKING DIAMOND LAYERS BY CVD
    • 通过CVD制备金刚石层的方法
    • WO2014090664A1
    • 2014-06-19
    • PCT/EP2013/075576
    • 2013-12-04
    • ELEMENT SIX TECHNOLOGIES LIMITED
    • PICKLES, Charles Simon JamesWORT, ChristopherBRANDON, JohnPERKINS, Neil
    • C23C16/27C30B25/10C30B29/04
    • C23C16/274C23C16/511C30B25/105C30B25/12C30B25/165C30B29/04
    • A method of coating a non-refractory and/or non-planar substrate (8) with synthetic diamond material using a microwave plasma chemical vapour deposition (CVD) synthesis technique, the method comprising: • forming a composite substrate assembly (1) comprising: • a support substrate (2) comprising an upper surface; • one or more electrically conductive refractory guards (6) disposed over the upper surface of the support substrate and extending to a height h g above the upper surface of the support substrate; and one or more non-refractory and/or non-planar substrates disposed over the upper surface of the support substrate and extending to a height h s above the upper surface of the support substrate, wherein the height h s is less than the height h g , wherein a difference in height h g - h s lies in a range 0.2 mm to 10 mm; • placing the composite substrate assembly within a plasma chamber of a microwave plasma CVD reactor; • feeding process gases into the plasma chamber including a carbon containing gas and a hydrogen containing gas; • feeding microwaves in the plasma chamber to form a microwave plasma at a location over the composite substrate assembly; and • growing synthetic diamond material on the one or more non-refractory and/or non-planar substrates.
    • 一种使用微波等离子体化学气相沉积(CVD)合成技术用合成金刚石材料涂覆非耐火和/或非平面基底(8)的方法,所述方法包括:•形成复合衬底组件(1),包括: •支撑衬底(2),包括上表面; •一个或多个导电耐火材料保护件(6),其布置在所述支撑基板的上表面上方并延伸到所述支撑基板的上表面上方的高度hg; 以及一个或多个非耐火和/或非平面基底,其设置在支撑基板的上表面上方并且延伸到支撑基板的上表面上方的高度h s,其中高度h s小于高度hg,其中 高度差hg-hs在0.2mm至10mm的范围内; •将复合衬底组件放置在微波等离子体CVD反应器的等离子体室内; •将工艺气体进料到等离子体室中,包括含碳气体和含氢气体; •在等离子体室中馈送微波以在复合衬底组件上的位置形成微波等离子体; 以及•在所述一个或多个非耐火材料和/或非平面基材上生长合成金刚石材料。
    • 6. 发明公开
    • METHOD FOR MAKING DIAMOND LAYERS BY CVD
    • VERFAHREN ZUR HERSTELLUNG VON DIAMANTSCHICHTEN MITTELS CVD
    • EP2931935A1
    • 2015-10-21
    • EP13799087.5
    • 2013-12-04
    • Element Six Technologies Limited
    • PICKLES, Charles Simon JamesWORT, ChristopherBRANDON, JohnPERKINS, Neil
    • C23C16/27C30B25/10C30B29/04
    • C23C16/274C23C16/511C30B25/105C30B25/12C30B25/165C30B29/04
    • A method of coating a non-refractory and/or non-planar substrate 2 with synthetic diamond material using a microwave plasma chemical vapour deposition (MWCVD) synthesis technique is described. The method details forming a composite substrate assembly comprising: a support substrate 2 with an upper surface 4 and one or more electrically conductive refractory guards 6 disposed over the upper surface 4 of the support substrate 2, extending to a height hg above the upper surface 4 of the support substrate 2; and one or more non-refractory and/or non-planar substrates 8 disposed over the upper surface 4 of the support substrate 2, wherein the height hs above the upper surface 4 of the support substrate 2, where the height hs and where the difference in height hg hs lies in the range of 0.2-10mm. The composite substrate assembly is located within a plasma chamber of the microwave plasma CVD reactor (Figure 5). The process gases are fed into the plasma chamber with microwave plasma where plasma is formed at a location over the composite substrate assembly thus growing synthetic diamond on the one or more non-refractory and/or non-planar substrates.
    • 描述了使用微波等离子体化学气相沉积(MWCVD)合成技术用合成金刚石材料涂覆非耐火和/或非平面基板2的方法。 该方法详细地形成复合衬底组件,其包括:具有上表面4的支撑衬底2和设置在支撑衬底2的上表面4上方的一个或多个导电耐火护板6,延伸到上表面4上方的高度hg 的支撑基板2; 以及设置在支撑基板2的上表面4上方的一个或多个非耐火和/或非平面基板8,其中在支撑基板2的上表面4上方的高度hs,其中高度hs和差异 在高度hg hs在0.2-10mm的范围内。 复合衬底组件位于微波等离子体CVD反应器的等离子体室内(图5)。 工艺气体用微波等离子体送入等离子体室,等离子体形成在复合衬底组件上方的一个位置上,从而在一个或多个非耐火和/或非平面衬底上生长合成金刚石。