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1. 发明申请

WO2008011296A3 PROCESS AND SYSTEM FOR QUALITY MANAGEMENT AND ANALYSIS OF VIA DRILLING 审中-公开
标题翻译：钻井过程质量管理与分析系统
公开(公告)号：WO2008011296A3
公开(公告)日：2008-04-24
申请号：PCT/US2007073103
申请日：2007-07-10
申请人： ELECTRO SCIENT IND INC , MATSUMOTO HISASHI , SINGER MARK , BALDWIN LEO , HOWERTON JEFFREY E , CHILDERS DAVID V
发明人： MATSUMOTO HISASHI , SINGER MARK , BALDWIN LEO , HOWERTON JEFFREY E , CHILDERS DAVID V
IPC分类号： H01L21/4763
CPC分类号： H05K3/0035 , B23K26/03 , B23K26/06 , B23K26/389 , B23K2201/42 , H05K1/0269 , H05K2201/09454 , H05K2203/163
摘要： A process for laser forming a blind via in at least one layer of a circuit substrate having a plurality of capture pads of varying geometry can include, for at least one blind via to be formed in at least one layer of a circuit substrate, evaluating a capture pad geometry value (such as area and/or volume) within a predetermined distance from a drilling location with respect to a blind via geometry value (such as area and/or volume) to be formed at the drilling location. The process can include setting at least one laser operating parameter based on the evaluation in order to obtain a desired capture pad appearance after blind via formation. The process can include imaging a capture pad area defined as an area within a predetermined distance from a blind via drilling location in at least one layer of a circuit substrate, quantifying at least one appearance value for the imaged capture pad area, and determining an acceptability of the imaged capture pad areas based on the quantified appearance value.
摘要翻译：用于在具有多个不同几何形状的多个捕获垫的电路基板的至少一层中激光形成盲通孔的方法可以包括：至少一个盲孔以形成在电路基板的至少一层中，相对于在钻孔位置处形成的盲孔通孔几何值（例如面积和/或体积），距离钻孔位置预定距离内的捕获垫几何值（例如面积和/或体积）。该过程可以包括基于评估设置至少一个激光操作参数，以便在盲通孔形成之后获得期望的捕获垫外观。该过程可以包括将被定义为距电路基板的至少一层中的盲孔通孔位置的预定距离范围内的捕获区域成像，量化成像捕获区域的至少一个出现值，以及确定可接受性基于量化外观值的成像捕获垫区域。

2. 发明申请

WO2010030575A2 ADAPTIVE OPTIC BEAMSHAPING IN LASER PROCESSING SYSTEMS 审中-公开
标题翻译：激光加工系统中的自适应光学波束成形
公开(公告)号：WO2010030575A2
公开(公告)日：2010-03-18
申请号：PCT/US2009056045
申请日：2009-09-04
申请人： ELECTRO SCIENT IND INC , UNRATH MARK A , PIROGOVSKY PETER , BALDWIN LEO
发明人： UNRATH MARK A , PIROGOVSKY PETER , BALDWIN LEO
IPC分类号： G02B27/09
CPC分类号： B23K26/0676 , B23K26/0613 , B23K26/066 , B23K26/705
摘要： A laser processing system quickly and flexibly modifies a processing beam to determine and implement an improved or optimum beam profile for a particular application (or a subset of the application). The system reduces the sensitivity of beam shaping subsystems to variations in the laser processing system, including those due to manufacturing tolerances, thermal drift, variations in component performance, and other sources of system variation. Certain embodiments also manipulate lower quality laser beams (higher M2 values) to provide acceptable shaped beam profiles.
摘要翻译：激光处理系统快速且灵活地修改处理光束，以确定和实施针对特定应用（或应用的子集）的改进的或最佳的光束轮廓。该系统降低了光束整形子系统对激光加工系统变化的敏感性，包括由于制造公差，热漂移，元件性能变化以及系统变化的其他来源造成的变化。某些实施例还操纵较低质量的激光束（较高的M2值）以提供可接受的成形束分布。

3. 发明申请

WO2009120541A3 LASER MICROMACHINING THROUGH A SACRIFICIAL PROTECTIVE MEMBER 审中-公开
标题翻译：通过一个非常保护的成员进行激光打印
公开(公告)号：WO2009120541A3
公开(公告)日：2009-12-17
申请号：PCT/US2009037411
申请日：2009-03-17
申请人： ELECTRO SCIENT IND INC , BALDWIN LEO
发明人： BALDWIN LEO
IPC分类号： B23K26/04 , B23K26/36 , B23K26/42
CPC分类号： B23K26/0624 , B23K26/082 , B23K26/0861 , B23K26/361 , B23K26/364 , B23K26/40 , B23K26/60 , B23K37/06 , B23K2203/50
摘要： A small feature at a target location (106) on a working surface (108) of a workpiece (110) is laser machined. A laser beam (104) propagating along a beam path is directed for incidence at the target location (106) on the working surface (108) to machine the small feature. A focusing lens (112) sized to converge the laser beam (104) on the working surface (108) is set in the beam path at a short working distance (x1) from the working surface (108) to laser machine the small feature and thereby eject target material from the workpiece back toward the focusing lens (112). A sacrificial protective member (114) positioned between the focusing lens (112) and the working surface (108) transmits without appreciable distortion or adsorption the laser beam (104) focused by the focusing lens (112) and incident on the working surface (108). The sacrificial protective member (114) intercepts the ejected target material to prevent a sufficient amount of it from reaching and thereby appreciably contaminating the focusing lens (112).
摘要翻译：激光加工在工件（110）的工作表面（108）上的目标位置（106）上的小特征。沿着光束路径传播的激光束（104）被引导以入射到工作表面（108）上的目标位置（106），以加工该小特征。尺寸适合于将激光束（104）会聚在工作表面（108）上的聚焦透镜（112）被设置在距工作表面（108）的短工作距离（x1）处的光束路径中，以激光加工该小特征，从而将目标材料从工件返回到聚焦透镜（112）。定位在聚焦透镜（112）和工作表面（108）之间的牺牲保护构件（114）透射不受聚焦透镜（112）聚焦并入射到工作表面（108）上的激光束（104）的明显变形或吸附）。牺牲保护构件（114）拦截被喷射的目标材料以防止其足够的量到达，从而明显地污染聚焦透镜（112）。

4. 发明申请

WO2010117683A3 IMPROVED METHOD AND APPARATUS FOR LASER MACHINING 审中-公开
标题翻译：改进的激光加工方法和装置
公开(公告)号：WO2010117683A3
公开(公告)日：2011-01-13
申请号：PCT/US2010028884
申请日：2010-03-26
申请人： ELECTRO SCIENT IND INC , BALDWIN LEO
发明人： BALDWIN LEO
IPC分类号： B23K26/073 , B23K26/04 , B23K26/42 , B23K101/40
CPC分类号： B23K26/073 , B23K26/0622
摘要： A method and apparatus is presented for laser machining complex features (107) in workpieces (100) using programmable laser focal spot (104) shapes (101). A deformable mirror (92) is inserted into the laser beam path (74) of a laser machining system and programmed to alter the shape of the laser beam focal spot (104) in real time as the workpiece (100) is being laser machined in order to achieve improved control over the shape and size of laser machined features (107).
摘要翻译：提出了一种使用可编程激光焦点（104）形状（101）激光加工工件（100）中的复杂特征（107）的方法和装置。可变形反射镜（92）被插入到激光加工系统的激光束路径（74）中，并被编程为随着工件（100）被激光加工而实时地改变激光束焦点（104）的形状以实现对激光加工特征（107）的形状和尺寸的改进的控制。

5. 发明申请

WO2009076184A3 METHOD AND APPARATUS FOR ACHIEVING PANCHROMATIC RESPONSE FROM A COLOR-MOSAIC IMAGER 审中-公开
标题翻译：用于从彩色图像成像器中获得平面响应的方法和装置
公开(公告)号：WO2009076184A3
公开(公告)日：2009-07-30
申请号：PCT/US2008085629
申请日：2008-12-05
申请人： ELECTRO SCIENT IND INC , BALDWIN LEO
发明人： BALDWIN LEO
IPC分类号： H04N9/70 , H04N5/369 , H04N9/07
CPC分类号： H04N9/045 , G03B17/00 , H04N5/332
摘要： A method and apparatus for achieving monochromatic response from a low-cost color imager is presented. In this method and apparatus, the out-of-band response to infrared (IR) light is by solid state sensors exploited to produce a monochrome image. The monochrome image is produced by removing the IR blocking filter from the sensor and illuminating the scene to be imaged with IR radiation from an LED. The wavelength emitted from the LED is matched to the wavelength or wavelengths that correspond to a region where the sensor's response to IR light is relatively even, despite the color-mosaic filter permanently attached to the sensor.
摘要翻译：提出了一种用于从低成本彩色成像器获得单色响应的方法和装置。在这种方法和装置中，对红外（IR）光的带外响应是利用固态传感器产生单色图像的。通过从传感器中去除IR阻挡滤光器并照射来自LED的IR辐射成像的场景来产生单色图像。从LED发出的波长与对应于传感器对IR光的反应相对均匀的区域的波长或波长相匹配，尽管颜色马赛克滤光片永久地附着在传感器上。

6. 发明申请

WO2009120623A2 METHOD AND APPARATUS FOR DETECTING DEFECTS USING STRUCTURED LIGHT 审中-公开
标题翻译：使用结构光检测缺陷的方法和装置
公开(公告)号：WO2009120623A2
公开(公告)日：2009-10-01
申请号：PCT/US2009037940
申请日：2009-03-23
申请人： ELECTRO SCIENT IND INC , BALDWIN LEO , EMERY JOSEPH J
发明人： BALDWIN LEO , EMERY JOSEPH J
IPC分类号： G01N21/88 , G01B11/30 , G01N21/956 , G06T7/00
CPC分类号： G01N21/8806 , G01B11/245 , G01B11/25 , G01N2021/887 , G06T7/0006 , G06T2207/10012 , G06T2207/30164
摘要： Improved method and apparatus for detecting problems with fit and finish of manufactured articles (94) use structured light. Two or more structured light images (92, 98) acquired from opposing directions are used to measure the fit of mating surfaces, while avoiding false positives caused by small defects near the seam.
摘要翻译：用于检测制品（94）的配合和完成的问题的改进方法和装置使用结构光。使用从相对方向获取的两个或多个结构化光图像（92,98）来测量配合表面的配合，同时避免由接缝附近的小缺陷引起的假阳性。

7. 发明申请

WO2004077336A3 COAXIAL NARROW ANGLE DARK FIELD LIGHTING 审中-公开
标题翻译：同轴窄角暗场照明
公开(公告)号：WO2004077336A3
公开(公告)日：2004-12-29
申请号：PCT/US2004002284
申请日：2004-01-27
申请人： ELECTRO SCIENT IND INC , BALDWIN LEO
发明人： BALDWIN LEO
IPC分类号： G01N21/88 , G02B21/10 , G06K9/00
CPC分类号： G01N21/8806 , G02B21/10
摘要： A coaxial narrow angle dark field imaging system is provided. The system utilizes a telecentric lens to illuminate objects with symmetric coaxial narrow angle dark field illumination. The illumination technique is particularly suited to highlight minor features or defects on planar specular objects. In particular, the coaxial light source directs light rays towards a telecentric lens which redirects the light rays towards the substantially planar specular object. The light rays are reflected back through the telecentric lens towards a camera. To the extent that the light rays are reflected from a planar specular portion of the object the light rays are blocked by a telecentric stop. Light rays reflected from a defect or feature in the planar specular object will pass through an aperture in the stop to a camera.
摘要翻译：提供同轴窄角暗场成像系统。该系统利用远心镜头照射具有对称同轴窄角暗场照明的物体。照明技术特别适用于突出平面镜面物体上的微小特征或缺陷。特别地，同轴光源将光线引向远心透镜，该远心透镜将光线朝向基本上平面的镜面物体重定向。光线通过远心镜头向相机反射回来。在光线从物体的平面镜面部分反射的程度上，光线被远心停止而被阻挡。从平面镜面物体中的缺陷或特征反射的光线将穿过停止点中的孔径到相机。

8. 发明申请

WO2004008022A2 METHOD AND APPARATUS FOR UNIFORM LIGHTING SOURCE 审中-公开
标题翻译：用于均匀照明源的方法和装置
公开(公告)号：WO2004008022A2
公开(公告)日：2004-01-22
申请号：PCT/US0321809
申请日：2003-07-11
申请人： ELECTRO SCIENT IND INC
发明人： BALDWIN LEO , EVANS FRANK
IPC分类号： F21V20060101 , F21V1/00 , F21V5/00 , F21V13/14 , F21V17/02 , F21V23/04 , G01N21/88 , F21V
CPC分类号： G01N21/8806
摘要： The present invention provides a light source which improves the lighting for objects which include a nontrivial bi-directional reflectance distribution function and a nominal illumination angle. A two dimensional, light source is positioned at an angle which is complementary to the nominal illumination angle such that the object is illuminated at its nominal illumination angle.
摘要翻译：本发明提供了一种改善对象照明的光源，其包括非平凡的双向反射分布函数和标称照明角度。二维光源以与标称照明角度互补的角度定位，使得物体在其标称照明角度被照射。

9. 发明公开

EP1644661A4 METHOD AND APPARATUS FOR UNIFORM LIGHTING SOURCE 审中-公开
标题翻译：方法和装置源均匀照明
公开(公告)号：EP1644661A4
公开(公告)日：2007-09-05
申请号：EP03764560
申请日：2003-07-11
申请人： ELECTRO SCIENT IND INC
发明人： BALDWIN LEO , EVANS FRANK
IPC分类号： G01N21/88 , F21V20060101 , F21V1/00 , F21V5/00 , F21V13/14 , F21V17/02 , F21V23/04
CPC分类号： G01N21/8806
摘要： The present invention provides a light source which improves the lighting for objects which include a nontrivial bi-directional reflectance distribution function and a nominal illumination angle. A two dimensional, light source is positioned at an angle which is complementary to the nominal illumination angle such that the object is illuminated at its nominal illumination angle.

10. 发明专利

DE112004000329B4 Koaxiale Kleinwinkel-Dunkelfeld-Beleuchtungseinrichtung 未知
公开(公告)号：DE112004000329B4
公开(公告)日：2013-03-07
申请号：DE112004000329
申请日：2004-01-27
申请人： ELECTRO SCIENT IND INC
发明人： BALDWIN LEO
IPC分类号： G01N21/88 , G02B21/10 , G02B27/02
摘要： Bildgebendes System zum Abbilden eines auf einem ebenen spiegelnden Objekt liegenden Defektes, umfassend: ein telezentrisches Objektiv, das eine definierte Achse und einen Brennpunkt aufweist, wobei das telezentrische Objektiv dazu dient, ein Bild des Objektes einer Kamera zu überstellen; eine Quelle für Beleuchtungslicht, die so angeordnet ist, daß sie das Objekt längs der Achse des telezentrischen Objektivs beleuchtet; und eine telezentrische Blende, die mit einer in ihr liegenden Öffnung versehen ist und so angeordnet ist, daß sie Licht blockiert, welches von dem ebenen spiegelnden Objekt zurückgeworfen wird, während sie Licht durch die Öffnung hindurchlaufen läßt, welches von dem Defekt zurückgeworfen wird, wodurch eine Kleinwinkel-Dunkelfeldbeleuchtung erreicht wird.

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