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1. 发明申请

WO0033431A8 ELECTRIC DISCHARGE EXCITATION EXCIMER LASER 审中-公开
标题翻译：电子放电激光激光器
公开(公告)号：WO0033431A8
公开(公告)日：2000-08-10
申请号：PCT/JP9906601
申请日：1999-11-26
申请人： EBARA CORP , KOMATSU MFG CO LTD , EBARA DENSAN LTD , SHINOZAKI HIROYUKI , SEKIGUCHI SHINICHI , BARADA TOSHIMITSU , NAKAZAWA TOSHIHARU
发明人： SHINOZAKI HIROYUKI , SEKIGUCHI SHINICHI , BARADA TOSHIMITSU , NAKAZAWA TOSHIHARU
IPC分类号： H01S3/036 , H01S3/225 , F16C32/04
CPC分类号： F16C32/047 , H01S3/036 , H01S3/225
摘要： A long-life electric discharge excitation excimer laser improved in that the laser gas in the laser enclosure hardly degrades, no dust enters the inside of the magnetic bearing and the inside of the motor, and damage to the portions in contact with the laser gas is little. The electric discharge excitation excimer laser is characterized by comprising a housing connected to both ends of a laser enclosure where the laser gas is sealed and a pair of main discharge electrodes are housed, a cross flow fan rotatably supported at both ends by a magnetic bearing housed in the housing and adapted to produce a laser gas flow, a motor housed in the housing and adapted to rotate the cross flow fan, a laser gas passage extending through the gap between the rotor side and the stator side of the magnetic bearing and the gap between the rotor side and the stator side of the motor along the full length of the housing and communicating with the laser enclosure, a laser gas introduction passage extending from the inside of the laser enclosure and communicating with the laser gas passage at one end of the housing, and a filter disposed in the laser gas introduction passage.
摘要翻译：改善了长寿命放电励磁准分子激光器，即激光器外壳中的激光气体几乎不降解，磁粉轴承内部和电机内部没有灰尘，并且与激光气体接触的部分损坏是小。放电激发准分子激光器的特征在于包括连接到激光器外壳的两端的壳体，其中激光气体被密封并且容纳一对主放电电极，横流风扇由两个端部旋转地支撑，在壳体中并且适于产生激光气流;马达，容纳在壳体中并且适于旋转横流风扇，激光气体通道延伸穿过磁轴承的转子侧和定子侧之间的间隙，间隙沿着壳体的整个长度在电动机的转子侧和定子侧之间连通激光外壳，激光气体引入通道从激光外壳的内部延伸并与激光气体通道的一端连通壳体和布置在激光气体导入通道中的过滤器。

2. 发明专利

DE69818880D1 未知
公开(公告)号：DE69818880D1
公开(公告)日：2003-11-20
申请号：DE69818880
申请日：1998-01-30
申请人： EBARA CORP , EBARA DENSAN LTD
发明人： YAMAMOTO SHIGEKAZU , IKEGAMI TETSUMA , SOBUKAWA HIROSHI , AIYOSHIZAWA SHUN-ICHI , NAKAZAWA TOSHIHARU , OJIMA YOSHINORI
IPC分类号： F04C2/16 , F04C15/00 , F04D3/02 , F04D13/06 , F04D15/00 , F04D29/04 , F04D29/048 , F17D1/14 , H02K7/09 , H02K7/14 , H02K29/00 , H02P6/22
摘要： A screw pump includes a casing (10) having inlet (2a) and outlet (2b) ports and a pump rotor rotatably mounted in the casing and having screw threads (12a) communicating with said inlet and outlet ports. The pump rotor is rotated by a reversible speed-controllable motor (20), typically a DC brushless motor, mounted in the casing to deliver a liquid such as a chemical solution from the inlet port through a liquid passage defined by the screw threads to the outlet port.

3. 发明专利

DE69818880T2 未知
公开(公告)号：DE69818880T2
公开(公告)日：2004-08-19
申请号：DE69818880
申请日：1998-01-30
申请人： EBARA CORP , EBARA DENSAN LTD
发明人： YAMAMOTO SHIGEKAZU , IKEGAMI TETSUMA , SOBUKAWA HIROSHI , AIYOSHIZAWA SHUN-ICHI , NAKAZAWA TOSHIHARU , OJIMA YOSHINORI
IPC分类号： F04C2/16 , F04C15/00 , F04D3/02 , F04D13/06 , F04D15/00 , F04D29/04 , F04D29/048 , F17D1/14 , H02K7/09 , H02K7/14 , H02K29/00 , H02P6/22
摘要： A screw pump includes a casing (10) having inlet (2a) and outlet (2b) ports and a pump rotor rotatably mounted in the casing and having screw threads (12a) communicating with said inlet and outlet ports. The pump rotor is rotated by a reversible speed-controllable motor (20), typically a DC brushless motor, mounted in the casing to deliver a liquid such as a chemical solution from the inlet port through a liquid passage defined by the screw threads to the outlet port.

4. 发明专利

JP2002281775A INVERTER APPARATUS FOR MOTOR DRIVE 失效
公开(公告)号：JP2002281775A
公开(公告)日：2002-09-27
申请号：JP2001076666
申请日：2001-03-16
申请人： EBARA CORP , EBARA DENSAN LTD
发明人： OCHIAI TOSHIHARU , YAMAZAKI SATOYUKI , NAKAZAWA TOSHIHARU
IPC分类号： H02P1/30 , H02M7/48 , H02P27/06 , H02P7/63
摘要： PROBLEM TO BE SOLVED: To provide an inverter apparatus for motor drive that simply controls starting voltage and frequency, can miniaturize an inverter as compared with the motor that is supported by a friction type bearing, and at the same time does not require the need for increasing the support force of a magnetic bearing in starting as compared with the normal case. SOLUTION: The inverter apparatus 1 for motor drive comprises a rectifying circuit 1, a voltage variable circuit 2, a DC-AC conversion circuit 3, a control circuit 4, a frequency control circuit 5, starting voltage setting equipment 6, starting frequency setting equipment 7, and storages 11 and 12, controls the voltage variable circuit 2 and DC-AC conversion circuit 3 by the control circuit 4, and outputs power having a specific voltage and frequency to a motor M where the rotor is supported by a magnetic bearing. Also, in the inverter apparatus 10 for motor drive, a current detection circuit 9 is provided, and the control circuit 4 has a function for comparing an actual starting current value detected by the current detection circuit 9 with a preset setting starting current value, and determining an optimum starting voltage value or starting frequency value according to the comparison result.

5. 发明专利

JP2001352114A MAGNETIC BEARING DEVICE FOR EXCIMER LASER EQUIPMENT 失效
公开(公告)号：JP2001352114A
公开(公告)日：2001-12-21
申请号：JP2000172233
申请日：2000-06-08
申请人： EBARA CORP , EBARA DENSAN LTD
发明人： OYAMA ATSUSHI , SEKIGUCHI SHINICHI , SHINOZAKI HIROYUKI , IBARADA TOSHIMITSU , NAKAZAWA TOSHIHARU
IPC分类号： F16C32/04 , F16C39/06 , H01S3/03 , H01S3/036 , H01S3/225 , H02K7/09 , H02K7/14
摘要： PROBLEM TO BE SOLVED: To provide a magnetic bearing device for excimer laser equipment wherein an adjustment part of a position displacement detecting sensor is mounted on a magnetic bearing mechanism main body of a gas stirring fan in excimer laser equipment, and individual irregularity of the magnetic bearing mechanism main body is eliminated in design plan by using the adjustment part. SOLUTION: This magnetic bearing device for excimer laser equipment levitates and retains magnetically both ends of a rotary shaft 13 of the stirring fan 12 which is disposed in a laser vessel 11 for sealing laser gas and makes a high speed laser gas flow. The magnetic bearing device is provided with the magnetic bearing mechanism main body 17 having an electromagnet which is arranged facing the rotary shaft 13 of the stirring fan 12 and levitates and retains magnetically the rotary shaft 13, and the position displacement detecting sensor for detecting position of the rotary shaft; a signal processing circuit part 18 for processing output signals of the position displacement detecting sensor; and an exciting power control part 22 which controls exciting power of the electromagnet by using an output of the signal processing circuit part 18. A part or the whole of the signal processing circuit part 18 is mounted on the magnetic bearing mechanism main body part 17, to which signal processing adjustment function is imparted for adjusting sensor detecting sensitivity in such a manner that individual difference is not generated.

6. 发明专利

JP2001309688A MAGNETIC BEARING CONTROL DEVICE 失效
公开(公告)号：JP2001309688A
公开(公告)日：2001-11-02
申请号：JP2000121583
申请日：2000-04-21
申请人： EBARA CORP , EBARA DENSAN LTD
发明人： TAIRA AKIKO , NAKAZAWA TOSHIHARU
IPC分类号： F16C32/04 , F16C39/06 , H02P27/08 , H02P29/00 , H02P7/00
摘要： PROBLEM TO BE SOLVED: To provide a small-sized and inexpensive magnetic bearing control device with simple constitution capable of operating a motor in low noise. SOLUTION: In the magnetic bearing control device provided with a pair of opposite electromagnets for floating and supporting a floating body, a motor M for rotating the floating body, and a controller for driving and controlling them, a DC/DC converter 13 for supplying drive electric power to an inverter 14 for driving the motor M is provided to rotate and drive the motor M by simultaneously using a PWM control system and a PAM control system by the inverter 14 for driving the motor M.

7. 发明专利

JP2001050161A GAS TRANSFER MACHINE 失效
公开(公告)号：JP2001050161A
公开(公告)日：2001-02-23
申请号：JP22276199
申请日：1999-08-05
申请人： EBARA CORP , EBARA DENSAN LTD
发明人： KOJIMA YOSHINORI , NAKAZAWA TOSHIHARU , SEKIGUCHI SHINICHI , NOMICHI SHINJI
IPC分类号： F04B39/00 , F04C18/00 , F04C29/00 , F04D17/16 , F04D25/06 , F04D29/00 , H02K3/44 , H02K5/128 , H02K7/14 , H02K19/10 , H02K21/14
摘要： PROBLEM TO BE SOLVED: To make a gas transfer machine highly stable for even corrosive transfer gas and adaptive to a high speed operation by a compact structure. SOLUTION: In a gas transfer machine for transferring gas by performing a rotation operation for a rotor 1, a motor for driving the rotor 1 is provided with a member 11A for isolating a stator 6 and the inside of a motor rotor chamber 14. A motor rotor 7 has a structure that the rotor 7 is directly connected with an extension of a pump drive shaft 2 and the motor rotor 7 has a reluctance shape having a salient pole part of a magnetic material.

8. 发明专利

JP2000018189A TURBO MOLECULAR PUMP 失效
公开(公告)号：JP2000018189A
公开(公告)日：2000-01-18
申请号：JP18419398
申请日：1998-06-30
申请人： EBARA CORP , EBARA DENSAN LTD
发明人： MIYAMOTO MATSUTARO , SOFUGAWA TAKUJI , NAKAZAWA TOSHIHARU
IPC分类号： F04D27/00 , F04D19/04
摘要： PROBLEM TO BE SOLVED: To provide a turbo molecular pump having rotor temperature detection means capable of accurately detecting the rotor temperature of a turbo molecular pump in operation, without contacting therewith. SOLUTION: In a turbo molecular pump having temperature detection means for detecting a temperature of a rotor rotating at a high speed, at least two displacement sensors 22, 23 for detecting axial displacement of a rotor R are provided, so as to detect the temperature of the rotor R from the detected displacement of the rotor R.

9. 发明专利

JPH11230167A MAGNETIC BEARING DEVICE 失效
公开(公告)号：JPH11230167A
公开(公告)日：1999-08-27
申请号：JP4624598
申请日：1998-02-10
申请人： EBARA CORP , EBARA DENSAN LTD
发明人： SEKIGUCHI SHINICHI , NAKAZAWA TOSHIHARU , KAWAMURA TAKESHI
IPC分类号： F16C32/04
摘要： PROBLEM TO BE SOLVED: To enlarge adhering width of a magnetic body dust with keeping five axis control without specifically enlarging a magnetic bearing. SOLUTION: This bearing device is so constituted that a circulating fan 2 is installed in an airtight container l into which process gas 3 mixed with magnetic dust is filled and a rotor of the circulating fan 2 is supported by a five axis control magnetic bearing. In this case, radial magnetic bearings 4, 5 of the five axis control magnetic bearing is constituted with a passive type magnetic bearing having a stator side permanent magnet and a rotor side permanent magnet and an active type magnetic bearing having a stator side electromagnet and a rotor side magnetic pole, the active type magnetic bearing is installed on the airtight container 1 side, and clearance between a stator side electromagnet and the rotor side magnetic pole of the active type magnetic bearing is larger than clearance between the stator side permanent magnet and the rotor side permanent magnet of the passive type magnetic bearing.

10. 发明专利

JP2005240952A Magnetic bearing device and turbo-type vacuum pump 审中-公开
标题翻译：磁力轴承装置和涡轮式真空泵
公开(公告)号：JP2005240952A
公开(公告)日：2005-09-08
申请号：JP2004054281
申请日：2004-02-27
申请人： Ebara Corp , Ebara Densan Ltd , 株式会社荏原製作所 , 株式会社荏原電産
发明人： OCHIAI TOSHIHARU , SEKIGUCHI SHINICHI , MIYAMOTO MATSUTARO , NAKAZAWA TOSHIHARU
IPC分类号： G01B7/30 , F04D19/04 , F04D29/04 , F04D29/056 , F04D29/058 , F16C32/04 , G01B7/00 , H02K7/09
CPC分类号： F16C32/0476 , F16C32/0446 , F16C2360/45
摘要： PROBLEM TO BE SOLVED: To provide a magnetic bearing device capable of reducing the influence of a thermal expansion of a rotary shaft due to high temperature, preventing the amount of whirling caused by unbalance of a rotary shaft from being superposed on the output value of an axial displacement sensor, mounting the axial displacement sensor in a place other than an end of the rotary shaft, and stably controlling a position in the axial direction of the rotary shaft. SOLUTION: The magnetic bearing device is equipped with at least a pair of axial magnetic bearings 5a, 5b for magnetically levitating a rotary shaft 1, at least one axial displacement sensor 6 for detecting an axial levitating position of the rotary shaft 1, a magnetic bearing control device 17 for controlling exciting current of the axial magnetic bearings 5a, 5b so as to magnetically levitate the rotary shaft 1 at a prescribed position on the basis of the output value of the axial displacement sensor 6. A sensor target 7 concentric with the rotary shaft 1 is provided to the vicinity of a high-temperature part of the rotary shaft 1. The axial displacement sensor 6 is arranged in a position opposed to the sensor target 7. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种能够降低由于高温导致的旋转轴的热膨胀的影响的磁轴承装置，防止由旋转轴的不平衡引起的旋转量叠加在输出端上轴向位移传感器的值，将轴向位移传感器安装在旋转轴的端部以外的位置，并稳定地控制旋转轴的轴向位置。解决方案：磁性轴承装置配备有至少一对用于磁悬浮旋转轴1的轴向磁轴承5a，5b，至少一个用于检测旋转轴1的轴向悬浮位置的轴向位移传感器6，磁轴承控制装置17，其用于控制轴向磁轴承5a，5b的励磁电流，以便根据轴向位移传感器6的输出值将旋转轴1磁化悬浮在规定的位置。传感器目标7同心旋转轴1设置在旋转轴1的高温部附近。轴向位移传感器6配置在与传感器目标7相对的位置。（C）2005，JPO＆NCIPI

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