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1. 发明申请

WO2011053446A1 FLUID CONVEYANCE SYSTEM INCLUDING FLEXIBLE RETAINING MECHANISM 审中-公开
标题翻译：流体输送系统，包括柔性保持机构
公开(公告)号：WO2011053446A1
公开(公告)日：2011-05-05
申请号：PCT/US2010/052219
申请日：2010-10-12
申请人： EASTMAN KODAK COMPANY , KERR, Roger, Stanley , LEVY, David, Howard , SUTTON, James, Edward
发明人： KERR, Roger, Stanley , LEVY, David, Howard , SUTTON, James, Edward
IPC分类号： C23C16/458 , C23C16/54 , C23C16/455
CPC分类号： C23C16/458 , C23C16/45551 , C23C16/545 , Y10T137/8593
摘要： A fluid conveyance system for thin film material deposition includes a fluid distribution manifold and a substrate transport mechanism. The fluid distribution manifold includes an output face that includes a plurality of elongated slots. The output face of the fluid distribution manifold is positioned opposite a first surface of the substrate such that the elongated slots face the first surface of the substrate and are positioned proximate to the first surface of the substrate. The substrate transport mechanism causes a substrate to travel in a direction and includes a flexible mechanism that contacts a second surface of the substrate in a region that is proximate to the output face of the fluid distribution manifold.
摘要翻译：用于薄膜材料沉积的流体输送系统包括流体分配歧管和基底输送机构。流体分配歧管包括包括多个细长槽的输出面。流体分配歧管的输出面与衬底的第一表面相对定位，使得细长的槽面对衬底的第一表面并且靠近衬底的第一表面定位。衬底传送机构使衬底沿一个方向行进，并且包括在靠近流体分配歧管的输出面的区域中接触衬底的第二表面的柔性机构。

2. 发明申请

WO2011056359A1 FLUID CONVEYANCE SYSTEM 审中-公开
标题翻译：流体输送系统
公开(公告)号：WO2011056359A1
公开(公告)日：2011-05-12
申请号：PCT/US2010/052222
申请日：2010-10-12
申请人： EASTMAN KODAK COMPANY , KERR, Roger, Stanley , SUTTON, James, Edward , LEVY, David, Howard
发明人： KERR, Roger, Stanley , SUTTON, James, Edward , LEVY, David, Howard
IPC分类号： C23C16/44 , C23C16/455 , C23C16/52 , C23C16/54
CPC分类号： C23C16/4401 , C23C16/4412 , C23C16/45551 , C23C16/45574 , C23C16/52 , C23C16/545 , Y10T137/8593
摘要： A fluid conveyance system for thin film material deposition is provided. A first fluid distribution manifold (10) includes an output face (36) that includes a plurality of elongated slots. The plurality of elongated slots, include a source slot and an exhaust slot. A gas source (28a-28c) is in fluid communication with the source slot. The gas source is configured to provide a gas to the output face of the distribution manifold. A gas receiving chamber (29a-29b) is in fluid communication with the exhaust slot. The gas receiving chamber is configured to collect the gas provided to the output face of the distribution manifold through the exhaust slot. A sensor (46) positioned to sense a parameter of the gas traveling from the gas source to the gas receiving chamber. A controller (56), connected in electrical communication with the sensor, is configured to modify an operating parameter of the conveyance system based on data received from the sensor.
摘要翻译：提供了用于薄膜材料沉积的流体输送系统。第一流体分配歧管（10）包括包括多个细长槽的输出面（36）。多个细长槽包括源槽和排气槽。气源（28a-28c）与源槽流体连通。气源构造成向分配歧管的输出面提供气体。气体接收室（29a-29b）与排气槽流体连通。气体接收室构造成通过排气槽收集设置在分配歧管的输出面上的气体。定位成感测从气体源传播到气体接收室的气体的参数的传感器（46）。与传感器电连接的控制器（56）被配置为基于从传感器接收的数据来修改传送系统的操作参数。

3. 发明申请

WO2011056521A1 FLUID DISTRIBUTION MANIFOLD INCLUDING BONDED PLATES 审中-公开
标题翻译：流体分配管道包括粘结板
公开(公告)号：WO2011056521A1
公开(公告)日：2011-05-12
申请号：PCT/US2010/053993
申请日：2010-10-26
申请人： EASTMAN KODAK COMPANY , KERR, Roger, Stanley , LEVY, David, Howard
发明人： KERR, Roger, Stanley , LEVY, David, Howard
IPC分类号： C23C16/455
CPC分类号： C23C16/45565 , C23C16/45551 , Y10T137/8593 , Y10T156/10
摘要： A fluid distribution manifold includes a first plate and a second plate. At least a portion of at least the first plate and the second plate define a relief pattern. A metal bonding agent is disposed between the first plate and the second plate such that the first plate and the second plate form a fluid flow directing pattern defined by the relief pattern.
摘要翻译：流体分配歧管包括第一板和第二板。至少第一板和第二板的至少一部分限定浮雕图案。金属粘合剂设置在第一板和第二板之间，使得第一板和第二板形成由浮雕图案限定的流体流动引导图案。

4. 发明申请

WO2011056405A1 FLUID DISTRIBUTION MANIFOLD INCLUDING COMPLIANT PLATES 审中-公开
标题翻译：流体分配管理包括合规板
公开(公告)号：WO2011056405A1
公开(公告)日：2011-05-12
申请号：PCT/US2010/053096
申请日：2010-10-19
申请人： EASTMAN KODAK COMPANY , KERR, Roger, Stanley , LEVY, David, Howard
发明人： KERR, Roger, Stanley , LEVY, David, Howard
IPC分类号： C23C16/54 , C23C16/455 , H01L21/314 , H01L51/00
CPC分类号： C23C16/545 , C23C16/45551 , C23C16/45574 , Y10T137/8593 , Y10T156/10
摘要： A fluid distribution manifold includes a first plate and a second plate. The first plate includes a length dimension, a width dimension, and a thickness that allows the first plate to be deformable over at least one of the length dimension and the width dimension of the first plate. The second plate includes a length dimension, a width dimension, and a thickness that allows the second plate to be deformable over at least one of the length dimension and the width dimension of the second plate. At least a portion of at least the first plate and the second plate define a relief pattern that defines a fluid flow directing path. The first plate and the second plate are bonded together to form a non-planar shape in a height dimension along at least one of the length dimension and the width dimension.
摘要翻译：流体分配歧管包括第一板和第二板。第一板包括长度尺寸，宽度尺寸和允许第一板在第一板的长度尺寸和宽度尺寸中的至少一个上可变形的厚度。第二板包括长度尺寸，宽度尺寸和允许第二板在第二板的长度尺寸和宽度尺寸中的至少一个上可变形的厚度。至少第一板和第二板的至少一部分限定了限定流体流动引导路径的浮雕图案。第一板和第二板结合在一起，以沿着长度尺寸和宽度尺寸中的至少一个在高度尺寸上形成非平面形状。

5. 发明申请

WO2011053445A1 DISTRIBUTION MANIFOLD 审中-公开
标题翻译：分销管理
公开(公告)号：WO2011053445A1
公开(公告)日：2011-05-05
申请号：PCT/US2010/052217
申请日：2010-10-12
申请人： EASTMAN KODAK COMPANY , KERR, Roger, Stanley , LEVY, David, Howard , NELSON, Shelby, Forrester
发明人： KERR, Roger, Stanley , LEVY, David, Howard , NELSON, Shelby, Forrester
IPC分类号： C23C16/455
CPC分类号： C23C16/45551 , C23C16/45563 , C23C16/45574 , C23C16/45591 , Y10T137/87571
摘要： A fluid conveyance device for thin film material deposition includes a fluid distribution manifold (10), a primary chamber (610, 612), and a secondary fluid source (620). The fluid distribution manifold includes an output face (36) that is connected in fluid communication to the primary chamber. The secondary fluid source is connected in fluid communication to the primary chamber through a plurality of conveyance ports (630).
摘要翻译：用于薄膜材料沉积的流体输送装置包括流体分配歧管（10），主室（610,612）和次流体源（620）。流体分配歧管包括与主室流体连通地连接的输出面（36）。二次流体源通过多个输送口（630）与第一室流体连通。

6. 发明申请

WO2011056438A2 CONVEYANCE SYSTEM INCLUDING OPPOSED FLUID DISTRIBUTION MANIFOLDS 审中-公开
标题翻译：包括流体分配管理的输送系统
公开(公告)号：WO2011056438A2
公开(公告)日：2011-05-12
申请号：PCT/US2010/053467
申请日：2010-10-21
申请人： EASTMAN KODAK COMPANY , LEVY, David, Howard , KERR, Roger, Stanley , SPATH, Todd, Mathew
发明人： LEVY, David, Howard , KERR, Roger, Stanley , SPATH, Todd, Mathew
IPC分类号： C23C16/54
CPC分类号： C23C16/54 , C23C16/45551 , C23C16/45565 , C23C16/45574 , C23C16/45589 , C23C16/545
摘要： A fluid conveyance system for thin film material deposition includes a first fluid distribution manifold and a second distribution manifold. The first fluid distribution manifold includes an output face that includes a plurality of elongated slots. The plurality of elongated slots includes a source slot and an exhaust slot. The second fluid distribution manifold includes an output face that includes a plurality of openings. The plurality of openings include a source opening and an exhaust opening. The second fluid distribution manifold is positioned spaced apart from and opposite the first fluid distribution manifold such that the source opening of the output face of the second fluid distribution manifold mirrors the source slot of the output face of the first fluid distribution manifold and the exhaust opening of the output face of the second fluid distribution manifold mirrors the exhaust slot of the output face of the first fluid distribution manifold.
摘要翻译：用于薄膜材料沉积的流体输送系统包括第一流体分配歧管和第二分配歧管。第一流体分配歧管包括包括多个细长槽的输出面。多个细长槽包括源槽和排气槽。第二流体分配歧管包括包括多个开口的输出面。多个开口包括源开口和排气口。第二流体分配歧管与第一流体分配歧管隔开并相对设置，使得第二流体分配歧管的输出面的源开口反映第一流体分配歧管的输出面的源槽和排气口第二流体分配歧管的输出面与第一流体分配歧管的输出面的排气槽反映。

7. 发明申请

WO2011056404A1 FLUID DISTRIBUTION MANIFOLD INCLUDING PLATE COMPRISING A MIRROR - FINISHED SURFACE 审中-公开
标题翻译：流体分配管理包括包含镜子的表面 - 表面处理
公开(公告)号：WO2011056404A1
公开(公告)日：2011-05-12
申请号：PCT/US2010/053093
申请日：2010-10-19
申请人： EASTMAN KODAK COMPANY , KERR, Roger, Stanley , LEVY, David, Howard
发明人： KERR, Roger, Stanley , LEVY, David, Howard
IPC分类号： C23C16/54 , C23C16/455 , H01L21/314 , H01L51/00
CPC分类号： C23C16/45574 , C23C16/45551 , C23C16/545 , Y10T29/49428 , Y10T137/8593
摘要： A fluid distribution manifold includes a first plate and a second plate. At least a portion of at least the first plate and the second plate define a relief pattern. At least one of the first plate and the second plate include a mirrored surface finish. A bonding agent is disposed between the first plate and the second plate such that the first plate and the second plate form a fluid flow directing pattern defined by the relief pattern.
摘要翻译：流体分配歧管包括第一板和第二板。至少第一板和第二板的至少一部分限定浮雕图案。第一板和第二板中的至少一个包括镜面表面光洁度。粘合剂设置在第一板和第二板之间，使得第一板和第二板形成由浮雕图案限定的流体流动引导图案。

8. 发明申请

WO2008085468A1 DELIVERY DEVICE FOR DEPOSITION 审中-公开
标题翻译：递送装置用于沉积
公开(公告)号：WO2008085468A1
公开(公告)日：2008-07-17
申请号：PCT/US2007/026314
申请日：2007-12-26
申请人： EASTMAN KODAK COMPANY , LEVY, David, Howard , KERR, Roger, Stanley
发明人： LEVY, David, Howard , KERR, Roger, Stanley
IPC分类号： C23C16/455 , C23C16/54
CPC分类号： C23C16/45525 , C23C16/45551 , C23C16/45587 , C23C16/545
摘要： A delivery device (150) for thin-film material deposition has at least first, second, and third inlet ports (14), (16), (18) for receiving a common supply for a first, a second and a third gaseous material, respectively. Each of the first, second, and third elongated emissive channels (132) allow gaseous fluid communication with one of corresponding first, second, and third inlet ports (14), (16), (18). The delivery device is formed from apertured plates (100), (110), (120), (130), superposed to define a network of interconnecting supply chambers and directing channels for routing each of the gaseous materials from its corresponding inlet port (14), (16), (18) to its corresponding plurality of elongated emissive channels (132).
摘要翻译：用于薄膜材料沉积的输送装置（150）具有至少第一，第二和第三入口（14），（16），（18），用于接收第一，第二和第三气态物质的共同供应，分别。第一，第二和第三细长发射通道（132）中的每一个允许与对应的第一，第二和第三入口（14），（16），（18）中的一个进行气态流体连通。输送装置由多孔板（100），（110），（120），（130）形成，叠加以限定互连供应室的网络并且引导通道用于从其相应的入口（14）路由每个气态材料），（16），（18）到其对应的多个细长发射通道（132）。

9. 发明申请

WO2009042145A2 DELIVERY DEVICE FOR DEPOSITION 审中-公开
标题翻译：递送装置用于沉积
公开(公告)号：WO2009042145A2
公开(公告)日：2009-04-02
申请号：PCT/US2008/011063
申请日：2008-09-24
申请人： EASTMAN KODAK COMPANY , KERR, Roger, Stanley , LEVY, David, Howard , MURRAY, James, T.
发明人： KERR, Roger, Stanley , LEVY, David, Howard , MURRAY, James, T.
IPC分类号： B21D51/38 , C23C16/00 , F17D1/02
CPC分类号： B05B1/005 , C23C16/45551 , C23C16/45574 , Y10T29/494 , Y10T29/49432 , Y10T29/49826 , Y10T137/0318 , Y10T137/87249
摘要： A delivery device for thin-film material deposition has at least first, second, and third inlet ports for receiving a common supply for a first, a second and a third gaseous material, respectively. Each of the first, second, and third elongated emissive channels allow gaseous fluid communication with one of corresponding first, second, and third inlet ports. The delivery device can be formed from apertured plates, superposed to define a network of interconnecting supply chambers and directing channels for routing each of the gaseous materials from its corresponding inlet port to a corresponding plurality of elongated emissive channels. The delivery device comprises a diffusing channel formed by a relief pattern between facing plates. Also disclosed is a process for thin film deposition. Finally, more generally, a flow diffuser and a corresponding method of diffusing flow is disclosed.
摘要翻译：用于薄膜材料沉积的递送装置具有至少第一，第二和第三入口端口，用于分别接收第一，第二和第三气态材料的共同供应。第一，第二和第三细长发射通道中的每一个允许与对应的第一，第二和第三入口端口之一的气态流体连通。输送装置可以由孔板形成，叠加以形成互连供应室的网络，并且引导通道用于将每个气态材料从其相应的入口端口路由到相应的多个细长的发射通道。输送装置包括由相对板之间的浮雕图案形成的扩散通道。还公开了一种用于薄膜沉积的方法。最后，更一般地，公开了一种流扩散器和相应的扩散流的方法。

10. 发明申请

WO2009067162A1 PROCESS USING COLORED MASK COMBINED WITH SELECTIVE AREA DEPOSITION 审中-公开
标题翻译：使用与选择区沉积相结合的彩色面膜的方法
公开(公告)号：WO2009067162A1
公开(公告)日：2009-05-28
申请号：PCT/US2008/012762
申请日：2008-11-12
申请人： EASTMAN KODAK COMPANY , IRVING, Lyn, Marie , FREEMAN, Diane, Carol , COWDERY-CORVAN, Peter, Jerome , YANG, Cheng , LEVY, David, Howard
发明人： IRVING, Lyn, Marie , FREEMAN, Diane, Carol , COWDERY-CORVAN, Peter, Jerome , YANG, Cheng , LEVY, David, Howard
IPC分类号： G03F7/00 , G03F7/20 , H01L21/77
CPC分类号： H01L27/1288 , G03F7/0005 , G03F7/2022 , H01L27/1214 , H01L27/1225 , H01L27/1292 , H01L29/66765 , H01L29/7869
摘要： The invention relates to a process for forming a structure comprising (a) providing a transparent support; (b) forming a color mask on a first side of the transparent support; (c) applying a first layer comprising a deposition inhibitor material that is sensitive to visible light; (d) patterning the first layer by exposing the first layer through the color mask with visible light to form a first pattern and developing the deposition inhibitor material to provide selected areas of the first layer effectively not having the deposition inhibitor material; and (e) depositing a second layer of functional material over the transparent support; wherein the second layer of functional material is substantially deposited only in selected areas over the transparent support not having the deposition inhibitor material.
摘要翻译：本发明涉及一种用于形成结构的方法，包括（a）提供透明支撑体; （b）在所述透明支撑体的第一面上形成彩色掩模; （c）施加包含对可见光敏感的沉积抑制剂材料的第一层; （d）通过用可见光将所述第一层暴露于所述彩色掩模以形成第一图案并使所述沉积抑制剂材料显影以提供所述第一层的选定区域，而不具有所述沉积抑制剂材料; 和（e）在所述透明支撑体上沉积第二层功能材料; 其中第二层功能材料仅在不具有沉积抑制剂材料的透明支撑体上基本上沉积在选定的区域中。

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