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    • 4. 发明申请
    • PLASMA DEPOSITION METHOD
    • 等离子体沉积法
    • WO2014158796A1
    • 2014-10-02
    • PCT/US2014/020215
    • 2014-03-04
    • DOW CORNING CORPORATION
    • ASAD, Syed, SalmanDESCAMPS, PierreKAISER, VincentLEEMPOEL, Patrick
    • H05H1/42H05H1/46
    • H05H1/42H05H1/46H05H2001/4697
    • A method of plasma deposition of a coating on a substrate using a non-thermal equilibrium atmospheric pressure plasma generated with a plasma reactor device spaced apart from the substrate by a gap, the method comprising: generating a turbulent luminous plasma jet at atmospheric pressure within a luminous zone of a chamber defined by a dielectric housing having an outlet, the generating being done in such a way that the turbulent luminous plasma jet diffuses laterally to create a region of diffused luminous plasma within the luminous zone of the chamber and the turbulent aspect of the turbulent luminous plasma jet is insensitive to, and not a function of, the existence and size of the dielectric housing and the gap between dielectric housing and the substrate; contacting the turbulent luminous plasma jet with an atomized precursor material to give coating-useful products within the luminous zone of the chamber; allowing the coating-useful products including a diffused plasma, but not the turbulent luminous plasma jet, to flow from the luminous zone to the outlet of the dielectric housing, and then out of the outlet of the dielectric housing to give released coating-useful products disposed outside the dielectric housing and spaced apart from the turbulent luminous plasma jet, and contacting the released coating-useful products to the substrate so as to form the coating on the substrate. A manufactured article comprising a coated substrate prepared by the method.
    • 一种使用由等离子体反应器装置产生的非热平衡大气压等离子体在衬底上等离子体沉积涂层的方法,所述等离子体反应器装置通过间隙与衬底间隔开,所述方法包括:在大气压力下产生湍流发光等离子体射流 由具有出口的绝缘壳体限定的室的发光区域,该发生方式使得湍流发光等离子体射流横向扩散以在腔室的发光区域内产生扩散的发光等离子体的区域,并且该紊流区域 湍流发光等离子体射流对绝缘壳体的存在和尺寸以及介电壳体和衬底之间的间隙不敏感,而不是功能; 使湍流发光等离子体射流与雾化的前体材料接触,以在腔室的发光区域内产生涂层有用的产物; 允许包括扩散等离子体但不包括湍流发光等离子体射流的涂层有用的产品从发光区流到介质壳体的出口,然后从绝缘壳体的出口流出,以产生释放的涂层有用的产物 设置在电介质外壳的外部并与湍流发光等离子体射流间隔开,并将释放的涂层有用的产品与基底接触,以在基底上形成涂层。 一种包含通过该方法制备的涂覆基材的制品。