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    • 2. 发明授权
    • Stationary and dynamic radial transverse electric polarizer for high numerical aperture systems
    • 用于高数值孔径系统的静态和动态径向横向电偏振器
    • US07511884B2
    • 2009-03-31
    • US11187848
    • 2005-07-25
    • Donis FlagelloKevin CummingsAlexander Straaijer
    • Donis FlagelloKevin CummingsAlexander Straaijer
    • G02B5/30
    • G03F7/70566G02B5/3058
    • A radial transverse electric polarizer device is provided. The device includes a first layer of material having a first refractive index, a second layer of material having a second refractive index, and a plurality of elongated elements azimuthally and periodically spaced apart, and disposed between the first layer and the second layer. The plurality of elongated elements interact with electromagnetic waves of radiation to transmit transverse electric polarization of electromagnetic waves of radiation. One aspect of the invention is, for example, to use such polarizer device in a lithographic projection apparatus to increase imaging resolution. Another aspect is to provide a device manufacturing method including polarizing a beam of radiation in a transverse electric polarization.
    • 提供径向横向电偏振器装置。 该器件包括具有第一折射率的第一材料层,具有第二折射率的第二材料层和位于方位角和周期上间隔开的多个细长元件,并且设置在第一层和第二层之间。 多个细长元件与辐射的电磁波相互作用以透射辐射的电磁波的横向电极化。 本发明的一个方面是例如在光刻投影设备中使用这种偏振器装置来增加成像分辨率。 另一方面是提供一种包括在横向电极化中偏振辐射束的装置制造方法。