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    • 1. 发明授权
    • Apparatus for sensing position of electrostatic XY-stage through time-division multiplexing
    • 用于通过时分复用来感测静电XY平台的位置的装置
    • US06515489B2
    • 2003-02-04
    • US09879973
    • 2001-06-14
    • Dong-ki MinCheol-soon KimJong Up Jeon
    • Dong-ki MinCheol-soon KimJong Up Jeon
    • G01R2726
    • G01Q10/06G01B7/003G01D5/2417G01P2015/082G11B9/1418
    • The apparatus senses the positions of X- and Y- axes of the stage by applying an excitation signal having a phase difference to a stator of each axis of the XY-stage and then time-division detecting changes in capacitance from a moving plate. The apparatus includes: a moveable stage, rotor combs connected to the stage, and stator combs of predetermined axes, wherein differential capacitors are formed between the rotor and stator combs; an amplifier connected to the stage for outputting position information in a time-division manner, in which a time constant is designed so as to prevent interference between position information output from the stage; a sample/hold unit for sampling and holding the time-division position information output from the amplifier in response to a timing control signal; and a controller which outputs a control signal such that the time-division position information from the amplifier can be sampled and held when the information reaches a maximum, reads position information output from the sample/hold unit, and generates excitation signals having different phases to each be applied to a different axis.
    • 该装置通过向XY台的每个轴的定子施加具有相位差的激励信号,然后对来自移动板的电容的变化进行时分检测来感测台的X轴和Y轴的位置。 该装置包括:移动台,连接到台的转子梳和预定轴的定子梳,其中差分电容器形成在转子和定子梳之间; 连接到所述级的放大器,用于以时分方式输出位置信息,其中设计时间常数以防止从所述级输出的位置信息之间的干扰; 采样/保持单元,用于采样和保持响应于定时控制信号从放大器输出的时分位置信息; 以及控制器,其输出控制信号,使得当信息达到最大时可以对来自放大器的时分位置信息进行采样和保持,读取从采样/保持单元输出的位置信息,并产生具有不同相位的激励信号 每个都应用于不同的轴。
    • 2. 发明授权
    • Apparatus and method for measuring change in capacitance
    • 用于测量电容变化的装置和方法
    • US06630834B2
    • 2003-10-07
    • US09682572
    • 2001-09-21
    • Dong-ki MinJong Up Jeon
    • Dong-ki MinJong Up Jeon
    • G01R2702
    • G01P15/125G01R27/2605
    • The apparatus includes a first gain adjuster, a second gain adjuster, an amplifier, a demodulator, a controller, and a change measuring unit. The first gain adjuster adjusts the gain of an input signal and outputs the gain-adjusted input signal as a first modulating signal, while the second gain adjuster adjusts the gain of an inverted input signal and outputs the gain-adjusted inverted input signal as a second modulating signal. The amplifier amplifies a modulated signal output from a junction between the first and second capacitors and outputs the amplified results. The demodulator demodulates the amplified results received from the amplifier in response to a control signal and outputs the demodulated result. The controller generates the control signal per unit period of the input signal and outputs the generated control signal to the demodulator. The change measuring unit measures the change in capacitance from the demodulated results received from the demodulator. An offset produced by parasitic capacitance is compensated without affecting the change in capacitance to be measured.
    • 该装置包括第一增益调节器,第二增益调节器,放大器,解调器,控制器和变化测量单元。 第一增益调整器调节输入信号的增益,并输出增益调整的输入信号作为第一调制信号,而第二增益调整器调节反相输入信号的增益,并输出经增益调整的反相输入信号作为第二调制信号 调制信号。 放大器放大从第一和第二电容器之间的结点输出的调制信号,并输出放大的结果。 解调器响应于控制信号解调从放大器接收的放大结果,并输出解调结果。 控制器在输入信号的每单位周期产生控制信号,并将产生的控制信号输出到解调器。 变化测量单元根据从解调器接收的解调结果来测量电容的变化。 补偿由寄生电容产生的偏移,而不影响待测电容的变化。
    • 3. 发明授权
    • Information storage apparatus using a magnetic medium coated with a wear-resistant thin film
    • 使用涂有耐磨薄膜的磁性介质的信息存储装置
    • US07027364B2
    • 2006-04-11
    • US10232326
    • 2002-09-03
    • Seung-bum HongJong Up JeonHyun-jung Shin
    • Seung-bum HongJong Up JeonHyun-jung Shin
    • G11B11/00
    • G11B9/08B82Y10/00G11B5/58G11B5/596G11B9/14G11B11/08G11B13/00
    • There is provided an information storage apparatus including recording medium and a head. The recording medium has an electrode layer, a magnetic layer that is stacked on the electrode layer, and a wear-resistant thin film that is stacked on the magnetic layer. The head has a conductive probe for injecting charge to record information and sensing the charge injected into the recording medium to reproduce information in a state that the conductive probe contacts the recording medium. A magnetic medium, which is coated with a wear-resistant thin film, stores charges to record information and reproduce information using an electrostatic force. Thus, it is possible to stably store highly integrated information. Also, a probe contacts a recording medium to record and reproduce information at a high speed. Thus, sensitivity and resolution can be improved.
    • 提供了一种包括记录介质和头部的信息存储装置。 记录介质具有电极层,堆叠在电极层上的磁性层和堆叠在磁性层上的耐磨薄膜。 头具有用于注入电荷以记录信息并感测注入到记录介质中的电荷的导电探针,以在导电探针接触记录介质的状态下再现信息。 涂有耐磨薄膜的磁性介质存储电荷以记录信息并使用静电力再现信息。 因此,可以稳定地存储高度集成的信息。 此外,探针接触记录介质以高速记录和再现信息。 因此,可以提高灵敏度和分辨率。
    • 4. 发明授权
    • Lorentz force microscope and method of measuring magnetic domain using Lorentz force
    • 洛仑兹力显微镜和使用洛伦兹力测量磁畴的方法
    • US06696833B2
    • 2004-02-24
    • US10138643
    • 2002-05-06
    • Seung-bum HongJong Up JeonHyun-jung Shin
    • Seung-bum HongJong Up JeonHyun-jung Shin
    • G01R3302
    • G01Q60/54G01R33/0385
    • A Lorentz force microscope and a method of measuring magnetic domains using Lorentz force are provided. The Lorentz force microscope includes: a conductive probe which is actuated by Lorentz force occurring due to the interaction between a magnetic field of the magnetic medium and current applied into the magnetic field; a bottom electrode which is prepared on one side of the magnetic medium, for charging the magnetic field with electricity; a scanner for supporting the magnetic medium on which the bottom electrode is prepared and actuating the magnetic medium when the conductive probe opposite to a record of the magnetic medium scans the record of the magnetic medium; and an information detector for controlling the scanner and detecting information on magnetization of the magnetic medium from motion components of the conductive probe. Directions of Lorentz force which is applied to the conductive probe are sensed in a state that the conductive probe contacts or does not contact the magnetic medium to detect magnetization directions of the magnetic domains. Thus, a magnetic domain distribution map having improved resolution can be obtained.
    • 提供洛伦兹力显微镜和使用洛伦兹力测量磁畴的方法。 洛伦兹力显微镜包括:由于磁介质的磁场和施加到磁​​场中的电流之间的相互作用而产生的由洛伦兹力驱动的导电探针; 制备在磁介质一侧的用于对电磁场充电的底电极; 用于支撑制备底部电极的磁性介质的扫描器,当与磁性介质的记录相对的导电探针扫描磁性介质的记录时,致动磁性介质; 以及信息检测器,用于控制扫描仪并且从导电探针的运动分量检测关于磁介质的磁化的信息。 在导电探针接触或不接触磁介质以检测磁畴的磁化方向的状态下感测施加到导电探针的洛伦兹力的方向。 因此,可以获得具有改善的分辨率的磁畴分布图。
    • 5. 发明授权
    • Apparatus for recording and reading data and method of recording and reading data using contact resistance measurement thereof
    • 用于记录和读取数据的装置以及使用其接触电阻测量记录和读取数据的方法
    • US06762402B2
    • 2004-07-13
    • US09973869
    • 2001-10-11
    • Jae-joon ChoiJong Up JeonJung-gyu Shin
    • Jae-joon ChoiJong Up JeonJung-gyu Shin
    • H01J314
    • G11B9/1463B82Y10/00G11B9/04G11B9/14
    • An apparatus for recording and reading data by measuring contact resistance and a method for recording and reading data thereof are provided. The apparatus for recording and reading data includes a storage medium and a probe which is installed to face the storage medium and is used for recording data on the storage medium and reading the data from the storage medium. The storage medium includes a substrate, a conductive layer formed on the substrate and a dielectric layer formed on the conductive layer. With the apparatus for recording and reading data, it is possible to solve problems concerning data retention, data read speed and signal-to-noise ratio which have been at issue in developing data storage media with the use of conventional scanning probe microscopic techniques.
    • 提供了一种通过测量接触电阻​​来记录和读取数据的装置及其记录和读取数据的方法。 用于记录和读取数据的装置包括存储介质和探针,该存储介质和探针安装成面向存储介质,并用于在存储介质上记录数据并从存储介质读取数据。 存储介质包括基板,形成在基板上的导电层和形成在导电层上的电介质层。 利用用于记录和读取数据的装置,可以利用常规的扫描探针显微技术来解决在开发数据存储介质中已经存在的关于数据保持,数据读取速度和信噪比的问题。
    • 8. 发明授权
    • Single stage microactuator for multi-dimensional actuation
    • US06445107B1
    • 2002-09-03
    • US09682085
    • 2001-07-18
    • Hee-moon JeongJong Up JeonJae-joon Choi
    • Hee-moon JeongJong Up JeonJae-joon Choi
    • H02N100
    • H02N1/008B82Y10/00G11B9/1418
    • A single-stage microactuator is provided. The single-stage microactuator includes: a substrate; a fixed plate electrode disposed at a central portion of the substrate; a rectangular stage having first and second side directions, which is located above the fixed plate electrode, the second direction being perpendicular to the first direction; a plurality of actuating frame parts provided corresponding to the two first direction of sides and the two second direction of sides for regions surrounding the stage, wherein each actuating frame includes a plurality of actuating frames arranged parallel to a corresponding side of the stage adjacent to each surrounding region; a plurality of comb normal directional deformable spring parts, each disposed between each side of the stage and the inner part of each actuating frame part, wherein each comb normal directional deformable spring part includes a plurality of spring members extending in a direction perpendicular to a corresponding side of the stage; a plurality of fixed frame parts, each including a plurality of fixed frames alternately arranged parallel to the plurality of actuating frames of a corresponding actuating frame part of each surrounding region; an actuating comb electrode provided in each actuating frame of the actuating frame part, the actuating comb electrode extending in a direction perpendicular to the side of the stage corresponding to each surrounding region; a fixed comb electrode arranged alternately in parallel to the actuating comb electrode in each fixed frame of the fixed frame part; and a plurality of comb directional deformable spring parts disposed on one side of each actuating frame part opposite the stage and the opposing side thereof for providing an elastic recovery force in a direction perpendicular to one side of the stage corresponding to each of the surrounding regions. The microactuator is capable of multi-dimensional actuation using a single electrode in an actuating part and of simplifying a fabrication process without an isolation process step.
    • 10. 发明授权
    • Rotary microactuator having optimally curved electrodes
    • 具有最佳弯曲电极的旋转微致动器
    • US06563249B1
    • 2003-05-13
    • US09633288
    • 2000-08-04
    • Sunghwan JungJong Up JeonJae-joon Choi
    • Sunghwan JungJong Up JeonJae-joon Choi
    • H02N100
    • H02N1/008
    • A rotary microactuator having optimally curved electrodes is provided. The rotary microactuator is optimally designed so that the interval between two electrodes, which are a rotor and a stator, is constant regardless of a distance from the central axis of the rotor. Thus, a parallel-plate configuration can generate a maximum driving force, and also can widen a driving range. In particular, in a rotary microactuator using parallel-plate configuration electrodes, the electrodes are optimally designed so that the interval between the electrodes remains constant regardless the radius by tilting the electrodes or by zigzagging the electrodes. Therefore, a driving force per a given area can be maximized.
    • 提供具有最佳弯曲电极的旋转微型致动器。 旋转微型致动器被最佳地设计成使得作为转子和定子的两个电极之间的间隔是恒定的,而与离转子中心轴的距离无关。 因此,平行板构造可以产生最大驱动力,并且也可以扩大驱动范围。 特别地,在使用平行板配置电极的旋转微型致动器中,电极被最佳设计,使得电极之间的间隔通过倾斜电极而保持恒定,或者通过锯齿形电极而保持恒定。 因此,给定区域的驱动力可以最大化。