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    • 2. 发明申请
    • High Purity Phosphorus Oxychloride Safe Feeding System
    • 高纯度磷氯化物安全供料系统
    • US20160138760A1
    • 2016-05-19
    • US14898715
    • 2014-06-17
    • Dong Xiang
    • Dong XiangXiaoji ShuXianwei Pan
    • F17C9/00F17C3/00
    • F17C9/00F17C3/00F17C2205/0111F17C2205/0332F17C2223/0153F17C2223/033F17C2223/047F17C2250/032F17C2250/038F17C2250/0408F17C2250/0452F17C2260/037F17C2260/038F17C2260/042F17C2270/05Y10T137/3115
    • A high purity phosphorus oxychloride safety feeding system: one end of a nitrogen gas inlet tube (4) connected to a nitrogen gas inlet valve is inserted into the bottom of a high purity phosphorus oxychloride storage tank (2), and the other end external to a feeding device (1) is connected to a nitrogen gas valve (8); one end of a nitrogen outlet tube (5) connected to a nitrogen gas outlet valve (7) is inserted into the top part of the high purity phosphorus oxychloride storage tank (2); the feeding device (1) is provided with an automatic tail gas exhaust outlet (11) thereon; a high purity phosphorus oxychloride gas leakage detection alarm (10) is installed in the upper part of the inner wall of the feeding device (1); a video surveillance camera (14) is installed in the middle part of the inner wall; a low liquid level detection alarm (9) is installed in the lower part of the inner wall, and is connected to a computer port (13) on the feeding device; an LED illuminating lamp (15) is installed at the bottom inside the feeding device (1), and an observation window (16) is provided in the front of the feeding device (1). The system improves continuity and intelligent control of operation and usage, addresses alarm reporting and takes measures when leakage of high purity phosphorus oxychloride occurs; and solves the problems of on-site and remote monitoring and material liquid level monitoring during the use of high purity phosphorus oxychloride.
    • 高纯度三氯氧化磷安全供料系统:连接氮气入口阀的氮气入口管(4)的一端插入高纯度三氯氧磷储罐(2)的底部,另一端位于 供给装置(1)连接到氮气阀(8); 连接到氮气出口阀(7)的氮气出口管(5)的一端插入高纯度三氯氧磷储罐(2)的顶部; 给料装置(1)上设置有自动尾气排出口(11); 在供料装置(1)的内壁的上部安装有高纯度的三氯氧化磷气体泄漏检测报警器(10); 视频监控摄像机(14)安装在内壁的中间部分; 低液位检测报警器(9)安装在内壁的下部,并连接到进料装置上的计算机端口(13); 一个LED照明灯(15)安装在馈送装置(1)的底部,并且在馈送装置(1)的前面设有观察窗(16)。 系统提高运行和使用的连续性和智能控制,解决报警报告,并在发生高纯度三氯氧磷泄漏时采取措施; 解决了高纯度三氯氧化磷使用过程中现场和远程监控以及物质液位监测问题。