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    • 1. 发明授权
    • Method for forming a capacitor for semiconductor devices with diffusion barrier layer on both sides of dielectric layer
    • 在介电层两侧形成具有扩散阻挡层的半导体器件的电容器的方法
    • US06479364B2
    • 2002-11-12
    • US09751396
    • 2001-01-02
    • Dong Woo ShinSeung Joon Jeon
    • Dong Woo ShinSeung Joon Jeon
    • H01L2120
    • H01L28/75H01L21/28568H01L21/3143H01L28/84
    • A method for forming a capacitor for a semiconductor device is provided. In the method, a storage electrode is formed of a polysilicon layer, and a hemispherical silicate glass (HSG) layer is optionally formed on the surface of the storage electrode to increase the surface area of the storage electrode. Next, a TaSiN layer as a diffusion barrier is formed, a TaON layer as a dielectric layer is formed, and then a TaSiN layer is formed on the TaON layer. Next, a plate electrode is formed on the TaSiN layer, thereby completing a capacitor. Diffusion of oxygen between the electrodes and the dielectric layer is effectively blocked, so that reduction of capacitance and occurrence of leakage current are prevented. Due to improved dielectric characteristics of the TaON layer, increasing the surface area of the dielectric layer—for example, by forming a HSG layer—may not be required, thereby increasing a processing margin between adjacent capacitors. In addition, the thickness of the TaON layer can be adjusted, thereby raising the breakdown voltage of the TaON layer.
    • 提供一种形成半导体器件的电容器的方法。 在该方法中,存储电极由多晶硅层形成,并且任选地在存储电极的表面上形成半球状硅酸盐玻璃(HSG)层以增加存储电极的表面积。 接着,形成作为扩散阻挡层的TaSiN层,形成作为电介质层的TaON层,然后在TaON层上形成TaSiN层。 接着,在TaSiN层上形成平板电极,从而形成电容器。 有效地阻止电极和电介质层之间的氧扩散,从而防止电容的减小和泄漏电流的发生。 由于改善了TaON层的介电特性,可能不需要增加介质层的表面积,例如通过形成HSG层,从而增加相邻电容器之间的加工余量。 此外,可以调节TaON层的厚度,从而提高TaON层的击穿电压。
    • 2. 发明授权
    • Organic light emitting display device and method for manufacturing the same
    • 有机发光显示装置及其制造方法
    • US09076745B2
    • 2015-07-07
    • US13339925
    • 2011-12-29
    • Hee Dong ChoiSeung Joon Jeon
    • Hee Dong ChoiSeung Joon Jeon
    • H01L27/32H01L51/52
    • H01L51/56H01L27/3244H01L27/3246H01L27/3276H01L27/3279H01L51/5203H01L51/5246
    • An OLED device is disclosed. The OLED device includes: a substrate defined into an active area in which a plurality of pixels are formed in a matrix shape, a GIP (gate-in-panel) area in which drive elements are formed, a ground contact area, and a seal line area; a thin film transistor formed in each pixel region within the active area; an organic light emission diode formed on a protective film and configured to include a first electrode, an organic light emission layer and a second electrode; a bank layer formed to divide the organic light emission diode into pixel units; a signal wiring formed in the ground contact area and the seal line area; and an extended portion formed from the same material as the first electrode of the organic light emission diode and configured to cover the signal wiring.
    • 公开了OLED器件。 OLED器件包括:被限定在其中以矩阵形状形成多个像素的有源区域,其中形成有驱动元件的GIP(栅极面板)区域,接地区域和密封件 线面积 形成在有源区域内的每个像素区域中的薄膜晶体管; 形成在保护膜上并被配置为包括第一电极,有机发光层和第二电极的有机发光二极管; 形成为将有机发光二极管分割成像素单元的堤层; 形成在接地区域和密封线区域中的信号线; 以及由与有机发光二极管的第一电极相同的材料形成并被构造成覆盖信号布线的延伸部分。
    • 3. 发明申请
    • ORGANIC LIGHT EMITTING DISPLAY DEVICE AND METHOD FOR MANUFACTURING THE SAME
    • 有机发光显示装置及其制造方法
    • US20130049003A1
    • 2013-02-28
    • US13339925
    • 2011-12-29
    • Hee Dong ChoiSeung Joon Jeon
    • Hee Dong ChoiSeung Joon Jeon
    • H01L27/32H01L51/56
    • H01L51/56H01L27/3244H01L27/3246H01L27/3276H01L27/3279H01L51/5203H01L51/5246
    • An OLED device is disclosed. The OLED device includes: a substrate defined into an active area in which a plurality of pixels are formed in a matrix shape, a GIP (gate-in-panel) area in which drive elements are formed, a ground contact area, and a seal line area; a thin film transistor formed in each pixel region within the active area; an organic light emission diode formed on a protective film and configured to include a first electrode, an organic light emission layer and a second electrode; a bank layer formed to divide the organic light emission diode into pixel units; a signal wiring formed in the ground contact area and the seal line area; and an extended portion formed from the same material as the first electrode of the organic light emission diode and configured to cover the signal wiring.
    • 公开了OLED器件。 OLED器件包括:被限定在其中以矩阵形状形成多个像素的有源区域,其中形成有驱动元件的GIP(栅极面板)区域,接地区域和密封件 线面积 形成在有源区域内的每个像素区域中的薄膜晶体管; 形成在保护膜上并被配置为包括第一电极,有机发光层和第二电极的有机发光二极管; 形成为将有机发光二极管分割成像素单元的堤层; 形成在接地区域和密封线区域中的信号线; 以及由与有机发光二极管的第一电极相同的材料形成并被构造成覆盖信号布线的延伸部分。