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    • 2. 发明授权
    • Optical interferometer measurement apparatus and method
    • 光干涉仪测量装置及方法
    • US5986759A
    • 1999-11-16
    • US127430
    • 1998-07-13
    • Donald Michael DeCainPhilip C. D. HobbsKeith Randal Pope
    • Donald Michael DeCainPhilip C. D. HobbsKeith Randal Pope
    • G01B9/02
    • G01B3/00G01B9/02068G01B2290/25
    • Method and apparatus for realizing unusually sensitive and stable interferometric measurement capabilities. The apparatus comprises an optical interferometer with at least two optical outputs, the ratio of whose intensities can vary with a tuning parameter; and at least one detector, each of which is optically connected to the interferometer, and producing in aggregate at least two linearly-independent signals that depend on the light intensity and the tuning parameter, which are combined to produce a first measurement whose sensitivity to light intensity changes is substantially smaller than that of either of the two linearly-independent signals, and a second measurement whose sensitivity to the tuning parameter is substantially smaller than that of either of the two linearly-independent signals.
    • 用于实现异常敏感和稳定的干涉测量能力的方法和装置。 该装置包括具有至少两个光学输出的光学干涉仪,其强度可以随着调谐参数而变化; 以及至少一个检测器,其中的每一个光学连接到干涉仪,并且集合地产生取决于光强度和调谐参数的至少两个线性独立的信号,其被组合以产生对光敏感的第一测量 强度变化明显小于两个线性独立信号中任一个的强度变化,而对调谐参数的灵敏度显着小于两个线性独立信号中的任一个的灵敏度的第二测量。