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    • 6. 发明授权
    • CMOS integrated circuit architecture incorporating deep implanted emitter region to form auxiliary bipolar transistor
    • CMOS集成电路架构结合深注入发射极区域形成辅助双极晶体管
    • US06350640B1
    • 2002-02-26
    • US08276290
    • 1994-07-18
    • Robert T. FullerChris McCartyJohn T. GasnerMichael D. Church
    • Robert T. FullerChris McCartyJohn T. GasnerMichael D. Church
    • H01L218238
    • H01L27/0623
    • To program a CMOS memory, an auxiliary bipolar transistor is formed in a P-well adjacent to the P-well of an NMOS device of the CMOS memory, the auxiliary transistor being capable of forcing a large magnitude current through a fusible link, so as to program the electronic state of the CMOS memory cell into a prescribed binary (1/0) condition. A separate implant mask for the emitter region of the auxiliary transistor allows the geometry and impurity concentration profile of the emitter region to be tailored by a deep dual implant, so that the impurity concentration of the emitter region is not decreased, and yields a reduced base width for the auxiliary transistor to provide a relatively large current gain to blow the fuse, while allowing the doping parameters of the source/drain regions of the CMOS structure to be separately established to prevent thyristor latch-up.
    • 为了编程CMOS存储器,辅助双极晶体管形成在与CMOS存储器的NMOS器件的P阱相邻的P阱中,辅助晶体管能够通过可熔链路强制大幅度电流,因此 将CMOS存储单元的电子状态编程为规定的二进制(1/0)条件。 用于辅助晶体管的发射极区域的单独的注入掩模允许通过深度双注入来调整发射极区域的几何形状和杂质浓度分布,使得发射极区域的杂质浓度不降低,并且产生降低的基极 宽度用于提供相对较大的电流增益来熔断熔丝,同时允许分别建立CMOS结构的源/漏区的掺杂参数以防止晶闸管闭锁。