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1. 发明专利

JP2009094326A Method of grinding wafer 审中-公开
标题翻译：研磨方法
公开(公告)号：JP2009094326A
公开(公告)日：2009-04-30
申请号：JP2007264172
申请日：2007-10-10
申请人： Disco Abrasive Syst Ltd , 株式会社ディスコ
发明人： KAJIYAMA KEIICHI , MASUDA TAKATOSHI , WATANABE SHINYA , AOKI SHIGEHIKO , HOSHIKAWA HIROTOSHI , KOBAYASHI YOSHIKAZU , HARADA SEISHI , YAMAMOTO SETSUO
IPC分类号： H01L21/304 , B24B7/22
CPC分类号： B24D7/18 , B24B1/00 , B24B7/228
摘要： PROBLEM TO BE SOLVED: To produce the gettering effect without reducing the bending strength of devices even if the backside of a wafer is ground.
SOLUTION: In a method of grinding a wafer where the backside of a wafer having a plurality of devices formed on the front surface thereof is ground and free movement of heavy metal is suppressed and the bending strength of the devices is maintained at ≥1,000 MPa by the gettering effect, a grinding wheel to be used in the method has such a configuration that a grinding stone is firmly fixed to the free end of a base, the grinding stone being such that diamond abrasive grains having a grain diameter of ≤1 μm are fastened together using vitrified bond. A protection member is pasted to the front surface of the wafer, and the protection member is held on a chuck table. The grinding wheel is turned by turning the chuck table to grind the backside of the wafer by the grinding stone until an average value of the surface roughness of the backside of the wafer becomes ≤0.003 μm and a distortion layer remaining on the backside of the wafer has a thickness of 0.05 μm.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：即使晶片的背面被研磨，也可以在不降低器件的弯曲强度的情况下产生吸气效果。解决方案：在研磨晶片的方法中，其中具有形成在其前表面上的多个器件的晶片的背面被研磨并且重金属的自由移动被抑制，并且器件的弯曲强度保持在≥ 通过吸气效果为1000MPa，在该方法中使用的砂轮具有如下结构：磨石牢固地固定在基座的自由端，研磨石使得具有晶粒直径≤ 1微米用玻璃化粘结固定在一起。保护构件被粘贴到晶片的前表面，并且保护构件保持在卡盘台上。通过转动卡盘台来研磨砂轮，通过研磨石研磨晶片的背面直到晶片背面的表面粗糙度的平均值变为≤0.003μm，并且残留在晶片背面的失真层厚度为0.05μm。版权所有（C）2009，JPO＆INPIT

2. 发明专利

JP2008207277A Grinding wheel method of attachment 有权
标题翻译：研磨轮安装方法
公开(公告)号：JP2008207277A
公开(公告)日：2008-09-11
申请号：JP2007046067
申请日：2007-02-26
申请人： Disco Abrasive Syst Ltd , 株式会社ディスコ
发明人： KOGA HIROMI , AOKI SHIGEHIKO , IKETANI KAZUTO , SATO DAISUKE , MATSUMURA YURIKO
IPC分类号： B24B45/00 , B24D7/16
摘要： PROBLEM TO BE SOLVED: To prevent a grinding wheel and the inside of a grinding device from being damaged when mounting the grinding wheel on a wheel mount. SOLUTION: The grinding wheel 33 can be mounted without directly touching a grinding wheel part 332, by fixing both by a fixing means while contacting a fixing end surface 334 of an exposed frame part 330 with the wheel mount 32, in a state of storing a free end surface 331 of the grinding wheel 33 in a holding member 5 storing the free end surface 331 of the grinding wheel 33 covering the grinding wheel part 332. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：为了防止砂轮和研磨装置的内部在将砂轮安装在砂轮架上时损坏。解决方案：砂轮33可以安装在没有直接接触砂轮部分332的情况下，通过固定装置固定，同时在暴露的框架部分330的固定端面334与轮安装件32接触的状态下将砂轮33的自由端面331保存在保持构件5中，保持构件5容纳研磨砂轮33的自由端面331，覆盖砂轮部分332.版权所有（C）2008，JPO＆INPIT

3. 发明专利

JP2010149222A Grinder 有权
标题翻译：磨床
公开(公告)号：JP2010149222A
公开(公告)日：2010-07-08
申请号：JP2008329739
申请日：2008-12-25
申请人： Disco Abrasive Syst Ltd , 株式会社ディスコ
发明人： KAKEFUDA MASAKI , AOKI SHIGEHIKO
IPC分类号： B24B53/007 , B24B7/00 , B24B41/047 , H01L21/304
摘要： PROBLEM TO BE SOLVED: To provide a grinder reducing frequency of dressing of a grinding wheel, causing no scratch on a wafer.
SOLUTION: The grinder includes a chuck table retaining a workpiece and a grinding means rotatably supporting the grinding wheel that grinds the workpiece retained at the chuck table. The grinding wheel comprises an annular base having a mount attachment part attached to a wheel mount jointed to a tip end of a main spindle, and a plurality of the grinding wheel circularly disposed at a free end part of the annular base. A cleaning means cleaning an outer periphery side face and an inner periphery side face reaching from the mount attachment part to the free end part of the annular base is disposed in the grinder.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：为了提供减少研磨轮修整频率的研磨机，在晶片上不造成划痕。解决方案：研磨机包括保持工件的卡盘台和可旋转地支撑研磨保持在卡盘台上的工件的砂轮的研磨装置。砂轮包括环形基座，其具有连接到连接到主轴的末端的车轮安装件的安装附接部分和环形地设置在环形基座的自由端部处的多个砂轮。在研磨机中设置有清洁装置，其将从安装附件部分到达环形基座的自由端部的外周侧面和内周侧面清理。版权所有（C）2010，JPO＆INPIT

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