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JP2005193308A Blasting device and blasting method 有权
标题翻译：喷砂装置和喷砂方法
公开(公告)号：JP2005193308A
公开(公告)日：2005-07-21
申请号：JP2003435276
申请日：2003-12-26
申请人： Densho Engineering Co Ltd , Trecenti Technologies Inc , トレセンティテクノロジーズ株式会社 , 株式会社電硝エンジニアリング
发明人： FUTASE TAKUYA , SUMIMOYA IWAO , KIBE HOTAKA , KURODA KAZUHISA
IPC分类号： B24C1/00 , B24C3/32 , H01L21/31
摘要： PROBLEM TO BE SOLVED: To provide blasting technology capable of processing a surface of a work piece in a plazma treatment chamber with high accuracy of roughness.
SOLUTION: In this blasting device 300, a blasting means 200 and a roughening degree measuring means 400a as a blasting control means 400 are accommodated in a casing 110. The blasting means 200 is mounted in a blasting chamber 111, and the roughening degree measuring means 400a is mounted in a measuring chamber 401 defined through an openable and closeable door 111a in the blasting chamber 111 in adjacent to the blasting means. A parameter input device 420 for setting various blasting conditions, and an analyzing device 430 for analyzing an average roughening degree, a rate of change of roughening degree on the basis of a result of the measurement of the roughening degree, are mounted as the blasting control means 400.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供能够以高精度的粗糙度处理在plazma处理室中的工件的表面的喷砂技术。解决方案：在这种喷砂装置300中，喷砂装置200和作为喷砂控制装置400的粗化度测量装置400a容纳在壳体110中。喷砂装置200安装在喷射室111中，并且粗糙化度量测量装置400a安装在测量室401中，该测量室401通过与爆破装置相邻的喷射室111中的可打开和关闭的门111a限定。用于设定各种喷砂条件的参数输入装置420和用于分析平均粗糙度的分析装置430，基于粗糙度的测量结果的粗糙度变化率被安装作为爆破控制意味着400.版权所有（C）2005，JPO＆NCIPI

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