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    • 4. 发明授权
    • Mask complementary multiple exposure technique
    • 面膜互补多重曝光技术
    • US07387871B2
    • 2008-06-17
    • US10927564
    • 2004-08-26
    • Jianxin ZhuLance Eugene Stover
    • Jianxin ZhuLance Eugene Stover
    • G03F7/20
    • G03F7/70466
    • A method for creating a pattern on an exposure site of a material blank using an exposure apparatus includes providing a mask having a first mask pattern. The mask is positioned between the exposure apparatus and the material blank. The exposure site of the material blank is exposed. One or more additional exposure events are performed for patterning the exposure site of the material blank. Between each exposure event, the exposure site of the material blank is repositioned in a lateral direction with respect to the mask. Between successive exposure events involving the first mask pattern, there is a relative movement between the mask and the material blank of a distance less than or equal to a length of the first mask pattern.
    • 使用曝光装置在坯料的曝光部位上形成图案的方法包括提供具有第一掩模图案的掩模。 掩模位于曝光装置和材料坯料之间。 暴露材料坯料的暴露部位。 执行一个或多个额外的曝光事件以对材料坯料的曝光部位进行图案化。 在每个曝光事件之间,材料坯料的曝光位置相对于掩模在横向方向上重新定位。 在涉及第一掩模图案的连续曝光事件之间,在掩模和材料空白之间存在距离小于或等于第一掩模图案的长度的距离的相对移动。
    • 9. 发明授权
    • Capped polymeric load/unload pads
    • 带盖的聚合物装载/卸载垫
    • US06535353B2
    • 2003-03-18
    • US09188400
    • 1998-11-06
    • Zine Eddine BoutaghouJoel David LimmerJorge Vicente HanchiLance Eugene Stover
    • Zine Eddine BoutaghouJoel David LimmerJorge Vicente HanchiLance Eugene Stover
    • G11B2121
    • G11B5/6005
    • A disk drive system includes a base, a disk stack rotatably attached to the base, and an actuator assembly movably attached to the base. A ramp assembly includes a set of ramps for loading and unloading the sliders and transducing elements carried by the sliders to and from the disks in the disk stack. The ramp assembly is attached to the base. An actuator assembly is movably attached to the base of the disk drive. The actuator assembly moves the load springs and attached slider and transducers to various positions on the disk. The slider is a block of material having corners and edges. Sliders have a backside surface and an air-bearing surface. The slider also has at least one recess therein. One or more pads of shock absorbing material are positioned within at least one of the recesses in the slider. The pads are positioned within one or more recesses to prevent the corners or edges of the block of material near the air-bearing surface from contacting the disk. In one embodiment, the pads are positioned within the recesses so that the second material is positioned near the air-bearing surface. The pads include a first shock absorbing material, and a second material harder than the shock absorbing material. The second material can be diamond like carbon. After forming the pad, diamond like carbon is deposited on the pad using photolithography.
    • 磁盘驱动器系统包括基座,可旋转地附接到基座的磁盘组,以及可移动地附接到基座的致动器组件。 斜坡组件包括一组斜面,用于将滑块和由滑块承载的换能元件装载到盘堆中的盘和从盘中移出。 斜坡组件连接到基座。 致动器组件可移动地附接到盘驱动器的基座。 执行器组件将负载弹簧和附接的滑块和换能器移动到磁盘上的各种位置。 滑块是具有拐角和边缘的材料块。 滑块具有背面和空气轴承表面。 滑块还具有至少一个凹部。 减震材料的一个或多个垫定位在滑块中的至少一个凹部内。 焊盘定位在一个或多个凹部内,以防止靠近空气轴承表面的材料块的角部或边缘接触盘。 在一个实施例中,焊盘定位在凹部内,使得第二材料位于空气轴承表面附近。 垫包括第一减震材料和比冲击吸收材料更硬的第二材料。 第二种材料可以是像碳这样的金刚石。 在形成垫之后,使用光刻法将金刚石状碳沉积在垫上。
    • 10. 发明授权
    • Increased mechanical spacing through localized continuous carbon overcoat
    • 通过局部连续碳涂层增加机械间距
    • US06359754B1
    • 2002-03-19
    • US09329429
    • 1999-06-10
    • Jason W. RidderingZine-Eddine BoutaghouLance Eugene StoverPeter Raymond SegarDaniel Paul Burbank
    • Jason W. RidderingZine-Eddine BoutaghouLance Eugene StoverPeter Raymond SegarDaniel Paul Burbank
    • G11B571
    • G11B5/255G11B5/3106G11B5/6005G11B5/6082G11B5/72
    • An air bearing slider for a disc drive has an overcoat localized on the air bearing surface to provide a continuous covering over a leading portion of the air bearing surface. The overcoat terminates in a trailing cut-off line, and a trailing portion of the air bearing surface is not covered by overcoat. The overcoat also covers the pole tips of the transducer at a pole tip recession from the air bearing surface. The leading portion covered by the overcoat includes all of the air bearing surface that contacts the disc during contact/start/stop, which is protected by a uniform continuous overcoat layer. The trailing cut-off line is disposed at an angle to expose the trailing corners of the air bearing surface, such that all of the overcoat is elevated above the lowermost portion of the air bearing surface through pitch and roll angles of flying at inner and outer radii. Methods of applying the localized overcoat include subtractive and additive photolithographic deposition processes. The overcoat over the pole tips protects the pole tips during subsequent processing steps of forming the slider cavity.
    • 用于盘驱动器的空气轴承滑块具有定位在空气轴承表面上的外涂层,以在空气轴承表面的引导部分上提供连续的覆盖物。 外罩终止于拖尾切割线,空气支承表面的后部不被外涂层覆盖。 外罩还在空气轴承表面的极尖凹陷处覆盖换能器的极尖。 由外涂层覆盖的引导部分包括在接触/起动/停止期间接触盘的所有空气轴承表面,其被均匀的连续外涂层保护。 尾部切断线设置成一定角度以暴露空气支承表面的后角,使得所有的外涂层通过在内部和外部飞行的俯仰角和滚动角度而升高到空气轴承表面的最下部分之上 半径 施加局部外涂层的方法包括减色和附加光刻沉积工艺。 在形成滑块空腔的后续处理步骤中,极尖上的外涂保护极尖。