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    • 7. 发明申请
    • CATADIOPTRIC PROJECTION OBJECTIVE
    • 目标投影目标
    • US20110235167A1
    • 2011-09-29
    • US13153544
    • 2011-06-06
    • David ShaferWilhelm UlrichAurelian DodocRudolf M. Von BuenauHans-Juergen MannAlexander Epple
    • David ShaferWilhelm UlrichAurelian DodocRudolf M. Von BuenauHans-Juergen MannAlexander Epple
    • G02B17/08
    • G02B17/0804G02B17/08G02B17/0812G02B17/0844G02B17/0856G02B17/0892G03F7/70225
    • A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective comprises: a first objective part for imaging the pattern provided in the object plane into a first intermediate image; a second objective part for imaging the first intermediate imaging into a second intermediate image; a third objective part for imaging the second intermediate imaging directly onto the image plane; wherein a first concave mirror having a first continuous mirror surface and at least one second concave mirror having a second continuous mirror surface are arranged upstream of the second intermediate image; pupil surfaces are formed between the object plane and the first intermediate image, between the first and the second intermediate image and between the second intermediate image and the image plane; and all concave mirrors are arranged optically remote from a pupil surface. The system has potential for very high numerical apertures at moderate lens material mass consumption.
    • 用于将设置在投影物镜的物平面中的图案成像到投影物镜的像平面上的反射折射投射物镜包括:用于将设置在物平面中的图案成像为第一中间图像的第一物镜部分; 第二目标部分,用于将第一中间成像成像成第二中间图像; 用于将第二中间成像直接成像到图像平面上的第三目标部分; 其中具有第一连续镜面的第一凹面镜和具有第二连续镜面的至少一个第二凹面镜布置在所述第二中间图像的上游; 瞳孔表面形成在物平面与第一中间图像之间,第一和第二中间图像之间以及第二中间图像与图像平面之间; 并且所有凹面反射镜光学地远离光瞳表面布置。 该系统具有中等透镜材料质量消耗的非常高的数值孔径的潜力。
    • 8. 发明申请
    • CATADIOPTRIC PROJECTION OBJECTIVE
    • 目标投影目标
    • US20080310014A1
    • 2008-12-18
    • US12196637
    • 2008-08-22
    • David ShaferWilhelm UlrichAurelian DodocRudolf Von BuenauHans-Juergen MannAlexander Epple
    • David ShaferWilhelm UlrichAurelian DodocRudolf Von BuenauHans-Juergen MannAlexander Epple
    • G02B17/08
    • G02B17/0804G02B17/08G02B17/0812G02B17/0844G02B17/0856G02B17/0892G03F7/70225
    • A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective comprises: a first objective part for imaging the pattern provided in the object plane into a first intermediate image; a second objective part for imaging the first intermediate imaging into a second intermediate image; a third objective part for imaging the second intermediate imaging directly onto the image plane;wherein a first concave mirror having a first continuous mirror surface and at least one second concave mirror having a second continuous mirror surface are arranged upstream of the second intermediate image; pupil surfaces are formed between the object plane and the first intermediate image, between the first and the second intermediate image and between the second intermediate image and the image plane; and all concave mirrors are arranged optically remote from a pupil surface. The system has potential for very high numerical apertures at moderate lens material mass consumption.
    • 用于将设置在投影物镜的物平面中的图案成像到投影物镜的像平面上的反射折射投射物镜包括:用于将设置在物平面中的图案成像为第一中间图像的第一物镜部分; 第二目标部分,用于将第一中间成像成像成第二中间图像; 用于将第二中间成像直接成像到图像平面上的第三目标部分; 其中具有第一连续镜面的第一凹面镜和具有第二连续镜面的至少一个第二凹面镜布置在所述第二中间图像的上游; 瞳孔表面形成在物平面与第一中间图像之间,第一和第二中间图像之间以及第二中间图像与图像平面之间; 并且所有凹面反射镜光学地远离光瞳表面布置。 该系统具有中等透镜材料质量消耗的非常高的数值孔径的潜力。