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    • 5. 发明授权
    • Blue/ultraviolet/green vertical cavity surface emitting laser employing lateral edge overgrowth (LEO) technique
    • 蓝色/紫外/绿色垂直腔表面发射激光采用侧边过度生长(LEO)技术
    • US06233267B1
    • 2001-05-15
    • US09233006
    • 1999-01-19
    • Arto V NurmikkoYoon-Kyu Song
    • Arto V NurmikkoYoon-Kyu Song
    • H01S500
    • B82Y20/00H01S5/18308H01S5/18341H01S5/18369H01S5/2214H01S5/34333H01S2304/12
    • A vertical cavity, surface emitting laser (VCSEL) device (10, 10′) has a substrate (12) and, disposed over a surface of the substrate, a Group III nitride buffer layer (14) and a mesa structure containing at least a portion of an n-type Group III nitride layer (16). The VCSEL device and mesa structure further include a first multilayer dielectric mirror stack (18a), that is embedded within the first Group III nitride layer by the use of a lateral edge overgrowth (LEO) process; a p-type Group III nitride layer (26); and a p-n junction between the n-type Group III nitride layer and the p-type Group III nitride layer. The p-n junction contains an active multiquantum well region (24). Also contained in the mesa structure is a dielectric (silicon dioxide) layer (20) having a current constricting aperture (20a). The dielectric layer and aperture are buried within one of the n-type Group III nitride layer or the p-type Group III nitride layer, also by the use of the LEO process. A second multilayer dielectric mirror stack (18b) is disposed on top of the mesa structure and over the p-type Group III nitride layer. The first and second multilayer dielectric mirror stacks define a resonant optical cavity structure that passes through the aperture, and that supports an emission of less than 500 nm in the blue/green or NUV spectral regions.
    • 垂直腔表面发射激光器(VCSEL)装置(10,10')具有衬底(12),并且设置在衬底的表面上,具有第III族氮化物缓冲层(14)和包含至少 部分为n型III族氮化物层(16)。 VCSEL器件和台面结构还包括通过使用横向边缘过度生长(LEO)工艺嵌入在第一III族氮化物层内的第一多层介电镜叠层(18a); p型III族氮化物层(26); 以及n型III族氮化物层和p型III族氮化物层之间的p-n结。 p-n结包含活性多量子阱区(24)。 也包含在台面结构中的是具有电流收缩孔(20a)的电介质(二氧化硅)层(20)。 电介质层和孔径也被埋在n型III族氮化物层或p型III族氮化物层之一内,也通过使用LEO工艺。 第二多层介质镜叠层(18b)设置在台面结构的顶部和p型III族氮化物层上方。 第一和第二多层介质镜叠层限定了通过孔的共振光学腔结构,并支持在蓝/绿或NUV光谱区中小于500nm的发射。