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    • 1. 发明授权
    • Fast variable flow microelectromechanical valves
    • 快速变流微机电阀门
    • US6089534A
    • 2000-07-18
    • US4520
    • 1998-01-08
    • David K. BiegelsenWarren B. JacksonPatrick C. P. CheungEric Peeters
    • David K. BiegelsenWarren B. JacksonPatrick C. P. CheungEric Peeters
    • B65H5/22F16K7/00F16K31/06
    • B65H5/228F16K99/0015B65H2406/11B65H2406/414
    • A variable fluid flow valve is disclosed. The valve can be batch fabricated in two dimensional valve arrays, with all valves in the array being controlled in parallel to achieve high flow rates without increasing response time. Typically, each valve includes a valve housing having an aperture plate defining an elongated aperture therethrough, and an opposing plate positioned in spaced apart relationship to the aperture plate. In one embodiment a flexible film or strip is attached at its first end to the aperture plate and at its second end to the opposing plate. In another embodiment of the invention, the flexible film is attached at only one end and is free to move at the other end. In both types of valves, valve action is provided by using electrodes to variably move the flexible film from an aperture blocking to an aperture non-blocking position. The flexible film may be moved in a continuously variable manner or a discretely variable manner, depending upon the electrode configuration. Binary valves in matrixes may also be used with the elongated opening.
    • 公开了一种可变流体流量阀。 该阀可以批量制造在二维阀阵列中,阵列中的所有阀并联控制以实现高流速而不增加响应时间。 通常,每个阀包括具有限定穿过其中的细长孔的孔板的阀壳体和与孔板间隔开的关系。 在一个实施例中,柔性膜或带在其第一端附接到孔板并且在其第二端处连接到相对的板。 在本发明的另一个实施例中,柔性膜仅在一端附接并在另一端自由移动。 在两种类型的阀中,通过使用电极来将柔性膜从孔径阻挡可变地移动到孔阻塞位置来提供阀动作。 取决于电极配置,柔性膜可以以连续可变的方式或离散地变化的方式移动。 基体中的二元阀也可以与细长的开口一起使用。
    • 5. 发明授权
    • Pressure sensor and method for detecting pressure
    • 压力传感器和压力检测方法
    • US6032536A
    • 2000-03-07
    • US161534
    • 1998-09-28
    • Eric PeetersDavid K. BiegelsenWarren Jackson
    • Eric PeetersDavid K. BiegelsenWarren Jackson
    • G01L1/20G01L9/00G03G15/00G01L9/02
    • G03G15/65G01L1/20G01L9/0057G03G2215/00721
    • A pressure sensor is provided which can detect the presence, absence or magnitude of pressure. The pressure sensor includes a sensor membrane and a sensor device. The sensor membrane is flexible and may be constructed of a conductive material or may include a flexible film attached to a conductive film. The sensor device includes an electrode substrate having an electrode surface and a set of electrodes disposed on the electrode surface. As pressure is applied to the sensor membrane, the sensor membrane distends or deforms towards the electrode set positioned on the electrode surface. As sufficient pressure is applied, the sensor membrane will make both electrical and mechanical contact with at least two of the electrodes. Since the sensor membrane is conductive, the contacted electrodes will be in electrical connection with each other. As pressure is increased, additional electrodes will be contacted and placed in electrical contact with each other. As a result, the presence, absence or magnitude of pressure exerted on the sensor membrane may be determined. The pressure sensor may be utilized in a variety of environments to sense either fluid pressure or physical contact pressure.
    • 提供了可以检测压力存在,不存在或大小的压力传感器。 压力传感器包括传感器膜和传感器装置。 传感器膜是柔性的并且可以由导电材料构成,或者可以包括附着到导电膜的柔性膜。 传感器装置包括具有电极表面的电极基底和设置在电极表面上的一组电极。 当压力施加到传感器膜时,传感器膜朝向位于电极表面上的电极组膨胀或变形。 当施加足够的压力时,传感器膜将与至少两个电极进行电气和机械接触。 由于传感器膜是导电的,所以接触的电极将彼此电连接。 随着压力的增加,附加的电极将被接触并且彼此电接触。 结果,可以确定施加在传感器膜上的压力的存在,不存在或大小。 压力传感器可用于各种环境以感测流体压力或物理接触压力。
    • 8. 发明授权
    • Pressure and force profile sensor and method for detecting pressure
    • 压力和力轮廓传感器和压力检测方法
    • US6044717A
    • 2000-04-04
    • US161532
    • 1998-09-28
    • David K. BiegelsenEric PeetersWarren Jackson
    • David K. BiegelsenEric PeetersWarren Jackson
    • B65H7/02G01L1/20G01L9/00G01L19/08G03G15/00G01L1/02
    • G01L1/20B65H7/02G01L9/0057B65H2515/34B65H2515/70G03G2215/00721G03G2215/00725
    • A pressure sensor is provided which can detect the presence, absence or magnitude of pressure, as well as a pressure profile. The pressure sensor includes a sensor membrane and a sensor device. The sensor membrane is flexible and may be constructed of a conductive material or may include a flexible film attached to a conductive film. The sensor device includes a sensor strip, a voltage source, and an electrical sensor. The sensor strip includes both a conductive strip and a resistive strip. The conductive strip is arranged parallel to the resistive strip. As pressure is applied to the sensor membrane, the sensor membrane distends or deforms towards the sensor strip. As sufficient pressure is applied, the sensor membrane will make both electrical and mechanical contact with both the conductive strip and the resistive strip at a point along the length of the sensor strip. Since the sensor membrane is conductive, the conductive strip and the resistive strip will be in electrical connection with each other. As the point of application of pressure is varied, the point at which the conductive strip and the resistive strip are connected will vary. As a result, the pressure profile exerted on the sensor membrane may be determined. The pressure sensor may be utilized in a variety of environments to sense a wide variety of pressures including either fluid pressure or physical contact pressure.
    • 提供压力传感器,其可以检测压力的存在,不存在或大小以及压力分布。 压力传感器包括传感器膜和传感器装置。 传感器膜是柔性的并且可以由导电材料构成,或者可以包括附着到导电膜的柔性膜。 传感器装置包括传感器条,电压源和电传感器。 传感器条包括导电条和电阻条。 导电条平行于电阻条布置。 当压力施加到传感器膜时,传感器膜向传感器条带膨胀或变形。 当施加足够的压力时,传感器膜将沿着传感器带的长度的一点与导电带和电阻带两者进行电接触和机械接触。 由于传感器膜是导电的,导电条和电阻条将彼此电连接。 随着压力的施加点的变化,导电条和电阻条的连接点将变化。 结果,可以确定施加在传感器膜上的压力分布。 压力传感器可用于各种环境中以感测各种压力,包括流体压力或物理接触压力。