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    • 9. 发明授权
    • High-speed scanning probe microscope
    • 高速扫描探针显微镜
    • US08327461B2
    • 2012-12-04
    • US13146355
    • 2010-01-15
    • Harish BhaskaranMichel DespontAbu Sebastian
    • Harish BhaskaranMichel DespontAbu Sebastian
    • G01Q60/14G01N13/16G01N13/10
    • G01Q60/16
    • The invention is directed to a probe for scanning probe microscopy. The probe 20 comprises a tunnel-current conducting part 30 and a tunnel-current insulating part 40. The said parts are configured such that the insulating part determines a minimal distance between the conducting part 30 and the sample surface. The invention may further concern a scanning probe microscope having such a probe, and a corresponding scanning probe microscopy method. Since the distance to the sample surface 100 is actually determined by the insulating part 40, controlling the vertical position of the probe 20 relative to the sample surface is easily and rapidly achieved. The configuration of the parts allows for a fast scan of the sample surface, whereby high-speed imaging can be achieved. Further, embodiments allow for topographical variations to be accurately captured through tunneling effect.
    • 本发明涉及用于扫描探针显微镜的探针。 探针20包括隧道电流传导部分30和隧道电流绝缘部分40.所述部分被构造成使得绝缘部分确定导电部分30和样品表面之间的最小距离。 本发明还可以涉及具有这种探针的扫描探针显微镜和相应的扫描探针显微镜方法。 由于到达样品表面100的距离实际上由绝缘部件40确定,因此容易且快速地实现了探针20相对于样品表面的垂直位置的控制。 部件的构造允许对样品表面进行快速扫描,由此可以实现高速成像。 此外,实施例允许通过隧道效应准确地捕获地形变化。