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    • 5. 发明授权
    • Reliable low thermal resistance package for high power flip clip ICs
    • 适用于大功率倒装夹IC的可靠低热阻封装
    • US5585671A
    • 1996-12-17
    • US319764
    • 1994-10-07
    • Voddarahalli K. NageshKim H. ChenCheng-Cheng ChangBahram AfshariJacques Leibovitz
    • Voddarahalli K. NageshKim H. ChenCheng-Cheng ChangBahram AfshariJacques Leibovitz
    • H01L23/367H01L23/373H01L23/10H01L23/34
    • H01L23/3675H01L23/367H01L23/3737H01L2224/16225H01L2224/16227H01L2224/32245H01L2224/73253
    • A flip-chip IC package (10) provides a thermally-conductive lid (20) attached to a backside of the chip (12) by a die attach layer (18) of a predetermined thickness range. A rim (22), preferably KOVAR iron-nickel alloy, is formed on the lid (20) with a depth (44) less than a sum (42) of a thickness of the chip, the interconnects (16), and a minimum final thickness (40) of the die attach layer (18) by a predetermined margin (46). An initial thickness of thermally-filled epoxy is applied to the backside of the chip and a layer of lid attach epoxy (24) is applied to the rim of the lid in a thickness sufficient to span the predetermined margin. The lid is floated on the die attach layer (18) with the rim of the lid surrounding the chip and floating on the lid attach material. The lid is clamped against the chip with a force sufficient to compress the die attach material to a predetermined thickness in a range less than the initial thickness and not less than the minimum final thickness (40). An oxide layer, such as an iron or iron-alloy oxide layer, is formed on the bottom surface of the rim. A spacer is placed on the backside of the chip within the die attach material (18), to define the minimum final thickness (40) of the die attach layer. A beveled or stepped vent hole is formed in the lid and plugged and sealed.
    • 倒装芯片IC封装(10)通过预定厚度范围的管芯附着层(18)提供安装在芯片(12)背面的导热盖(20)。 在盖子(20)上形成一个边缘(22),其深度(44)小于芯片厚度(16)和互连件(16)的总和(42) 芯片附着层(18)的最终厚度(40)预定的边缘(46)。 将热填充环氧树脂的初始厚度施加到芯片的背面,并且将盖子附着环氧树脂层(24)以足以跨越预定边缘的厚度施加到盖的边缘。 盖子悬挂在芯片附着层(18)上,盖子的边缘围绕着芯片并漂浮在盖子附着材料上。 盖子以足以在小于初始厚度并且不小于最小最终厚度(40)的范围内将管芯附接材料压缩到预定厚度的力夹紧在芯片上。 在边缘的底面上形成氧化物层,例如铁或铁 - 合金氧化物层。 间隔件被放置在芯片附接材料(18)内的芯片的背面,以限定芯片附着层的最小最终厚度(40)。 在盖子上形成一个倾斜或有级的通风孔,并将其密封。