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1. 发明授权

US4911597A Semiconductor processing system with robotic autoloader and load lock 失效
标题翻译：带有机器人自动装载机和加载锁的半导体处理系统
公开(公告)号：US4911597A
公开(公告)日：1990-03-27
申请号：US89926
申请日：1987-08-25
申请人： Dan Maydan , Sasson R. Somekh , Charles Ryan-Harris , Richard A. Seilheimer , David Cheng , Edward M. Abolnikov , Lance S. Reinke , J. Christopher Moran , Richard M. Catlin, Jr. , Robert B. Lowrance , Gregory W. Ridgeway
发明人： Dan Maydan , Sasson R. Somekh , Charles Ryan-Harris , Richard A. Seilheimer , David Cheng , Edward M. Abolnikov , Lance S. Reinke , J. Christopher Moran , Richard M. Catlin, Jr. , Robert B. Lowrance , Gregory W. Ridgeway
IPC分类号： H01L21/677 , B65G49/07 , H01L21/67 , H01L21/683 , H05K13/02
CPC分类号： H05K13/021 , H01L21/67 , Y10S414/13 , Y10S414/135 , Y10S414/137 , Y10S414/139 , Y10S414/14 , Y10S414/141
摘要： A wafer processing system includes an autoloader mounted within a load lock for providing batch, cassette-to-cassette automatic wafer transfer between the semiconductor processing chamber and cassette load and unload positions within the load lock. The system provides rapid, contamination-free loading and unloading of semiconductor wafers.
摘要翻译：晶片处理系统包括安装在负载锁中的自动装载机，用于在半导体处理室和装载锁之间的卸载位置之间提供批处理，盒到盒自动晶片传送。该系统提供快速，无污染的半导体晶片装载和卸载。

2. 发明授权

US5280983A Semiconductor processing system with robotic autoloader and load lock 失效
标题翻译：带有机器人自动装载机和加载锁的半导体处理系统
公开(公告)号：US5280983A
公开(公告)日：1994-01-25
申请号：US963006
申请日：1992-10-19
申请人： Dan Maydan , Sasson R. Somekh , Charles Ryan-Harris , Richard A. Seilheimer , David Cheng , Edward M. Abolnikov , Lance S. Reinke , J. Christopher Moran , Richard M. Catlin, Jr. , Robert B. Lowrance , Gregory W. Ridgeway
发明人： Dan Maydan , Sasson R. Somekh , Charles Ryan-Harris , Richard A. Seilheimer , David Cheng , Edward M. Abolnikov , Lance S. Reinke , J. Christopher Moran , Richard M. Catlin, Jr. , Robert B. Lowrance , Gregory W. Ridgeway
IPC分类号： H01L21/67 , H02H9/00 , H05K13/02 , B66C1/42
CPC分类号： H05K13/021 , H01L21/67 , H02H9/005 , Y10S294/902
摘要： A wafer processing system includes an autoloader mounted within a load lock for providing batch, cassette-to-cassette automatic wafer transfer between the semiconductor processing chamber and cassette load and unload positions within the load lock. The system provides rapid, contamination-free loading and unloading of semiconductor wafers.
摘要翻译：晶片处理系统包括安装在负载锁中的自动装载机，用于在半导体处理室和装载锁之间的卸载位置之间提供批处理，盒到盒自动晶片传送。该系统提供快速，无污染的半导体晶片装载和卸载。

3. 发明授权

US5224809A Semiconductor processing system with robotic autoloader and load lock 失效
标题翻译：带有机器人自动装载机和加载锁的半导体处理系统
公开(公告)号：US5224809A
公开(公告)日：1993-07-06
申请号：US816525
申请日：1991-12-30
申请人： Dan Maydan , Sasson R. Somekh , Charles Ryan-Harris , Richard A. Seilheimer , David Cheng , Edward M. Abolnikov , Lance S. Reinke , J. Christopher Moran , Richard M. Catlin, Jr. , Robert B. Lowrance , Gregory W. Ridgeway
发明人： Dan Maydan , Sasson R. Somekh , Charles Ryan-Harris , Richard A. Seilheimer , David Cheng , Edward M. Abolnikov , Lance S. Reinke , J. Christopher Moran , Richard M. Catlin, Jr. , Robert B. Lowrance , Gregory W. Ridgeway
IPC分类号： B65G49/07 , H01L21/67 , H05K13/02
CPC分类号： H01L21/67 , H05K13/021 , Y10S414/13
摘要： A wafer processing system includes an autoloader mounted within a load lock for providing batch, cassette-to-cassette automatic wafer transfer between the semiconductor processing chamber and cassette load and unload positions within the load lock. The system provides rapid, contamination-free loading and unloading of semiconductor wafers.
摘要翻译：晶片处理系统包括安装在负载锁中的自动装载机，用于在半导体处理室和装载锁之间的卸载位置之间提供批处理，盒到盒自动晶片传送。该系统提供快速，无污染的半导体晶片装载和卸载。

4. 发明授权

US5795355A Integrated micro-environment container loader apparatus having a semipermeable barrier 失效
标题翻译：具有半透性屏障的集成式微环境容器装载装置
公开(公告)号：US5795355A
公开(公告)日：1998-08-18
申请号：US773011
申请日：1996-12-24
申请人： J. Christopher Moran
发明人： J. Christopher Moran
IPC分类号： B65G49/07 , H01L21/00 , H01L21/677 , H01L21/68
CPC分类号： H01L21/67167 , H01L21/67201 , H01L21/67739 , Y10S438/907 , Y10T29/41
摘要： An integrated wafer loader is provided for use with a vacuum process chamber. At least one semipermeable membrane provided in the separator between upper and lower chambers of a load lock permits air flow while preventing particulate matter transfer. A micro-environment container is sealed within the upper chamber and a vacuum simultaneously produced in both upper and lower chambers. A movable carrier plate opens the micro-environment container and removes a cassette of wafers from therein and into the lower chamber. The micro-environment container remains supported by the separator and forms an impermeable barrier between the chambers. Wafers are transferred from the cassette to the process environment, and returned to the cassette after processing has been completed. The carrier plate returns the cassette containing the processed wafers to the micro-environment container for removal from the load lock chamber.
摘要翻译：提供了一个与真空处理室一起使用的集成晶片装载器。设置在负载锁的上室和下室之间的隔板中的至少一个半透膜允许空气流动同时防止颗粒物质转移。微环境容器被密封在上部腔室内，同时在上部和下部腔室中产生真空。可移动的承载板打开微环境容器并从其中移除一盒晶片并进入下室。微环境容器保持由分离器支撑，并且在室之间形成不可渗透的屏障。晶片从盒子转移到处理环境中，并且在处理完成之后返回盒子。承载板将包含经处理的晶片的盒带返回到微环境容器以从装载锁定室移除。

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