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1. 发明授权

US09028614B2 Substrate processing apparatus 有权
标题翻译：基板加工装置
公开(公告)号：US09028614B2
公开(公告)日：2015-05-12
申请号：US13406056
申请日：2012-02-27
申请人： Daisuke Hara , Takeshi Itoh , Masanao Fukuda , Takatomo Yamaguchi , Hiroaki Hiramatsu , Shuhei Saido , Takafumi Sasaki
发明人： Daisuke Hara , Takeshi Itoh , Masanao Fukuda , Takatomo Yamaguchi , Hiroaki Hiramatsu , Shuhei Saido , Takafumi Sasaki
IPC分类号： C23C16/455 , C23C16/458 , C23C16/46 , H01L21/67 , C30B25/08 , C30B25/14 , C30B29/36 , H01L21/673 , H01L21/677 , C23C16/32 , C23C16/44
CPC分类号： H01L21/67109 , C23C16/325 , C23C16/4405 , C23C16/4412 , C23C16/455 , C23C16/458 , C23C16/4581 , C23C16/4582 , C23C16/4583 , C23C16/4584 , C23C16/4587 , C23C16/4588 , C23C16/46 , C30B25/08 , C30B25/14 , C30B29/36 , H01L21/67303 , H01L21/67309 , H01L21/67757
摘要： When processing such as SiC epitaxial growth is performed at an ultrahigh temperature of 1500° C. to 1700° C., a film-forming gas can be decreased to heat-resistant temperature of a manifold and film quality uniformity can be improved. A substrate processing apparatus includes a reaction chamber for processing a plurality of substrates, a boat for holding the plurality of substrates, a gas supply nozzle for supplying a film-forming gas to the plurality of substrates, an exhaust port for exhausting the film-forming gas supplied into the reaction chamber, a heat exchange part which defines a second flow path narrower than a first flow path defined by an inner wall of the reaction chamber and the boat, and a gas discharge part installed under the lowermost substrate of the plurality of substrates.
摘要翻译：当在1500℃至1700℃的超高温下进行诸如SiC外延生长的处理时，可以将成膜气体降低至歧管的耐热温度，并且可以提高膜质量均匀性。基板处理装置包括用于处理多个基板的反应室，用于保持多个基板的船，用于向多个基板供给成膜气体的气体供给喷嘴，用于排出成膜的排气口供应到反应室的气体，限定比由反应室和船的内壁限定的第一流动路径窄的第二流动路径的热交换部分，以及安装在多个底物。

2. 发明申请

US20120220108A1 SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFACTURING SUBSTRATE 有权
标题翻译：基板加工装置及其制造方法
公开(公告)号：US20120220108A1
公开(公告)日：2012-08-30
申请号：US13406056
申请日：2012-02-27
申请人： Daisuke Hara , Takeshi Itoh , Masanao Fukuda , Takatomo Yamaguchi , Hiroaki Hiramatsu , Shuhei Saido , Takafumi Sasaki
发明人： Daisuke Hara , Takeshi Itoh , Masanao Fukuda , Takatomo Yamaguchi , Hiroaki Hiramatsu , Shuhei Saido , Takafumi Sasaki
IPC分类号： H01L21/20 , H01L21/306 , C23C16/455
CPC分类号： H01L21/67109 , C23C16/325 , C23C16/4405 , C23C16/4412 , C23C16/455 , C23C16/458 , C23C16/4581 , C23C16/4582 , C23C16/4583 , C23C16/4584 , C23C16/4587 , C23C16/4588 , C23C16/46 , C30B25/08 , C30B25/14 , C30B29/36 , H01L21/67303 , H01L21/67309 , H01L21/67757
摘要： When processing such as SiC epitaxial growth is performed at an ultrahigh temperature of 1500° C. to 1700° C., a film-forming gas can be decreased to heat-resistant temperature of a manifold and film quality uniformity can be improved. A substrate processing apparatus includes a reaction chamber for processing a plurality of substrates, a boat for holding the plurality of substrates, a gas supply nozzle for supplying a film-forming gas to the plurality of substrates, an exhaust port for exhausting the film-forming gas supplied into the reaction chamber, a heat exchange part which defines a second flow path narrower than a first flow path defined by an inner wall of the reaction chamber and the boat, and a gas discharge part installed under the lowermost substrate of the plurality of substrates.
摘要翻译：当在1500℃至1700℃的超高温下进行诸如SiC外延生长的处理时，可以将成膜气体降低至歧管的耐热温度，并且可以提高膜质量均匀性。基板处理装置包括用于处理多个基板的反应室，用于保持多个基板的船，用于向多个基板供给成膜气体的气体供给喷嘴，用于排出成膜的排气口供应到反应室的气体，限定比由反应室和船的内壁限定的第一流动路径窄的第二流动路径的热交换部分，以及安装在多个底物。

3. 发明授权

US06798222B2 Migration measuring method and measuring apparatus 有权
标题翻译：迁移测量方法和测量仪器
公开(公告)号：US06798222B2
公开(公告)日：2004-09-28
申请号：US10206974
申请日：2002-07-30
申请人： Hirokazu Tanaka , Sachio Yoshihara , Takashi Shirakashi , Hiroaki Hiramatsu , Kazuhiro Kumekawa , Fumitaka Ueta
发明人： Hirokazu Tanaka , Sachio Yoshihara , Takashi Shirakashi , Hiroaki Hiramatsu , Kazuhiro Kumekawa , Fumitaka Ueta
IPC分类号： G01R2708
CPC分类号： G01N17/02
摘要： A migration measuring method based on an alternating current impedance method, including steps: direct current with fine alternating current superposed is applied across electrodes (1), (2) to measure the impedance there between; and a surface static capacity (c) is calculated from the measured value of impedance in order to measure migration in accordance with the variation of the calculated surface static capacity.
摘要翻译：一种基于交流阻抗法的迁移测量方法，包括以下步骤：跨越电极（1），（2）施加重叠的交流电流的直流电流，以测量其间的阻抗; 并且根据阻抗的测量值计算表面静电容量（c），以便根据计算出的表面静电容量的变化来测量迁移。

4. 发明申请

US20120175216A1 SEGMENT-TYPE FRICTION MATERIAL 有权
标题翻译：分段式摩擦材料
公开(公告)号：US20120175216A1
公开(公告)日：2012-07-12
申请号：US13496094
申请日：2010-07-27
申请人： Hiroaki Hiramatsu , Yoshihito Fujimaki
发明人： Hiroaki Hiramatsu , Yoshihito Fujimaki
IPC分类号： F16D13/60
CPC分类号： F16D13/648 , F16D13/72 , F16D65/122 , F16D2069/004
摘要： A segment-type friction material comprises segment pieces each having a supply passage formed thereon to supply lubricating oil to a surface of each of the segment pieces. The segment-type friction material further comprises oil grooves each having an outer peripheral opening portion extended in a curved shape or a linear shape. Thereby, lubricating oil is sufficiently supplied to the surface of each of the segment pieces from an outer peripheral side thereof or an inner peripheral side thereof and a clearance between the segment-type friction material and its associated separator plate is assured. Moreover, a space for the lubricating oil to flow through an outer periphery is sufficiently assured and a drag torque is reduced.
摘要翻译：段式摩擦材料包括各自具有形成在其上的供给通道的节段，以将润滑油供应到每个段片的表面。节段型摩擦材料还包括各自具有延伸成弯曲形状或线性形状的外周开口部的油槽。因此，从其外周侧或内周侧向各片段的表面充分供给润滑油，并且确保了段式摩擦材料与其相关的隔板之间的间隙。此外，润滑油流过外周的空间被充分保证，并且减小了扭矩。

5. 发明授权

US09027728B2 Segment type friction material 有权
标题翻译：分段式摩擦材料
公开(公告)号：US09027728B2
公开(公告)日：2015-05-12
申请号：US13496094
申请日：2010-07-27
申请人： Hiroaki Hiramatsu , Yoshihito Fujimaki
发明人： Hiroaki Hiramatsu , Yoshihito Fujimaki
IPC分类号： F16D13/64 , F16D13/72 , F16D65/12 , F16D69/00
CPC分类号： F16D13/648 , F16D13/72 , F16D65/122 , F16D2069/004
摘要： A segment-type friction material comprises segment pieces each having a supply passage formed thereon to supply lubricating oil to a surface of each of the segment pieces. The segment-type friction material further comprises oil grooves each having an outer peripheral opening portion extended in a curved shape or a linear shape. Thereby, lubricating oil is sufficiently supplied to the surface of each of the segment pieces from an outer peripheral side thereof or an inner peripheral side thereof and a clearance between the segment-type friction material and its associated separator plate is assured. Moreover, a space for the lubricating oil to flow through an outer periphery is sufficiently assured and a drag torque is reduced.
摘要翻译：段式摩擦材料包括各自具有形成在其上的供给通道的节段，以将润滑油供应到每个段片的表面。节段型摩擦材料还包括各自具有延伸成弯曲形状或线性形状的外周开口部的油槽。因此，从其外周侧或内周侧向各片段的表面充分供给润滑油，并且确保了段式摩擦材料与其相关的隔板之间的间隙。此外，润滑油流过外周的空间被充分保证，并且减小了扭矩。

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