专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

US20110130073A1 WAFER POLISHING METHOD AND DOUBLE-SIDE POLISHING APPARATUS 有权
标题翻译：波浪抛光方法和双面抛光装置
公开(公告)号：US20110130073A1
公开(公告)日：2011-06-02
申请号：US13002449
申请日：2009-06-30
申请人： Daisuke Furukawa , Kazumasa Asai , Takahiro Kida , Tadao Tanaka
发明人： Daisuke Furukawa , Kazumasa Asai , Takahiro Kida , Tadao Tanaka
IPC分类号： B24B49/12 , B24B37/04
CPC分类号： B24B37/013 , B24B37/042 , B24B37/08 , B24B49/04 , B24B49/12 , B24D7/12 , H01L21/02024 , H01L21/304 , H01L22/12 , H01L22/26 , H01L2924/0002 , H01L2924/00
摘要： The present invention is a wafer polishing method including simultaneously polishing both surfaces of a wafer by pressing and rubbing the wafer, while holding the wafer with: a lower turn table having a flat polishing-upper-surface rotationally driven; an upper turn table having a flat polishing-lower-surface rotationally driven, the upper turn table being arranged with facing to the lower turn table; and a carrier having a wafer-holding hole for holding the wafer, wherein the polishing is performed while measuring a thickness of the wafer through a plurality of openings provided between a rotation center and an edge of the upper turn table or the lower turn table, and switching a polishing slurry with a polishing slurry having a different polishing rate during the polishing of the wafer. As a result, there is provided a wafer polishing method that can manufacture a wafer having a high flatness and a high smoothness at high productivity and high yield.
摘要翻译：本发明是一种晶片抛光方法，包括：通过按压和摩擦晶片同时抛光晶片的两个表面，同时用下面的转台来保持晶片：具有平坦的抛光上表面旋转驱动; 具有平面抛光下表面旋转驱动的上转台，所述上转台被布置成面向下转台; 以及具有用于保持晶片的晶片保持孔的载体，其中在通过设置在上转台或下转台的旋转中心和边缘之间的多个开口测量晶片的厚度的同时进行抛光，以及在抛光晶片期间用抛光速率不同的抛光浆料切割抛光浆料。结果，提供了可以以高生产率和高产率制造具有高平坦度和高平滑度的晶片的晶片抛光方法。

2. 发明授权

US08834230B2 Wafer polishing method and double-side polishing apparatus 有权
标题翻译：晶圆抛光法和双面抛光装置
公开(公告)号：US08834230B2
公开(公告)日：2014-09-16
申请号：US13002449
申请日：2009-06-30
申请人： Daisuke Furukawa , Kazumasa Asai , Takahiro Kida , Tadao Tanaka
发明人： Daisuke Furukawa , Kazumasa Asai , Takahiro Kida , Tadao Tanaka
IPC分类号： B24B49/00 , B24B51/00 , H01L21/02 , B24B37/08 , B24D7/12 , H01L21/66 , B24B37/04 , B24B49/12
CPC分类号： B24B37/013 , B24B37/042 , B24B37/08 , B24B49/04 , B24B49/12 , B24D7/12 , H01L21/02024 , H01L21/304 , H01L22/12 , H01L22/26 , H01L2924/0002 , H01L2924/00
摘要： The present invention is a wafer polishing method including simultaneously polishing both surfaces of a wafer by pressing and rubbing the wafer, while holding the wafer with: a lower turn table having a flat polishing-upper-surface rotationally driven; an upper turn table having a flat polishing-lower-surface rotationally driven, the upper turn table being arranged with facing to the lower turn table; and a carrier having a wafer-holding hole for holding the wafer, wherein the polishing is performed while measuring a thickness of the wafer through a plurality of openings provided between a rotation center and an edge of the upper turn table or the lower turn table, and switching a polishing slurry with a polishing slurry having a different polishing rate during the polishing of the wafer. As a result, there is provided a wafer polishing method that can manufacture a wafer having a high flatness and a high smoothness at high productivity and high yield.
摘要翻译：本发明是一种晶片抛光方法，包括：通过按压和摩擦晶片同时抛光晶片的两个表面，同时用下面的转台来保持晶片：具有平坦的抛光上表面旋转驱动; 具有平面抛光下表面旋转驱动的上转台，所述上转台被布置成面向下转台; 以及具有用于保持晶片的晶片保持孔的载体，其中在通过设置在上转台或下转台的旋转中心和边缘之间的多个开口测量晶片的厚度的同时进行抛光，以及在抛光晶片期间用抛光速率不同的抛光浆料切割抛光浆料。结果，提供了可以以高生产率和高产率制造具有高平坦度和高平滑度的晶片的晶片抛光方法。

3. 发明授权

US06764392B2 Wafer polishing method and wafer polishing device 有权
标题翻译：晶圆抛光方法和晶圆抛光装置
公开(公告)号：US06764392B2
公开(公告)日：2004-07-20
申请号：US09913790
申请日：2001-08-16
申请人： Takashi Nihonmatsu , Takahiro Kida , Tadao Tanaka
发明人： Takashi Nihonmatsu , Takahiro Kida , Tadao Tanaka
IPC分类号： B24B2900
CPC分类号： B24B37/30 , B25B11/005 , H01L21/30625 , H01L21/6838
摘要： A polishing method and polishing apparatus capable of improving the flatness of a wafer are provided. When a wafer is adhered to a wafer holding plate for polishing a surface to be polished of the wafer by pressing and rubbing the surface to be polished against a polishing pad on a polishing turn table, the wafer is held by vacuum-chucking the surface to be polished of the wafer such that a surface to be adhered of the wafer forms a convex surface in a vicinity including an arbitrary point in the surface to be adhered within a region surrounding a center of the surface to be adhered of the wafer, and the region being at least not less than 50% of an entire adhesion area; and the wafer is adhered to the wafer holding plate from a central portion of the surface to be adhered of the wafer.
摘要翻译：提供能够提高晶片的平坦度的抛光方法和抛光装置。当将晶片粘附到用于抛光晶片表面的晶片保持板时，通过将抛光表面按照抛光表面抛光在研磨台上的抛光垫上，将晶片通过真空吸附表面来保持对晶片进行抛光，使得晶片表面在包围待粘附表面的任意点附近的附近形成凸起表面，该区域围绕晶片的待粘附表面的中心，并且至少不小于整个粘合面积的50％的区域; 并且晶片从晶片的待粘合表面的中心部分粘附到晶片保持板。

4. 发明授权

US06296269B1 Air bag cover 失效
标题翻译：气囊盖
公开(公告)号：US06296269B1
公开(公告)日：2001-10-02
申请号：US09310117
申请日：1999-05-12
申请人： Yutaka Nagai , Chiharu Totani , Fumitake Kobayashi , Tadao Tanaka , Hiroyuki Tajima , Hiroshi Ishiyama
发明人： Yutaka Nagai , Chiharu Totani , Fumitake Kobayashi , Tadao Tanaka , Hiroyuki Tajima , Hiroshi Ishiyama
IPC分类号： B60R2116
CPC分类号： B60R21/232 , B60R21/213
摘要： An air bag cover is formed of synthetic resin and is connected to and held by the body of a car in a plurality of discontinuous portions thereof along the peripheral edge of an opening formed on the interior side of the car in such a manner that the air bag cover not only can cover an air bag folded in the peripheral edge of the opening on the car interior side, but also, when an air bag main body of the air bag is developed and expanded, can be so opened and moved as to allow the air bag main body to project toward the opening side. The air bag cover further includes a restricting wall which projects toward the body of the car in such a manner that it can connect together these connecting/holding portions while the restricting wall is disposed on the back surface side of the air bag cover, in more particular, on the side of the folded air bag main body that is distant from the opening and on the opening side of connecting/holding portions.
摘要翻译：安全气囊盖由合成树脂形成，并且沿着形成在轿厢内侧的开口的周缘连接并保持在轿厢主体的多个不连续部分中，使得空气袋盖不仅可以覆盖折叠在汽车内侧的开口的周边边缘的气囊，而且当气囊的气囊主体展开和膨胀时，可以如此打开和移动以允许气囊主体向开口侧突出。安全气囊罩还包括限制壁，该限制壁朝向轿厢的本体突出，使得它们可以将限制壁设置在安全气囊罩的背面侧上时连接在一起，更多特别地，在折叠的气囊主体的远离开口和连接/保持部分的开口侧的一侧。

5. 发明授权

US5519614A Electronically controlled power steering apparatus and method therefor 失效
标题翻译：电控动力转向装置及其方法
公开(公告)号：US5519614A
公开(公告)日：1996-05-21
申请号：US124700
申请日：1993-09-22
申请人： Yoshinori Miichi , Mitsuhiko Harara , Tadao Tanaka
发明人： Yoshinori Miichi , Mitsuhiko Harara , Tadao Tanaka
IPC分类号： B62D6/00 , B62D101/00 , B62D109/00 , B62D111/00 , B62D113/00 , B62D125/00 , B62D5/04
CPC分类号： B62D6/00 , Y10S706/905
摘要： An electronically controlled power steering apparatus responsive to a running condition of a vehicle includes a vehicle speed sensor for detecting a running speed of the vehicle, a detector for detecting a lateral acceleration of the vehicle, and a control unit for setting an aimed assist amount setting based upon the running speed detected by the vehicle speed sensor and the lateral acceleration detected by the lateral acceleration detector in accordance with a fuzzy rule.
摘要翻译：一种响应于车辆行驶状态的电子控制的动力转向装置，包括用于检测车辆的行驶速度的车速传感器，用于检测车辆的横向加速度的检测器，以及用于设定目标辅助量设定的控制单元基于由车速传感器检测到的行驶速度和根据模糊规则由横向加速度检测器检测到的横向加速度。

6. 发明授权

US5347457A Method and apparatus for controlling vehicle suspension such that suspension characteristics are changed at a point in time when a vehicle wheel reaches a road surface irregularity detected in front of the vehicle 失效
标题翻译：用于控制车辆悬架的方法和装置，使得悬架特性在车轮到达车辆前方检测到的路面不规则的时间点改变
公开(公告)号：US5347457A
公开(公告)日：1994-09-13
申请号：US760160
申请日：1991-09-16
申请人： Tadao Tanaka , Takao Morita , Akihiko Togashi , Naohiro Kishimoto , Hiroaki Yoshida
发明人： Tadao Tanaka , Takao Morita , Akihiko Togashi , Naohiro Kishimoto , Hiroaki Yoshida
IPC分类号： B60G17/015 , B60G17/016 , B60G17/0165 , B60G17/04 , B60G23/00 , B60G17/00 , B60G17/08
CPC分类号： B60G17/0416 , B60G17/0164 , B60G17/0165 , B60G2202/154 , B60G2202/24 , B60G2400/102 , B60G2400/204 , B60G2400/252 , B60G2400/82 , B60G2401/176 , B60G2500/10 , B60G2500/22 , B60G2800/014 , B60G2800/916
摘要： A vehicular suspension control apparatus includes a selector valve for changing at least one of spring rigidity or damper rigidity of a suspension which is installed between a wheel and a body of a vehicle and extensibly and retractably supports the vehicle body on the wheel, a forward road surface sensor attached to the vehicle body and adapted to detect an irregularity of a road surface located in front of the vehicle body at a predetermined distance from the mounting position of the sensor when the vehicle body is in a predetermined attitude, a vehicle speed sensor for detecting a vehicle speed, and a controller for calculating a point of time when the wheel reaches the irregularity of the road surface, in accordance with the vehicle speed detected by the vehicle speed sensor, when the irregularity of the road surface is detected by the forward road surface sensor, and delivering a command signal for lowering at least one of the spring rigidity and the damper rigidity of the suspension to the selector valve by not later than the calculated time point.
摘要翻译：一种车辆悬架控制装置，包括：选择阀，用于改变安装在车轮和车体之间的悬架的弹簧刚性或阻尼器刚度中的至少一个，并可将车身伸缩地支撑在车轮上;前进道路表面传感器，其安装在车体上，适于在车体处于预定姿态时，与传感器的安装位置相距预定距离，检测位于车身前方的路面的不规则性;车速传感器，检测车速，以及控制器，用于根据由车速传感器检测到的车速计算车轮达到路面不规则时的时间点，当路面的不规则性被前方检测到时路面传感器，并且提供用于降低悬架的弹簧刚度和阻尼器刚度中的至少一个的命令信号不迟于计算出的时间点离开选择阀。

7. 发明授权

US5322319A Active suspension apparatus for a vehicle 失效
标题翻译：用于车辆的主动悬挂装置
公开(公告)号：US5322319A
公开(公告)日：1994-06-21
申请号：US965707
申请日：1992-10-23
申请人： Tadao Tanaka , Takao Morita , Akihiko Togashi , Naohiro Kishimoto , Hiroaki Yoshida
发明人： Tadao Tanaka , Takao Morita , Akihiko Togashi , Naohiro Kishimoto , Hiroaki Yoshida
IPC分类号： B60G17/0165 , B60G17/06
CPC分类号： B60G17/0165 , B60G2202/154 , B60G2202/24 , B60G2400/102 , B60G2400/204 , B60G2400/252 , B60G2400/41 , B60G2400/82 , B60G2401/176 , B60G2500/10 , B60G2500/22 , B60G2800/916
摘要： An active suspension apparatus is provided for a vehicle which includes an actuator being extensible and retractable and provided between a vehicle body and a wheel so that the force of the vehicle body to support the wheel is adjustable, a sprung G sensor or a vehicle height sensor for detecting a vibration input to the vehicle body, and a control valve and a controller for controlling the supporting force of the actuator in accordance with the vibration input detected by the sprung G sensor or the vehicle height sensor, and thereby restraining the stroke of the actuator. The suspension apparatus further comprises a forward road surface sensor for detecting the size of irregularities of a road surface in front of the vehicle, and the control valve and the controller are adapted to execute normal control such that the equivalent spring constant of the actuator is adjusted to a first spring constant when a surface irregularity of a size larger than a predetermined size is detected by the forward road surface sensor, and to execute inverse spring control such that the equivalent spring constant of the actuator is adjusted to a second spring constant lower than the first spring constant, and thereby lengthening the stroke of the wheel, when no surface irregularity of a size larger than the predetermined size is detected by the forward road surface sensor. As a result, the ride is greatly improved when the vehicle runs on a smooth road.
摘要翻译：本发明提供一种主动式悬架装置，其特征在于，具备能够伸缩地设置在车身与车轮之间的致动器，能够调整车身支撑车轮的力的可调节的弹簧G传感器或车高传感器用于检测输入到车身的振动;以及控制阀和控制器，用于根据由弹簧G传感器或车高传感器检测到的振动输入来控制致动器的支撑力，从而抑制执行器。悬挂装置还包括前方路面传感器，用于检测车辆前方的路面的不规则尺寸，并且控制阀和控制器适于执行正常控制，使得调节致动器的等效弹簧常数当通过前方路面传感器检测到大于预定尺寸的尺寸的表面不规则时，执行反向弹簧控制，使得致动器的等效弹簧常数被调节到低于第一弹簧常数，从而当没有通过前方路面传感器检测到大于预定尺寸的尺寸的表面不规则时，延长车轮的行程。结果，当车辆在平稳的道路上行驶时，骑行大大改善。

8. 发明授权

US4977506A Suspension control apparatus for an automotive vehicle 失效
标题翻译：用于汽车的悬架控制装置
公开(公告)号：US4977506A
公开(公告)日：1990-12-11
申请号：US258410
申请日：1988-10-17
申请人： Mitsuhiko Hara , Shozo Takizawa , Tadao Tanaka , Yasutaka Taniguchi , Shunichi Wada , Shigeki Ohtagaki
发明人： Mitsuhiko Hara , Shozo Takizawa , Tadao Tanaka , Yasutaka Taniguchi , Shunichi Wada , Shigeki Ohtagaki
IPC分类号： B60G17/00 , B60G17/015 , B60G17/016 , B60G17/019 , F16F15/08
CPC分类号： B60G17/016 , B60G17/01908 , F16F15/08 , B60G2204/10 , B60G2204/20 , B60G2204/41 , B60G2400/104 , B60G2400/204 , B60G2400/252 , B60G2400/34 , B60G2400/44 , B60G2400/50 , B60G2400/60 , B60G2500/102 , B60G2500/203 , B60G2600/26 , B60G2600/604 , B60G2600/66 , B60G2600/68
摘要： A suspension control apparatus for an automotive vehicle has a plurality of suspension units which are disposed between each of the wheels of the vehicle and the vehicle body. A plurality of actuators for controlling the characteristics of the suspension units are controlled by a control unit in response to the output of an acceleration sensor. The ground circuit of the acceleration sensor is connected to the ground circuit of the control unit.
摘要翻译：一种用于机动车辆的悬架控制装置，具有设置在车辆的车轮和车身的车轮之间的多个悬架单元。响应于加速度传感器的输出，由控制单元控制用于控制悬架单元的特性的多个致动器。加速度传感器的接地电路连接到控制单元的接地电路。

9. 发明授权

US4856813A Vehicle suspension apparatus 失效
标题翻译：车辆悬挂装置
公开(公告)号：US4856813A
公开(公告)日：1989-08-15
申请号：US255778
申请日：1988-10-11
申请人： Tadao Tanaka , Mitsuhiko Harara , Yasutaka Taniguchi , Shozo Takizawa , Minoru Tatemoto , Tetsuya Terada , Shunichi Wada , Shigeki Ohtagaki , Kouji Mitsuhata
发明人： Tadao Tanaka , Mitsuhiko Harara , Yasutaka Taniguchi , Shozo Takizawa , Minoru Tatemoto , Tetsuya Terada , Shunichi Wada , Shigeki Ohtagaki , Kouji Mitsuhata
IPC分类号： B60G17/04 , B60G17/015 , B60G17/016
CPC分类号： B60G17/0164 , B60G2400/104 , B60G2400/106 , B60G2400/204 , B60G2400/252 , B60G2400/34 , B60G2400/44 , B60G2400/50 , B60G2600/02 , B60G2600/26 , B60G2600/66 , B60G2600/70 , B60G2800/012 , B60G2800/014 , B60G2800/24
摘要： If a deceleration exeeds first set value G1 within set time T1 after the brake is depressed, a set amount of fluid is supplied to the fluid spring chamber of each front-wheel suspension unit. If a deceleration exceeds the second set value G2 when set time T1 or more has elapsed upon this operation, a set amount of fluid is exhausted from the fluid spring chamber of each rearwheel suspension unit. With this operation, since braking action for gradually increasing a deceleration is controlled by two stages, uncomfortableness which passangers feel in anti-nose-dive control can be greatly reduced. In addition, control is not performed only by depressing the brake pedal if an acutal deceleration is smaller than first set value G1. Even when a deceleration exceeds first set value G1 upon depression of the brake pedal, if the time when the deceleration exceeds first set value G1 exceeds set time T1, it is determined that a gradual braking operation is performed, so that only control for increasing a damping force is performed.
摘要翻译：如果减速器在制动器被按下之后在设定时间T1内减速第一设定值G1，则将设定量的流体供给到每个前轮悬架单元的流体弹簧室。如果在该操作中经过了设定时间T1以上时减速度超过第二设定值G2，则每个后轮悬架单元的流体弹簧室排出一定量的流体。通过这种操作，由于逐渐增加减速度的制动动作由两个阶段控制，因此可以大大减少防鼻子控制中的通风风味的不适感。此外，如果急停减速度小于第一设定值G1，则不通过按压制动踏板来进行控制。即使当按压制动踏板时减速度超过第一设定值G1时，如果减速度超过第一设定值G1的时间超过设定时间T1，则确定执行逐步制动操作，使得仅仅增加执行阻尼力。

10. 发明授权

US4846496A Vehicle suspension apparatus 失效
标题翻译：车辆悬挂装置
公开(公告)号：US4846496A
公开(公告)日：1989-07-11
申请号：US141425
申请日：1988-01-07
申请人： Tadao Tanaka , Sunao Chikamori , Mitsuhiko Harara , Shinichi Takeuchi , Masanaga Suzumura , Minoru Tatemoto , Naotake Kumagai , Hiroki Abe
发明人： Tadao Tanaka , Sunao Chikamori , Mitsuhiko Harara , Shinichi Takeuchi , Masanaga Suzumura , Minoru Tatemoto , Naotake Kumagai , Hiroki Abe
IPC分类号： B60G17/015 , B60G17/016 , B60G17/052
CPC分类号： B60G17/0162 , B60G17/0155 , B60G17/016 , B60G17/0523 , B60G2204/80 , B60G2400/821 , B60G2500/204 , B60G2500/2044 , B60G2500/205 , B60G2500/30 , B60G2600/02 , B60G2800/162
摘要： Wheel suspension units each having fluid spring chambers are arranged in a vehicle suspension apparatus. A roll control quantity determined in accordance with the relationship between a vehicle velocity and a steering angular velocity, i.e., inlet solenoid valves and exhaust solenoid valves, are controlled in accordance with a solenoid ON/OFF time, thereby controlling the roll of a vehicle.
摘要翻译：在车辆悬架装置中设置各具有流体弹簧室的悬架单元。根据电磁线圈ON / OFF时间控制根据车速和转向角速度之间的关系确定的滚动控制量，即进气电磁阀和排气电磁阀，从而控制车辆的滚动。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式