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    • 5. 发明专利
    • Paste for electron field emitter manufacture, and its usage
    • 用于电子场发射器制造及其使用
    • JP2011071124A
    • 2011-04-07
    • JP2010251592
    • 2010-11-10
    • E I Du Pont De Nemours & Coイー・アイ・デュポン・ドウ・ヌムール・アンド・カンパニーE.I.Du Pont De Nemours And Company
    • BOUCHARD ROBERT JOSEPHCHENG LAP-TAK ANDREWLAVIN JOHN GERARDROACH DAVID HERBERT
    • H01J9/02H01J1/00H01J1/02H01J1/14H01J1/304H01J19/24H01J21/10H01J63/06
    • B82Y10/00H01J1/3048H01J9/025H01J2201/30469H01J2329/00
    • PROBLEM TO BE SOLVED: To eliminate a problem that there is a limit of precision and resolution that can be attained by a complete screen printing when a triode of less than 100 μm of dimension is manufactured, and solve a problem such as prevention of electric short circuit and deterioration of accuracy of positioning of different screens at the time of multilayer formation. SOLUTION: A gate triode has a physical gate electrode between a cathode and an anode of a field emitter, and an inversion gate triode has a physical field emitter cathode between a gate and the anode. A thick film composition of light image forming type such as Fodel (R) silver in which, in addition to silver or dielectric, a small amount of low-melting point glass frit is contained in an organic medium containing a light image forming type component such as a photo-polymerization initiator and an optical monomer in a form of particulate, and a dielectric paste composition (respectively, DC 206 and DG201 etc.) is screen-printed on a substrate adjusting the thickness of a uniform layer, and a contact type photomask including a desired pattern is arranged mutually in contact with the film and is exposed to ultraviolet (UV) rays. Then, this film is developed in a weak sodium carbonate aqueous solution, and by a thick film method of a light image forming type in which a light image forming treatment is applied on the thick film with screen printing, a small feature dimension of 10 μm is attained. COPYRIGHT: (C)2011,JPO&INPIT
    • 要解决的问题:为了消除在制造尺寸小于100μm的三极管时通过全面丝网印刷可以获得的精度和分辨率的限制的问题,并且解决诸如预防的问题 的电气短路和多层形成时不同筛网的定位精度的劣化。 解决方案:栅极三极管在场发射极的阴极和阳极之间具有物理栅电极,反向栅极三极管在栅极和阳极之间具有物理场发射极阴极。 一种厚膜组合物,其中除了银或电介质以外,少量的低熔点玻璃料也包含在含有光成像型成分的有机介质中,例如Fodel银, 作为光聚合引发剂和颗粒形式的光学单体,并且电介质浆料组合物(分别为DC 206和DG201等)丝网印刷在调整均匀层的厚度的基材上,并且接触型 包括期望图案的光掩模被布置成与膜接触并且暴露于紫外线(UV)射线。 然后,将该膜显影在弱碳酸钠水溶液中,通过使用丝网印刷在厚膜上进行光图像形成处理的光图像形成类型的厚膜法,具有10μm的小特征尺寸 达到了 版权所有(C)2011,JPO&INPIT