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    • 3. 发明申请
    • JUNCTION FIELD EFFECT TRANSISTOR USING SILICIDE CONNECTION REGIONS AND METHOD OF FABRICATION
    • 使用硅化物连接区域的结型场效应晶体管及其制造方法
    • WO2010011536A2
    • 2010-01-28
    • PCT/US2009/050634
    • 2009-07-15
    • DSM SOLUTIONS, INC.KAPOOR, Ashok, K.VORA, Madhukar, B.
    • KAPOOR, Ashok, K.VORA, Madhukar, B.
    • H01L29/80
    • H01L29/8086H01L29/458H01L29/66901
    • A junction field effect transistor comprises a semiconductor substrate and a well region formed in the substrate. A source region of a first conductivity type is formed in the well region. A drain region of the first conductivity type is formed in the well region and spaced apart from the source region. A channel region of the first conductivity type is located between the source region and the drain region and formed in the well region. A gate region of a second conductivity type is formed in the well region. The transistor further includes first, second, and third connection regions. The first connection region is in ohmic contact with the source region and formed of suicide. The second connection region is in ohmic contact with the drain region and formed of suicide. The third connection region in ohmic contact with the gate region.
    • 结型场效应晶体管包括半导体衬底和形成在衬底中的阱区。 第一导电类型的源极区域形成在阱区域中。 第一导电类型的漏极区形成在阱区中并与源极区隔开。 第一导电类型的沟道区位于源极区和漏极区之间并形成在阱区中。 第二导电类型的栅极区域形成在阱区域中。 晶体管还包括第一,第二和第三连接区域。 第一连接区域与源极区域欧姆接触并由硅化物形成。 第二连接区与漏极区欧姆接触并由硅化物形成。 第三个连接区与栅极区欧姆接触。
    • 9. 发明申请
    • JUNCTION ISOLATED POLY-SILICON GATE JFET
    • 结隔离多晶硅栅极JFET
    • WO2008055095A2
    • 2008-05-08
    • PCT/US2007/082815
    • 2007-10-29
    • DSM SOLUTIONS, INC.VORA, Madhukar, B.
    • VORA, Madhukar, B.
    • H01L21/337H01L29/808H01L21/761H01L27/098
    • H01L29/808H01L27/098H01L29/66901
    • An integrated Junction Field Effect Transistor is disclosed which is much smaller and much less expensive to fabricate because it does not use Shallow Trench Isolation or field oxide in the semiconductor substrate to isolate separate transistors. Instead, a layer of insulating material is formed on the top surface of said substrate, and interconnect trenches are etched in said insulating layer which do not go all the way down to the semiconductor substrate. Contact openings are etched in the insulating layer all the way down to the semiconductor layer. Doped poly-silicon is formed in the contact openings and interconnect trenches and silicide is formed on tops of the poly-silicon. This contact and interconnect structure applies to any integrated transistor. The integrated JFET disclosed herein does not use STI or field oxide and uses junction isolation. A conventional JFET is built in a P- well. The P- well is encapsulated in an N-well which is implanted into the substrate. Separate contacts to the P-well, N-well and substrate are formed as well as to the source, drain and gate so that the device can be isolated by reverse-biasing a PN junction. Operating voltage is restricted to less than 0.7 volts to prevent latching.
    • 公开了一种集成结型场效应晶体管,其制造要小得多,成本更低,因为它不在半导体衬底中使用浅沟槽隔离或场氧化物来隔离单独的晶体管。 相反,在所述衬底的顶表面上形成绝缘材料层,并且在所述绝缘层中蚀刻互连沟槽,所述绝缘层不会完全向下到达半导体衬底。 接触开口在绝缘层中一直被蚀刻到半导体层。 掺杂的多晶硅形成在接触开口和互连沟槽中,硅化物形成在多晶硅的顶部。 该接触和互连结构适用于任何集成晶体管。 本文公开的集成JFET不使用STI或场氧化物并且使用结隔离。 传统的JFET内置在P阱中。 P-阱被封装在植入衬底中的N阱中。 形成与P阱,N阱和衬底的单独接触以及源极,漏极和栅极,使得可以通过反向偏置PN结来隔离器件。 工作电压限制在小于0.7伏,以防止锁定。
    • 10. 发明申请
    • APPARATUS AND METHODS FOR HIGH-DENSITY CHIP CONNECTIVITY
    • 用于高密度芯片连接性的装置和方法
    • WO2007024774A2
    • 2007-03-01
    • PCT/US2006/032592
    • 2006-08-22
    • VORA, Madhukar, B.
    • VORA, Madhukar, B.
    • H01L25/0657H01L25/50H01L2224/16H01L2225/06513H01L2225/06593H01L2924/01019H01L2924/01023H01L2924/01033H01L2924/01079H01L2924/10253H01L2924/00
    • Self-alignment structures, such as micro-balls (608) and V-grooves (606), may be formed on chips (605, 607) made by different processes. The self-alignment structures may be aligned to mask layers within an accuracy of one-half the smallest feature size inside a chip. For example, the alignment structures can align an array of pads (803, 807) having a pitch of 0.6 microns, compared to a pitch of 100 microns available with today's Ball Grid Array (BGA) technology. As a result, circuits in the mated chips (605, 607) can communicate via the pads (803, 807) with the same speed or clock frequency as if in a single chip. For example, clock rates between interconnected chips (605, 607) can be increased from 100 MHz to 4 GHz due to low capacitance of the interconnected pads (803, 807). Because high-density arrays of pads (803, 807) can interconnect chips, chips (605, 607) can be made smaller, thereby reducing cost of chips (605, 607) by order(s) of magnitude.
    • 可以在由不同工艺制成的芯片(605,607)上形成诸如微球(608)和V形槽(606)之类的自对准结构。 自对准结构可以在芯片内的最小特征尺寸的二分之一的精度内对准掩模层。 例如,与目前的球栅阵列(BGA)技术可用的100微米的间距相比,对准结构可以对准具有0.6微米间距的焊盘阵列(803,807)。 结果,配合芯片(605,607)中的电路可以通过焊盘(803,807)以与单个芯片中相同的速度或时钟频率进行通信。 例如,由于互连焊盘(803,807)的低电容,互连芯片(605,607)之间的时钟速率可以从100MHz增加到4GHz。 由于焊盘的高密度阵列(803,807)可以互连芯片,所以可以使芯片(605,607)更小,由此降低芯片(605,607)的成本(数量级)。