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    • 5. 发明申请
    • MULTI-AXIS MAGNETICALLY ACTUATED DEVICE
    • 多轴磁力驱动装置
    • WO0225349A3
    • 2003-09-25
    • PCT/US0129070
    • 2001-09-18
    • DRAPER LAB CHARLES S
    • BERNSTEIN JONATHAN
    • B81B3/00B81C99/00G02B6/35G02B26/08
    • G02B6/3572B81B3/0021B81B2201/042B81B2201/045B81B2203/058B81C1/00214G02B6/3512G02B6/3556G02B6/358G02B6/3584G02B26/085G02B26/101Y10S359/90
    • A multi-axis magnetically actuated device, an array and a method of fabrication thereof are disclosed. In addition, disclosed is an optical switch comprised of an array of multi-axis magnetically actuated devices and an array of ports adapted to receive an optical waveguide. The multi-axis magnetically actuated device is capable of rotational movement in two orthogonal directions. The multi-axis magnetically actuated device comprises two nested rotational members, an inner rotational member nested within the outer rotational member that in turn is nested within a base member. The inner rotational member is mounted by two inner torsional flexures to the outer rotational member that in turn is mounted by two outer torsional flexures to the base member. The rotational motions of each rotational member arise in response to an interaction between a magnetic influence and a magnetic moment generated by a current passing through coils arranged adjacent to a surface of the inner rotational member. The inner rotational member may function as a reflector.
    • 公开了一种多轴磁致动装置,阵列及其制造方法。 此外,公开了一种由多轴磁致动装置的阵列和适于接收光波导的端口阵列组成的光开关。 多轴磁力驱动装置能够在两个正交方向上旋转运动。 多轴磁力驱动装置包括两个嵌套的旋转构件,嵌套在外部旋转构件内的内部旋转构件,其依次嵌套在基座构件内。 内部旋转构件通过两个内部扭转挠曲件安装到外部旋转构件,外部旋转构件又通过两个外部扭转挠曲件安装到基座构件。 每个旋转构件的旋转运动响应于磁力影响和由通过与内旋转构件的表面相邻布置的线圈的电流产生的磁矩之间的相互作用而产生。 内旋转构件可以用作反射器。
    • 6. 发明申请
    • MEMS VIBRATION ISOLATION SYSTEM AND METHOD
    • MEMS振动隔离系统及方法
    • WO2013112310A3
    • 2013-09-19
    • PCT/US2013021408
    • 2013-01-14
    • DRAPER LAB CHARLES S
    • BERNSTEIN JONATHANWEINBERG MARC
    • B81B7/00
    • B81B7/0016
    • A microelectromechanical vibration isolation system includes a microelectromechanical structure having a plurality of fin apertures etched therethrough, and a plurality of fins each disposed within a respective one of the plurality of fin apertures and spaced apart from the microelectromechanical structure so as to define a fluid gap therebetween. The fluid gap is configured to provide squeeze film damping of vibrations imparted upon the microelectromechanical structure in at least two dimensions. The system further includes a frame surrounding the microelectromechanical structure, and a plurality of springs each coupled to the microelectromechanical structure and to the frame. The plurality of springs is configured to support the microelectromechanical structure in relation to the frame.
    • 微机电振动隔离系统包括具有蚀刻穿过其中的多个翅片孔的微机电结构,以及多个翅片,每个翼片设置在多个翅片孔中的相应一个翅片孔内并与微机电结构间隔开,从而在其间形成流体间隙 。 流体间隙构造成在至少两个维度上提供施加在微机电结构上的振动的挤压膜阻尼。 该系统还包括围绕微电子机械结构的框架,以及多个弹簧,每个弹簧联接到微机电结构和框架。 多个弹簧构造成相对于框架支撑微机电结构。
    • 8. 发明专利
    • Multi-axis magnetically actuated device
    • AU9104501A
    • 2002-04-02
    • AU9104501
    • 2001-09-18
    • DRAPER LAB CHARLES S
    • BERNSTEIN JONATHAN
    • B81B3/00B81C99/00G02B6/35G02B26/08G02B26/00
    • A multi-axis magnetically actuated device, an array of multi-axis magnetically actuated devices, and a method of fabrication of a multi-axis magnetically actuated device are disclosed. In addition, disclosed is an optical switch comprised of an array of multi-axis magnetically actuated devices and an array of ports adapted to receive an optical waveguide such as, for example, an optical fiber. The multi-axis magnetically actuated device of the invention is capable of rotational movement in two orthogonal directions. In one embodiment, the multi-axis magnetically actuated device comprises two nested rotational members, an inner rotational member nested within an outer rotational member that in turn is nested within a base member. The inner rotational member is mounted by two inner torsional flexures to the outer rotational member that in turn is mounted by two outer torsional flexures to the base member. The inner torsional flexures define an inner axis of rotation while the outer torsional flexures define an outer axis of rotation. The rotational motions of each rotational member arise in response to an interaction between a magnetic influence and a magnetic moment generated by a current passing through coils arranged adjacent to a surface of the inner rotational member. Bulk micromachining techniques enable the members to be formed from a monolithic silicon wafer and can produce a member with a smooth surface. The smooth surface of a member may function as a reflector. In one embodiment, the inner rotational member functions as a reflector.