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    • 8. 发明申请
    • MICROELECTROMECHANICAL SYSTEMS HAVING STORED CHARGE AND METHODS FOR FABRICATING AND USING SAME
    • 具有储存电荷的微电子机电系统及其制造方法和使用方法
    • WO2007143129A3
    • 2008-12-31
    • PCT/US2007012997
    • 2007-06-01
    • BOSCH GMBH ROBERTLUTZ MARKUSPARTRIDGE AARONSTARK BRIAN H
    • LUTZ MARKUSPARTRIDGE AARONSTARK BRIAN H
    • H02H3/26
    • B81B3/0086B81B3/0021
    • Many inventions are disclosed. Some aspects are directed to MEMS, and/or methods for use with and/or for fabricating MEMS, that supply, store, and/or trap charge on a mechanical structure disposed in a chamber. Various structures may be disposed in the chamber and employed in supplying, storing and/or trapping charge on the mechanical structure. In some aspects, a breakable link, a thermionic electron source and/or a movable mechanical structure are employed. The breakable link may comprise a fuse. In one embodiment, the movable mechanical structure is driven to resonate. In some aspects, the electrical charge enables a transducer to convert vibrational energy to electrical energy, which may be used to power circuit(s), device(s) and/or other purpose(s). In some aspects, the electrical charge is employed in changing the resonant frequency of a mechanical structure and/or generating an electrostatic force, which may be repulsive.
    • 许多发明被公开。 一些方面涉及用于和/或制造MEMS的MEMS,和/或用于在设置在室中的机械结构上提供,存储和/或捕获电荷的方法。 各种结构可以设置在室中并用于在机械结构上供应,储存和/或捕集电荷。 在一些方面,采用易碎连接件,热离子电子源和/或可移动机械结构。 可破坏的连接件可以包括保险丝。 在一个实施例中,可移动机械结构被驱动以共振。 在一些方面,电荷使得换能器将振动能量转换成电能,其可用于为电路,设备和/或其他目的供电。 在一些方面,电荷用于改变机械结构的谐振频率和/或产生可能是排斥性的静电力。