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1. 发明公开

EP1034377A4 DIFFERENTIAL PUMPING VIA CORE OF ANNULAR SUPERSONIC JET 审中-公开
标题翻译：差压泵送通过环形超声波喷流的核心
公开(公告)号：EP1034377A4
公开(公告)日：2005-08-24
申请号：EP98955258
申请日：1998-11-18
申请人： DANILATOS GERASIMOS DANIEL
发明人： DANILATOS GERASIMOS DANIEL
IPC分类号： F04F5/20 , F04F5/46 , G01Q30/02 , G01Q30/08 , H01J37/18 , H01J37/301
CPC分类号： H01J37/18 , F04F5/20 , F04F5/465 , H01J37/301 , H01J2237/188 , H01J2237/2605

2. 发明公开

EP1034557A4 RADIOFREQUENCY GASEOUS DETECTION DEVICE (RF-GDD) 审中-公开
标题翻译：射频气体探测装置
公开(公告)号：EP1034557A4
公开(公告)日：2007-01-17
申请号：EP98955259
申请日：1998-11-18
申请人： DANILATOS GERASIMOS DANIEL
发明人： DANILATOS GERASIMOS DANIEL
IPC分类号： G01Q30/08 , G01Q60/02 , H01J37/244 , H01J47/06 , G01N23/225 , H01J37/28
CPC分类号： H01J37/244 , H01J47/06

3. 发明专利

AU2016309960B2 Wide field atmospheric scanning electron microscope 未知
公开(公告)号：AU2016309960B2
公开(公告)日：2020-11-05
申请号：AU2016309960
申请日：2016-08-16
申请人： DANILATOS GERASIMOS DANIEL DR
发明人： DANILATOS GERASIMOS DANIEL
IPC分类号： H01J37/26
摘要： Atmospheric scanning electron microscope achieves a wide field of view at low magnifications in a broad range of gaseous pressure, acceleration voltage and image resolution. This is based on the use of a reduced size pressure limiting aperture together with a scanning beam pivot point located at the small aperture at the end of electron optics column. A second aperture is located at the principal plane of the objective lens. Double deflection elements scan and rock the beam at a pivot point first at or near the principal plane of the lens while post-lens deflection means scan and rock the beam at a second pivot point at or near aperture at the end of the optics column. The aperture at the first pivot may act also as beam limiting aperture. In the alternative, with no beam limiting aperture at the principal plane, maximum amount of beam rays passes through the lens and with no post-lens deflection means, the beam is formed (limited) by a very small aperture at or near-and-below the final lens while the aperture skims a shifting portion of the wide beam, which is physically rocked with a pivot on the principal plane but with an apparent pivot point close and above the aperture, all of which result in a wide field of view on the examined specimen.

4. 发明专利

AU7739301A Environmental scanning electron microscope 未知
公开(公告)号：AU7739301A
公开(公告)日：2002-02-25
申请号：AU7739301
申请日：2001-08-03
申请人： DANILATOS GERASIMOS DANIEL
发明人： DANILATOS GERASIMOS DANIEL
IPC分类号： H01J37/28 , H01J37/301

5. 发明专利

AU2016309960A1 Wide field atmospheric scanning electron microscope 未知
公开(公告)号：AU2016309960A1
公开(公告)日：2018-04-12
申请号：AU2016309960
申请日：2016-08-16
申请人： DANILATOS GERASIMOS DANIEL DR
发明人： DANILATOS GERASIMOS DANIEL
IPC分类号： H01J37/26
摘要： Atmospheric scanning electron microscope achieves a wide field of view at low magnifications in a broad range of gaseous pressure, acceleration voltage and image resolution. This is based on the use of a reduced size pressure limiting aperture together with a scanning beam pivot point located at the small aperture at the end of electron optics column. A second aperture is located at the principal plane of the objective lens. Double deflection elements scan and rock the beam at a pivot point first at or near the principal plane of the lens while post-lens deflection means scan and rock the beam at a second pivot point at or near aperture at the end of the optics column. The aperture at the first pivot may act also as beam limiting aperture. In the alternative, with no beam limiting aperture at the principal plane, maximum amount of beam rays passes through the lens and with no post-lens deflection means, the beam is formed (limited) by a very small aperture at or near-and-below the final lens while the aperture skims a shifting portion of the wide beam, which is physically rocked with a pivot on the principal plane but with an apparent pivot point close and above the aperture, all of which result in a wide field of view on the examined specimen.

6. 发明专利

AU737394B2 Radiofrequency gaseous detection device (RF-GDD) 未知
公开(公告)号：AU737394B2
公开(公告)日：2001-08-16
申请号：AU1218999
申请日：1998-11-18
申请人： DANILATOS GERASIMOS DANIEL
发明人： DANILATOS GERASIMOS DANIEL
IPC分类号： G01Q30/08 , G01Q60/02 , H01J37/244 , H01J47/06 , G01N23/225 , H01J37/28

7. 发明专利

AU737387B2 Differential pumping via core of annular supersonic jet 未知
公开(公告)号：AU737387B2
公开(公告)日：2001-08-16
申请号：AU1218899
申请日：1998-11-18
申请人： DANILATOS GERASIMOS DANIEL
发明人： DANILATOS GERASIMOS DANIEL
IPC分类号： F04F5/20 , F04F5/46 , G01Q30/02 , G01Q30/08 , H01J37/18 , H01J37/301
摘要： An aperture (5) connects a first chamber (1) with a second chamber (2), and is surrounded by an annular nozzle (7) formed by inner and outer walls (6, 8), which connects the first chamber (1) with a third chamber (3). A supersonic annular gas jet (9) is ejected by the annular nozzle (7) into the first chamber (1), creating a Venturi pumping action at the core of the jet in the vicinity of the aperture (5). The second chamber (2) may thus be maintained at a substantially lower pressure than the first chamber (1). Inner wall (6) and outer wall (8) may be relatively movable for varying gas flow, and the first chamber (1) may include baffles or skimmers to modify gas flow, e.g., to create a high density molecular beam. An electron or ion beam (4) may be transferred from the second chamber (2) to the first chamber (1), e.g., as part of an environmental scanning electron microscope.

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